CN108288602B - Crawl and placing device - Google Patents
Crawl and placing device Download PDFInfo
- Publication number
- CN108288602B CN108288602B CN201810082370.2A CN201810082370A CN108288602B CN 108288602 B CN108288602 B CN 108288602B CN 201810082370 A CN201810082370 A CN 201810082370A CN 108288602 B CN108288602 B CN 108288602B
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- CN
- China
- Prior art keywords
- absorbent module
- suction nozzle
- crawl
- placing device
- turntable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Abstract
The present invention provides a kind of crawl and placing device, comprising: back board module；The first absorbent module on back board module is set, and the first absorbent module includes at least the first driving mechanism and the first suction nozzle, and the first suction nozzle can be driven by the first driving mechanism so as to mobile in vertical direction；It is movably disposed at the second absorbent module on back board module in the horizontal direction relative to the first absorbent module, the second absorbent module includes at least the second driving mechanism and the second suction nozzle, and the second suction nozzle can be driven by the second driving mechanism so as to mobile in vertical direction；Third driving mechanism for driving the second absorbent module to move in the horizontal direction relative to the first absorbent module；And the first suction nozzle can be selectively retained at least two different spaced positions by adjustable stop, a part by rotating adjustable stop from the second suction nozzle.Production efficiency can be improved significantly according to the present invention and reduce spare parts purchasing cost and spare parts management cost.
Description
Technical field
The present invention relates to be used to grab and place grabbing for chip or chip during semiconductor chip manufacture and packaging and testing
It takes and placing device.
Background technique
In the semiconductor industry, the either manufacturing process of chip or the packaging and testing process after chip manufacturing requires
Take and shift and be placed on chip or chip away next station from a station using crawl and placing device, so as into
The processing or processing of row subsequent processing.For example, in chip testing sorting machine, it is necessary to utilize crawl and placing device by chip
It takes and shifts and be placed on test station away from heating station and after testing is complete take chip from test station away
And shift and be placed on reception pallet.In order to improve transfer and place the efficiency of chip or chip, crawl and placing device are logical
It often include two absorbent modules for being respectively provided with suction nozzle, so as to shift and place two chips or chip simultaneously.Due to reality
In trampling, the size of chip or chip with a variety of different sizes, in order to ensure each chip or chip are inhaled in place
Mouth is adsorbed, and the suction nozzle of the one of absorbent module backboard mounted thereto relative to absorbent module is in the horizontal direction fixed
But the backboard mounted thereto relative to absorbent module be moveable in vertical direction, the suction of another absorbent module
The mouth backboard mounted thereto relative to absorbent module is all moveable in the horizontal direction and in vertical direction.Existing
In crawl and placing device, be fixed on backboard stop device for prevent in the horizontal direction and in vertical direction be all removable
The further movement in the horizontal direction of dynamic suction nozzle will all be moveable suction nozzle phase in the horizontal direction and in vertical direction
Suitable distance is kept in the horizontal direction for suction nozzle can only be moveable in vertical direction, to reliably adsorb chip
Or chip.The pallet dimension for storing chip or chip is caused to change when the size due to chip or chip changes
When, needing to dismantle mounted stop device and is reinstalled the stop device of another size.This process is very time-consuming, leads
Crawl and placing device is caused to need the shutdown of a period of time, so that production efficiency reduces.In addition, configuring, storing and manage multiple
Stop device also leads to increased costs.
It is then desired to be improved to existing crawl and placing device.
Summary of the invention
One object of the present invention seeks to propose a kind of improved crawl and placing device, this crawl and placing device
It not only can significantly shorten downtime, improve production efficiency, but also spare parts purchasing cost and spare part can be reduced significantly
Management cost.
For this purpose, according to an aspect of the present invention, a kind of crawl and placing device are provided, comprising:
Back board module；
The first absorbent module on the back board module is set, and first absorbent module includes at least the first driving machine
Structure and the first suction nozzle, first suction nozzle can be driven by first driving mechanism so as to mobile in vertical direction；
The second suction being movably disposed in the horizontal direction relative to first absorbent module on the back board module
Attached component, second absorbent module include at least the second driving mechanism and the second suction nozzle, and second suction nozzle can be described
The driving of second driving mechanism is so as to mobile in vertical direction；
Third for driving second absorbent module to move in the horizontal direction relative to first absorbent module is driven
Motivation structure；And
Adjustable stop, by rotate the adjustable stop a part can will first suction nozzle and
Second suction nozzle is selectively retained at least two different spaced positions.
Preferably, the adjustable stop includes turntable and block piece, and the turntable includes turntable body and puts
Spacing bar at least two different lengths in the turntable body is set with penetrating shape, and the spacing bar is used for against the resistance
Block piece is so that first suction nozzle and second suction nozzle to be limited at selected spaced position；
Wherein, one in the turntable and the block piece is arranged on first absorbent module or the backboard group
On part, another in the turntable and the block piece is arranged in the second absorbent module and can be with described second
Absorbent module moves in the horizontal direction and the turntable can be rotatably set.
Preferably, the turntable is rotatably disposed on first absorbent module or the back board module, described
Block piece is arranged in second absorbent module and can move in the horizontal direction with second absorbent module.
Preferably, the turntable body is with the central axis around the turntable body at the shape of rotational symmetry.
Preferably, the turntable includes the spacing bar of six different lengths.
Preferably, the spacing bar is removably disposed in the turntable body.
Preferably, the block piece and a part of second absorbent module are integrally formed into.
Preferably, number or sign flag are provided on the spacing bar.
Preferably, first driving mechanism, second driving mechanism and the third driving mechanism are first respectively
Cylinder assembly, the second cylinder assembly and third cylinder assembly.
Preferably, the crawl and placing device are for grabbing and placing chip or chip.
Crawl according to the present invention and placing device, it is only necessary to which a part by rotating adjustable stop can
First suction nozzle is selectively retained at least two different spaced positions from second suction nozzle, therefore, is adjusted
The process of the position of second absorbent module becomes very simple, time saving, improves production efficiency significantly, and be not necessary to standard
Standby multiple stop devices, can also reduce spare parts purchasing cost and spare parts management cost significantly.
Detailed description of the invention
Fig. 1 is the schematic perspective view of a part of crawl according to the preferred embodiment of the invention and placing device；
Fig. 2 is the exploded perspective view of Fig. 1；
Fig. 3 is the removable guide block of the second absorbent module of crawl according to the preferred embodiment of the invention and placing device
Schematic perspective view；
Fig. 4 is the signal of the turntable of the adjustable stop of crawl according to the preferred embodiment of the invention and placing device
Property side view；
Fig. 5 is the schematic cross sectional views along the line 5-5 of Fig. 4；
Fig. 6 is schematic cross sectional views identical with Fig. 5, but spacing bar therein is shown as from adjustable stop
Turntable body disassembles；
Fig. 7 schematically shows a spacing bar on the turntable of adjustable stop and removable to simplify perspective view
Block piece on guide block abut each other with limit the second absorbent module suction nozzle relative to the first absorbent module suction nozzle in level
Distance on direction；And
Fig. 8 is the side view of adjustable stop shown in Fig. 7.
Specific embodiment
Below with reference to each preferred embodiment of example detailed description of the present invention.It will be understood by those skilled in the art that this
A little embodiments are exemplary, it is not meant to form any restrictions to the present invention.
Fig. 1 is the schematic perspective view of a part of crawl according to the preferred embodiment of the invention and placing device, and Fig. 2 is
The exploded perspective view of Fig. 1.As illustrated in fig. 1 and 2, crawl according to the preferred embodiment of the invention and placing device 1 include backboard group
Part 3, the first absorbent module 5 being arranged on back board module 3 and the second absorbent module 7 being arranged on back board module 3.Back
Board group part 3 includes backboard 9 and the backboard cover 11 being covered on backboard 9.
First absorbent module 5 includes the first cylinder assembly 15, the first support plate 17, first leading of being fixed on backboard cover 11
Block 19 and the first suction nozzle (not shown) for being mounted on 17 lower end of the first support plate.First cylinder assembly 15 is supported in lower end
On the first connector 21 being fixed on backboard cover 11, the first cylinder assembly 15 is in upper end (that is, its piston rod) and first
Fagging 17 connects.First support plate 17 is formed with for receiving the first guide block 19 on the side opposite with the first cylinder assembly 15
The first guiding groove (being sightless in figure).In this way, after the first absorbent module 5 installs in place, with the first air cylinder group
The piston rod of part 15 vertical direction (up and down direction in figure) stretch out or retract the first cylinder assembly 15 cylinder, first
Fagging 17 is moved up and down in vertical direction relative to back board module 3 under the guidance of the first guide block 19, finally to be mounted on
First suction nozzle of one support plate, 17 lower end can move up and down, to approach the chip being mounted in pallet or chip and adsorb chip
Or chip, and then far from pallet and transport chip or chip.
Second absorbent module 7 include the second cylinder assembly 23, the second support plate 25, the second guide block 27, removable guide block 29,
And it is mounted on the second suction nozzle (not shown) of 25 lower end of the second support plate.Crawl and placing device 1 further include for driving the
The third cylinder assembly 31 that two absorbent modules 7 move in the horizontal direction.Second guide block 27 is fixed on removable guide block 29.The
Two cylinder assemblies 23 are supported on the second connector 33 being fixed on removable guide block 29 in lower end, the second cylinder assembly 23
It is connect at upper end (that is, its piston rod) with the second support plate 25.Second support plate 25 is opposite with the second cylinder assembly 23 one
The second guiding groove (being sightless in figure) for receiving the second guide block 27 is formed on side.Third cylinder assembly 31 is mounted
It is covered on backboard 9 and at least partly by backboard cover 11.The piston rod of third cylinder assembly 31 is connected to removable lead
On block 29, be formed on removable guide block 29 for receiving the guide rail 35 being arranged on backboard cover 11 third guiding groove (Fig. 1 with
It is sightless in 2).In this way, the piston rod with the second cylinder assembly 23 exists after the second absorbent module 7 installs in place
Vertical direction (up and down direction in figure) stretches out or retracts the cylinder of the second cylinder assembly 23, and the second support plate 25 is led second
It is moved up and down in vertical direction relative to back board module 3 under the guidance of block 27, finally to be mounted on 25 lower end of the second support plate
The second suction nozzle can move up and down.At the same time, the piston rod of third cylinder assembly 31 can the (left and right in figure in the horizontal direction
Direction) stretch out or retract third cylinder assembly 31 cylinder, move guide block 29 under the guidance of guide rail 35 in the horizontal direction
Move back and forth relative to back board module 3, finally allows the second suction nozzle for being mounted on 25 lower end of the second support plate relative to peace
The first suction nozzle mounted in 17 lower end of the first support plate moves horizontally, to change between the first suction nozzle and the second suction nozzle in the horizontal direction
On distance, to close to the chip or chip in the pallet and adsorb chip or chip, and then far from pallet simultaneously
And transport chip or chip.Crawl and placing device 1 further include the bracket 36 that can be installed on back board module 3, on bracket 36
The sensor of position for detecting the first suction nozzle and the second suction nozzle is installed.
According to the present invention, crawl and placing device 1 further include adjustable stop 37, which can
For the first suction nozzle to be selectively retained at least two different spaced positions from the second suction nozzle.Specifically, it is adjusted
Position-limit mechanism 37 includes turntable 39 and block piece 41.Fig. 4 be it is according to the preferred embodiment of the invention crawl and placing device can
The schematic side elevation of the turntable of regulation position limiting mechanism, Fig. 5 are along the schematic cross sectional views of the line 5-5 of Fig. 4, and Fig. 6 is and Fig. 5
Identical schematic cross sectional views, but spacing bar therein is shown as under dismantling from the main body of the turntable of adjustable stop
Come.As Figure 4-Figure 6, turntable 39 include turntable body 43 and be disposed radially around in turntable body 43 at least two not
With the spacing bar 45 of length.Turntable body 43 is preferably around center axis thereof O-O ' into non-rotational symmetric shape.Preferred real
It applies in example, there are six the spacing bars 45 of different length to be radially arranged onto turntable body 43 for display, it will be appreciated that,
The number of spacing bar 45 can be two, three, four, five, seven or more.Spacing bar 45 is preferably removably
It is arranged onto turntable body 43, to replace the spacing bar 45 with different length size when needed.
According to the present invention, one in turntable 39 and block piece 41 is installed in the first absorbent module 5 or back board module 3
On, another in turntable 39 and block piece 41 is installed in the second absorbent module 7 and can be with the second absorbent module 7
It moves in the horizontal direction, and turntable therein 39 is to can be rotatably set.
Fig. 7 schematically shows a spacing bar on the turntable of adjustable stop and removable to simplify perspective view
Block piece on guide block abut each other with limit the second absorbent module suction nozzle relative to the first absorbent module suction nozzle in level
Distance and Fig. 8 on direction are the side views of adjustable stop shown in Fig. 7.For simplicity, in figures 7 and 8 only
Show the removable guide block 29 of adjustable stop 37 and the second absorbent module 7.In a preferred embodiment, turntable 39 is by can
Be rotatably mounted on the first absorbent module 5 or back board module 3, and block piece 41 is installed in the second absorbent module 7 and
It can move horizontally with the second absorbent module 7.More preferably, block piece 41 is led with the second the removable of absorbent module 7
Block 29 is integrally formed into.In use, cause to store chip or chip when the size due to chip or chip changes
Pallet dimension when changing, third cylinder assembly 31 drives the second absorbent module 7 and block piece 41 to move in the horizontal direction
From the first absorbent module 5, the turntable 39 that operator rotates adjustable stop 37 makes the spacing bar selected on turntable 39
45 drive the second absorbent module 7 and block piece 41 in level side against the direction of block piece 41, subsequent third cylinder assembly 31
It is moved to towards the first absorbent module 5, until selected spacing bar 45 is against block piece 41.In this manner it is possible to by the first absorption
The second suction nozzle holding on the first suction nozzle and the second absorbent module 7 on component 5 at the same time can be from two suckers reliably
Adsorb the correct position of chip or chip.For the ease of selecting required spacing bar 45, preferably set on each spacing bar 45
It is equipped with digital (such as pallet, chip or chip size) or sign flag, so that the selected spacing bar energy with correspondence markings
Determine the spacing of the first suction nozzle and the second suction nozzle, correspondingly quickly to be suitble to the various sizes of chip of absorption or chip.
According to the present invention, lead to the pallet ruler for storing chip or chip when the size due to chip or chip changes
Very little when changing, there is no need to mounted stop device and be reinstalled another size as dismantling in the prior art
Stop device, after the second absorbent module is moved away from the first absorbent module, operator only needs adjustable limit
The turntable of mechanism rotate to suitable position can, this operation can rotate turntable manually by operator both come complete
At, can also by operator start for drive turntable rotate mechanism be automatically completed.Therefore, the second absorption group is adjusted
The process of the position of part is very simple, time saving, hardly need shutdown, it is significant improve production efficiency, and be not necessary to
Prepare multiple stop devices, spare parts purchasing cost and spare parts management cost can be reduced significantly.
Above in conjunction with specific embodiments to the present invention have been described in detail.Obviously, above description and show in the accompanying drawings
Embodiment out should be construed as illustratively, but not to limit the present invention.For example, in a preferred embodiment,
The present invention is described as be in semiconductors manufacture and packaging and testing industry for grabbing and placing the crawl and peace of chip or chip
Device is put, it will be appreciated that, the present invention is suitable for grabbing and placing the crawl of any article with plurality of specifications or size
And placing device.In addition, in a preferred embodiment, the first suction nozzle of the first absorbent module and the movement of the second absorbent module are logical
It crosses cylinder assembly to realize, it should be understood that can also realize by such as hydraulic or motor other driving mechanisms.Should also
Understand, crawl and placing device can also include be not shown in figure for make back board module, the first absorbent module,
And second absorbent module mobile mobile mechanism occurs together.To those skilled in the art, this can not departed from
Various variations or modifications are carried out to it in the case where the spirit of invention, these variations or modifications are all without departing from the scope of the present invention.
Claims (10)
1. a kind of crawl and placing device (1), comprising:
Back board module (3)；
The first absorbent module (5) being arranged on the back board module (3), first absorbent module (5) include at least first
Driving mechanism and the first suction nozzle, first suction nozzle can be driven by first driving mechanism so as to mobile in vertical direction；
Second be movably disposed in the horizontal direction relative to first absorbent module (5) on the back board module (3)
Absorbent module (7), second absorbent module (7) include at least the second driving mechanism and the second suction nozzle, the second suction nozzle energy
It is enough to be driven by second driving mechanism so as to mobile in vertical direction；
Third for driving second absorbent module (7) to move in the horizontal direction relative to first absorbent module (5)
Driving mechanism；And
Adjustable stop (37), a part by rotating the adjustable stop (37) can be inhaled described first
Mouth is selectively retained at least two different spaced positions from second suction nozzle.
2. crawl according to claim 1 and placing device (1), which is characterized in that the adjustable stop (37)
Including turntable (39) and block piece (41), the turntable (39) includes turntable body (43) and is disposed radially around described turn
The spacing bar (45) of at least two different lengths on disc main body (43), the spacing bar (45) are used for against the block piece
(41) so that first suction nozzle and second suction nozzle are limited at selected spaced position；
Wherein, one in the turntable (39) and the block piece (41) is arranged on first absorbent module (5) or institute
It states on back board module (3), another in the turntable (39) and the block piece (41) is arranged on the second absorbent module (7)
It is upper and can be moved in the horizontal direction with second absorbent module (7) and the turntable (39) is rotationally set
It sets.
3. crawl according to claim 2 and placing device (1), which is characterized in that the turntable (39) is by rotationally
It is arranged on first absorbent module (5) or the back board module (3), the block piece (41) is arranged on described second and inhales
It can move in the horizontal direction on attached component (7) and with second absorbent module (7).
4. it is according to claim 2 crawl and placing device (1), which is characterized in that the turntable body (43) have around
The turntable body central axis at rotational symmetry shape.
5. it is according to claim 2 crawl and placing device (1), which is characterized in that the turntable (39) include six not
With the spacing bar (45) of length.
6. crawl according to claim 2 and placing device (1), which is characterized in that the spacing bar (45) is removably
It is arranged on the turntable body (43).
7. crawl according to claim 3 and placing device (1), which is characterized in that the block piece (41) and described the
A part of two absorbent modules (7) is integrally formed into.
8. crawl according to claim 2 and placing device (1), which is characterized in that be provided on the spacing bar (45)
Number or sign flag.
9. crawl according to claim 1 and placing device (1), which is characterized in that first driving mechanism, described the
Two driving mechanisms and the third driving mechanism are the first cylinder assembly, the second cylinder assembly and third cylinder assembly respectively.
10. crawl according to claim 1 and placing device (1), which is characterized in that the crawl and placing device are used for
Crawl and placement chip or chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810082370.2A CN108288602B (en) | 2018-01-29 | 2018-01-29 | Crawl and placing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810082370.2A CN108288602B (en) | 2018-01-29 | 2018-01-29 | Crawl and placing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108288602A CN108288602A (en) | 2018-07-17 |
| CN108288602B true CN108288602B (en) | 2019-06-14 |
Family
ID=62836031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810082370.2A Active CN108288602B (en) | 2018-01-29 | 2018-01-29 | Crawl and placing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108288602B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115413220B (en) * | 2022-10-12 | 2023-04-07 | 广东电邦新能源科技有限公司 | Power adapter PCB assembly equipment |
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| CN101488468A (en) * | 2008-01-17 | 2009-07-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Wafer retaining system and semiconductor processing apparatus applying the system |
| CN102683257A (en) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | Substrate clamping device |
| CN107146768A (en) * | 2017-06-16 | 2017-09-08 | 英特尔产品（成都）有限公司 | Device and alignment device for laying article |
| CN206541820U (en) * | 2017-01-05 | 2017-10-03 | 曹林仙 | A kind of photovoltaic panel grips mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100561666C (en) * | 2005-08-05 | 2009-11-18 | 中微半导体设备(上海)有限公司 | Semiconductor technology processing system and processing method thereof |
| KR101375848B1 (en) * | 2006-12-08 | 2014-03-18 | (주)스마트에이스 | Apparatus for etching substratee and fabrication line for fabricating liquid crystal display device using thereof |
| KR100959372B1 (en) * | 2008-03-24 | 2010-05-24 | 미래산업 주식회사 | Transferring Semiconductor, Handler having the same, and Method of Manufacturing Semiconductor using the same |
| US20120039691A1 (en) * | 2010-08-12 | 2012-02-16 | Kisang Kim | Systems for treating a substrate |
| CN102709224B (en) * | 2012-06-19 | 2015-01-14 | 北京七星华创电子股份有限公司 | Clamping device for rotary slice discoid material |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101488468A (en) * | 2008-01-17 | 2009-07-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Wafer retaining system and semiconductor processing apparatus applying the system |
| CN102683257A (en) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | Substrate clamping device |
| CN206541820U (en) * | 2017-01-05 | 2017-10-03 | 曹林仙 | A kind of photovoltaic panel grips mechanism |
| CN107146768A (en) * | 2017-06-16 | 2017-09-08 | 英特尔产品（成都）有限公司 | Device and alignment device for laying article |
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| Publication number | Publication date |
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| CN108288602A (en) | 2018-07-17 |
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