CN102709224B - Clamping device for rotary slice discoid material - Google Patents
Clamping device for rotary slice discoid material Download PDFInfo
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- CN102709224B CN102709224B CN201210208778.2A CN201210208778A CN102709224B CN 102709224 B CN102709224 B CN 102709224B CN 201210208778 A CN201210208778 A CN 201210208778A CN 102709224 B CN102709224 B CN 102709224B
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- thin slice
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Abstract
The invention relates to a clamping device in the technical field of a semi-conductor, and particularly discloses the clamping device for a rotary slice discoid material. The clamping device comprises a rotary screw, an upright lifting block, a horizontal moving block, a top fixing block, a clamping claw and a horizontal sliding rail, wherein the clamping claw is arranged on the horizontal moving block, the horizontal moving block is arranged on the horizontal sliding rail, the upright lifting block and the top fixing block are arranged on the rotary screw, and the horizontal sliding rail is arranged on the top fixing block. According to the clamping device, rigid force and part flexible force are combined to overcome affects of centripetal force and centrifugal force generated by the clamping claw at a high rotation speed on the state of a clamp-on slice discoid material, thus the clamping claw is enabled to tightly clamp the slice discoid material with clamping force in a stable and ideal scope, and the phenomenon of flying-out or being clamped into pieces of the slice discoid material at the high rotation speed cannot occur.
Description
Technical field
The present invention relates to a kind of clamping device of technical field of semiconductors, particularly relate to a kind of rotation thin slice disk clamping device.
Background technology
It is pin chuck, bernoulli gripper etc. that thin slice pan chuck is applied maximum in field.Be disclose one in the patent of CN101587851 to utilize centrifugal force to be clamped by thin slice pan at publication number, utilize the repulsive force of magnet to open the device of wafer.A kind of bernoulli principle that utilizes is disclosed by chuck fixing for thin slice pan in US Patent No. 5513668 and US4903717, it utilizes bernoulli principle to form one deck air cushion between chuck and thin slice pan, utilize air cushion to keep thin slice pan, realize radial location by the clamping element being distributed in thin slice pan circumference.But these technology have a shortcoming: when high speed or ultrahigh speed rotate, due to the mutual enhancing of centrifugal force and centripetal force, cause the clamping force of clamping device to thin slice pan increasing or more and more less, and then produce the phenomenon being caught broken thin slice pan or thin slice pan and flying out.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is: how to avoid the phenomenon appearance that the thin slice pan occurred in clamping high-speed rotation thin slice pan process flies out or is caught broken.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of rotation thin slice disk clamping device, comprise rotating threaded shaft, vertical lifting block, move horizontally block, top fixed block, claw and horizontal slip track, wherein, move horizontally described in described claw is arranged on block, the described block that moves horizontally is arranged on described horizontal slip track, and described vertical lifting block and top fixed block are arranged on rotating threaded shaft, and described horizontal slip track installation is on the fixed block of described top.
Preferably, described device also comprises the drive motors being installed on described rotating threaded shaft one end.
Preferably, described in move horizontally block and have four pieces, described horizontal slip track has two, each described horizontal slip track is provided with described in two pieces and moves horizontally block.
Preferably, described device also comprises articulated mast, the described lower end moving horizontally block is provided with the first chain connection knot, described vertical lifting block is provided with the second chain connection knot, and described articulated mast is connected to described first chain connection knot and between the second chain connection ties.
Preferably, described claw is moved horizontally on block described by Limit screw and spring fitting.
Preferably, described Limit screw pass described in move horizontally the slotted hole on block and the screwed hole spiral shell on described claw is contained on described claw.
Preferably, described drive motors is band self-locking motor.
Preferably, described thin slice pan is semiconductor wafer, CD or flat-panel monitor.
(3) beneficial effect
Technique scheme tool has the following advantages: the centripetal force that when utilizing rigidity power and local flexible force to overcome High Rotation Speed, claw produces and centrifugal force are on the impact of clamping thin slice pan state, ensure that claw can with the clamping force of stable ideal scope clamping thin slice pan, the phenomenon appearance that the thin slice pan of High Rotation Speed can not be caused to fly out or be caught broken.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram of the embodiment of the present invention;
Schematic diagram when Fig. 2 is the device open mode of the embodiment of the present invention;
Schematic diagram when Fig. 3 is the device clamped condition of the embodiment of the present invention;
Fig. 4 is vertical lifting block structure schematic diagram in the device of the embodiment of the present invention;
Fig. 5 moves horizontally block structure schematic diagram in the device of the embodiment of the present invention;
Fig. 6 is fixed-block-architecture (FBA) schematic diagram in top in the device of the embodiment of the present invention;
Fig. 7 is rotating threaded shaft structural representation in the device of the embodiment of the present invention;
Fig. 8 is articulated mast structural representation in the device of the embodiment of the present invention;
Fig. 9 is claw structure schematic diagram in the device of the embodiment of the present invention;
Figure 10 is claw buffer structure schematic diagram in the device of the embodiment of the present invention;
Figure 11 is Limit screw structural representation in the device of the embodiment of the present invention.
Wherein, 1: drive motors; 2: rotating threaded shaft; 3: vertical lifting block; 4: move horizontally block; 5: articulated mast; 6: top fixed block; 7: claw; 8: Limit screw; 9: spring; 10-1: the first chain connection knot; 10-2: the second chain connection knot; 11: horizontal slip track; 12: slotted hole; 13: shaft coupling.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
Figure 1 shows that the structural representation of clamping device of the present invention, composition graphs 2 ~ Figure 11 can find out, the inventive system comprises in this figure of drive motors 1(is band self-locking motor), rotating threaded shaft 2, vertical lifting block 3, move horizontally block 4, articulated mast 5, top fixed block 6, claw 7, Limit screw 8, spring 9, first chain connection knot 10-1, second chain connection knot 10-2, horizontal slip track 11, claw 7 is installed to be connected on by Limit screw 8 and spring 9 and is moved horizontally on block 4, the slotted hole 12 on block 4 is moved horizontally and the screwed hole spiral shell on described claw 7 is contained on described claw 7 described in described Limit screw 8 passes, to limit the amount of moving forward and backward of claw 7, spacing with the local realizing claw 7.Vertical lifting block 3 is uniformly distributed four (also can be designed as three or six) second chain connection knot 10-2, each moves horizontally block 4 lower end and is also designed with a first chain connection knot 10-1 simultaneously, articulated mast 5 is connected to described first chain connection knot 10-1 and the second chain connection is tied between 10-2, be connected through the hinge and can reach the stable conversion of rigidity power, and the loss reduction of rigidity power when ensureing high speed, ensure clamping force accurately.Top fixed block 6 is by installing little bearing (or other modes below; the rotary work of leading screw is assisted in the effect of little bearing) connect rotating threaded shaft 2, the rotation that this connected mode is conducive to rotating threaded shaft 2 ensures not produce when rotating particle or and the particle of pettiness simultaneously.Limit screw 8, spring 9 avoid claw 7 to occur because centripetal force or the excessive clamping thin slice pan caused of centrifugal force are out of shape or clamp situation about loosening, be local compliance power, object is the impact that the error overcoming thin slice pan self causes clamping force herein.And to move horizontally block 4 be fixed by rigidity power, therefore certain rigidity power can be provided to ensure that claw 7 can not be subject to excessive centripetal force and centrifugal force, thus ensure that the clamping force of clamping thin slice pan is in suitable scope, reaches the object of safety holding High Rotation Speed thin slice pan.Described first chain connection knot 10-1, the second chain connection knot 10-2 are preferably spherical linkage johning knot, can ensure horizontal or vertical maximum displacement, can the clamping force of accurate stable clamping thin slice pan during more favourable high speed.Controlled the number of turns of rotating threaded shaft rotation by band self-locking motor, and then control the rise and fall distance of vertical lifting block, also just control the distance moving horizontally block and move horizontally simultaneously, finally determine the clamping force of claw clamping thin slice pan.In the present embodiment, rotating threaded shaft 2 is connected with drive motors 1 by shaft coupling 13, and other modes can also be adopted as required to connect.
Operation principle of the present invention is as follows: before use, claw 7 is in open mode, manipulator is got after thin slice pan puts claw 7 into, now drive motors 1 is started working, drive rotating threaded shaft 2 reverse rotation one fixing turn, the height that now vertically movable block 3 decline is default, the interlock effect of bar 5 of being connected through the hinge makes to move horizontally block 4 distance that inwardly (direction near top fixed block 6) is mobile predetermined, now claw 7 can just in time according to desirable clamping force, (this power be by selected spring 9, the spacing distance of selected Limit screw 8 and the displacement moving horizontally block 4 determine jointly) clamp thin slice pan, now the rotary main shaft of wash chamber can carry out rotary-cleaning to thin slice pan.When making rotating threaded shaft 2 reverse rotation and then interlock move horizontally block 4 distance that inwardly motion is predetermined according to pre-provisioning request, drive motors 1 can provide from lock control (or other self-locking forms), so just ensure that rotating threaded shaft 2 does not carry out any rotation when technique, leading screw does not rotate, vertical lifting block can not move, now any movement can not be carried out by the exposure level movable block 4 of interlock, also just ensure that clamping force can remain in predetermined scope in technical process, avoid because the too high thin slice pan caused of rotating speed flies out or occurred by the phenomenon that clamping device is caught broken.For existing clamping device, the work such as cleaning can be carried out safely when low-speed running, but just there will be two kinds of damages when speed reaches 2000r/min or is higher, first be clamping device cause because centrifugal force is excessive clamping force not so that thin slice pan fly out, destroy equipment; Second is that clamping device causes the excessive and then thin slice pan of clamping force to be caught broken by clamping device because centripetal force is excessive.Both of these case is the two kinds of situations often occurred in High Rotation Speed technique, is also the place that High Rotation Speed thin slice pan needs most coefficient of safety.And the device designed by the present invention effectively can be made this potential safety hazard and takes on a new look accordingly and avoid.
After cleaning completes, now self-locking removed by electric rotating machine 1, start to rotate forward leading screw 2, vertical lifting block 3 is allowed to rise, make to move horizontally block 4 by interlock effect and move horizontally outward certain distance, claw 7 is opened, thin slice pan is on the level reference of claw 7, now manipulator can take corresponding thin slice pan away, prepares to put into another plate sheet pan simultaneously.For the displacement moving horizontally block 4, certain ensure can not excessive can not be too small, served as conference and caused thin slice pan one end can outside claw 7 datum level, picking and placeing sheet to manipulator makes troubles; Corresponding thin slice pan easily can not be got when too small meeting causes manipulator to pick and place sheet.So for this device, inside and outside distance is very important, simultaneously due to the existence of claw 7 place local compliance power, can effectively prevent because self error of thin slice pan and the phenomenon that moves horizontally clamping force that range error brings excessive or too small occur.
In device busy process, the number of turns of the forward and reverse rotation of rotating threaded shaft 2 can preset, the setting number of turns is the clamping force clamping thin slice pan in order to limit claw 7, ensure that when rotating threaded shaft 2 rotates forward vertical lifting block 3 rises a fixing turn self-locking, guarantee that claw 7 can be opened safely, can ensure thin slice pan level, what facilitate manipulator picks and places sheet simultaneously; Ensure that when rotating threaded shaft 2 reverse rotation vertical lifting block 3 declines a fixing turn self-locking, guarantees that claw 7 can according to the clamping force of budget to clamp thin slice pan.In order to ensure completing smoothly of high device, for the selection of locking device and the calculating of rotating cycle very strict, the number of turns that can be rotated by leading screw 2 determines the displacement moving horizontally block 4, this distance be step up thin slice pan appropriate clamping force and unclamp thin slice pan picks and places safely sheet key by manipulator.
As can be seen from the above embodiments, the centripetal force that when device projecting point of the present invention is to utilize rigidity power and local flexible force to overcome High Rotation Speed, claw produces and centrifugal force are on the impact of clamping thin slice pan state, ensure that claw can with the clamping force of stable ideal scope clamping thin slice pan, the phenomenon appearance that the thin slice pan of High Rotation Speed can not be caused to fly out or be caught broken.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and replacement, these improve and replace and also should be considered as protection scope of the present invention.
Claims (6)
1. one kind rotates thin slice disk clamping device, it is characterized in that, comprise rotating threaded shaft (2), vertical lifting block (3), move horizontally block (4), top fixed block (6), claw (7), horizontal slip track (11) and articulated mast (5), wherein, move horizontally on block (4) described in described claw (7) is arranged on, the described block (4) that moves horizontally is arranged on described horizontal slip track (11), described vertical lifting block (3) and top fixed block (6) are arranged on rotating threaded shaft (2), described horizontal slip track (11) is arranged on described top fixed block (6), the described lower end moving horizontally block (4) is provided with the first chain connection knot (10-1), described vertical lifting block is provided with the second chain connection knot (10-2), described articulated mast (5) is connected to described first chain connection knot (10-1) and the second chain connection is tied between (10-2), moves horizontally on block (4) described in described claw (7) is arranged on by Limit screw (8) and spring (9).
2. device as claimed in claim 1, it is characterized in that, described device also comprises the drive motors (1) being installed on described rotating threaded shaft (2) one end.
3. device as claimed in claim 1, it is characterized in that, the described block (4) that moves horizontally has four pieces, and described horizontal slip track (11) has two, each described horizontal slip track (11) is provided with described in two pieces and moves horizontally block (4).
4. device as claimed in claim 1, it is characterized in that, move horizontally the slotted hole (12) on block (4) described in described Limit screw (8) passes and the screwed hole spiral shell on described claw (7) is contained on described claw (7).
5. device as claimed in claim 2, is characterized in that, described drive motors (1) is band self-locking motor.
6. the device according to any one of Claims 1 to 5, is characterized in that, described thin slice pan is semiconductor wafer, CD or flat-panel monitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210208778.2A CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210208778.2A CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
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| Publication Number | Publication Date |
|---|---|
| CN102709224A CN102709224A (en) | 2012-10-03 |
| CN102709224B true CN102709224B (en) | 2015-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210208778.2A Active CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505363A (en) * | 2014-12-25 | 2015-04-08 | 苏州凯锝微电子有限公司 | Wafer clamping device |
| CN106356326A (en) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | Mask film plate clamping mechanism |
| CN108288602B (en) * | 2018-01-29 | 2019-06-14 | 英特尔产品（成都）有限公司 | Crawl and placing device |
| CN113161271B (en) * | 2021-03-17 | 2024-06-14 | 深圳市超聚微电子科技有限公司 | Can deposit strorage device for chip of different specifications |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1630056A (en) * | 2003-12-16 | 2005-06-22 | 株式会社拓普康 | Surface inspection apparatus |
| CN202712150U (en) * | 2012-06-19 | 2013-01-30 | 北京七星华创电子股份有限公司 | Rotary sheet type disk-like component clamping device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184853A (en) * | 2000-12-15 | 2002-06-28 | Yaskawa Electric Corp | Apparatus for grasping wafer |
| JP4254116B2 (en) * | 2002-03-22 | 2009-04-15 | 東京エレクトロン株式会社 | Substrate for alignment |
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2012
- 2012-06-19 CN CN201210208778.2A patent/CN102709224B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1630056A (en) * | 2003-12-16 | 2005-06-22 | 株式会社拓普康 | Surface inspection apparatus |
| CN202712150U (en) * | 2012-06-19 | 2013-01-30 | 北京七星华创电子股份有限公司 | Rotary sheet type disk-like component clamping device |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2002-184853A 2002.06.28 * |
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| CN102709224A (en) | 2012-10-03 |
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