CN102709224A - Clamping device for rotary slice discoid material - Google Patents
Clamping device for rotary slice discoid material Download PDFInfo
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- CN102709224A CN102709224A CN2012102087782A CN201210208778A CN102709224A CN 102709224 A CN102709224 A CN 102709224A CN 2012102087782 A CN2012102087782 A CN 2012102087782A CN 201210208778 A CN201210208778 A CN 201210208778A CN 102709224 A CN102709224 A CN 102709224A
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- thin slice
- clamping
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Abstract
The invention relates to a clamping device in the technical field of a semi-conductor, and particularly discloses the clamping device for a rotary slice discoid material. The clamping device comprises a rotary screw, an upright lifting block, a horizontal moving block, a top fixing block, a clamping claw and a horizontal sliding rail, wherein the clamping claw is arranged on the horizontal moving block, the horizontal moving block is arranged on the horizontal sliding rail, the upright lifting block and the top fixing block are arranged on the rotary screw, and the horizontal sliding rail is arranged on the top fixing block. According to the clamping device, rigid force and part flexible force are combined to overcome affects of centripetal force and centrifugal force generated by the clamping claw at a high rotation speed on the state of a clamp-on slice discoid material, thus the clamping claw is enabled to tightly clamp the slice discoid material with clamping force in a stable and ideal scope, and the phenomenon of flying-out or being clamped into pieces of the slice discoid material at the high rotation speed cannot occur.
Description
Technical field
The present invention relates to a kind of clamping device of technical field of semiconductors, particularly relate to a kind of rotation thin slice pan clamping device.
Background technology
It is pin chuck, bernoulli gripper etc. that thin slice pan chuck is used maximum in the field.In publication number is the patent of CN101587851, disclose a kind of centrifugal force that utilizes with thin slice pan chucking, utilized the repulsive force of magnet to open the device of wafer.A kind of bernoulli principle chuck that the thin slice pan is fixing that utilizes is disclosed in U.S. Pat 5513668 and US4903717; It utilizes bernoulli principle between chuck and thin slice pan, to form one deck air cushion; Utilize air cushion to keep the thin slice pan, realize radial location through the clamping element that is distributed in thin slice pan circumference.But these technology all have a shortcoming: when perhaps ultrahigh speed is rotated at a high speed; Because the mutual enhancing of centrifugal force and centripetal force; Cause clamping device increasing or more and more littler, and then produce the phenomenon that the broken thin slice pan of folder or thin slice pan fly out the clamping force of thin slice pan.
Summary of the invention
The technical problem that (one) will solve
The technical problem that the present invention will solve is: the phenomenon of how avoiding occurring in the clamping high speed rotating thin slice pan process that the thin slice pan flies out or the quilt folder is broken occurs.
(2) technical scheme
In order to solve the problems of the technologies described above; The present invention provides a kind of rotation thin slice pan clamping device, comprises rotating threaded shaft, vertical lifting piece, moves horizontally piece, top fixed block, claw and horizontal slip track, wherein; Said claw is installed in said moving horizontally on the piece; The said piece that moves horizontally is installed on the said horizontal slip track, and said vertical lifting piece and top fixed block are installed on the rotating threaded shaft, and said horizontal slip track is installed on the fixed block of said top.
Preferably, said device also comprises the drive motors that is installed on said rotating threaded shaft one end.
Preferably, the said piece that moves horizontally has four, and said horizontal slip track has two, and two said pieces that move horizontally are installed on each said horizontal slip track.
Preferably; Said device also comprises articulated mast; The said lower end that moves horizontally piece is equipped with the first hinge johning knot, and the second hinge johning knot is installed on the said vertical lifting piece, and said articulated mast is connected between the said first hinge johning knot and the second hinge johning knot.
Preferably, said claw is installed in said moving horizontally on the piece through spacing screw rod and spring.
Preferably, said spacing screw rod passes said slotted hole and the screwed hole spiral shell on the said claw that moves horizontally on the piece and is contained on the said claw.
Preferably, said drive motors is band self-locking motor.
Preferably, said thin slice pan is semiconductor wafer, CD or flat-panel monitor.
(3) beneficial effect
Technique scheme has following advantage: centripetal force that claw produces when utilizing rigidity power and local flexible force to overcome high speed rotating and centrifugal force are to clamping the influence of thin slice pan state; Guarantee that claw can clamp the thin slice pan with the clamping force of a stable ideal scope, can not cause the phenomenon that the thin slice pan flies out or the quilt folder is broken of high speed rotating to occur.
Description of drawings
Fig. 1 is the apparatus structure sketch map of the embodiment of the invention;
Sketch map when Fig. 2 is the device open mode of the embodiment of the invention;
Sketch map when Fig. 3 is the device clamped condition of the embodiment of the invention;
Fig. 4 is a vertical lifting block structure sketch map in the device of the embodiment of the invention;
Fig. 5 moves horizontally the block structure sketch map in the device of the embodiment of the invention;
Fig. 6 is a top fixed-block-architecture (FBA) sketch map in the device of the embodiment of the invention;
Fig. 7 is a rotating threaded shaft structural representation in the device of the embodiment of the invention;
Fig. 8 is an articulated mast structural representation in the device of the embodiment of the invention;
Fig. 9 is a claw structure sketch map in the device of the embodiment of the invention;
Figure 10 is a claw buffer structure sketch map in the device of the embodiment of the invention;
Figure 11 is a spacing screw-rod structure sketch map in the device of the embodiment of the invention.
Wherein, 1: drive motors; 2: rotating threaded shaft; 3: the vertical lifting piece; 4: move horizontally piece; 5: articulated mast; 6: the top fixed block; 7: claw; 8: spacing screw rod; 9: spring; 10-1: the first hinge johning knot; 10-2: the second hinge johning knot; 11: the horizontal slip track; 12: slotted hole; 13: shaft coupling.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention describes in further detail.Following examples are used to explain the present invention, but are not used for limiting scope of the present invention.
Shown in Figure 1 is the structural representation of clamping device of the present invention; Can find out in conjunction with Fig. 2 ~ Figure 11; The inventive system comprises drive motors 1 (being band self-locking motor among this figure), rotating threaded shaft 2, vertical lifting piece 3, move horizontally piece 4, articulated mast 5, top fixed block 6, claw 7, spacing screw rod 8, spring 9, the first hinge johning knot 10-1, the second hinge johning knot 10-2, horizontal slip track 11; Claw 7 is installed to be connected on spring 9 through spacing screw rod 8 and is moved horizontally on the piece 4; Said spacing screw rod 8 passes said slotted hole 12 and the screwed hole spiral shell on the said claw 7 that moves horizontally on the piece 4 and is contained on the said claw 7; With the front and back displacement of restriction claw 7, to realize the local spacing of claw 7.Four (also can be designed as three or six) second hinge johning knot 10-2 evenly distribute on the vertical lifting piece 3; Each moves horizontally piece 4 lower ends and also is designed with one first hinge johning knot 10-1 simultaneously; Articulated mast 5 is connected between the said first hinge johning knot 10-1 and the second hinge johning knot 10-2; Being connected through the hinge to reach the stable conversion of rigidity power, and the loss of rigidity power is minimum when guaranteeing high speed, guarantees clamping force accurately.Top fixed block 6 is through the little bearing of following installation (perhaps other modes; The effect of little bearing is the rotary work of assisting leading screw) connect rotating threaded shaft 2, the rotation that this connected mode helps rotating threaded shaft 2 does not produce particle or and the particle of pettiness when guaranteeing to rotate simultaneously.Spacing screw rod 8, spring 9 are avoided claw 7 because excessive clamping thin slice pan distortion that causes of centripetal force or centrifugal force or the loosening situation of clamping occur; Be local compliance power, purpose is to overcome the influence that the error of thin slice pan self causes clamping force here.And move horizontally piece 4 is to fix through rigidity power; Therefore can provide certain rigid power to guarantee that claw 7 can not receive excessive centripetal force and centrifugal force; Thereby the clamping force that guarantees clamping thin slice pan reaches the purpose of safe clamping high speed rotating thin slice pan in suitable scope.The said first hinge johning knot 10-1, the second hinge johning knot 10-2 are preferably the spherical linkage johning knot, can guarantee level or vertical least displacement amount, the accurate clamping force of stable holding thin slice pan during more favourable high speed.Through the number of turns of band self-locking Electric Machine Control rotating threaded shaft rotation, so the rise and fall distance of control vertical lifting piece, also just controlled simultaneously and moved horizontally the distance that piece moves horizontally, confirmed that finally claw clamps the clamping force of thin slice pan.In the present embodiment, rotating threaded shaft 2 is connected with drive motors 1 through shaft coupling 13, can also adopt other modes to connect as required.
Operation principle of the present invention is following: before the use; Claw 7 is in open mode; After manipulator is got the thin slice pan and is put claw 7 into; This moment, drive motors 1 was started working; Driven in rotation leading screw 2 reverse rotations one fixing turn, this moment is the preset height of movable block 3 declines vertically, and the interlock effect of the bar 5 that is connected through the hinge makes and moves horizontally the mobile predetermined distance of piece 4 inside (near the direction of top fixed block 6); This moment, claw 7 can be just in time clamps the thin slice pan according to desirable clamping force (this power is determined by the spacing distance of selected spring 9, selected spacing screw rod 8 and the displacement that moves horizontally piece 4 jointly), and this moment, the rotary main shaft of wash chamber can be rotated cleaning to the thin slice pan.When according to predetermined require to make rotating threaded shaft 2 reverse rotations and then interlock move horizontally piece 4 inwardly motion predetermined apart from the time; Drive motors 1 can provide from lock control (perhaps other self-locking forms); So just guarantee that rotating threaded shaft 2 does not carry out any rotation when technology; Leading screw does not rotate, and the vertical lifting piece can not move, and this moment, the exposure level movable block 4 through interlock can not carry out any moving; Just guaranteed that also clamping force can remain in the predetermined scope in technical process, avoided occurring because the too high thin slice pan that causes of rotating speed flies out or is held the broken phenomenon of device folder.For existing clamping device; Work such as when low-speed running, can clean safely; But when speed reaches 2000r/min or two kinds of damages will occur when higher; The firstth, clamping device is because the excessive not enough and then thin slice pan of clamping force that causes of centrifugal force flies out destruction equipment; The secondth, clamping device since centripetal force excessive to cause the excessive and then thin slice pan of clamping force to be held the device folder broken.Both of these case is two kinds of situation that occur often in high speed rotating technology, also is the place that high speed rotating thin slice pan needs most coefficient of safety.And the device that the present invention designed can be made corresponding change to this potential safety hazard effectively and avoid.
After cleaning completion, this moment, electric rotating machine 1 release self-locking began to be rotated in the forward leading screw 2; Let vertical lifting piece 3 rise; Make through the interlock effect to move horizontally piece 4 levels and outwards move certain distance, claw 7 is opened, the thin slice pan is on the level reference of claw 7; This moment, manipulator can be taken corresponding thin slice pan away, prepared to put into another plate sheet pan simultaneously.For the displacement that moves horizontally piece 4, certain assurance can not be excessive can not be too small, served as conference and caused thin slice pan one end can be in claw 7 datum levels outside, picking and placeing sheet to manipulator makes troubles; When causing manipulator to pick and place sheet, too small meeting can not get corresponding thin slice pan easily.So for this device; Inside and outside distance is very important; Owing to the existence of claw 7 place's local compliance power, can effectively avoid simultaneously because thin slice pan self sum of errors moves horizontally the excessive or too small phenomenon appearance of clamping force that range error is brought.
In the device busy process; The number of turns of rotating threaded shaft 2 forward and reverse rotations can preestablish; Set the number of turns and be in order to limit the clamping force of claw 7 chucking thin slice pans, when rotating threaded shaft 2 is rotated in the forward, guarantee vertical lifting piece 3 rise a fixing turn and self-lockings, guarantee that claw 7 can open safely; Simultaneously can guarantee thin slice pan level, make things convenient for the sheet that picks and places of manipulator; When rotating threaded shaft 2 reverse rotations, guarantee 3 decline one fixing turn and the self-lockings of vertical lifting piece, guarantee that claw 7 can clamp the thin slice pan according to the clamping force of budget.In order to guarantee the smooth completion of high device; For the selection of locking device and the very strictness of calculating of rotating cycle; Can be confirmed to move horizontally the displacement of piece 4 by the number of turns of leading screw 2 rotations, this distance is to step up the suitable clamping force of thin slice pan and unclamp the thin slice pan picks and places sheet by manipulator safety key.
Can find out by above embodiment; Centripetal force that claw produced when device projecting point of the present invention was to utilize rigidity power and local flexible force to overcome high speed rotating and centrifugal force are to clamping the influence of thin slice pan state; Guarantee that claw can clamp the thin slice pan with the clamping force of a stable ideal scope, can not cause the phenomenon that the thin slice pan flies out or the quilt folder is broken of high speed rotating to occur.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and replacement, these improvement and replacement also should be regarded as protection scope of the present invention.
Claims (8)
1. one kind is rotated thin slice pan clamping device; It is characterized in that; Comprise rotating threaded shaft (2), vertical lifting piece (3), move horizontally piece (4), top fixed block (6), claw (7) and horizontal slip track (11); Wherein, said claw (7) is installed in said moving horizontally on the piece (4), and the said piece (4) that moves horizontally is installed on the said horizontal slip track (11); Said vertical lifting piece (3) and top fixed block (6) are installed on the rotating threaded shaft (2), and said horizontal slip track (11) is installed on the said top fixed block (6).
2. device as claimed in claim 1 is characterized in that, said device also comprises the drive motors (1) that is installed on said rotating threaded shaft (2) one ends.
3. device as claimed in claim 1 is characterized in that, the said piece (4) that moves horizontally has four, and said horizontal slip track (11) has two, and two said pieces (4) that move horizontally are installed on each said horizontal slip track (11).
4. device as claimed in claim 3; It is characterized in that; Said device also comprises articulated mast (5); The said lower end that moves horizontally piece (4) is equipped with the first hinge johning knot (10-1), and the second hinge johning knot (10-2) is installed on the said vertical lifting piece, and said articulated mast (5) is connected between the said first hinge johning knot (10-1) and the second hinge johning knot (10-2).
5. device as claimed in claim 1 is characterized in that, said claw (7) is installed in said moving horizontally on the piece (4) through spacing screw rod (8) and spring (9).
6. device as claimed in claim 5 is characterized in that, said spacing screw rod (8) passes said slotted hole (12) and the screwed hole spiral shell on the said claw (7) that moves horizontally on the piece (4) and is contained on the said claw (7).
7. device as claimed in claim 2 is characterized in that, said drive motors (1) is band self-locking motor.
8. like each described device in the claim 1 ~ 7, it is characterized in that said thin slice pan is semiconductor wafer, CD or flat-panel monitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210208778.2A CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210208778.2A CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102709224A true CN102709224A (en) | 2012-10-03 |
| CN102709224B CN102709224B (en) | 2015-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210208778.2A Active CN102709224B (en) | 2012-06-19 | 2012-06-19 | Clamping device for rotary slice discoid material |
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| Country | Link |
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| CN (1) | CN102709224B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505363A (en) * | 2014-12-25 | 2015-04-08 | 苏州凯锝微电子有限公司 | Wafer clamping device |
| CN106356326A (en) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | Mask film plate clamping mechanism |
| CN108288602A (en) * | 2018-01-29 | 2018-07-17 | 英特尔产品（成都）有限公司 | Crawl and placing device |
| CN113161271A (en) * | 2021-03-17 | 2021-07-23 | 刘光桐 | Can deposit strorage device for chip of different specifications |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184853A (en) * | 2000-12-15 | 2002-06-28 | Yaskawa Electric Corp | Apparatus for grasping wafer |
| US20040018745A1 (en) * | 2002-03-22 | 2004-01-29 | Makoto Tashiro | Positioning substrate for semiconductor process |
| CN1630056A (en) * | 2003-12-16 | 2005-06-22 | 株式会社拓普康 | Surface inspection apparatus |
| CN202712150U (en) * | 2012-06-19 | 2013-01-30 | 北京七星华创电子股份有限公司 | Rotary sheet type disk-like component clamping device |
-
2012
- 2012-06-19 CN CN201210208778.2A patent/CN102709224B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184853A (en) * | 2000-12-15 | 2002-06-28 | Yaskawa Electric Corp | Apparatus for grasping wafer |
| US20040018745A1 (en) * | 2002-03-22 | 2004-01-29 | Makoto Tashiro | Positioning substrate for semiconductor process |
| CN1630056A (en) * | 2003-12-16 | 2005-06-22 | 株式会社拓普康 | Surface inspection apparatus |
| CN202712150U (en) * | 2012-06-19 | 2013-01-30 | 北京七星华创电子股份有限公司 | Rotary sheet type disk-like component clamping device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505363A (en) * | 2014-12-25 | 2015-04-08 | 苏州凯锝微电子有限公司 | Wafer clamping device |
| CN106356326A (en) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | Mask film plate clamping mechanism |
| CN108288602A (en) * | 2018-01-29 | 2018-07-17 | 英特尔产品（成都）有限公司 | Crawl and placing device |
| CN113161271A (en) * | 2021-03-17 | 2021-07-23 | 刘光桐 | Can deposit strorage device for chip of different specifications |
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| Publication number | Publication date |
|---|---|
| CN102709224B (en) | 2015-01-14 |
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