CN102543818A - Balance wafer clamping device - Google Patents
Balance wafer clamping device Download PDFInfo
- Publication number
- CN102543818A CN102543818A CN2012100048980A CN201210004898A CN102543818A CN 102543818 A CN102543818 A CN 102543818A CN 2012100048980 A CN2012100048980 A CN 2012100048980A CN 201210004898 A CN201210004898 A CN 201210004898A CN 102543818 A CN102543818 A CN 102543818A
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- silicon chip
- clamping
- gripping member
- adjustable
- balance
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- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a balance wafer clamping device comprising a rotary shaft and a chuck which can be driven by the rotary shaft to rotate; the chuck comprises three clamping arms, wherein the ends of two clamping arms are fixed clamping elements, and the end of the other clamp is an adjustable clamping piece; the adjustable clamping piece can swing relative to a connecting point with the chuck for clamping a wafer; and the top end of the adjustable clamping piece is provided with a clamping element which is contacted with the surface of the wafer, and the bottom end of the adjustable clamping piece is provided with a balance mechanism with adjustable weight. According to the balance wafer clamping device, the structure is simple, the wafer does not need to be clamped through a movable part, so that no particle is produced after the wafer is cleaned.
Description
Technical field
The present invention relates to integrated circuit technology field, particularly relate to a kind of silicon chip fixture.
Background technology
As the part of integrated circuit processing technology, it is very important can grasping silicon chip safely.Traditional method uses spring, electronic installation, cam and other mechanical connections to keep and mobile clamping element usually.Clamping silicon chip process mainly is divided into three parts: load silicon chip (clamping element is a position of opening), rotation silicon chip (clamping element is wanted the silicon chip that grasps of safety), take out silicon chip (clamping element is at open position)
The method of tradition clamping silicon chip all has requirement to parts, electronic component and pneumatics aspect.The switching of clamping element and moving of parts are controlled in the common requirement of these methods exactly.And chuck want to satisfy the requirement of pneumatics aspect just must special very expensive rotating shaft and the rotary system of needs.Many traditional clamping elements are owing to be vulnerable to gravitational influence under the high speed rotating condition, thereby have to exceed the safety standard design or when resetting, have only short stroke.
And traditional method is to grasp silicon chip through mobile part, and this method can produce particle after silicon chip cleans end, and these particles can be deposited in silicon chip surface when clamping element opened the end of silicon chip technology.
Summary of the invention
The technical problem that (one) will solve
The technical problem that the present invention will solve provides a kind of clamping element, and is simple in structure, and need not to grasp silicon chip through moving part, thereby can after silicon chip cleans end, can not produce particle.
(2) technical scheme
In order to solve the problems of the technologies described above; The invention provides a kind of balance silicon chip fixture; Comprise: rotating shaft and the chuck that can under said rotating shaft drives, rotate; Said chuck comprises three clamping limbs, and wherein the end of two said clamping limbs is the fixed clamp element, and the end of another said clamping limb is the adjustable clamp gripping member;
Said adjustable clamp gripping member can with respect to the swing of the tie point of said chuck, be used for the clamping silicon chip, its top is provided with and is used for the clamping element that contacts with said silicon chip surface, its bottom is provided with the adjustable balanced controls of weight.
Wherein, said balanced controls comprise the hole that is positioned at said adjustable clamp gripping member bottom or the spring of groove and setting thereof, and the other end of said spring is connected with the balance gauge block, and the opening part of said hole or groove is provided with stopper.
Wherein, the amount of feeding of said stopper in said hole or groove is adjustable.
Wherein, the end of said adjustable clamp gripping member clamping limb is provided with the adjustable clamp gripping member and returns only part, and the end that said adjustable clamp gripping member is returned part only is adjustable with spacing between the said adjustable clamp gripping member of vertical state, and it is used to limit the swing of said adjustable clamp gripping member.
Wherein, the placement surface that is used for contacting with said silicon chip surface under the vertical state of said clamping element is for being tilted to down.
Wherein, the angle between said three clamping limbs is 120 ° each other.
(3) beneficial effect
In the balance silicon chip fixture that technique scheme provided; It comprises: rotating shaft and the chuck that can under said rotating shaft drives, rotate; Said chuck comprises three clamping limbs; Wherein the end of two said clamping limbs is the fixed clamp element, and the end of another said clamping limb is the adjustable clamp gripping member; Said adjustable clamp gripping member can be relatively and the tie point swing of said chuck, is used for the clamping silicon chip, and its top is provided with and is used for the clamping element that contacts with said silicon chip surface, and its bottom is provided with the adjustable balanced controls of weight.It is simple in structure for this balance silicon chip fixture, and need not to grasp silicon chip through moving part, can not produce particle thereby can not clean at silicon chip after finishing.
Description of drawings
Fig. 1 is the structural representation of the balance silicon chip fixture of the embodiment of the invention;
Fig. 2 is the local enlarged diagram of A portion among Fig. 1;
Fig. 3 is the schematic cross-section of adjustable clamp gripping member of the balance silicon chip fixture of the embodiment of the invention;
Fig. 4 a and Fig. 4 b are the process sketch mapes that the silicon chip of the embodiment of the invention is placed into the placement surface of balance silicon chip fixture;
The sketch map of centrifugal force when Fig. 5 a and 5b are the rotations of embodiment of the invention balance silicon chip fixture;
The adjustable clamp gripping member was returned the only force diagram of part when Fig. 6 was the rotation of embodiment of the invention balance silicon chip fixture;
Fig. 7 is the rotary speed of the embodiment of the invention balance silicon chip fixture sketch map that the adjustable clamp gripping member discharges when reducing;
Fig. 8 a is the schematic top plan view of embodiment of the invention balance silicon chip fixture;
Fig. 8 b is the schematic side view of embodiment of the invention balance silicon chip fixture;
Wherein, 1: balance silicon chip fixture; 2: silicon chip; 3: chuck; 4: clamping element; 5: spring; 6: the balance gauge block; 7: stopper; 8: the adjustable clamp gripping member is returned only part; 9: the adjustable clamp gripping member; 10: the fixed clamp element; 11: placement surface; 12: centrifugal force; 13: arrow line; 14: clamping zone; 17: centrifugal force; 18: active force; 19: silicon chip and clamping element contact position; 20: the adjustment position; 21: return stop bit and put; 22: direction of rotation.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention describes in further detail.Following examples are used to explain the present invention, but are not used for limiting scope of the present invention.
Shown in Fig. 1 to 3 and Fig. 8 a, 8b; The balance silicon chip fixture 1 that present embodiment provides; Comprise: rotating shaft and the chuck 3 that can under rotating shaft drives, rotate; Chuck 3 comprises three clamping limbs, and wherein the end of two clamping limbs is a fixed clamp element 10, and the end of another clamping limb is an adjustable clamp gripping member 9; Adjustable clamp gripping member 9 can be with respect to swinging with the tie point of chuck 3; Be used for clamping silicon chip 2; Its top is provided with and is used for and the silicon chip 2 surperficial clamping elements 4 that contact; Its bottom is provided with the adjustable balanced controls of weight, the 120 ° of distributions each other of the angle between preferred three clamping limbs, and purpose is can and take silicon chip 2 away in the situation held that does not receive any interference for manipulator.Adjust the centripetal force that adjustable clamp gripping member 9 produces through the weight of adjustment balanced controls when chuck 3 rotates, thereby realize clamping silicon chip 2.This balance silicon chip fixture 1 is simple in structure, and need not to grasp silicon chip 2 through moving part, thereby can after silicon chip 2 cleans end, can not produce particle.
Balanced controls comprise the hole that is positioned at adjustable clamp gripping member 9 bottoms or the spring 5 of groove and setting thereof, and the other end of spring 5 is connected with balance gauge block 6, and the opening part of hole or groove is provided with stopper 7.The amount of feeding of stopper 7 in hole or groove is adjustable.Through the weight of adjustment gauge block 6, perhaps regulate the amount of feeding of stopper 7 in hole or groove and change balanced controls in chuck 3 revolving centripetal force, to adapt to the demand of 2 pairs of chucking powers of different silicon chips.
The placement surface 11 that is used under the clamping element 4 vertical states contacting with silicon chip 2 surfaces is for being tilted to down.Silicon chip 2 is positioned at as on accompanying drawing 4a and the 4b placement surface 11.Silicon chip 2 will be placed in this position and under chuck 3 rotates to enough soon condition, force aequum piece 6 outwards to move to clamp silicon chip 2.Adjustable clamp gripping member 9 is under the 33rpm condition, to clamp silicon chip 2 when initial design, and the amount of feeding of the weight through adjustment gauge block 6, the stopper 7 that adjustment is used can be adjusted silicon chip 2 demand to chucking power under different rotating speeds that clamps.
Accompanying drawing 5a has showed the direction of adjustable clamp gripping member 9 centrifugal force under the rotation condition.When arriving suitable rotating speed (by the determining positions of balance gauge block 6), clamping element 4 will be rotated by the direction of arrow 13, and the lower end of adjustable clamp gripping member 19 also will be by the direction swing of centrifugal force 12.Shown in Fig. 5 b, silicon chip 2 will move to the clamping zone 14 of clamping element 4.Silicon chip 2 is also concentric with chuck 3 automatically.Along with the increase of rotating speed, centrifugal force 17 also will increase thereupon, and silicon chip 2 will be out of shape under the clamping of clamping element 4.For fear of silicon chip 2 under clamp position owing to power is damaged too greatly; The end of the clamping limb of adjustable clamp gripping member 9 is provided with the adjustable clamp gripping member and returns only part 8; The end that the adjustable clamp gripping member is returned part 8 only is adjustable with spacing between the adjustable clamp gripping member 9 of vertical state, and it is used to limit the swing of adjustable clamp gripping member 9.Thereby the power that clamping element 4 acts on the silicon chip 2 will obtain restriction under the adjustable clamp gripping member returned the effect of part 8 only.Concrete, accompanying drawing 6 has been showed the direction of the active force 18 on silicon chip and the clamping element contact position 19.Return through adjustment adjustable clamp gripping member that only part 8 is with respect to the adjustment position 20 of clamping limb end, the stop bit that returns that can change the restriction adjustable clamp gripping member 9 of clamping element 4 puts 21.
In accompanying drawing 7, the rotating speed of silicon chip descends, and the centrifugal force that adjustable clamp gripping member 9 acts on balance gauge block 6 also descends thereupon, and it will be rotated by direction of rotation 22.Silicon chip 2 will move to the supporting zone of clamping element 4.
In case chuck 3 stops the rotation, manipulator will not receive easily to take silicon chip away under the condition of any interference of clamping element.
Can find out by above embodiment; The embodiment of the invention provides a kind of balance silicon chip fixture 1; Comprise: rotating shaft and the chuck 3 that can under rotating shaft drives, rotate; Chuck 3 comprises three clamping limbs, and wherein the end of two clamping limbs is a fixed clamp element 10, and the end of another clamping limb is an adjustable clamp gripping member 9; Adjustable clamp gripping member 9 can be used for clamping silicon chip 2 with respect to swinging with the tie point of chuck 3, and its top is provided with and is used for and the silicon chip 2 surperficial clamping elements 4 that contact, and its bottom is provided with the adjustable balanced controls of weight.It is simple in structure for this balance silicon chip fixture, and need not to grasp silicon chip through moving part, can not produce particle thereby can not clean at silicon chip after finishing.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and replacement, these improvement and replacement also should be regarded as protection scope of the present invention.
Claims (6)
1. balance silicon chip fixture; It is characterized in that; Comprise: rotating shaft and the chuck (3) that can under said rotating shaft drives, rotate; Said chuck (3) comprises three clamping limbs, and wherein the end of two said clamping limbs is fixed clamp element (10), and the end of another said clamping limb is adjustable clamp gripping member (9);
Said adjustable clamp gripping member (9) can be used for clamping silicon chip (2) with respect to swinging with the tie point of said chuck (3), and its top is provided with and is used for and the surperficial clamping element (4) that contacts of said silicon chip (2), and its bottom is provided with the adjustable balanced controls of weight.
2. balance silicon chip fixture as claimed in claim 1; It is characterized in that; Said balanced controls comprise the hole that is positioned at said adjustable clamp gripping member (9) bottom or the spring (5) of groove and setting thereof; The other end of said spring (5) is connected with balance gauge block (6), and the opening part of said hole or groove is provided with stopper (7).
3. balance silicon chip fixture as claimed in claim 2 is characterized in that the amount of feeding of said stopper (7) in said hole or groove is adjustable.
4. balance silicon chip fixture as claimed in claim 1; It is characterized in that; The end of said adjustable clamp gripping member (9) clamping limb is provided with the adjustable clamp gripping member and returns only part (8); The end that said adjustable clamp gripping member is returned part (8) only is adjustable with spacing between the said adjustable clamp gripping member (9) of vertical state, and it is used to limit the swing of said adjustable clamp gripping member (9).
5. balance silicon chip fixture as claimed in claim 1 is characterized in that, the placement surface (11) that is used for contacting with said silicon chip (2) surface under the vertical state of said clamping element (4) is for being tilted to down.
6. balance silicon chip fixture as claimed in claim 1 is characterized in that, 120 ° each other of the angles between said three clamping limbs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210004898.0A CN102543818B (en) | 2012-01-09 | 2012-01-09 | Balance wafer clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210004898.0A CN102543818B (en) | 2012-01-09 | 2012-01-09 | Balance wafer clamping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102543818A true CN102543818A (en) | 2012-07-04 |
| CN102543818B CN102543818B (en) | 2014-03-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210004898.0A Active CN102543818B (en) | 2012-01-09 | 2012-01-09 | Balance wafer clamping device |
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| CN (1) | CN102543818B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103752576A (en) * | 2014-01-14 | 2014-04-30 | 无锡江南计算技术研究所 | Jig universal for centrifugal cleaning |
| CN105470192A (en) * | 2016-01-05 | 2016-04-06 | 天津华海清科机电科技有限公司 | Wafer clamping mechanism |
| CN105529295A (en) * | 2014-09-29 | 2016-04-27 | 盛美半导体设备（上海）有限公司 | Wafer clamping device |
| CN104103559B (en) * | 2014-07-23 | 2017-01-04 | 济南晶博电子有限公司 | Clipping silicon chip coating whirler |
| CN106847738A (en) * | 2017-01-19 | 2017-06-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer clamping device |
| CN108063110A (en) * | 2018-01-10 | 2018-05-22 | 苏州聚晶科技有限公司 | A kind of silicon slice floating supporting mechanism |
| CN108269753A (en) * | 2018-01-10 | 2018-07-10 | 苏州聚晶科技有限公司 | A kind of silicon chip one-side cleaner |
| CN109967480A (en) * | 2018-12-03 | 2019-07-05 | 杭州众硅电子科技有限公司 | It is a kind of for drying the fastening structure of wafer |
| CN113003185A (en) * | 2021-02-23 | 2021-06-22 | 胡慧红 | Flat pasting equipment for wafer photoetching development |
| CN114803539A (en) * | 2022-05-16 | 2022-07-29 | 中建八局第二建设有限公司 | ALC light partition wall board construction is with shifting positioner |
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| CN1377069A (en) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | Jig |
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| CN101587851A (en) * | 2009-06-23 | 2009-11-25 | 北京七星华创电子股份有限公司 | A kind of device that is used for holding plate-like article |
| US20100001021A1 (en) * | 2005-07-19 | 2010-01-07 | Finell Rebecca M | Spout cover |
| US20100219920A1 (en) * | 2009-02-27 | 2010-09-02 | Novellus Systems, Inc. | Magnetically actuated chuck for edge bevel removal |
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| CN1377069A (en) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | Jig |
| US20100001021A1 (en) * | 2005-07-19 | 2010-01-07 | Finell Rebecca M | Spout cover |
| US20100219920A1 (en) * | 2009-02-27 | 2010-09-02 | Novellus Systems, Inc. | Magnetically actuated chuck for edge bevel removal |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103752576A (en) * | 2014-01-14 | 2014-04-30 | 无锡江南计算技术研究所 | Jig universal for centrifugal cleaning |
| CN103752576B (en) * | 2014-01-14 | 2015-11-18 | 无锡江南计算技术研究所 | A kind of eccentric cleaning General purpose jig |
| CN104103559B (en) * | 2014-07-23 | 2017-01-04 | 济南晶博电子有限公司 | Clipping silicon chip coating whirler |
| CN105529295A (en) * | 2014-09-29 | 2016-04-27 | 盛美半导体设备（上海）有限公司 | Wafer clamping device |
| CN105470192A (en) * | 2016-01-05 | 2016-04-06 | 天津华海清科机电科技有限公司 | Wafer clamping mechanism |
| CN106847738A (en) * | 2017-01-19 | 2017-06-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer clamping device |
| CN108063110A (en) * | 2018-01-10 | 2018-05-22 | 苏州聚晶科技有限公司 | A kind of silicon slice floating supporting mechanism |
| CN108269753A (en) * | 2018-01-10 | 2018-07-10 | 苏州聚晶科技有限公司 | A kind of silicon chip one-side cleaner |
| CN108063110B (en) * | 2018-01-10 | 2023-11-24 | 池州海琳服装有限公司 | Silicon wafer floating supporting mechanism |
| CN108269753B (en) * | 2018-01-10 | 2023-12-05 | 池州海琳服装有限公司 | Silicon wafer single-sided cleaning machine |
| CN109967480A (en) * | 2018-12-03 | 2019-07-05 | 杭州众硅电子科技有限公司 | It is a kind of for drying the fastening structure of wafer |
| CN113003185A (en) * | 2021-02-23 | 2021-06-22 | 胡慧红 | Flat pasting equipment for wafer photoetching development |
| CN114803539A (en) * | 2022-05-16 | 2022-07-29 | 中建八局第二建设有限公司 | ALC light partition wall board construction is with shifting positioner |
Also Published As
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|---|---|
| CN102543818B (en) | 2014-03-12 |
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Address after: 100015 floor 2, No. M2, No. 1, Jiuxianqiao East Road, Chaoyang District, Beijing Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 floor 2, No. M2, No. 1, Jiuxianqiao East Road, Chaoyang District, Beijing Patentee before: North China Science and technology group Limited by Share Ltd. |
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