CN108943458A - Silicon single crystal rod transfer device and silicon single crystal rod conveyer method - Google Patents
Silicon single crystal rod transfer device and silicon single crystal rod conveyer method Download PDFInfo
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- CN108943458A CN108943458A CN201710396229.5A CN201710396229A CN108943458A CN 108943458 A CN108943458 A CN 108943458A CN 201710396229 A CN201710396229 A CN 201710396229A CN 108943458 A CN108943458 A CN 108943458A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 595
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 595
- 239000010703 silicon Substances 0.000 title claims abstract description 595
- 239000013078 crystal Substances 0.000 title claims abstract description 124
- 238000012546 transfer Methods 0.000 title claims abstract description 87
- 238000000034 method Methods 0.000 title claims abstract description 32
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 92
- 238000009434 installation Methods 0.000 claims description 41
- 230000007246 mechanism Effects 0.000 claims description 37
- 210000000515 tooth Anatomy 0.000 claims description 31
- 238000012360 testing method Methods 0.000 claims description 5
- 238000013461 design Methods 0.000 abstract description 17
- 230000009977 dual effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 36
- 230000000694 effects Effects 0.000 description 15
- 238000005520 cutting process Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 7
- 229910021419 crystalline silicon Inorganic materials 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000032258 transport Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000007599 discharging Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 241001416181 Axis axis Species 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
This application discloses a kind of silicon single crystal rod transfer device and silicon single crystal rod conveyer method, which includes: commutation carrier；Silicon rod clamper, set on the silicon rod clamper area of the commutation carrier；Wherein, the commutation carrier makees commutation movement by driving, and single-wafer silicon rod is transported to evolution operation station by feeding station in commutation movement and/or monocrystalline silicon cube is transported to discharge station by evolution operation station by the silicon rod clamper on the commutation carrier.So, the quick of workpiece can be achieved and easily transport, improve the transfer efficiency of workpiece, in addition, the silicon rod clamper to commutate on carrier has the dual clamping function of single-wafer silicon rod and monocrystalline silicon cube, de-chucking can be saved in the case of not increasing structure complexity, increase the design space of other structures and reduce cost.
Description
Technical field
This application involves wire cutting technology fields, transport more particularly to a kind of silicon single crystal rod transfer device and silicon single crystal rod
Method.
Background technique
When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics
Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure for restricting subsequent finished product, thus
It is also higher and higher to its job requirements.Currently, multi-wire cutting technology is since with high production efficiency, operating cost is low, operation is smart
The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.
Multi-wire cutting technology is relatively advanced semiconductor workpiece cutting technique in the world at present, its principle is to pass through height
The semiconductor workpiece that the diamond wire of speed movement treats operation carries out cutting and forms target product.
By taking crystalline silicon rod is cut as an example, generally, rough flow chart includes: first using shear to long silicon originally
Stick carries out truncation operation to form the short silicon rod of multistage, after the completion of truncation, and is opened using excavation machine the short silicon rod after truncation
Crystal silicon cube is formed after Fang Zuoye, it is subsequent to reuse slicer slice operation is carried out to crystal silicon cube, then obtain silicon wafer.But,
Under normal circumstances, in the related art, operation needed for each procedures is independent arrangement, and operating equipment is dispersed in difference
Production unit or workshop or workshop different production areas, execute the workpiece of different procedures conversion need
Carrying allotment is carried out, in this way, process is many and diverse, inefficiency needs more manpowers or transloading equipment, and security risk is big, separately
Outside, the flowing link between the operating equipment of each process is more, and the risk of workpiece damage is improved during workpiece transfer,
Be also easy to produce it is unqualified caused by nonproductive factors, reduce product qualification rate and existing processing method brought by do not conform to
Reason loss, is the major improvement project that each company faces.
Summary of the invention
In view of above-described disadvantages, the purpose of the application is to disclose a kind of silicon single crystal rod transfer device and monocrystalline
Silicon rod conveyer method, for solving the problems such as silicon single crystal rod transfer efficiency present in the relevant technologies is low.
To achieve the above object and other purposes, the application disclose a kind of silicon single crystal rod transfer device on the one hand, application
In silicon single crystal rod multi-wire saw equipment, the silicon single crystal rod multi-wire saw equipment have feeding station, evolution operation station,
And discharge station, silicon single crystal rod transfer device include: commutation carrier；Silicon rod clamper, set on the silicon rod folder of the commutation carrier
Has area；The commutation carrier makees commutation movement by driving, and the silicon rod clamper on the commutation carrier is in commutation movement by monocrystalline
Circle silicon rod is transported to evolution operation station by feeding station and/or monocrystalline silicon cube is transported to blanking by evolution operation station
Station.
Silicon single crystal rod transfer device disclosed in the present application, the silicon rod clamper including commutation carrier and on commutation carrier,
Silicon rod clamper can be used to clamp single-wafer silicon rod and monocrystalline silicon cube, make commutation movement by driving commutation carrier, may make and change
Silicon rod clamper on carrier is converted between feeding station and evolution operation station to turn single-wafer silicon rod by feeding station
It is transported to evolution operation station and/or converts between evolution operation station and discharge station to make monocrystalline silicon cube by evolution
Industry station is transported to discharge station, so, it can be achieved that workpiece quick and easily transporting, improves the transfer efficiency of workpiece,
In addition, the silicon rod clamper on commutation carrier has the dual clamping function of single-wafer silicon rod and monocrystalline silicon cube, do not increasing knot
De-chucking can be saved in the case of structure complexity, increase the design space of other structures and reduce cost.
In some embodiments, the silicon rod clamper includes: silicon rod clamper installation part, is set on the commutation carrier；
At least two silicon rod clamping pieces are arranged along the silicon rod clamper installation part spacing.
In some embodiments, the silicon rod clamping piece includes: clamp arm mounting base, is set on the fixture installation part；
Two clamp arm are movably arranged in the clamp arm mounting base；The clamp arm is equipped with two clip tooths being oppositely arranged；Clamp arm driving
Mechanism, for driving described two clamp arm to make opening and closing movement；Wherein, described two clamp arm drive in the clamp arm driving mechanism
When lower clamping, the clip tooth in described two clamp arm is held on the cylinder of single-wafer silicon rod or the connection faceted pebble of monocrystalline silicon cube.
In some embodiments, the clamp arm driving mechanism includes: folding gear, is set in the clamp arm；Gear drives
Moving part has the groove engaged with the folding gear in the clamp arm；Driving source is connected to the gear drive, for driving
Move the gear drive movement.
In some embodiments, the gear drive is rack gear, and the opposite sides of the rack gear is respectively equipped with and institute
The folding gear stated at least two clamp arm engages corresponding groove；The driving source is for driving the rack movement
Cylinder or driving motor.
In some embodiments, the gear drive is driving gear structure, and the driving source is for driving
State the driving motor of driving gear structure operating.
In some embodiments, at least one silicon rod in the silicon rod clamper, at least two silicon rod clamping pieces
Clamping piece is equipped with guiding driving mechanism, for driving it along the silicon rod clamper installation part movement, to adjust described at least two
The spacing of a silicon rod clamping piece.
In some embodiments, the guiding driving mechanism includes: guiding leading screw and guide motor, wherein described to lead
It is connected to the silicon rod clamping piece to one end of lead screw, the other end of the guiding leading screw is connected to the guide motor.
In some embodiments, the silicon single crystal rod transfer device further includes height testing instrument, is set to the commutation and carries
On tool, for detecting the height of the single-wafer silicon rod.
The application provides a kind of silicon single crystal rod conveyer method on the other hand, is applied to foregoing silicon single crystal rod and transports
Device, the silicon single crystal rod conveyer method include: to be clamped using the silicon rod clamper in silicon single crystal rod transfer device positioned at feeding
The single-wafer silicon rod of station；Driving commutation carrier makees commutation movement, so that the silicon rod clamper is with the single-wafer silicon clamped
Stick is converted by feeding station to evolution operation station；The silicon rod clamper is discharged, the single-wafer silicon rod clamped is put
In evolution operation station, for carrying out evolution operation to the single-wafer silicon rod on evolution operation station to form monocrystalline silicon cube；
The monocrystalline silicon cube positioned at the evolution operation station is clamped using the silicon rod clamper；The commutation carrier is driven to change
To movement, so that the silicon rod clamper is converted by evolution operation station to discharge station with the monocrystalline silicon cube clamped；It releases
The silicon rod clamper is put, the monocrystalline silicon cube clamped is placed in discharge station and carries out blanking.
Silicon single crystal rod conveyer method disclosed in the present application will be located at the single-wafer silicon rod of feeding station first with silicon rod clamper
It clamps and single-wafer silicon rod is transported to by feeding station by evolution operation station by commutation movement, it is subsequent, recycle silicon rod
The monocrystalline silicon cube for being located at evolution operation station is clamped and is made monocrystalline silicon cube by evolution by commutation movement by fixture
Industry station is transported to discharge station, and compared with the existing technology, the application silicon single crystal rod conveyer method improves the effect of workpiece transhipment
Rate reduces costs and avoids workpiece damage.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the application silicon single crystal rod transfer device in the loosened condition.
Fig. 2 is stereoscopic schematic diagram of the application silicon single crystal rod transfer device under clamping state.
Fig. 3 is the application silicon single crystal rod transfer device and feeding station, evolution operation station and discharge station in one kind
Setting relation schematic diagram under situation.
Fig. 4 is for the application silicon single crystal rod transfer device with feeding station, evolution operation station and discharge station another
Setting relation schematic diagram under kind situation.
Fig. 5 is for the application silicon single crystal rod transfer device with feeding station, evolution operation station and discharge station another
Setting relation schematic diagram under kind situation.
Fig. 6 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single-wafer silicon rod in advance in the loosened condition.
Fig. 7 is the top view of Fig. 6.
Fig. 8 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single-wafer silicon rod under clamping state.
Fig. 9 is the top view of Fig. 8.
Figure 10 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps monocrystalline silicon cube in advance in the loosened condition.
Figure 11 is the top view of Figure 10.
Figure 12 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single machine silicon cube under clamping state.
Figure 13 is the top view of Figure 12.
Figure 14 is the rear pseudosection of silicon rod clamper in the application silicon single crystal rod transfer device.
Figure 15 is the flow diagram of the application silicon single crystal rod conveyer method in one embodiment.
Figure 16 is shape of the silicon rod clamper corresponding to the single-wafer silicon rod on loading and unloading station in silicon single crystal rod transfer device
State schematic diagram.
Figure 17 is that the silicon rod clamper in silicon single crystal rod transfer device clamps the single-wafer silicon rod positioned at loading and unloading station
Status diagram.
Figure 18 be commutation carrier make commutation movement after silicon rod clamper with the single-wafer silicon rod clamped correspond to evolution operation work
The status diagram of position.
Figure 19 is the status diagram that single-wafer silicon rod is placed in evolution operation station after discharging silicon rod clamper.
Figure 20 is the monocrystalline silicon cube that the silicon rod clamper in silicon single crystal rod transfer device corresponds on evolution operation station
Status diagram.
Figure 21 is that the silicon rod clamper in silicon single crystal rod transfer device clamps the monocrystalline silicon cube positioned at evolution operation station
Status diagram.
Figure 22 be commutation carrier make commutation movement after silicon rod clamper with the monocrystal rod cube clamped correspond to loading and unloading
The status diagram of station.
Figure 23 is the status diagram that monocrystalline silicon cube is placed in loading and unloading station after discharging silicon rod clamper.
Specific embodiment
Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book understands other advantages and effect of the application easily.
Fig. 1 is please referred to Figure 14.It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., are only used
To cooperate the revealed content of specification, so that those skilled in the art understands and reads, being not limited to the application can
Qualifications of implementation, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size
Adjustment, in the case where not influencing the effect of the application can be generated and the purpose that can reach, should all still fall in disclosed herein
Technology contents obtain in the range of capable of covering.Meanwhile it is cited such as "upper", "lower", "left", "right", " centre " in this specification
And the term of " one " etc., it is merely convenient to being illustrated for narration, rather than to limit the enforceable range of the application, it is opposite to close
System is altered or modified, under the content of no substantial changes in technology, when being also considered as the enforceable scope of the application.
The inventors of the present application found that in the relevant cutting operation technology for crystalline silicon rod, each work for being related to
Industry is independent arrangement, and operating equipment is dispersed in the different production areas of different production unit or workshop or workshop,
The conversion needs for executing the crystalline silicon rod of different procedures are transported through allotment, and there are processes, and many and diverse, transfer device structure is answered
The problems such as miscellaneous and transfer efficiency is low.In view of this, present inventor, by scrap build, providing can at least realize fastly
Prompt and stable silicon single crystal rod transfer device and its silicon single crystal rod conveyer method, in this way, can be in the case of occupied space is certain
The transhipment that different shape crystalline silicon rod is completed by silicon single crystal rod transfer device, simplifies the structure of silicon single crystal rod transfer device, subtracts
Lack transhipment process, improved the efficiency of workpiece transhipment, reduces costs and avoid workpiece damage.
Fig. 1 to Fig. 2 is please referred to, is the structural schematic diagram of the application silicon single crystal rod transfer device in one embodiment,
In, Fig. 1 is the stereoscopic schematic diagram of the application silicon single crystal rod transfer device in the loosened condition, and Fig. 2 turns for the application silicon single crystal rod
Stereoscopic schematic diagram of the shipping unit under clamping state.
The application silicon single crystal rod transfer device is applied in silicon single crystal rod multi-wire saw equipment, for carrying out to silicon single crystal rod
Cutting operation closes the structure of rule to be formed, and in the present embodiment, monocrystalline silicon multi-wire saw equipment may be, for example, silicon single crystal rod evolution
Equipment, for carrying out evolution operation to silicon single crystal rod, that is, form single-wafer silicon rod cylindrical after evolution operation and cut
Face is in the monocrystalline silicon cube of class rectangle.Further, the silicon single crystal rod multi-wire saw equipment more at least have feeding station,
Evolution operation station and discharge station, the feeding station are used to carry out the feeding operation of single-wafer silicon rod, the evolution
Operation station for carrying out the evolution operation of single-wafer silicon rod at least to form monocrystalline silicon cube, the discharge station be used for into
The blanking of row monocrystalline silicon cube operates, and silicon single crystal rod transfer device is then used to make single-wafer silicon rod in feeding station and evolution
It is transported between industry station and/or transports monocrystalline silicon cube between evolution operation station and discharge station.
As depicted in figs. 1 and 2, silicon single crystal rod transfer device disclosed in the present application includes: commutation carrier 11 and silicon rod clamper
13, wherein silicon rod clamper 13 is configured at commutation carrier 11, makees commutation movement by driving commutation carrier 11, may make configuration
Silicon rod clamper 13 is converted between feeding station and evolution operation station to transport the single-wafer silicon rod clamped and/or open
Conversion is between Fang Zuoye station and discharge station to transport the monocrystalline silicon cube clamped.
The carrier 11 that commutates is the agent set for other kinds component in silicon single crystal rod transfer device to be arranged, other kinds
Component mainly may include silicon rod clamper 13, but be not limited thereto, and other component also may be, for example, mechanical structure, electrical control
System and numerical control device etc..In the present embodiment, commutation carrier 11 may include pedestal 111, the upper frame opposite with pedestal 111
113 and the supporting framework between pedestal 111 and upper frame 113.In addition, the commutation another important function of carrier 11 is to lead to
Commutation movement is crossed to support the commutation of silicon rod clamper 13 to convert.The carrier 11 that commutates for example can make commutation fortune by a reversing mechanism
It is dynamic.In specific implementation, so that commutation carrier 11 realizes that the reversing mechanism of commutation movement may include rotation axis and rotation electricity
Machine (do not shown), and by installation foundation of the rotation axis axis connection under it, (installation foundation may be, for example, more to commutation carrier 11
The pedestal of linear cutting equipment or the workbench of multi-wire saw equipment), the connection in rotation axis for being connect with commutation carrier 11
End can be equipped with the installation edge that extends out, uniformly distributed have mounting hole, corresponding, pedestal in the carrier 11 that commutates along upper in the installation
111 central position also is provided with mounting hole, and during installation, pedestal 111 is docked with rotation axis in the carrier 11 that commutates, pedestal 111
On mounting hole be aligned with the mounting hole in rotation axis, later, by the additional locking elements such as such as bolt through alignment mounting hole after
It is locked, completes the assembly of commutation carrier 11.When implementing divertical motion, then start rotary electric machine, driving rotation axis rotation
Commutation movement is realized to drive commutation carrier 11 to rotate.Aforementioned driving rotation axis rotation, which may be designed as one-directional rotation, to be set
It is calculated as Double-directional rotary, the one-directional rotation may be, for example, to rotate clockwise or rotate counterclockwise, and the Double-directional rotary then can be such as
To rotate clockwise and rotating counterclockwise.In addition, the angle of driving rotation axis rotation can be according to the reality of silicon single crystal rod transfer device
Border construction (such as: according to commutation carrier 11 structure, be set to commutation carrier 11 on silicon rod clamper 13 and feeding station or
Setting positional relationship of discharge station etc.) and set.Furthermore disc structure, side can be used in the pedestal 111 in the carrier 11 that commutates
Shape disk or oval plate, central location and rotation axis connection, but the shape of pedestal 111 is not limited to this, in other embodiments
In, other shapes can also be used in pedestal 111.
It is provided at least one silicon rod clamper 13 on commutation carrier 11, for clamping corresponding workpiece.In the present embodiment
In, it is assumed that silicon rod clamper 13 is set to the silicon rod clamper area of commutation carrier 11, can be used to clamp single-wafer silicon rod and monocrystalline silicon side
Body.In this way, making commutation movement by driving commutation carrier 11, so that the silicon rod clamper 13 on commutation carrier 11 is in feeding station
Between evolution operation station convert with transport single-wafer silicon rod and between evolution operation station and discharge station convert with
Transport monocrystalline silicon cube.In practical applications, the rotational angle that commutation carrier 11 makees commutation movement is according to feeding station, opens
Depending on Fang Zuoye station and the mutual positional relationship of discharge station.Such as: in one case, feeding station is opened
Fang Zuoye station and discharge station sequence are arranged and they to be in 120 ° of distributions (referring to Fig. 3, for silicon single crystal rod between any two
Transfer device and the setting relation schematic diagram of feeding station, evolution operation station and discharge station in one case), it is false
Surely the silicon rod clamper 13 to commutate on carrier 11 corresponds to feeding station 200 in the initial state, then passes through driving commutation carrier
11, which rotate forward 120 °, to drive commutation by silicon rod clamper 13 by the conversion of feeding station 200 to evolution operation station 300
Carrier 11 rotates forward 120 ° and can convert silicon rod clamper 13 to blanking operation station 400 by evolution operation station 300, then
Driving commutation carrier 11 rotates forward 120 ° can be by silicon rod clamper 13 by the conversion of discharge station 400 to feeding station 200.?
Under another situation, feeding station, evolution operation station and discharge station sequentially setting and feeding station and evolution operation
Differing between station and differing 90 ° between 180 ° and evolution operation station and discharge station (is referring to fig. 4, silicon single crystal rod transhipment dress
Set and the setting relation schematic diagram of feeding station, evolution operation station and discharge station in another scenario), it is assumed that it changes
Silicon rod clamper 13 on carrier 11 corresponds to feeding station 200 in the initial state, then just by driving commutation carrier 11
Silicon rod clamper 13 can be converted to 180 ° of rotation by feeding station 200 to evolution operation station 300, and drive commutation carrier
11 rotate forward 90 ° can be by silicon rod clamper 13 by the conversion of evolution operation station 300 to blanking operation station 400, then drives and change
Rotating forward 90 ° to carrier 11 can be by silicon rod clamper 13 by the conversion of discharge station 400 to feeding station 200.In another feelings
Under shape, feeding station and discharge station are to can be described as loading and unloading station with going out at one, can be used as feeding and blanking,
This loading and unloading station 200 (400) is to be oppositely arranged with evolution operation station 300, can differ 180 ° between the two (referring to figure
5, it is silicon single crystal rod transfer device and feeding station, the setting of evolution operation station and discharge station in a yet another situation
Relation schematic diagram), it is assumed that the silicon rod clamper 13 on commutation carrier 11 corresponds to loading and unloading station 200 in the initial state
(400), then rotating forward 180 ° by driving commutation carrier 11 can be turned silicon rod clamper 13 by loading and unloading station 200 (400)
Evolution operation station 300 is shifted to, and driving commutation carrier 11 to rotate forward 180 ° can be by silicon rod clamper 13 by evolution operation work
It converts to loading and unloading operation station 200 (400) position 300.In above-mentioned each situation, rotates forward and refer specifically to according to upper
Expect station, evolution operation station, discharge station setting sequence rotation direction, the rotation opposite with rotating forward then claimed
For backwards rotation.Specifically, if feeding station, evolution operation station, discharge station are arranged according to clock-wise order,
It rotates forward to rotate clockwise, rotates counterclockwise then as backwards rotation；If feeding station, evolution operation station, discharge station
It is to be arranged according to sequence counter-clockwise, then rotates forward to rotate counterclockwise, rotates clockwise then as backwards rotation.But, no
By how to say, the setting relationship of feeding station, evolution operation station and discharge station is without specific limitation, their setting
Sequence and mutual setting angle can still make other variations, as long as ensure to generate between each station it is unnecessary
If interference, in this way, the rotation direction of the silicon rod clamper 13 on commutation carrier 11 and rotational angle can also be adaptively adjusted.
As previously mentioned, the application silicon single crystal rod transfer device is applied in silicon single crystal rod multi-wire saw equipment, the list
Crystalline silicon rod multi-wire saw equipment includes at least the evolution operation of silicon single crystal rod to cutting operation made by silicon single crystal rod, by opening
Fang Zuoye can will be formed as the monocrystalline silicon side that section is in class rectangle in the single-wafer silicon rod of cylinder morphology after evolution operation
Body.Therefore, the silicon rod clamper 13 in the application, which can be realized, had both been capable of clamping single-wafer silicon rod or had been capable of clamping monocrystalline silicon cube.
Below to silicon rod clamper 13 and being described in detail.
Silicon rod clamper 13 further comprises silicon rod clamper installation part 131 and at least two silicon rod clamping pieces 132, wherein extremely
Few two silicon rod clamping pieces 132 are spaced setting relative to silicon rod clamper installation part 131.In one embodiment, clamped
Single-wafer silicon rod is either still either being developed in evolution operation station or clamped monocrystalline silicon cube in feeding station
Operation station is still all to erect to place in discharge station, and therefore, at least two silicon rod clamping pieces 132 are relative to silicon rod clamper
Installation part 131 and be spaced setting in a vertical direction, that is, at least two silicon rod clamping pieces 132 be it is setting up and down.
In specific implementation, any one silicon rod clamping piece 132 is further included: clamp arm mounting base 133 and at least two folders
Arm 134, wherein clamp arm mounting base 133 is provided on silicon rod clamper installation part 131, and at least two clamp arm 134 are to be movably arranged at
In clamp arm mounting base 133.In an alternative embodiment, the clamp arm 134 for forming silicon rod clamping piece 132 is two, the two folders
Arm 134 is symmetrical set, and single clamp arm 134 is equipped with two clip tooths 130 of front and back layout, in this way, in two clamp arm 134
Clip tooth 130 (totally four) may make up one for clamping single-wafer silicon rod or the grasping part of monocrystalline silicon cube.Especially for list
For crystal silicon cube 102, four clip tooths 130 in two clamp arm 134 are to respectively correspond be held on monocrystalline silicon cube 102 four
A connection faceted pebble.Preferably, two clip tooths 130 are formed by two in the first line and the second clamp arm 134 in the first clamp arm 134
A clip tooth 130 is formed by the second line and is parallel to each other, and, (clip tooth of clip tooth 130 of inside is located in the first clamp arm 134
130 are close in commutation carrier 11) (clip tooth 130 is close in commutation carrier with the clip tooth 130 in the second clamp arm 134 positioned inside
11) it is formed by third line and the first clamp arm 134 that (clip tooth 130 is away from commutation carrier positioned at the clip tooth 130 in outside
11) the 4th company is formed by with the clip tooth 130 (clip tooth 130 is away from commutation carrier 11) for being located at outside in the second clamp arm 134
Line is parallel to each other.Further, to be capable of clamping single-wafer silicon rod and monocrystalline silicon cube, folder is in two clamp arm 134
When holding under the clamp position of single-wafer silicon rod or monocrystalline silicon cube, (clip tooth of clip tooth 130 of inside is located in the first clamp arm 134
130 are close in commutation carrier 11) (clip tooth 130 is away from commutation carrier with the clip tooth 130 in the second clamp arm 134 positioned at outside
11) it is formed by the 5th line and the first clamp arm 134 that (clip tooth 130 is away from commutation carrier positioned at the clip tooth 130 in outside
11) the 6th company is formed by with the clip tooth 130 (clip tooth 130 is close in commutation carrier 11) for being located inside in the second clamp arm 134
Line is mutually orthogonal.Extraly, the effect for the adjusting that centers can be more had both using silicon rod clamping piece 132.Under general scenario, silicon rod
Under clamping state, the center for the grasping part that two clamp arm 134 are constituted is and single-wafer clamp arm 134 in clamping piece 132
What the center of silicon rod or the center of monocrystalline silicon cube coincided.Therefore, it is placed when using 132 de-clamping of silicon rod clamping piece setting
Single-wafer silicon rod 101 or when monocrystalline silicon cube 102, two clamp arm 134 in silicon rod clamping piece 132 are shunk, by clamp arm 134
In clip tooth 130 be resisted against single-wafer silicon rod 101 or monocrystalline silicon cube 102.Simultaneously clamping single-wafer silicon rod is shunk in clamp arm 134
101 or monocrystalline silicon cube 102 during, single-wafer silicon rod 101 or monocrystalline silicon cube 102 are by two clamp arm, 134 institute of both sides
It pushes and mobile towards the middle section of grasping part, until single-wafer silicon rod 101 or monocrystalline silicon cube 102 are clamped by silicon rod
Two clamp arm 134 in part 132 clamp, at this point, the center of single-wafer silicon rod 101 or monocrystalline silicon cube 102 can be located at silicon
The center of the grasping part of stick clamping piece 132.Certainly, in the clip tooth 130 in clamp arm 134 can also additional buffer unit, use
In avoiding playing protection clamping single-wafer silicon rod 101 or monocrystalline silicon cube 102 during causes damage to its surface
The good result of single-wafer silicon rod 101 or monocrystalline silicon cube 102.For single-wafer silicon rod 101, Fig. 6 to Fig. 9 is seen,
In, Fig. 6 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single-wafer silicon rod in advance in the loosened condition, and Fig. 7 is
The top view of Fig. 6, Fig. 8 show for the solid that the application silicon single crystal rod transfer device clamps single-wafer silicon rod under clamping state
It is intended to, Fig. 9 is the top view of Fig. 8.For single-wafer silicon rod 102, Figure 10 is seen to Figure 13, wherein Figure 10 is the application list
Crystalline silicon rod transfer device clamps the stereoscopic schematic diagram of monocrystalline silicon cube in advance in the loosened condition, and Figure 11 is the top view of Figure 10, figure
12 clamp the stereoscopic schematic diagram of single machine silicon cube, Figure 13 Figure 12 for the application silicon single crystal rod transfer device under clamping state
Top view.
To enable at least two clamp arm 134 in silicon rod clamping piece 132 smooth and being held fixedly different sizes rule
The single-wafer silicon rod 101 or monocrystalline silicon cube 102 of lattice, silicon rod clamping piece 132 further include clamp arm driving mechanism, for driving extremely
Few two clamp arm 134 make opening and closing movement.
Figure 14 is please referred to, the rear pseudosection of silicon rod clamper 13 is schematically shown as.In specific implementation, as shown in figure 14, folder
Arm driving mechanism further comprises: folding gear 135, gear drive 136 and driving source 137.Opening and closing gear 135 is to set
It is placed in corresponding clamp arm 134.Gear drive 136 has the groove engaged with the folding gear 135 in clamp arm 134.Driving
Source is connected to gear drive 136, for driving gear drive 136 to move.On a kind of implementation, gear drive
136 be rack gear, which is located at the centre of two clamp arm 134, respectively for the clamp arm 134 in two sides in rack gear 136
It is respectively equipped on two lateral surfaces and engages corresponding groove with the folding gear 135 in two clamp arm 134, driving source 137 can example
For example driving motor or or cylinder.In this way, according to above-mentioned implementation, in practical applications, when need to realize 134 clamping of clamp arm
When, by as driving source driving motor or cylinder driving move up as the rack gear 136 of gear drive, by rack gear 136
The folding gear 135 of both sides engagement is driven to make outward turning movement, folding gear 135 drives the (folding of clamp arm 134 during revolving outside
Gear 135 can be connect with clamp arm 134 by shaft) make decentralization movement to be transferred to clamping state by releasing orientation；Conversely, when needing
When realizing that clamp arm 134 is unclamped, the rack gear 136 as gear drive is driven by the driving motor (or cylinder) as driving source
It moves down, drives the folding gear 135 of both sides engagement to make pronation by rack gear 136, folding gear 135 is threaded through journey inside
Middle drive clamp arm 134 (folding gear 135 can be connect with clamp arm 134 by the shaft) movement that raises up by clamping state to be transferred to
Releasing orientation.Certainly, it above are only an embodiment, be not intended to limit the working condition of silicon rod clamping piece 132, in fact, preceding
" upward ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change in stating is equal
There can be other changes according to the structure and function mode of clamp arm 134, the construction of clamp arm driving mechanism.
Just as it is known by a person skilled in the art that being by carrying out truncation work to long silicon rod originally for single-wafer silicon rod
Industry and formed, be bound to so that the size difference between single-wafer silicon rod is totally different, be for being put to setting in view of silicon rod clamper 13
The single-wafer silicon rod 101 set under state is clamped, therefore, for silicon rod clamper 13, the influence master of aforementioned dimensions difference
Just to show whether the length difference opposite sex of single-wafer silicon rod can correspond to clamping to the silicon rod clamping piece 132 in silicon rod clamper 13
To the secret worry of single-wafer silicon rod.
To reduce the risk even exempted above-mentioned silicon rod clamping piece 132 and may can not be clamped to single-wafer silicon rod, silicon
Rod clamp 13 has different design schemes.
In one implementation, silicon rod clamper 13 uses fixed clamping piece, that is, with vertical side on commutation carrier 11
Silicon rod clamping piece as much as possible is fixedly installed in formula, and, two neighboring silicon rod clamping piece 132 in these silicon rod clamping pieces 132
Spacing is as small as possible, in this way, using these silicon rod clamping pieces 132 can cover all kinds scale lengths single-wafer silicon rod.Example
Such as, if the length of single-wafer silicon rod is longer, clamping is participated in using silicon rod clamping piece 132 more on commutation carrier 11；If single
The length of wafer silicon rod is shorter, then clamping is participated in using silicon rod clamping piece 132 less on commutation carrier 11, for example, under being located at
Several silicon rod clamping pieces 132 of side participate in clamping, and be located above and be higher than those of single-wafer silicon rod silicon rod clamping
Part 132 is just not involved in.
In other implementations, silicon rod clamper 13 uses movable clamping piece, that is, on the mounting surface of commutation carrier 11
Silicon rod clamping piece 132 is arranged in activity in a manner of vertical, due to, silicon rod clamping piece 132 is movable design, therefore, silicon rod clamping
The quantity of part 132 can be greatly decreased, and generally two or three can meet.In this way, can be covered using movable clamping piece
The single-wafer silicon rod of all kinds of scale lengths.For example, moving the silicon rod clamping of activity setting if the length of single-wafer silicon rod is longer
Part 132 extends the clamping spacing of two silicon rod clamping pieces 132；If the length of single-wafer silicon rod is shorter, mobile activity setting
Silicon rod clamping piece 132, shorten the clamping spacing of two silicon rod clamping pieces 132.Movable clamping piece is used in silicon rod clamper 13
Implementation in, for convenient for movable clamping piece it is smooth smoothly it is up and down to adjust position, using silicon rod clamper 13
In silicon rod clamper installation part 131 play boot activity setting silicon rod clamping piece 132 guiding role, it is a kind of achievable
In mode, guide post structure is can be used in silicon rod clamper installation part 131, and clamp arm mounting base 133 then uses and is socketed on guide post structure
Movable block structure.It specifically, include erectting setting and parallel as the guide post structure of silicon rod clamper installation part 131
Two guide posts, as being then equipped in the movable block structure of clamp arm mounting base 133 and two in the guide post structure
A corresponding two perforations of guide post or two clips.According to perforation, the movable block is sheathed on the guide post and can be real
Now slid along the guide post.According to clip, the movable block is clipped on the guide post and can realize and leads along described
It is slid to column, wherein in practical applications, the clip can be clipped on an at least half part for the guide post.
For the silicon rod clamper 13 of movable silicon rod clamping piece, different change case is also had.With two silicon rod clamping pieces
For 132, in an alternative embodiment, a silicon rod clamping piece 132 in two silicon rod clamping pieces 132 is movable sets
Counting another silicon rod clamping piece 132 then is fixed design, in this way, being all by the movable design of movement in practical applications
That silicon rod clamping piece 132 adjust the clamping spacing between the silicon rod clamping piece 132 of fixed design.It can from above
To know, single-wafer silicon rod 101 is to erect to place, therefore, and no matter the scale lengths of single-wafer silicon rod, the bottom of single-wafer silicon rod 101
It can be always relatively easy to determination, it is thus preferable to, that silicon rod that can will be located above in two silicon rod clamping pieces 132
Clamping piece 132 be designed as it is movable, in this way, need to only adjust top silicon rod clamping piece 132 position.
Silicon rod clamping piece 132 for the movement for realizing silicon rod clamping piece 132, the movable design can be equipped with guiding driving
Mechanism.The silicon rod clamping piece 132 of movable design can be driven along on silicon rod clamper installation part 131 using guiding driving mechanism
Lower movement.In one implementation, guiding driving mechanism can for example, guiding leading screw 138 and guide motor 139,
In, guiding leading screw 138 is to erect setting, and one end of guiding leading screw 138 is connected to clamp arm mounting base 133, guiding leading screw 138
The other end is then connected to guide motor 139, and guide motor 139 may be provided at the top of commutation carrier 11, but not as
Limit, guide motor 139 may also be arranged on the bottom of commutation carrier 11.Guiding leading screw 138 have high-precision, invertibity and efficiently
The characteristics of rate, in this way, driving guide wire by guide motor 139 when needing the position of the silicon rod clamping piece 132 above adjustment
Thick stick 138 rotate, guiding leading screw 138 driven in rotary course above silicon rod clamping piece 132 along silicon rod clamper installation part
131 move up and down.Such as: guide motor 139 drives guiding leading screw 138 to rotate clockwise, then drives the silicon rod clamping piece of top
132 move upwards along silicon rod clamper installation part 131 with the silicon rod clamping piece 132 far from lower section, increase by two silicon rod clamping pieces
Clamping spacing between 132；Guide motor 139 drives guiding leading screw 138 to rotate counterclockwise, then drives the silicon rod clamping of top
Part 132 is moved downward along silicon rod clamper installation part 131 to reduce two silicon rod clampings close to the silicon rod clamping piece 132 of lower section
Clamping spacing between part 132.In this way, can adjust two silicon rod folders by the silicon rod clamping piece 132 for controlling movable design
Clamping spacing between gripping member 132, so that the single-wafer silicon rod 101 to different size length is effectively clamped.
In another alternative embodiment, two silicon rod clamping pieces 132 are movable design, in this way, in practical application
In, their mutual clamping spacing can be adjusted by the movement of two silicon rod clamping pieces 132 of movable design.By
In silicon rod clamping piece 132 be movable design, then, at least one silicon rod clamping piece 132 in two silicon rod clamping pieces 132
Guiding driving mechanism need to be set, for driving two silicon rod clamping pieces 132 to move along silicon rod clamper installation part 131.Relative to
Former alternative embodiment, in this alternative embodiment, since two silicon rod clamping pieces 132 in silicon rod clamper 13 are work
Dynamic formula, then will have setting guiding driving machine on some silicon rod clamping piece 132 in two silicon rod clamping pieces 132
Structure is still respectively provided with the situation of guiding driving mechanism on two silicon rod clamping pieces 132.
Now by taking the silicon rod clamping piece 132 of the top in two silicon rod clamping pieces 132 is provided with guiding driving mechanism as an example,
Under this situation, it is between the clamp arm mounting base 133 and silicon rod clamper installation part 131 in one, two silicon rod clamping pieces 132
It is flexibly connected, that is, clamp arm mounting base 133 and clamp arm 134 thereon are pacified along silicon rod clamper in any one silicon rod clamping piece 132
Piece installing 131 and it is up and down, in addition, setting guiding driving mechanism include guiding leading screw 138 and guide motor 139, wherein
One end of guiding leading screw 138 is connected in the clamp arm mounting base 133 in the silicon rod clamping piece 132 of top, guiding leading screw 138
The other end is then connected to guide motor, and guide motor 139 may be provided at the top of commutation carrier 11.In this way, on needing to adjust
When the position of the silicon rod clamping piece 132 of side, guiding leading screw 138 is driven to rotate by guide motor 139, guiding leading screw 138 rotates through
Silicon rod clamping piece 132 is driven to move up and down along silicon rod clamper installation part 131 in journey, such as: the driving guiding of guide motor 139
Lead screw 138 rotates clockwise, then the silicon rod clamping piece 132 of top is driven to move upwards along silicon rod clamper installation part 131 with remote
Silicon rod clamping piece 132 from lower section increases the clamping spacing between two silicon rod clamping pieces 132；The driving of guide motor 139 is led
To 138 counter-rotating of lead screw, then the silicon rod clamping piece 132 of top is driven to move downward along silicon rod clamper installation part 131 to lean on
The silicon rod clamping piece 132 of nearly lower section, reduces the clamping spacing between two silicon rod clamping pieces 132.In this way, passing through control activity
The silicon rod clamping piece 132 of formula design, can adjust the clamping spacing between two silicon rod clamping pieces 132, thus long to different size
The single-wafer silicon rod 101 of degree is effectively clamped.
In fact, in the case of two silicon rod clamping pieces 132 are movable design, not only using guiding driving mechanism
Clamping spacing between adjustable two silicon rod clamping pieces 132 carries out effectively come the single-wafer silicon rod 101 to different size length
Except clamping, the purpose of lifting can be also realized to the single-wafer silicon rod 101 of clamping, when two silicon rod clamping pieces 132 effectively clamp
Firmly after single-wafer silicon rod 101, by driving moving up and down for silicon rod clamping piece 132 to go up and down single-wafer silicon rod 101.Specifically
Ground, still by taking the silicon rod clamping piece 132 of top is provided with guiding driving mechanism as an example, firstly, the silicon rod clamping piece 132 of top is logical
Guiding driving mechanism is crossed to move up and down and had adjusted between lower section silicon rod clamping piece 132 along silicon rod clamper installation part 131
Clamp spacing；Then, corresponding two clamp arm 134 are driven to make using the clamp arm driving mechanism in each silicon rod clamping piece 132
Clamping movement is with smooth and be held fixedly single-wafer silicon rod 101；Then, the silicon rod clamping piece 132 of top passes through guiding again
Driving mechanism drives and moves upwards along silicon rod clamper installation part 131, at this point, since frictional force acts on, the monocrystalline clamped
Circle silicon rod 101 and the silicon rod clamping piece 132 of lower section move upwards therewith together, wherein the single-wafer silicon rod 101 clamped to
What upper movement utilized is the frictional force effect between the silicon rod clamping piece 132 and single-wafer silicon rod 101 of top, silicon rod clamping piece
132 move upwards, and what is utilized is the frictional force effect between single-wafer silicon rod 101 and the silicon rod clamping piece 132 of lower section, thus
Realize the effect of lifting single-wafer silicon rod 101.The silicon rod clamping piece 132 of top drives single under the driving of guiding driving mechanism
It is also identical process that wafer silicon rod 101 and the silicon rod clamping piece 132 of lower section, which move downward, to realize landing single-wafer silicon
The effect of stick 101, details are not described herein.
It should be noted that in other change case, the silicon rod clamping piece of lower section e.g. in two silicon rod clamping pieces 132
Guiding driving mechanism, structure, set-up mode and the driving working method of guiding driving mechanism and aforementioned top are set on 132
Silicon rod clamping piece 132 guiding driving mechanism it is similar, such as by lower section silicon rod clamping piece 132 in guiding driving mechanism
Driving under move up and down and adjust the clamping between top silicon rod clamping piece 132 along silicon rod clamper installation part 131 between
Away from, and by the silicon rod clamping piece 132 of lower section single-wafer silicon rod 101 and top are driven under the driving of guiding driving mechanism
Silicon rod clamping piece 132 modes such as moves up and down along silicon rod clamper installation part 131 together.Such as two silicon rod clamping pieces 132 again
It is provided with guiding driving mechanism, then the set-up mode of guiding driving mechanism and driving working method and two silicon rod clampings
The motion mode of part 132 is self-evident, and details are not described herein.
It moves up and down in the silicon rod clamping piece 132 for movable setting along silicon rod clamper installation part 131 to adapt to
In the situation that the single-wafer silicon rod of different size length is clamped, in addition to silicon rod clamping piece 132 is set using movable structure
Meter, silicon rod clamping piece 132 need to be arranged except guiding driving mechanism etc., certainly will also need to know the single-wafer for currently needing to clamp
The scale lengths of silicon rod.(do not scheming in view of this, the silicon single crystal rod transfer device in the application may also include height testing instrument
Shown in formula), for erectting the height for the single-wafer silicon rod placed, thus the silicon rod clamping piece as movable setting
132 move up or move down along silicon rod clamper installation part 131 and the foundation of moving distance subsequent.
Correspondingly, in the present embodiment, single-wafer silicon rod 101 is formed after evolution operation and other related operations
Monocrystalline silicon cube 102, during being formed as monocrystalline silicon cube 102 by single-wafer silicon rod 101, generally, length is constant
, therefore, when being located at the monocrystalline silicon cube 102 at evolution operation station using 13 de-clamping of silicon rod clamper, silicon rod clamper 13
The silicon rod clamping piece 132 of upper movable setting can no longer need to adjust.
Silicon single crystal rod transfer device disclosed in the present application, the silicon rod clamper including commutation carrier and on commutation carrier,
Silicon rod clamper can be used to clamp single-wafer silicon rod and monocrystalline silicon cube, make commutation movement by driving commutation carrier, may make and change
Silicon rod clamper on carrier is converted between feeding station and evolution operation station to turn single-wafer silicon rod by feeding station
It is transported to evolution operation station and/or converts between evolution operation station and discharge station to make monocrystalline silicon cube by evolution
Industry station is transported to discharge station, so, it can be achieved that workpiece quick and easily transporting, improves the transfer efficiency of workpiece,
In addition, the silicon rod clamper on commutation carrier has the dual clamping function of single-wafer silicon rod and monocrystalline silicon cube, do not increasing knot
De-chucking can be saved in the case of structure complexity, increase the design space of other structures and reduce cost.
The application separately discloses a kind of silicon single crystal rod conveyer method, for being transported through to the silicon single crystal rod for implementing operation.
In one embodiment, the silicon single crystal rod conveyer method is applied in a silicon single crystal rod transfer device, the silicon single crystal rod
Transfer device includes commutation carrier and silicon rod clamper.
Refering to fig. 15, it is the flow diagram of the application silicon single crystal rod conveyer method in one embodiment.Such as Figure 15 institute
Show, the application silicon single crystal rod conveyer method the following steps are included:
Step S101 clamps the single-wafer silicon positioned at feeding station using the silicon rod clamper in silicon single crystal rod transfer device
Stick.In step s101, firstly, single-wafer silicon rod is placed on feeding station to erect, and it must ensure that silicon single crystal rod turns simultaneously
Silicon rod clamper in shipping unit corresponds to feeding station, wherein single-wafer silicon rod can be mechanical by manual handling or manipulator
Crawl etc. modes and erect and be placed in feeding station, the silicon rod clamper in silicon single crystal rod transfer device then can pass through driving commutation
Carrier rotates to adjust position to realize and correspond to feeding station.Then, when necessary, placed according to the setting of single-wafer silicon rod
Height under state drives the moving up and down on commutation carrier of corresponding silicon rod clamping piece in silicon rod clamper each to adjust
Silicon rod clamping piece is formed by clamping spacing.Then, the folder in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven
Arm makees clamping movement, so that these silicon rod clamping pieces can clamp the single-wafer silicon rod on feeding station, wherein described
Clip tooth in silicon rod clamping piece in clamp arm is held on the cylinder of single-wafer silicon rod.
Step S103, driving commutation carrier make commutation movement so that silicon rod clamper with the single-wafer silicon rod clamped by
Feeding station is converted to evolution operation station.In step s 103, firstly, before driving commutation carrier makees commutation movement, compared with
Goodly, the single-wafer silicon rod clamped by silicon rod clamper need to be detached from feeding station, it is as follows realizes that the mode of disengaging can be taken
Any or their combination: one, in the case of ensuring that silicon rod clamper 13 clamps single-wafer silicon rod, utilize silicon rod
Fixture is moved up along commutation carrier to be lifted single-wafer silicon rod；Two, driving commutation carrier is moved up with respect to installation foundation
To be lifted single-wafer silicon rod；Three, it drives and declines on feeding station or feeding station for carrying the plummer work of single-wafer silicon rod
It is mobile, disengaging configuration is dropped to by original carrying position.Then, driving commutation carrier is rotated relative to installation foundation, so that changing
Carrier on carrier corresponds to evolution operation station by commutation movement.
Step S105 discharges silicon rod clamper, the single-wafer silicon rod clamped is placed in evolution operation station.In step
In S105, in the case of ensuring that the silicon rod clamper in single-wafer silicon rod transfer device corresponds to evolution operation station, also wrap
One is included single-wafer silicon rod is detached from single-wafer silicon rod dropping place in feeding station contrary in evolution work with step S103
The operating procedure of industry station specifically realizes that the mode of dropping place can take following any or their combination: one,
In the case of ensuring that silicon rod clamper clamps single-wafer silicon rod, moved down using silicon rod clamper along commutation carrier to land
Single-wafer silicon rod；Two, driving commutation carrier is moved down with respect to installation foundation with the single-wafer silicon rod that lands；Three, driving evolution is made
Make to rise movement for carrying the plummer of single-wafer silicon rod on industry station or evolution operation station, by original disengaging configuration
Rise to carrying position.Then, the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven to make release dynamic
Make, so that these silicon rod clamping pieces unclamp single-wafer silicon rod, so that the single-wafer silicon rod dropping place after unclamping is in evolution operation work
On position.
Subsequent, just the single-wafer silicon rod implementation on evolution operation station is at least wrapped by silicon single crystal rod multi-wire saw equipment
The processing operation of evolution operation is included, so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.
Step S107 clamps the monocrystalline silicon cube positioned at evolution operation station using silicon rod clamper.In step s 107,
Firstly, monocrystalline silicon cube is placed on evolution operation station to erect, and it must ensure the silicon in silicon single crystal rod transfer device simultaneously
Rod clamp corresponds to evolution operation station.Then, when necessary, according to monocrystalline silicon cube erect placement status under height,
Corresponding silicon rod clamping piece moving up and down to adjust each silicon rod clamping piece institute shape on commutation carrier in driving silicon rod clamper
At clamping spacing.Then, the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven to make clamping movement,
So that these silicon rod clamping pieces can clamp the monocrystalline silicon cube on evolution operation station, wherein the silicon rod clamping piece
Clip tooth in middle clamp arm is held on the connection faceted pebble of monocrystalline silicon cube.
Step S109, driving commutation carrier make commutation movement so that silicon rod clamper with the monocrystalline silicon cube clamped by
Evolution operation station is converted to discharge station.In step S109, firstly, before driving commutation carrier makees commutation movement, compared with
Goodly, the monocrystalline silicon cube clamped by silicon rod clamper need to be detached from evolution operation station, realizes that the mode of disengaging can be taken
Following any or their combination: one, in the case of ensuring to clamp monocrystalline silicon cube, utilize silicon rod clamper edge
Commutation carrier move up to be lifted monocrystalline silicon cube；Two, driving commutation carrier is moved up with respect to installation foundation to be lifted
Monocrystalline silicon cube；Three, it drives under the plummer work on evolution operation station or evolution operation station for carrying monocrystalline silicon cube
Drop movement, drops to disengaging configuration by original carrying position.Then, driving commutation carrier is rotated relative to installation foundation, so that
The silicon rod clamper to commutate on carrier corresponds to discharge station by commutation movement.
Step S111 discharges silicon rod clamper, the monocrystalline silicon cube clamped is placed in discharge station and carries out blanking.?
In step S111, in the case of ensuring that the silicon rod clamper in silicon single crystal rod transfer device corresponds to discharge station, further include
There is one monocrystalline silicon cube is detached from monocrystalline silicon cube dropping place in evolution operation station contrary in blanking with step S109
The operating procedure of station specifically realizes that the mode of dropping place can take following any or their combination: one, true
In the case of guarantor clamps monocrystalline silicon cube, moved down using silicon rod clamper along commutation carrier with monocrystalline silicon cube of landing；
Two, driving commutation carrier is moved down with respect to installation foundation with monocrystalline silicon cube of landing；Three, drive discharge station or blankers
Make to rise movement for carrying the plummer of monocrystalline silicon cube on position, carrying position is risen to by original disengaging configuration.It connects
, drive the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper to make release movement, so that these silicon rods press from both sides
Gripping member unclamps monocrystalline silicon cube, so that the monocrystalline silicon cube dropping place after unclamping is in discharge station.
Silicon single crystal rod conveyer method disclosed in the present application will be located at the single-wafer silicon rod of feeding station first with silicon rod clamper
It clamps and single-wafer silicon rod is transported to by feeding station by evolution operation station by commutation movement, it is subsequent, recycle silicon rod
The monocrystalline silicon cube for being located at evolution operation station is clamped and is made monocrystalline silicon cube by evolution by commutation movement by fixture
Industry station is transported to discharge station, and compared with the existing technology, the application silicon single crystal rod conveyer method improves the effect of workpiece transhipment
Rate reduces costs and avoids workpiece damage.
Below in conjunction with Figure 16 to Figure 23, silicon single crystal rod is executed to the application silicon single crystal rod transfer device in some instances and is turned
Fortune is described in detail.In the following example, first make following setting: it is multi-thread that silicon single crystal rod transfer device is applied to silicon single crystal rod
In cutting equipment, the silicon single crystal rod multi-wire saw equipment silicon single crystal rod can be implemented evolution and other operations (such as it is round as a ball and
Flour milling etc.), the silicon single crystal rod multi-wire saw equipment has feeding station, evolution operation station and discharge station, monocrystalline
Silicon rod transfer device include commutate carrier and set on commutation carrier on silicon rod clamper, and, in silicon rod clamper include at least
Two silicon rod clamping pieces, at least two silicon rod clamping pieces are movable design, and the silicon rod clamping piece being located above more configures
There is guiding driving mechanism.For simplification description, in this example, feeding station and discharge station are to go out at one (to be combined into one) together
And can be described as loading and unloading station, in this way, the silicon single crystal rod multi-wire saw equipment just has loading and unloading station and evolution operation
Station, and, loading and unloading station differs 180 ° with evolution operation station.
Step 1, the silicon rod clamper in silicon single crystal rod transfer device is corresponded to the single-wafer silicon rod on loading and unloading station.?
In the step 1, silicon rod clamper in silicon single crystal rod transfer device can then be adjusted by driving commutation carrier 11 rotation position with
It realizes and corresponds to loading and unloading station, at this point, the clamp arm 134 in two silicon rod clamping pieces 132 in silicon rod clamper is to unclamp shape
The setting of single-wafer silicon rod 101 is placed on loading and unloading station by state.The shape of silicon single crystal rod transfer device after implementation aforesaid operations
For details, reference can be made to Figure 16, Figure 16 to correspond to the monocrystalline on loading and unloading station for the silicon rod clamper in silicon single crystal rod transfer device for state
The status diagram of circle silicon rod.
Step 2, the single-wafer silicon positioned at loading and unloading station is clamped using the silicon rod clamper in silicon single crystal rod transfer device
Stick.In the step 2, when necessary, the height of the single-wafer silicon rod 101 on loading and unloading station is located at using height testing instrument detection
Degree drives the opposite commutation carrier 11 of the silicon rod clamping piece 132 being located above in silicon rod clamper to make according to the elevation information measured
It moves up or moves down, adjust the clamping spacing between two silicon rod clamping pieces 132.Then, it drives in silicon rod clamper
Clamp arm 134 in two silicon rod clamping pieces 132 makees clamping movement, and the single-wafer silicon rod 101 on loading and unloading station is clamped
Firmly, wherein the clip tooth in the silicon rod clamping piece in clamp arm is held on the cylinder of single-wafer silicon rod.It is single after implementation aforesaid operations
The state of crystalline silicon rod transfer device is that the silicon rod clamper in silicon single crystal rod transfer device clamps for details, reference can be made to Figure 17, Figure 17
Positioned at the status diagram of the single-wafer silicon rod of loading and unloading station.
Step 3, driving commutation carrier makees commutation movement, so that silicon rod clamper is with the single-wafer silicon rod clamped by upper and lower
Material station is converted to evolution operation station.In step 3, firstly, before driving commutation carrier 11 makees commutation movement, preferably
The single-wafer silicon rod 101 clamped by the silicon rod clamping piece 132 in silicon rod clamper need to be detached from loading and unloading station by ground.It connects
, driving commutation carrier 11 rotates 180 °, so that the single-wafer silicon rod 101 handled folded by the carrier on commutation carrier 11 passes through
Commutation moves and corresponds to evolution operation station.Implement aforesaid operations after silicon single crystal rod transfer device state for details, reference can be made to
Figure 18, Figure 18 be commutation carrier make commutation movement after silicon rod clamper with the single-wafer silicon rod clamped correspond to evolution operation
The status diagram of station.
Step 4, silicon rod clamper is discharged, the single-wafer silicon rod clamped is placed in evolution operation station.In step 4,
Ensure that the silicon rod clamper in silicon single crystal rod transfer device corresponds to evolution operation station in the case of, will first it clamp
Single-wafer silicon rod dropping place is on evolution operation station.Then, the clamp arm in silicon rod clamper in two silicon rod clamping pieces 132 is driven
134 make release movement, so that the setting of single-wafer silicon rod 101 after unclamping is placed on evolution operation station.Implement aforesaid operations
The state of silicon single crystal rod transfer device is that single-wafer silicon rod is placed in after discharging silicon rod clamper for details, reference can be made to Figure 19, Figure 19 afterwards
The status diagram of evolution operation station.
Subsequent, just the single-wafer silicon rod implementation on evolution operation station is at least wrapped by silicon single crystal rod multi-wire saw equipment
Each road processing operation of evolution operation is included, so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.Its
In, for the evolution operation of single-wafer silicon rod, it is special that the specific embodiment of the evolution operation then can refer to CN105818285A etc.
Sharp open source literature, details are not described herein.In addition, may also include corase grinding, round as a ball, fine grinding or polishing other than evolution operation
Operation is processed Deng other.
Step 5, the monocrystalline silicon cube positioned at the evolution operation station is clamped using silicon rod clamper.In step 6, must
When wanting, the height of the monocrystalline silicon cube 102 on evolution operation station is located at using height testing instrument detection, according to the height measured
Information is spent, drives in silicon rod clamper the opposite commutation carrier 11 of the silicon rod clamping piece 132 that is located above to move up or to moving down
It is dynamic, adjust the clamping spacing between two silicon rod clamping pieces 132.Then, two silicon rod clamping pieces in silicon rod clamper are driven
Clamp arm 134 in 132 makees clamping movement, and the monocrystalline silicon cube 102 on evolution operation station is clamped, wherein silicon rod folder
Clip tooth 130 in gripping member 132 in clamp arm 134 is held on the connection faceted pebble of monocrystalline silicon cube 102.Monocrystalline after implementation aforesaid operations
The state of silicon rod transfer device is the silicon rod clamper pair in silicon single crystal rod transfer device for details, reference can be made to Figure 20 and Figure 21, Figure 20
It should be the silicon rod folder in silicon single crystal rod transfer device in the status diagram of the monocrystalline silicon cube on evolution operation station, Figure 21
Tool clamps the status diagram of the monocrystalline silicon cube positioned at evolution operation station.
Step 6, driving commutation carrier makees commutation movement, so that silicon rod clamper is with the monocrystal rod cube clamped by evolution
Operation station converts supreme discharge station.In step 6, firstly, before driving commutation carrier 11 makees commutation movement, preferably
The monocrystalline silicon cube 102 clamped by the silicon rod clamping piece 132 in silicon rod clamper need to be detached from evolution operation station by ground.It connects
, driving commutation carrier 11 rotates 180 °, so that the monocrystalline silicon cube 102 handled folded by the silicon rod clamper on commutation carrier 11
Correspond to loading and unloading station by commutation movement.The state of silicon single crystal rod transfer device can specifically join after implementation aforesaid operations
See Figure 22, Figure 22 be commutation carrier make commutation movement after silicon rod clamper with the monocrystal rod cube clamped correspond to loading and unloading
The status diagram of station.
Step 7, silicon rod clamper is discharged, the monocrystalline silicon cube clamped is placed in loading and unloading station and and carries out blanking.
In step 7, in the case of ensuring that the silicon rod clamper in silicon single crystal rod transfer device corresponds to loading and unloading station, first will
102 dropping place of monocrystalline silicon cube that silicon rod clamper clamps is on loading and unloading station.Then, two silicon rods in silicon rod clamper are driven
Clamp arm 134 in clamping piece 132 makees release movement, so that the setting of monocrystalline silicon cube 102 after unclamping is placed in loading and unloading station
On.The state of silicon single crystal rod transfer device is list after discharging silicon rod clamper for details, reference can be made to Figure 23, Figure 23 after implementation aforesaid operations
Crystal silicon cube is placed in the status diagram of loading and unloading station.
The principles and effects of the application are only illustrated in above-described embodiment, not for limitation the application.It is any ripe
Know the personage of this technology all can without prejudice to spirit herein and under the scope of, carry out modifications and changes to above-described embodiment.Cause
This, those of ordinary skill in the art is without departing from spirit disclosed herein and institute under technical idea such as
All equivalent modifications or change completed, should be covered by claims hereof.
Claims (10)
1. a kind of silicon single crystal rod transfer device is applied in silicon single crystal rod multi-wire saw equipment, the silicon single crystal rod multi-wire saw
Equipment has feeding station, evolution operation station and discharge station, which is characterized in that the silicon single crystal rod transfer device packet
It includes:
Commutate carrier；
Silicon rod clamper, set on the silicon rod clamper area of the commutation carrier；
Wherein, the commutation carrier makees commutation movement by driving, and the silicon rod clamper on the commutation carrier will in commutation movement
Single-wafer silicon rod is transported to evolution operation station by feeding station and/or is transported to down monocrystalline silicon cube by evolution operation station
Expect station.
2. silicon single crystal rod transfer device according to claim 1, which is characterized in that the silicon rod clamper includes:
Silicon rod clamper installation part is set on the commutation carrier；And
At least two silicon rod clamping pieces are arranged along the silicon rod clamper installation part spacing.
3. silicon single crystal rod transfer device according to claim 2, which is characterized in that the silicon rod clamping piece includes:
Clamp arm mounting base is set on the fixture installation part；
Two clamp arm are movably arranged in the clamp arm mounting base；The clamp arm is equipped with two clip tooths being oppositely arranged；And
Clamp arm driving mechanism, for driving described two clamp arm to make opening and closing movement；
Wherein, clip tooth clamping of described two clamp arm under the clamp arm driving mechanism driving when clamping, in described two clamp arm
In the cylinder of single-wafer silicon rod or the connection faceted pebble of monocrystalline silicon cube.
4. silicon single crystal rod transfer device according to claim 3, which is characterized in that the clamp arm driving mechanism includes:
Gear is opened and closed, is set in the clamp arm；
Gear drive has the groove engaged with the folding gear in the clamp arm；And
Driving source is connected to the gear drive, for driving the gear drive to move.
5. silicon single crystal rod transfer device according to claim 4, which is characterized in that
The gear drive is rack gear, and the opposite sides of the rack gear is respectively equipped with and the folding at least two clamp arm
Gear engages corresponding groove；And
The driving source is the cylinder or driving motor for driving the rack movement.
6. silicon single crystal rod transfer device according to claim 4, which is characterized in that
The gear drive is driving gear structure；And
The driving source is the driving motor for driving the driving gear structure to operate.
7. silicon single crystal rod transfer device according to claim 2, which is characterized in that in the silicon rod clamper, at least two
At least one silicon rod clamping piece in a silicon rod clamping piece is equipped with guiding driving mechanism, for driving it along the silicon rod clamper
Installation part movement, to adjust the spacing of at least two silicon rods clamping piece.
8. silicon single crystal rod transfer device according to claim 7, which is characterized in that the guiding driving mechanism includes: to lead
To lead screw and guide motor, wherein one end of the guiding leading screw is connected to the silicon rod clamping piece, the guiding leading screw it is another
One end is connected to the guide motor.
9. the silicon single crystal rod transfer device according to claim 2 or 7, which is characterized in that further include height testing instrument, be set to
On the commutation carrier, for detecting the height of the single-wafer silicon rod.
10. a kind of silicon single crystal rod conveyer method is applied to silicon single crystal rod as claimed in any one of claims 1-9 wherein transhipment dress
In setting, which is characterized in that the silicon single crystal rod conveyer method includes:
The single-wafer silicon rod positioned at feeding station is clamped using the silicon rod clamper in silicon single crystal rod transfer device；
Driving commutation carrier makees commutation movement, so that the silicon rod clamper is turned with the single-wafer silicon rod clamped by feeding station
Shift to evolution operation station；
The silicon rod clamper is discharged, the single-wafer silicon rod clamped is placed in evolution operation station, for making to evolution
Single-wafer silicon rod on industry station carries out evolution operation to form monocrystalline silicon cube；
The monocrystalline silicon cube positioned at the evolution operation station is clamped using the silicon rod clamper；
The commutation carrier is driven to make commutation movement, so that the silicon rod clamper is made with the monocrystalline silicon cube clamped by evolution
Industry station is converted to discharge station；And
The silicon rod clamper is discharged, the monocrystalline silicon cube clamped is placed in discharge station and carries out blanking.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710396229.5A CN108943458A (en) | 2017-05-27 | 2017-05-27 | Silicon single crystal rod transfer device and silicon single crystal rod conveyer method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710396229.5A CN108943458A (en) | 2017-05-27 | 2017-05-27 | Silicon single crystal rod transfer device and silicon single crystal rod conveyer method |
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| CN110605282A (en) * | 2019-08-20 | 2019-12-24 | 深圳市清雅科技有限公司 | Automatic cleaning system for bent pipe |
| WO2021027326A1 (en) * | 2019-08-14 | 2021-02-18 | 天通日进精密技术有限公司 | Silicon rod cut-off equipment |
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Address after: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Address before: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant before: ZHEJIANG JIYING PRECISION MACHINERY Co.,Ltd. |