CN207388034U - Silicon single crystal rod transfer device - Google Patents
Silicon single crystal rod transfer device Download PDFInfo
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- CN207388034U CN207388034U CN201720609794.0U CN201720609794U CN207388034U CN 207388034 U CN207388034 U CN 207388034U CN 201720609794 U CN201720609794 U CN 201720609794U CN 207388034 U CN207388034 U CN 207388034U
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Abstract
This application discloses a kind of silicon single crystal rod transfer device, including：Commutate carrier；Silicon rod clamper, arranged on the silicon rod clamper area of the commutation carrier；Wherein, the commutation carrier is made to commutate and be moved by driving, and single-wafer silicon rod is transported to evolution operation station by feeding station in commutation moves and/or monocrystalline silicon cube is transported to discharge station by evolution operation station by the silicon rod clamper on the commutation carrier.So, the quick of workpiece can be achieved and easily transport, improve the transfer efficiency of workpiece, in addition, the silicon rod clamper to commutate on carrier has single-wafer silicon rod and the dual clamping function of monocrystalline silicon cube, de-chucking can be saved in the case of structure complexity is not increased, increase the design space of other structures and reduces cost.
Description
Technical field
This application involves wire cutting technology field, more particularly to a kind of silicon single crystal rod transfer device.
Background technology
When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics
Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure that restricts follow-up finished product, thus
It is also higher and higher to its job requirements.At present, multi-wire cutting technology is due to production efficiency is high, operating cost is low, operation is smart
The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.
Multi-wire cutting technology is relatively advanced semiconductor workpiece cutting technique in the world at present, its principle is to pass through height
The semiconductor workpiece that the fast diamond wire moved treats operation carries out cutting and forms target product.
By taking crystalline silicon rod is cut as an example, usually, flow chart substantially includes：First using shear to long silicon originally
Stick block operation to form the short silicon rod of multistage, after the completion of blocking, and the short silicon rod after blocking is opened using excavation machine
Crystal silicon cube is formed after Fang Zuoye, slicer is subsequently reused and section operation is carried out to crystal silicon cube, then obtain silicon chip.But,
Under normal circumstances, in the related art, the operation needed for each procedures is independent arrangement, and implement is dispersed in different
The different production areas of production unit or workshop or workshop, perform the conversion of the workpiece of different procedures need into
Row carries allotment, in this way, process is numerous and diverse, inefficiency needs more manpowers or transloading equipment, and security risk is big, in addition, each
Flowing link between the implement of process is more, and the risk of workpiece damage is improved during workpiece transfer, is also easy to produce non-
It is unqualified caused by the factor of production, reduce product qualification rate and existing processing method caused by unreasonable loss, be
The major improvement problem that each company faces.
Utility model content
Disadvantages in view of the above, the purpose of the application are to disclose a kind of silicon single crystal rod transfer device, be used for
Solve the problems such as silicon single crystal rod transfer efficiency present in correlation technique is low.
To achieve the above object and other purposes, the application disclose a kind of silicon single crystal rod transfer device on the one hand, application
In silicon single crystal rod multi-wire saw equipment, the silicon single crystal rod multi-wire saw equipment have feeding station, evolution operation station, with
And discharge station, silicon single crystal rod transfer device include：Commutate carrier；Silicon rod clamper, arranged on the silicon rod clamper of the commutation carrier
Area；The commutation carrier is made commutation by driving and is moved, and the silicon rod clamper on the commutation carrier is in commutation moves by single-wafer
Silicon rod is transported to evolution operation station by feeding station and/or monocrystalline silicon cube is transported to blankers by evolution operation station
Position.
Silicon single crystal rod transfer device disclosed in the present application, the silicon rod clamper including commutation carrier and on commutation carrier,
Silicon rod clamper can be used to clamp single-wafer silicon rod and monocrystalline silicon cube, by the way that commutation carrier is driven to make commutation movement, may be such that and change
Silicon rod clamper on carrier is converted to turn single-wafer silicon rod by feeding station between feeding station and evolution operation station
Be transported to evolution operation station and/or between evolution operation station and discharge station convert with by monocrystalline silicon cube by evolution operation
Station is transported to discharge station, so, it can be achieved that workpiece quick and easily transporting, improves the transfer efficiency of workpiece, separately
Outside, the silicon rod clamper to commutate on carrier has single-wafer silicon rod and the dual clamping function of monocrystalline silicon cube, is not increasing structure
De-chucking can be saved in the case of complexity, increase the design space of other structures and reduces cost.
In some embodiments, the silicon rod clamper includes：Silicon rod clamper installed part, on the commutation carrier；
At least two silicon rod clamping pieces are set along the silicon rod clamper installed part spacing.
In some embodiments, the silicon rod clamping piece includes：Clamp arm mounting base, on the fixture installed part；
Two clamp arm are movably arranged in the clamp arm mounting base；The clamp arm is equipped with two clip tooths being oppositely arranged；Clamp arm driving machine
Structure, for described two clamp arm to be driven to make opening and closing movement；Wherein, described two clamp arm are pressed from both sides under clamp arm driving mechanism driving
During conjunction, the clip tooth in described two clamp arm is held on the cylinder of single-wafer silicon rod or the connection faceted pebble of monocrystalline silicon cube.
In some embodiments, the clamp arm driving mechanism includes：Folding gear, in the clamp arm；Gear drives
Moving part has the groove engaged with the folding gear in the clamp arm；Driving source is connected to the gear drive, for driving
The dynamic gear drive movement.
In some embodiments, the gear drive is rack, and the opposite sides of the rack is respectively equipped with and institute
The folding gear stated at least two clamp arm engages corresponding groove；The driving source is for driving the gas of the rack movement
Cylinder or driving motor.
In some embodiments, the gear drive is drive gear structure, and the driving source is for driving
State the driving motor of drive gear structure operating.
In some embodiments, in the silicon rod clamper, at least one silicon rod at least two silicon rod clamping pieces
Clamping piece is equipped with guiding driving mechanism, for driving it along the silicon rod clamper installed part movement, at least two described in adjusting
The spacing of a silicon rod clamping piece.
In some embodiments, the guiding driving mechanism includes：Guiding leading screw and guide motor, wherein, it is described to lead
The silicon rod clamping piece is connected to one end of leading screw, the other end of the guiding leading screw is connected to the guide motor.
In some embodiments, the silicon single crystal rod transfer device further includes height testing instrument, is carried arranged on the commutation
On tool, for detecting the height of the single-wafer silicon rod.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the application silicon single crystal rod transfer device in the loosened condition.
Fig. 2 is stereoscopic schematic diagram of the application silicon single crystal rod transfer device under clamping state.
Fig. 3 is for the application silicon single crystal rod transfer device with feeding station, evolution operation station and discharge station in one kind
Setting relation schematic diagram under situation.
Fig. 4 is for the application silicon single crystal rod transfer device with feeding station, evolution operation station and discharge station another
Setting relation schematic diagram under kind situation.
Fig. 5 is for the application silicon single crystal rod transfer device with feeding station, evolution operation station and discharge station another
Setting relation schematic diagram under kind situation.
Fig. 6 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single-wafer silicon rod in advance in the loosened condition.
Fig. 7 is the top view of Fig. 6.
Fig. 8 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps single-wafer silicon rod under clamping state.
Fig. 9 is the top view of Fig. 8.
Figure 10 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps monocrystalline silicon cube in advance in the loosened condition.
Figure 11 is the top view of Figure 10.
Figure 12 is the stereoscopic schematic diagram that the application silicon single crystal rod transfer device clamps unit silicon cube under clamping state.
Figure 13 is the top view of Figure 12.
Figure 14 is the rear pseudosection of silicon rod clamper in the application silicon single crystal rod transfer device.
Figure 15 is flow diagram of the application silicon single crystal rod transfer device in silicon single crystal rod transhipment operation is performed.
Figure 16 is shape of the silicon rod clamper in silicon single crystal rod transfer device corresponding to the single-wafer silicon rod on loading and unloading station
State schematic diagram.
Figure 17 clamps the single-wafer silicon rod positioned at loading and unloading station for the silicon rod clamper in silicon single crystal rod transfer device
View.
Silicon rod clamper is made with the single-wafer silicon rod clamped corresponding to evolution after Figure 18 makees commutation movement for commutation carrier
The view of industry station.
Figure 19 is placed in the view of evolution operation station for single-wafer silicon rod after release silicon rod clamper.
Figure 20 corresponds to the monocrystalline silicon cube on evolution operation station for the silicon rod clamper in silicon single crystal rod transfer device
View.
Figure 21 is that the silicon rod clamper in silicon single crystal rod transfer device clamps the monocrystalline silicon cube positioned at evolution operation station
View.
Silicon rod clamper corresponds to loading and unloading with the monocrystal rod cube clamped after Figure 22 makees commutation movement for commutation carrier
The view of station.
Figure 23 is placed in the view of loading and unloading station for monocrystalline silicon cube after release silicon rod clamper.
Specific embodiment
Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book understands other advantages and effect of the application easily.
It please refers to Fig.1 to Figure 14.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., is only used
To coordinate the revealed content of specification, so that those skilled in the art understands and reads, being not limited to the application can
The qualifications of implementation, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size
It is whole, in the case where not influencing the effect of the application can be generated and the purpose that can reach, should all still fall in skill disclosed herein
Art content is obtained in the range of covering.Meanwhile in this specification it is cited as " on ", " under ", "left", "right", " centre " and
The term of " one " etc. is merely convenient to understanding rather than to limit the enforceable scope of the application for narration, relativeness
It is altered or modified, in the case where changing technology contents without essence, when being also considered as the enforceable scope of the application.
The inventors of the present application found that in the relevant cutting operation technology for crystalline silicon rod, each work for being related to
Industry is independent arrangement, and implement is dispersed in the different production areas of different production units or workshop or workshop,
The conversion needs for performing the crystalline silicon rod of different procedures are transported through allotment, and there are process is numerous and diverse, transfer device structure is answered
The problems such as miscellaneous and transfer efficiency is low.In view of this, by scrap build, providing can at least realize fast present inventor
And the silicon single crystal rod transfer device stablized, in this way, can be completed in the case of occupied space is certain by silicon single crystal rod transfer device
The transhipment of different shape crystalline silicon rod simplifies the structure of silicon single crystal rod transfer device, reduces transhipment process, improves workpiece
The efficiency of transhipment reduces cost and avoids workpiece damage.
It please refers to Fig.1 to Fig. 2, is the structure diagram of the application silicon single crystal rod transfer device in one embodiment,
In, Fig. 1 is the stereoscopic schematic diagram of the application silicon single crystal rod transfer device in the loosened condition, and Fig. 2 turns for the application silicon single crystal rod
Stereoscopic schematic diagram of the shipping unit under clamping state.
The application silicon single crystal rod transfer device is applied in silicon single crystal rod multi-wire saw equipment, for being carried out to silicon single crystal rod
Cutting operation closes the structure of rule to be formed, and in the present embodiment, monocrystalline silicon multi-wire saw equipment may be, for example, silicon single crystal rod evolution
Equipment, for silicon single crystal rod carry out evolution operation, i.e. by cylinder single-wafer silicon rod after evolution operation Formation cross-section
In the monocrystalline silicon cube of class rectangle.Further, the silicon single crystal rod multi-wire saw equipment more at least has feeding station, evolution
Operation station and discharge station, the feeding station are used to carry out the feeding operation of single-wafer silicon rod, the evolution operation work
For at least carrying out the evolution operation of single-wafer silicon rod to form monocrystalline silicon cube, the discharge station is used to carry out monocrystalline silicon for position
The blanking operation of cube, silicon single crystal rod transfer device are then used for single-wafer silicon rod between feeding station and evolution operation station
It transports and/or transports monocrystalline silicon cube between evolution operation station and discharge station.
As depicted in figs. 1 and 2, silicon single crystal rod transfer device disclosed in the present application includes：Commutate carrier 11 and silicon rod clamper
13, wherein, silicon rod clamper 13 is configured at commutation carrier 11, makees commutation movement by driving commutation carrier 11, may be such that configuration
Silicon rod clamper 13 is converted to transport the single-wafer silicon rod clamped and/or in evolution between feeding station and evolution operation station
It converts to transport the monocrystalline silicon cube clamped between operation station and discharge station.
Commutation carrier 11 be for setting the agent set of other kinds component in silicon single crystal rod transfer device, it is other kinds
Component mainly may include silicon rod clamper 13, but be not limited thereto, and other component also may be, for example, mechanical structure, electrical control system
System and numerical control device etc..In the present embodiment, commutation carrier 11 may include pedestal 111, the upper frame 113 opposite with pedestal 111, with
And the supporting framework between pedestal 111 and upper frame 113.In addition, commutation 11 another important function of carrier is to pass through commutation
It moves that the commutation of silicon rod clamper 13 is supported to convert.The carrier 11 that commutates for example can make commutation movement by a changement.Having
On body realization method so that commutation carrier 11 realizes that the changement of commutation movement may include that rotation axis and rotary electric machine (do not give
With display), by installation foundation of the rotation axis axis connection under it, (installation foundation may be, for example, that multi-wire saw is set to commutation carrier 11
Standby pedestal or the workbench of multi-wire saw equipment), it is used in rotation axis to be equipped with the connecting pin that commutation carrier 11 is connected
The installation edge extended out, the installation along it is upper it is uniformly distributed have a mounting hole, corresponding, the center of pedestal 111 in the carrier 11 that commutates
Mounting hole also is provided at position, when mounted, pedestal 111 is docked with rotation axis in the carrier 11 that commutates, the mounting hole on pedestal 111
It is aligned with the mounting hole in rotation axis, afterwards, is locked by additional locking elements such as such as bolts after the mounting hole of alignment, it is complete
Into the assembling of commutation carrier 11.When implementing divertical motion, then start rotary electric machine, driving rotation axis rotates that commutation is driven to carry
Tool 11, which rotates, realizes commutation movement.Foregoing driving rotation axis rotation may be designed as one-directional rotation and be also designed to Double-directional rotary,
The one-directional rotation may be, for example, to rotate clockwise or rotate counterclockwise, the Double-directional rotary may be, for example, then rotate clockwise and
It rotates counterclockwise.In addition, the angle that rotates of driving rotation axis can according to the actual configuration of silicon single crystal rod transfer device (such as：Root
According to the structure of commutation carrier 11, the silicon rod clamper 13 being arranged on commutation carrier 11 and feeding station or the setting position of discharge station
Put relation etc.) and set.Furthermore disc structure, square plate or oval plate can be used in the pedestal 111 in commutation carrier 11, wherein
Position is entreated with rotating axis connection, but the shape of pedestal 111 is not limited to this, and in other embodiments, it can also be used in pedestal 111
His shape.
At least one silicon rod clamper 13 is provided on commutation carrier 11, for clamping corresponding workpiece.In the present embodiment
In, it is assumed that silicon rod clamper 13 is arranged on the silicon rod clamper area of commutation carrier 11, can be used to clamp single-wafer silicon rod and monocrystalline silicon cube.
In this way, by the way that commutation carrier 11 is driven to make commutation movement so that the silicon rod clamper 13 on commutation carrier 11 is in feeding station with opening
It converts to transport single-wafer silicon rod between Fang Zuoye stations and converts to transport between evolution operation station and discharge station
Monocrystalline silicon cube.In practical applications, the rotational angle that the carrier 11 that commutates makees commutation movement is according to feeding station, evolution operation
Depending on station and the mutual position relationship of discharge station.Such as：In one case, feeding station, evolution operation work
Position and discharge station order are set and they are to be in that 120 ° of distributions (are silicon single crystal rod transfer device referring to Fig. 3 between any two
With the setting relation schematic diagram of feeding station, evolution operation station and discharge station in one case), it is assumed that commutation carries
Silicon rod clamper 13 on tool 11 corresponds to feeding station 200 in the initial state, then by driving commutation carrier 11 is positive to turn
Dynamic 120 ° can be converted silicon rod clamper 13 to evolution operation station 300 by feeding station 200, and drive commutation carrier 11 positive
It rotates 120 ° silicon rod clamper 13 can be converted by evolution operation station 300 to blanking operation station 400, then commutation is driven to carry
Tool 11 rotates forward 120 ° and can convert silicon rod clamper 13 to feeding station 200 by discharge station 400.In another situation
Under, feeding station, evolution operation station and discharge station order set and are differed between feeding station and evolution operation station
Differed between 180 ° and evolution operation station and discharge station 90 ° (referring to Fig. 4, be silicon single crystal rod transfer device with feeding station,
The setting relation schematic diagram of evolution operation station and discharge station in another scenario), it is assumed that the silicon on commutation carrier 11
Rod clamp 13 corresponds to feeding station 200 in the initial state, then can by the way that commutation carrier 11 is driven to rotate forward 180 °
Silicon rod clamper 13 is converted by feeding station 200 to evolution operation station 300, and commutation carrier 11 is driven to rotate forward 90 ° just
Silicon rod clamper 13 can be converted by evolution operation station 300 to blanking operation station 400, then commutation carrier 11 is driven to rotate forward
90 ° can be converted silicon rod clamper 13 to feeding station 200 by discharge station 400.In a yet another situation, feeding station is under
Material station is to can be described as loading and unloading station with going out at one, can double as feeding and blanking is used, this loading and unloading station 200
(400) 180 ° can be differed between the two (referring to Fig. 5, for silicon single crystal rod transhipment dress to be oppositely arranged with evolution operation station 300
Put and the setting relation schematic diagram of feeding station, evolution operation station and discharge station in a yet another situation), it is assumed that it changes
Silicon rod clamper 13 on carrier 11 corresponds to loading and unloading station 200 (400) in the initial state, then is commutated by driving
Carrier 11 rotates forward 180 ° and can convert silicon rod clamper 13 to evolution operation station 300 by loading and unloading station 200 (400),
Driving commutation carrier 11 rotates forward 180 ° and can convert silicon rod clamper 13 to loading and unloading operation by evolution operation station 300 again
Station 200 (400).In above-mentioned each situation, rotate forward refer specifically to according to feeding station, evolution operation station, under
Expect the rotation direction of the setting order of station, the rotation opposite with rotating forward then is referred to as backwards rotation.Specifically, if feeding
Station, evolution operation station, discharge station are set according to clock-wise order, then are rotated forward to rotate clockwise, the inverse time
It is then backwards rotation that pin, which rotates,；If feeding station, evolution operation station, discharge station are set according to sequence counter-clockwise,
It rotates forward to rotate counterclockwise, it is then backwards rotation to rotate clockwise.But, regardless of how say, feeding station, evolution operation
The setting relation of station and discharge station is without specific limitation, their setting order and mutual setting angle are still
It can make other variations, as long as ensuring between each station if will not generating unnecessary interference, in this way, on commutation carrier 11
The rotation direction and rotational angle of silicon rod clamper 13 can also make accommodation.
As previously mentioned, the application silicon single crystal rod transfer device is applied in silicon single crystal rod multi-wire saw equipment, the list
The cutting operation that crystalline silicon rod multi-wire saw equipment makees silicon single crystal rod includes at least the evolution operation of silicon single crystal rod, passes through evolution
Operation can will be formed as the monocrystalline silicon cube that section is in class rectangle in the single-wafer silicon rod of cylinder morphology after evolution operation.
Therefore, the silicon rod clamper 13 in the application can realize that can clamp single-wafer silicon rod can also clamp monocrystalline silicon cube.
Below to silicon rod clamper 13 and being described in detail.
Silicon rod clamper 13 further comprises 131 and at least two silicon rod clamping piece 132 of silicon rod clamper installed part, wherein, until
Few two silicon rod clamping pieces 132 are arranged at intervals compared with silicon rod clamper installed part 131.In one embodiment, it is clamped
Single-wafer silicon rod is either still either being developed in feeding station in evolution operation station or clamped monocrystalline silicon cube
Operation station is still all to erect to place in discharge station, and therefore, at least two silicon rod clamping pieces 132 are pacified compared with silicon rod clamper
Piece installing 131 and be arranged at intervals in a vertical direction, i.e. at least two silicon rod clamping pieces 132 is setting up and down.
In specific implementation, any one silicon rod clamping piece 132 further includes：Clamp arm mounting base 133 and at least two is pressed from both sides
Arm 134, wherein, clamp arm mounting base 133 is provided on silicon rod clamper installed part 131, and at least two clamp arm 134 are to be movably arranged at folder
In arm mounting base 133.In a kind of alternative embodiment, the clamp arm 134 of composition silicon rod clamping piece 132 is two, the two clamp arm
134 are symmetrical set, and single clamp arm 134 is equipped with two clip tooths 130 of front and rear layout, in this way, the folder in two clamp arm 134
Tooth 130 (totally four) may make up one for clamping single-wafer silicon rod or the grasping part of monocrystalline silicon cube.Especially for monocrystalline
For silicon cube 102, four clip tooths 130 in two clamp arm 134 are corresponding four companies for being held on monocrystalline silicon cube 102 respectively
Connect faceted pebble.It is preferred that two clip tooths in two clip tooths 130 are formed in the first clamp arm 134 the first line and the second clamp arm 134
130 the second lines formed are mutually parallel, and, (clip tooth 130 is close in the clip tooth 130 in the first clamp arm 134 positioned inside
Commutation carrier 11) it is formed with being located at the clip tooth 130 (clip tooth 130 is close in commutation carrier 11) of inside in the second clamp arm 134
The 3rd line and the first clamp arm 134 on be located at the clip tooth 130 (clip tooth 130 be away from commutation carrier 11) and the second folder in outside
The 4th line that clip tooth 130 (clip tooth 130 is away from commutation carrier 11) on arm 134 positioned at outside is formed is mutually parallel.
Further, to make it possible to clamping single-wafer silicon rod and monocrystalline silicon cube, clamping single-wafer silicon rod is in two clamp arm 134
Or when under the clamp position of monocrystalline silicon cube, (clip tooth 130 is close in changes the clip tooth 130 in the first clamp arm 134 positioned inside
To carrier 11) formed with the clip tooth 130 (clip tooth 130 is away from commutation carrier 11) positioned at outside in the second clamp arm 134
Positioned at the clip tooth 130 (clip tooth 130 is away from commutation carrier 11) and the second folder in outside on 5th line and the first clamp arm 134
The 6th line that clip tooth 130 (clip tooth 130 is close in commutation carrier 11) on arm 134 positioned inside is formed is mutually orthogonal.
Extraly, the effect for the adjusting that centers can be more had both using silicon rod clamping piece 132.Under general scenario, in silicon rod clamping piece 132
Under clamping state, the center for the grasping part that two clamp arm 134 are formed is and the center of single-wafer silicon rod or list clamp arm 134
What the center of crystal silicon cube coincided.Therefore, when the single-wafer silicon rod 101 that placement is erect using 132 de-clamping of silicon rod clamping piece
Or during monocrystalline silicon cube 102, two clamp arm 134 in silicon rod clamping piece 132 are shunk, and are resisted against by the clip tooth 130 in clamp arm 134
Single-wafer silicon rod 101 or monocrystalline silicon cube 102.Simultaneously clamping single-wafer silicon rod 101 or monocrystalline silicon cube 102 are shunk in clamp arm 134
During, single-wafer silicon rod 101 or monocrystalline silicon cube 102 are promoted by two clamp arm 134 of both sides and towards grasping parts
Middle section movement, until single-wafer silicon rod 101 or monocrystalline silicon cube 102 are by two clamp arm in silicon rod clamping piece 132
134 clamp, at this point, the center of single-wafer silicon rod 101 or monocrystalline silicon cube 102 can be located at the clamping of silicon rod clamping piece 132
The center in space.Certainly, in the clip tooth 130 in clamp arm 134 can also additional buffer unit, for avoid clamping single-wafer
The damage to its surface is caused during silicon rod 101 or monocrystalline silicon cube 102, plays protection single-wafer silicon rod 101 or monocrystalline
The good result of silicon cube 102.For single-wafer silicon rod 101, Fig. 6 is seen to Fig. 9, wherein, Fig. 6 is the application silicon single crystal rod
Transfer device clamps the stereoscopic schematic diagram of single-wafer silicon rod in advance in the loosened condition, and Fig. 7 is the top view of Fig. 6, and Fig. 8 is this Shen
Please silicon single crystal rod transfer device the stereoscopic schematic diagram of single-wafer silicon rod is clamped under clamping state, Fig. 9 is the top view of Fig. 8.
For single-wafer silicon rod 102, Figure 10 is seen to Figure 13, wherein, Figure 10 is unclamping shape for the application silicon single crystal rod transfer device
The stereoscopic schematic diagram of monocrystalline silicon cube is clamped under state in advance, Figure 11 is the top view of Figure 10, and Figure 12 transports for the application silicon single crystal rod
Device clamps the stereoscopic schematic diagram of unit silicon cube under clamping state, and Figure 13 is the top view of Figure 12.
To enable at least two clamp arm 134 in silicon rod clamping piece 132 smooth and being held fixedly different sizes rule
The single-wafer silicon rod 101 of lattice or monocrystalline silicon cube 102, silicon rod clamping piece 132 further include clamp arm driving mechanism, for driving at least
Two clamp arm 134 make opening and closing movement.
4 are please referred to Fig.1, is schematically shown as the rear pseudosection of silicon rod clamper 13.In specific implementation, as shown in figure 14, folder
Arm driving mechanism further comprises：Folding gear 135, gear drive 136 and driving source 137.Folding gear 135 is to set
It is placed in corresponding clamp arm 134.Gear drive 136 has the groove engaged with the folding gear 135 in clamp arm 134.Driving
Source is connected to gear drive 136, is moved for drive gear actuator 136.On a kind of realization method, gear drive
136 be rack, and the rack 136 is in the centre of two clamp arm 134, rack 136 respectively for the clamp arm 134 in both sides
It is respectively equipped on two lateral surfaces and engages corresponding groove with the folding gear 135 in two clamp arm 134, driving source 137 can example
Such as it is driving motor or or cylinder.In this way, according to above-mentioned realization method, in practical applications, when need to realize 134 clamping of clamp arm
When, it is moved up by the driving motor as driving source or cylinder driving as the rack 136 of gear drive, by rack 136
The folding gear 135 of both sides engagement is driven to make outward turning action, folding gear 135 drives (the folding tooth of clamp arm 134 during revolving outside
Wheel 135 can be connected with clamp arm 134 by shaft) make decentralization action to be transferred to clamping state by releasing orientation；Conversely, working as needs to realize
It is downward as the rack 136 of gear drive by driving motor (or cylinder) driving as driving source when clamp arm 134 is unclamped
Mobile, the folding gear 135 for by rack 136 both sides being driven to engage makees pronation, and folding gear 135 drives during revolving inside
Clamp arm 134 (folding gear 135 can be connected with clamp arm 134 by shaft) raises up action to be transferred to release shape by clamping state
State.Certainly, an embodiment is above are only, is not intended to limit the working condition of silicon rod clamping piece 132, in fact, in foregoing
" upward ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change can bases
The structure and function mode of clamp arm 134, the construction of clamp arm driving mechanism and have other changes.
It is by carrying out blocking work to long silicon rod originally just as it is known by a person skilled in the art that for single-wafer silicon rod
Industry and formed, certainly will so that the size difference between single-wafer silicon rod is totally different, in view of silicon rod clamper 13 be for setting put
Single-wafer silicon rod 101 under configuration state is clamped, therefore, for silicon rod clamper 13, the influence master of aforementioned dimensions difference
Just to show that the length difference opposite sex of single-wafer silicon rod is clamped to whether the silicon rod clamping piece 132 in silicon rod clamper 13 can correspond to
The secret worry of single-wafer silicon rod.
The risk of single-wafer silicon rod, silicon may can not be clamped to by even exempting above-mentioned silicon rod clamping piece 132 for reduction
Rod clamp 13 has different designing schemes.
In one implementation, silicon rod clamper 13 uses fixed clamping piece, i.e. with vertical side on commutation carrier 11
Silicon rod clamping piece as much as possible is fixedly installed in formula, and, two neighboring silicon rod clamping piece 132 in these silicon rod clamping pieces 132
Spacing is small as much as possible, in this way, using these silicon rod clamping pieces 132 can cover all kinds scale lengths single-wafer silicon rod.For example,
If the length of single-wafer silicon rod is longer, clamping is participated in using silicon rod clamping piece 132 more on commutation carrier 11；If single-wafer
The length of silicon rod is shorter, then clamping is participated in using silicon rod clamping piece 132 less on commutation carrier 11, for example, underlying
Several silicon rod clamping pieces 132 participate in clamping, and be located above and higher than single-wafer silicon rod those silicon rod clamping pieces 132
Just it is not involved in.
In other realization methods, silicon rod clamper 13 uses movable clamping piece, i.e. on the mounting surface of commutation carrier 11
Activity sets silicon rod clamping piece 132 in a manner of vertical, due to, silicon rod clamping piece 132 is movable design, therefore, silicon rod clamping
The quantity of part 132 can be greatly decreased, and generally two or three can meet.In this way, it can be covered using movable clamping piece
The single-wafer silicon rod of all kinds of scale lengths.For example, if the length of single-wafer silicon rod is longer, the silicon rod clamping of activity setting is moved
Part 132 extends the clamping spacing of two silicon rod clamping pieces 132；If the length of single-wafer silicon rod is shorter, activity setting is moved
Silicon rod clamping piece 132 shortens the clamping spacing of two silicon rod clamping pieces 132.In silicon rod clamper 13 using movable clamping piece
It is smooth smoothly up and down to adjust position for ease of movable clamping piece in realization method, using in silicon rod clamper 13
Silicon rod clamper installed part 131 play boot activity setting silicon rod clamping piece 132 guiding role, a kind of achievable mode
In, guide post structure can be used in silicon rod clamper installed part 131, and clamp arm mounting base 133 is then using the work for being socketed on guide post structure
Motion block structure.Specifically, the guide post structure as silicon rod clamper installed part 131 includes erectting setting and parallel two
Lead, as two guiding being then equipped in the activity block structure of clamp arm mounting base 133 and in the guide post structure
Corresponding two perforations of column or two clips.According to perforation, the movable block be sheathed on the lead can simultaneously realize along
The lead sliding.According to clip, the movable block is clipped on the lead and can simultaneously realize along lead cunning
It moves, wherein, in practical applications, the clip can be clipped on an at least half part for the lead.
For the silicon rod clamper 13 of movable silicon rod clamping piece, different change case is also had.With two silicon rod clamping pieces
Exemplified by 132, in a kind of alternative embodiment, a silicon rod clamping piece 132 in two silicon rod clamping pieces 132 sets to be movable
It is then fixed design to count another silicon rod clamping piece 132, in this way, being all by the movable design of movement in practical applications
That silicon rod clamping piece 132 adjust the clamping spacing between the silicon rod clamping piece 132 of fixed design.It can from above
To know, single-wafer silicon rod 101 is placed to erect, therefore, and no matter the scale lengths of single-wafer silicon rod, the bottom of single-wafer silicon rod 101
Can always be relatively easy to it is definite, it is thus preferable to, that silicon rod that can will be located above in two silicon rod clamping pieces 132
Clamping piece 132 be designed as it is movable, in this way, need to only adjust top silicon rod clamping piece 132 position.
To realize the movement of silicon rod clamping piece 132, the silicon rod clamping piece 132 of the movable design, which can be equipped with, is oriented to driving
Mechanism.Using guiding driving mechanism the silicon rod clamping piece 132 of movable design can be driven along silicon rod clamper installed part about 131
It is mobile.In one implementation, guiding driving mechanism can for example including：Guiding leading screw 138 and guide motor 139, wherein, it leads
It is set to leading screw 138 to erect, one end of guiding leading screw 138 is connected to clamp arm mounting base 133, the other end of guiding leading screw 138
Guide motor 139 is then connected to, guide motor 139 may be provided at the top of commutation carrier 11, but be not limited thereto, and be oriented to electricity
Machine 139 may also be arranged on the bottom of commutation carrier 11.Guiding leading screw 138 has the characteristics that high-precision, invertibity and efficient, such as
This, at the position for needing the silicon rod clamping piece 132 above adjustment, drives guiding leading screw 138 to rotate, leads by guide motor 139
To leading screw 138 driven in rotary course above silicon rod clamping piece 132 moved up and down along silicon rod clamper installed part 131.Example
Such as：Guide motor 139 drives guiding leading screw 138 to rotate clockwise, then drives the silicon rod clamping piece 132 of top along silicon rod clamper
Installed part 131 move upwards with away from lower section silicon rod clamping piece 132, increase by two silicon rod clamping pieces 132 between clamping between
Away from；Guide motor 139 drives guiding leading screw 138 to rotate counterclockwise, then drives the silicon rod clamping piece 132 of top along silicon rod clamper
Installed part 131 is moved downward between the clamping between the silicon rod clamping piece 132 of lower section, two silicon rod clamping pieces 132 of reduction
Away from.In this way, the silicon rod clamping piece 132 by controlling movable design, can adjust between the clamping between two silicon rod clamping pieces 132
Away from so as to effectively be clamped to the single-wafer silicon rod 101 of different size length.
In another alternative embodiment, two silicon rod clamping pieces 132 are movable design, in this way, in practical application
In, can their mutual clamping spacing be adjusted by the movement of two silicon rod clamping pieces 132 of movable design.Due to
Silicon rod clamping piece 132 is movable design, then, at least one silicon rod clamping piece 132 in two silicon rod clamping pieces 132 need to be set
Guiding driving mechanism is put, for two silicon rod clamping pieces 132 to be driven to be moved along silicon rod clamper installed part 131.Compared with previous
Kind alternative embodiment, in this alternative embodiment, since two silicon rod clamping pieces 132 in silicon rod clamper 13 are movable,
Will so exist and guiding driving mechanism is set still on some silicon rod clamping piece 132 in two silicon rod clamping pieces 132
The situation of guiding driving mechanism is respectively provided on two silicon rod clamping pieces 132.
Now by taking the silicon rod clamping piece 132 of the top in two silicon rod clamping pieces 132 is provided with guiding driving mechanism as an example,
It is living between the clamp arm mounting base 133 and silicon rod clamper installed part 131 in one, two silicon rod clamping pieces 132 under this situation
Dynamic connection, i.e. clamp arm mounting base 133 and clamp arm 134 thereon are along silicon rod clamper installed part in any one silicon rod clamping piece 132
131 and it is up and down, in addition, set guiding driving mechanism include guiding leading screw 138 and guide motor 139, wherein, guide wire
One end of thick stick 138 is connected in the clamp arm mounting base 133 in the silicon rod clamping piece 132 of top, and the other end of guiding leading screw 138 is then
Guide motor is connected to, guide motor 139 may be provided at the top of commutation carrier 11.In this way, needing the silicon rod above adjustment
During the position of clamping piece 132, by guide motor 139 guiding leading screw 138 is driven to rotate, driven in 138 rotary course of guiding leading screw
Silicon rod clamping piece 132 is moved up and down along silicon rod clamper installed part 131, such as：Guide motor 139 drives guiding leading screw 138 suitable
Hour hands rotate, then the silicon rod clamping piece 132 of top is driven to be moved upwards along silicon rod clamper installed part 131 with the silicon away from lower section
Stick clamping piece 132 increases the clamping spacing between two silicon rod clamping pieces 132；Guide motor 139 drives guiding leading screw 138 inverse
To rotation, then the silicon rod clamping piece 132 of top is driven to be moved downward along silicon rod clamper installed part 131 with close to the silicon rod of lower section
Clamping piece 132 reduces the clamping spacing between two silicon rod clamping pieces 132.In this way, by the way that the silicon rod of movable design is controlled to press from both sides
Gripping member 132 can adjust the clamping spacing between two silicon rod clamping pieces 132, so as to the single-wafer silicon rod to different size length
101 are effectively clamped.
In fact, in the case of two silicon rod clamping pieces 132 are movable design, using guiding driving mechanism not only
The clamping spacing that can adjust between two silicon rod clamping pieces 132 carries out effectively come the single-wafer silicon rod 101 to different size length
Outside clamping, the purpose of lifting can be also realized to the single-wafer silicon rod 101 of clamping, when two silicon rod clamping pieces 132 effectively clamp
Firmly after single-wafer silicon rod 101, by drive silicon rod clamping piece 132 move up and down lift single-wafer silicon rod 101.Specifically
Ground, still by taking the silicon rod clamping piece 132 of top is provided with guiding driving mechanism as an example, first, the silicon rod clamping piece 132 of top passes through
Guiding driving mechanism moves up and down along silicon rod clamper installed part 131 and has adjusted the folder between lower section silicon rod clamping piece 132
Hold spacing；Then, using the clamp arm driving mechanism in each silicon rod clamping piece 132 corresponding two clamp arm 134 is driven to press from both sides
Conjunction action is with smooth and be held fixedly single-wafer silicon rod 101；Then, the silicon rod clamping piece 132 of top is driven again by being oriented to
Motivation structure drives and is moved upwards along silicon rod clamper installed part 131, at this point, since frictional force acts on, the single-wafer clamped
Silicon rod 101 and the silicon rod clamping piece 132 of lower section move upwards therewith together, wherein, the single-wafer silicon rod 101 clamped is upward
Move utilize be top silicon rod clamping piece 132 and single-wafer silicon rod 101 between frictional force act on, silicon rod clamping piece 132
It moves upwards, what is utilized is the frictional force effect between single-wafer silicon rod 101 and the silicon rod clamping piece 132 of lower section, so as to fulfill
The effect of lifting single-wafer silicon rod 101.The silicon rod clamping piece 132 of top drives single-wafer silicon under the driving of guiding driving mechanism
It is also identical process that stick 101 and the silicon rod clamping piece 132 of lower section, which move downward, so as to fulfill landing single-wafer silicon rod 101
Effect, details are not described herein.
It should be noted that in other change case, the silicon rod clamping piece of lower section e.g. in two silicon rod clamping pieces 132
Guiding driving mechanism, structure, set-up mode and the driving working method of guiding driving mechanism and foregoing top are set on 132
Silicon rod clamping piece 132 guiding driving mechanism it is similar, such as by lower section silicon rod clamping piece 132 in guiding driving mechanism
It is moved up and down under driving along silicon rod clamper installed part 131 and adjusts the clamping spacing between top silicon rod clamping piece 132, with
And by the silicon rod clamping piece 132 of lower section single-wafer silicon rod 101 and the silicon rod of top is driven to press from both sides under the driving of guiding driving mechanism
Gripping member 132 modes such as moves up and down along silicon rod clamper installed part 131 together.For example two silicon rod clamping pieces 132 are respectively provided with again
Guiding driving mechanism, the then set-up mode of guiding driving mechanism and driving working method and two silicon rod clamping pieces 132
Motion mode is self-evident, and details are not described herein.
It moves up and down to adapt to along silicon rod clamper installed part 131 in the silicon rod clamping piece 132 for movable setting
In the situation that the single-wafer silicon rod of different size length is clamped, except silicon rod clamping piece 132 uses movable structure to set
Meter, silicon rod clamping piece 132 need to be set outside guiding driving mechanism etc., certainly will also need to know the single-wafer silicon for currently needing to clamp
The scale lengths of stick.In view of this, the silicon single crystal rod transfer device in the application may also include height testing instrument (not in the drawings
Shown), for erectting the height for the single-wafer silicon rod placed, so as to which the silicon rod clamping piece 132 as movable setting exists
It subsequently along silicon rod clamper installed part 131 moves up or moves down and the foundation of displacement distance.
Correspondingly, in the present embodiment, single-wafer silicon rod 101 is formed after evolution operation and other related operations
Monocrystalline silicon cube 102, during monocrystalline silicon cube 102 is formed as by single-wafer silicon rod 101, usually, length is constant
, therefore, when being located at the monocrystalline silicon cube 102 at evolution operation station using 13 de-clamping of silicon rod clamper, silicon rod clamper 13
The silicon rod clamping piece 132 of upper movable setting can be without adjusting again.
Silicon single crystal rod transfer device disclosed in the present application, the silicon rod clamper including commutation carrier and on commutation carrier,
Silicon rod clamper can be used to clamp single-wafer silicon rod and monocrystalline silicon cube, by the way that commutation carrier is driven to make commutation movement, may be such that and change
Silicon rod clamper on carrier is converted to turn single-wafer silicon rod by feeding station between feeding station and evolution operation station
Be transported to evolution operation station and/or between evolution operation station and discharge station convert with by monocrystalline silicon cube by evolution operation
Station is transported to discharge station, so, it can be achieved that workpiece quick and easily transporting, improves the transfer efficiency of workpiece, separately
Outside, the silicon rod clamper to commutate on carrier has single-wafer silicon rod and the dual clamping function of monocrystalline silicon cube, is not increasing structure
De-chucking can be saved in the case of complexity, increase the design space of other structures and reduces cost.
It is flow signal of the application silicon single crystal rod transfer device in silicon single crystal rod transhipment operation is performed refering to Figure 15
Figure.As shown in figure 15, the flow for performing silicon single crystal rod transhipment operation comprises the following steps：
Step S101 clamps the single-wafer silicon positioned at feeding station using the silicon rod clamper in silicon single crystal rod transfer device
Stick.In step S101, first, single-wafer silicon rod is positioned over erectting on feeding station, and must ensure that silicon single crystal rod turns simultaneously
Silicon rod clamper in shipping unit corresponds to feeding station, wherein, single-wafer silicon rod can by manually carry or manipulator machinery
Crawl etc. modes and erect and be positioned over feeding station, the silicon rod clamper in silicon single crystal rod transfer device then can pass through drive commutation carry
Tool rotates to adjust position to realize corresponding to feeding station.Then, if necessary, according to the setting placement status of single-wafer silicon rod
Under height, corresponding silicon rod clamping piece in silicon rod clamper is driven to move up and down to adjust each silicon rod folder on commutation carrier
The clamping spacing that gripping member is formed.Then, the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven to press from both sides
Conjunction acts, so that these silicon rod clamping pieces can clamp the single-wafer silicon rod on feeding station, wherein, the silicon rod clamping
Clip tooth in part in clamp arm is held on the cylinder of single-wafer silicon rod.
Step S103, driving commutation carrier make commutation movement so that silicon rod clamper with the single-wafer silicon rod clamped by
Feeding station is converted to evolution operation station.In step s 103, first, before driving commutation carrier makees commutation movement, compared with
Goodly, the single-wafer silicon rod clamped by silicon rod clamper need to be departed from feeding station, realize disengaging mode can take it is as follows
Any or their combination：One, in the case of ensuring that silicon rod clamper 13 clamps single-wafer silicon rod, pressed from both sides using silicon rod
Tool is moved up along commutation carrier with lifting single-wafer silicon rod；Two, driving commutation carrier with respect to installation foundation move up with
Lifting single-wafer silicon rod；Three, it drives and makees to decline shifting for carrying the plummer of single-wafer silicon rod on feeding station or feeding station
It is dynamic, disengaging configuration is dropped to by original carrying position.Then, driving commutation carrier is rotated relative to installation foundation so that commutation
Carrier on carrier is by the movement that commutates and corresponding to evolution operation station.
Step S105 discharges silicon rod clamper, the single-wafer silicon rod clamped is placed in evolution operation station.In step
In S105, in the case of the silicon rod clamper in ensuring single-wafer silicon rod transfer device corresponds to evolution operation station, also wrap
Single-wafer silicon rod dropping place is made in evolution in feeding station contrary with departing from single-wafer silicon rod in step S103 there are one including
The operating procedure of industry station, specifically, following any or their combination can be taken by realizing the mode of dropping place：One,
In the case of ensuring that silicon rod clamper clamps single-wafer silicon rod, moved down using silicon rod clamper along commutation carrier with the list that lands
Wafer silicon rod；Two, driving commutation carrier moves down the single-wafer silicon rod that lands with respect to installation foundation；Three, drive evolution operation
Make to rise movement for carrying the plummer of single-wafer silicon rod on station or evolution operation station, be risen by original disengaging configuration
To carrying position.Then, the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven to make release action, so that
It obtains these silicon rod clamping pieces and unclamps single-wafer silicon rod so that the single-wafer silicon rod dropping place after release is on evolution operation station.
Follow-up, just the single-wafer silicon rod implementation on evolution operation station is at least wrapped by silicon single crystal rod multi-wire saw equipment
Include the processing operation of evolution operation so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.
Step S107 clamps the monocrystalline silicon cube positioned at evolution operation station using silicon rod clamper.In step s 107,
First, monocrystalline silicon cube is positioned over erectting on evolution operation station, and must ensure the silicon in silicon single crystal rod transfer device simultaneously
Rod clamp corresponds to evolution operation station.Then, if necessary, according to monocrystalline silicon cube erect placement status under height,
Corresponding silicon rod clamping piece moving up and down on commutation carrier adjusts each silicon rod clamping piece institute shape in driving silicon rod clamper
Into clamping spacing.Then, the clamp arm in each silicon rod clamping piece for participating in clamping in silicon rod clamper is driven to make clamping action, with
These silicon rod clamping pieces are clamped the monocrystalline silicon cube on evolution operation station, wherein, in the silicon rod clamping piece
Clip tooth in clamp arm is held on the connection faceted pebble of monocrystalline silicon cube.
Step S109, driving commutation carrier make commutation movement so that silicon rod clamper with the monocrystalline silicon cube clamped by
Evolution operation station is converted to discharge station.In step S109, first, before driving commutation carrier makees commutation movement, compared with
Goodly, the monocrystalline silicon cube clamped by silicon rod clamper need to be departed from evolution operation station, realizing the mode of disengaging can take
Following any or their combination：One, in the case of ensuring to clamp monocrystalline silicon cube, using silicon rod clamper along
Commutation carrier is moved up with lifting monocrystalline silicon cube；Two, driving commutation carrier is moved up with respect to installation foundation with lifting list
Crystal silicon cube；Three, it drives and declines on evolution operation station or evolution operation station for carrying the plummer of monocrystalline silicon cube work
It is mobile, disengaging configuration is dropped to by original carrying position.Then, driving commutation carrier is rotated relative to installation foundation so that is changed
Silicon rod clamper on carrier is by the movement that commutates and corresponding to discharge station.
Step S111 discharges silicon rod clamper, the monocrystalline silicon cube clamped is placed in discharge station and carries out blanking.
In step S111, in the case of the silicon rod clamper in ensuring silicon single crystal rod transfer device corresponds to discharge station, further include
There are one with departing from monocrystalline silicon cube dropping place monocrystalline silicon cube in evolution operation station contrary in blanking in step S109
The operating procedure of station, specifically, following any or their combination can be taken by realizing the mode of dropping place：One, true
In the case of guarantor clamps monocrystalline silicon cube, monocrystalline silicon cube of landing is moved down along commutation carrier using silicon rod clamper；
Two, driving commutation carrier moves down monocrystalline silicon cube of landing with respect to installation foundation；Three, drive discharge station or discharge station
On for carry the plummer of monocrystalline silicon cube make rise movement, by original disengaging configuration rise to carrying position.Then, drive
The clamp arm participated in dynamic silicon rod clamper in each silicon rod clamping piece of clamping makees release action, so that these silicon rod clamping pieces are loose
Open monocrystalline silicon cube so that the monocrystalline silicon cube dropping place after release is in discharge station.
It is transported in above-mentioned execution silicon single crystal rod in operation, it will be positioned at the single-wafer silicon rod of feeding station first with silicon rod clamper
It clamps and single-wafer silicon rod is transported to by evolution operation station by feeding station by the movement that commutates, subsequently, recycle silicon rod
Fixture will clamp positioned at the monocrystalline silicon cube of evolution operation station and be made monocrystalline silicon cube by evolution by the movement that commutates
Industry station is transported to discharge station, compared with the prior art, improves the efficiency of workpiece transhipment, reduces cost and avoid work
Part is damaged.
Below in conjunction with Figure 16 to Figure 23, perform silicon single crystal rod in some instances to the application silicon single crystal rod transfer device and turn
Fortune is described in detail.In the following example, following setting is first made：Silicon single crystal rod transfer device is applied to silicon single crystal rod multi-wire cutting
It cuts in equipment, the silicon single crystal rod multi-wire saw equipment can implement silicon single crystal rod on evolution and other operations (such as round as a ball and mill
Face etc.), the silicon single crystal rod multi-wire saw equipment has feeding station, evolution operation station and discharge station, silicon single crystal rod
Transfer device includes commutation carrier and the silicon rod clamper on commutation carrier, and, silicon rod clamper includes at least two
Silicon rod clamping piece, at least two silicon rod clamping pieces are movable design, and the silicon rod clamping piece being located above more is configured with and leads
To driving mechanism.Described to simplify, in this example, feeding station and discharge station be with go out it is (being combined into one) at one and can
Referred to as loading and unloading station, in this way, the silicon single crystal rod multi-wire saw equipment just has loading and unloading station and evolution operation station,
And loading and unloading station differs 180 ° with evolution operation station.
Step 1, the silicon rod clamper in silicon single crystal rod transfer device is corresponded to the single-wafer silicon rod on loading and unloading station.
In the step 1, silicon rod clamper in silicon single crystal rod transfer device then can by drive commutation carrier 11 rotate to adjust position with
It realizes and corresponds to loading and unloading station, at this point, the clamp arm 134 in two silicon rod clamping pieces 132 in silicon rod clamper is releasing orientation,
The setting of single-wafer silicon rod 101 is positioned on loading and unloading station.The state tool of silicon single crystal rod transfer device after implementation aforesaid operations
Body can be found in Figure 16, and Figure 16 corresponds to the single-wafer silicon rod on loading and unloading station for the silicon rod clamper in silicon single crystal rod transfer device
View.
Step 2, the single-wafer silicon positioned at loading and unloading station is clamped using the silicon rod clamper in silicon single crystal rod transfer device
Stick.In the step 2, if necessary, the height of the single-wafer silicon rod 101 on loading and unloading station is located at using height testing instrument detection
Degree, according to the elevation information measured, drive the opposite commutation carrier 11 of the silicon rod clamping piece 132 being located above in silicon rod clamper make to
Upper movement moves down, and adjusts the clamping spacing between two silicon rod clamping pieces 132.Then, two in silicon rod clamper are driven
Clamp arm 134 in a silicon rod clamping piece 132 makees clamping action, and the single-wafer silicon rod 101 on loading and unloading station is clamped,
In, the clip tooth in the silicon rod clamping piece in clamp arm is held on the cylinder of single-wafer silicon rod.Silicon single crystal rod after implementation aforesaid operations
The state of transfer device for details, reference can be made to Figure 17, and Figure 17 is that the silicon rod clamper in silicon single crystal rod transfer device is clamped positioned at up and down
Expect the view of the single-wafer silicon rod of station.
Step 3, driving commutation carrier makees commutation movement so that silicon rod clamper is with the single-wafer silicon rod clamped by upper and lower
Material station is converted to evolution operation station.In step 3, first, before driving commutation carrier 11 makees commutation movement, preferably
Ground need to depart from the single-wafer silicon rod 101 clamped by the silicon rod clamping piece 132 in silicon rod clamper in loading and unloading station.Then,
Driving commutation carrier 11 rotates 180 ° so that the single-wafer silicon rod 101 handled folded by the carrier on commutation carrier 11 passes through commutation
It moves and corresponds to evolution operation station.The state of silicon single crystal rod transfer device for details, reference can be made to Figure 18 after implementation aforesaid operations,
Figure 18 is that silicon rod clamper corresponds to evolution operation station with the single-wafer silicon rod clamped after commutation carrier makees commutation movement
View.
Step 4, silicon rod clamper is discharged, the single-wafer silicon rod clamped is placed in evolution operation station.In step 4,
In the case of the silicon rod clamper in ensuring silicon single crystal rod transfer device corresponds to evolution operation station, the list that will first clamp
Wafer silicon rod dropping place is on evolution operation station.Then, the clamp arm 134 in silicon rod clamper in two silicon rod clamping pieces 132 is driven
Make release action so that the setting of single-wafer silicon rod 101 after release is positioned on evolution operation station.It is single after implementation aforesaid operations
The state of crystalline silicon rod transfer device for details, reference can be made to Figure 19, and Figure 19 is placed in evolution work for single-wafer silicon rod after release silicon rod clamper
The view of industry station.
Follow-up, just the single-wafer silicon rod implementation on evolution operation station is at least wrapped by silicon single crystal rod multi-wire saw equipment
Include each road processing operation of evolution operation so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.Its
In, for the evolution operation of single-wafer silicon rod, the specific embodiment of the evolution operation then can refer to CN105818285A etc. specially
Sharp open source literature, details are not described herein.In addition, in addition to evolution operation, corase grinding, round as a ball, fine grinding or polishing etc. may also include
Other processing operations.
Step 5, the monocrystalline silicon cube positioned at the evolution operation station is clamped using silicon rod clamper.In step 6, must
When wanting, the height of the monocrystalline silicon cube 102 on evolution operation station is located at using height testing instrument detection, according to the height measured
Information drives the opposite commutation carrier 11 of the silicon rod clamping piece 132 being located above in silicon rod clamper to move up or move down,
Adjust the clamping spacing between two silicon rod clamping pieces 132.Then, drive in two silicon rod clamping pieces 132 in silicon rod clamper
Clamp arm 134 make clamping action, the monocrystalline silicon cube 102 on evolution operation station is clamped, wherein, silicon rod clamping piece
Clip tooth 130 in 132 in clamp arm 134 is held on the connection faceted pebble of monocrystalline silicon cube 102.Silicon single crystal rod after implementation aforesaid operations
The state of transfer device for details, reference can be made to Figure 20 and Figure 21, and Figure 20 corresponds to for the silicon rod clamper in silicon single crystal rod transfer device to be opened
The view of monocrystalline silicon cube on Fang Zuoye stations, Figure 21 are that the silicon rod clamper in silicon single crystal rod transfer device clamps
Positioned at the view of the monocrystalline silicon cube of evolution operation station.
Step 6, driving commutation carrier makees commutation movement so that silicon rod clamper is with the monocrystal rod cube clamped by evolution
Operation station converts supreme discharge station.In step 6, first, before driving commutation carrier 11 makees commutation movement, preferably
Ground need to depart from the monocrystalline silicon cube 102 clamped by the silicon rod clamping piece 132 in silicon rod clamper in evolution operation station.It connects
It, driving commutation carrier 11 rotates 180 ° so that the monocrystalline silicon cube 102 handled folded by the silicon rod clamper on commutation carrier 11 is logical
It crosses commutation movement and corresponds to loading and unloading station.The state of silicon single crystal rod transfer device for details, reference can be made to figure after implementation aforesaid operations
22, Figure 22 make silicon rod clamper after commutation moves for commutation carrier corresponds to loading and unloading station with the monocrystal rod cube clamped
View.
Step 7, silicon rod clamper is discharged, the monocrystalline silicon cube clamped is placed in loading and unloading station and and carries out blanking.
In step 7, in the case of the silicon rod clamper in ensuring silicon single crystal rod transfer device corresponds to loading and unloading station, first by silicon
102 dropping place of monocrystalline silicon cube that rod clamp clamps is on loading and unloading station.Then, two silicon rod clampings in silicon rod clamper are driven
Clamp arm 134 in part 132 makees release action so that the setting of monocrystalline silicon cube 102 after release is positioned on loading and unloading station.
The state of silicon single crystal rod transfer device for details, reference can be made to Figure 23 after implementation aforesaid operations, and Figure 23 is monocrystalline silicon after release silicon rod clamper
Cube is placed in the view of loading and unloading station.
The principles and effects of the application is only illustrated in above-described embodiment, not for limitation the application.It is any ripe
Know the personage of this technology all can without prejudice to spirit herein and under the scope of, modifications and changes are carried out to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technological thought such as
Into all equivalent modifications or change, should be covered by claims hereof.
Claims (9)
1. a kind of silicon single crystal rod transfer device, applied in silicon single crystal rod multi-wire saw equipment, the silicon single crystal rod multi-wire saw
Equipment has feeding station, evolution operation station and discharge station, which is characterized in that the silicon single crystal rod transfer device bag
It includes：
Commutate carrier；
Silicon rod clamper, arranged on the silicon rod clamper area of the commutation carrier；
Wherein, the commutation carrier is moved by driving work commutation, and the silicon rod clamper on the commutation carrier will in commutation movement
Single-wafer silicon rod is transported to evolution operation station by feeding station and/or is transported to down monocrystalline silicon cube by evolution operation station
Expect station.
2. silicon single crystal rod transfer device according to claim 1, which is characterized in that the silicon rod clamper includes：
Silicon rod clamper installed part, on the commutation carrier；And
At least two silicon rod clamping pieces are set along the silicon rod clamper installed part spacing.
3. silicon single crystal rod transfer device according to claim 2, which is characterized in that the silicon rod clamping piece includes：
Clamp arm mounting base, on the fixture installed part；
Two clamp arm are movably arranged in the clamp arm mounting base；The clamp arm is equipped with two clip tooths being oppositely arranged；And
Clamp arm driving mechanism, for described two clamp arm to be driven to make opening and closing movement；
Wherein, under the clamp arm driving mechanism driving during clamping, the clip tooth in described two clamp arm clamps described two clamp arm
In the cylinder of single-wafer silicon rod or the connection faceted pebble of monocrystalline silicon cube.
4. silicon single crystal rod transfer device according to claim 3, which is characterized in that the clamp arm driving mechanism includes：
Folding gear, in the clamp arm；
Gear drive has the groove engaged with the folding gear in the clamp arm；And
Driving source is connected to the gear drive, for the gear drive to be driven to move.
5. silicon single crystal rod transfer device according to claim 4, which is characterized in that
The gear drive is rack, and the opposite sides of the rack is respectively equipped with and the folding at least two clamp arm
Gear engages corresponding groove；And
The driving source is for driving the cylinder or driving motor of the rack movement.
6. silicon single crystal rod transfer device according to claim 4, which is characterized in that
The gear drive is drive gear structure；And
The driving source is for driving the driving motor of the drive gear structure operating.
7. silicon single crystal rod transfer device according to claim 2, which is characterized in that in the silicon rod clamper, at least two
At least one silicon rod clamping piece in a silicon rod clamping piece is equipped with guiding driving mechanism, for driving it along the silicon rod clamper
Installed part moves, to adjust the spacing of at least two silicon rods clamping piece.
8. silicon single crystal rod transfer device according to claim 7, which is characterized in that the guiding driving mechanism includes：It leads
To leading screw and guide motor, wherein, one end of the guiding leading screw is connected to the silicon rod clamping piece, the guiding leading screw it is another
One end is connected to the guide motor.
9. the silicon single crystal rod transfer device according to claim 2 or 7, which is characterized in that further include height testing instrument, be arranged on
On the commutation carrier, for detecting the height of the single-wafer silicon rod.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720609794.0U CN207388034U (en) | 2017-05-27 | 2017-05-27 | Silicon single crystal rod transfer device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720609794.0U CN207388034U (en) | 2017-05-27 | 2017-05-27 | Silicon single crystal rod transfer device |
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| CN207388034U true CN207388034U (en) | 2018-05-22 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108943458A (en) * | 2017-05-27 | 2018-12-07 | 浙江集英精密机器有限公司 | Silicon single crystal rod transfer device and silicon single crystal rod conveyer method |
| CN109109183A (en) * | 2018-09-25 | 2019-01-01 | 天通银厦新材料有限公司 | A kind of sapphire sheet automatic clamping device |
| CN110154254A (en) * | 2019-07-03 | 2019-08-23 | 青岛高测科技股份有限公司 | Material clamping device on a kind of crystal bar evolution |
| WO2021254084A1 (en) * | 2020-06-15 | 2021-12-23 | 天通日进精密技术有限公司 | Silicon rod loading and unloading device and silicon rod squaring apparatus |
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2017
- 2017-05-27 CN CN201720609794.0U patent/CN207388034U/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108943458A (en) * | 2017-05-27 | 2018-12-07 | 浙江集英精密机器有限公司 | Silicon single crystal rod transfer device and silicon single crystal rod conveyer method |
| CN109109183A (en) * | 2018-09-25 | 2019-01-01 | 天通银厦新材料有限公司 | A kind of sapphire sheet automatic clamping device |
| CN110154254A (en) * | 2019-07-03 | 2019-08-23 | 青岛高测科技股份有限公司 | Material clamping device on a kind of crystal bar evolution |
| CN110154254B (en) * | 2019-07-03 | 2024-05-31 | 青岛高测科技股份有限公司 | Crystal bar squaring and feeding clamping device |
| WO2021254084A1 (en) * | 2020-06-15 | 2021-12-23 | 天通日进精密技术有限公司 | Silicon rod loading and unloading device and silicon rod squaring apparatus |
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Address after: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Patentee after: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Address before: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Patentee before: ZHEJIANG JIYING PRECISION MACHINERY Co.,Ltd. |
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Denomination of utility model: Single crystal silicon rod transfer device Effective date of registration: 20211126 Granted publication date: 20180522 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Registration number: Y2021330002258 |