CN108943455A

CN108943455A - Workpiece transporter and workpiece conveyer method

Info

Publication number: CN108943455A
Application number: CN201710359457.5A
Authority: CN
Inventors: 卢建伟; 李鑫
Original assignee: Zhejiang Ji Ying Precision Machinery Co Ltd
Current assignee: Zhejiang Ji Ying Precision Machinery Co Ltd
Priority date: 2017-05-19
Filing date: 2017-05-19
Publication date: 2018-12-07

Abstract

This application discloses a kind of workpiece transporter and workpiece conveyer methods, the workpiece transporter includes commutate carrier and the first fixture and the second fixture on commutation carrier, first fixture is for clamping the first form workpiece, second fixture is for clamping the second form workpiece, make commutation movement by driving commutation carrier, may make the first fixture converted between loading and unloading station and operation station the workpiece in the form of will be located at loading and unloading station first be transported to operation station and the second fixture converted between operation station and loading and unloading station by will be located at be completed at operation station cutting operation second in the form of workpiece be transported to loading and unloading station, so, it can not only consolidate and clamp workpiece, it more can realize the quick of workpiece and easily transport, improve the transfer efficiency of workpiece.

Description

Workpiece transporter and workpiece conveyer method

Technical field

This application involves wire cutting technology fields, more particularly to a kind of workpiece transporter and workpiece conveyer method.

Background technique

When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics Conductor work piece cut is the structure of specification.Since semiconductor workpiece cutting is the important procedure for restricting subsequent finished product, thus It is also higher and higher to its job requirements.Currently, multi-wire cutting technology is since with high production efficiency, operating cost is low, operation is smart The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.

Multi-wire cutting technology is relatively advanced semiconductor workpiece cutting technique in the world at present, its principle is to pass through height The semiconductor workpiece that the diamond wire of speed movement treats operation carries out cutting and forms target product.

By taking crystalline silicon rod is cut as an example, generally, rough flow chart includes: first using shear to long silicon originally Stick carries out truncation operation to form the short silicon rod of multistage, after the completion of truncation, and is opened using excavation machine the short silicon rod after truncation Crystal silicon cube is formed after Fang Zuoye, it is subsequent to reuse slicer slice operation is carried out to crystal silicon cube, then obtain silicon wafer.But, Under normal circumstances, in the related art, operation needed for each procedures is independent arrangement, and operating equipment is dispersed in different The different production areas of production unit or workshop or workshop, execute the workpiece of different procedures conversion need into Row carries allotment, in this way, process is many and diverse, inefficiency needs more manpowers or transloading equipment, and security risk is big, in addition, each Flowing link between the operating equipment of process is more, and the risk of workpiece damage is improved during workpiece transfer, is also easy to produce non- It is unqualified caused by the factor of production, reduce product qualification rate and existing processing method brought by unreasonable loss, be The major improvement project that each company faces.

Summary of the invention

In view of above-described disadvantages, the purpose of the application is to disclose a kind of workpiece transporter and workpiece transhipment Method, for solving the problems such as workpiece transfer efficiency present in the relevant technologies is low.

To achieve the above object and other purposes, the application disclose a kind of workpiece transporter on the one hand, are applied to more In linear cutting equipment, the multi-wire saw equipment has loading and unloading station and operation station, and the workpiece transporter includes: to change To carrier；First fixture, set on the first fixture area of the commutation carrier, for clamping the first form workpiece；Second fixture, if In the second fixture area of the commutation carrier, for clamping the second form workpiece；Wherein, by driving the commutation carrier to change To movement so that first fixture and second fixture on the commutation carrier loading and unloading station and operation station it Between conversion to transport the associated workpiece clamped.

Workpiece transporter disclosed in the present application, the first fixture and second including commutation carrier and on commutation carrier Fixture, for clamping the first form workpiece, the second fixture is carried for clamping the second form workpiece by driving commutation the first fixture Tool makees commutation movement, and the first fixture may make to convert between loading and unloading station and operation station will be located at loading and unloading station First form workpiece is transported to operation station and the second fixture and converts between operation station and loading and unloading station will be located at The second form workpiece that cutting operation is completed at operation station is transported to loading and unloading station, so, it can be achieved that workpiece it is quick And easily transport, the transfer efficiency of workpiece is improved, in addition, the first fixture and the second clamp structure are simple and can firmly press from both sides Handle workpiece.

In some embodiments, first fixture includes: the first fixture installation part, is set on the commutation carrier； At least two first clamping member are arranged along the first fixture installation part spacing；Second fixture includes: the second fixture peace Piece installing is set on the commutation carrier；At least two second clamping pieces are arranged along the second fixture installation part spacing.

In some embodiments, described first clamping member includes: the first clamp arm mounting base, is set to the fixture installation part On；At least two first clamp arm are movably arranged in the first clamp arm mounting base；First clamp arm driving mechanism, for driving It states at least two first clamp arm and makees opening and closing movement；Second clamping piece includes: the second clamp arm mounting base, is set to the fixture and pacifies In piece installing；At least two second clamp arm are movably arranged in the second clamp arm mounting base；Second clamp arm driving mechanism, for driving It moves at least two second clamp arm and makees opening and closing movement.

In some embodiments, the first clamp arm driving mechanism includes: the first folding gear, is set to first folder On arm；First gear actuator has the first groove engaged with the first folding gear in first clamp arm；First driving Source is connected to the first gear actuator, for driving the first gear actuator to move；The second clamp arm driving machine Structure includes: the second folding gear, is set in second clamp arm；Second gear actuator, have in second clamp arm Second groove of the second folding gear engagement；Second driving source is connected to the second gear actuator, for driving described The movement of two gear drives.

In some embodiments, the first gear actuator is the first rack gear, the opposite sides of first rack gear It is respectively equipped with the first groove corresponding with the first folding gear engagement at least two first clamp arm；First driving Source is the first cylinder or the first driving motor for driving first rack movement；The second gear actuator is second Rack gear, the opposite sides of second rack gear is respectively equipped with to be engaged with the second folding gear at least two second clamp arm Corresponding second groove；Second driving source is the second cylinder or the second driving electricity for driving second rack movement Machine.

In some embodiments, the first gear actuator is the first driving gear structure；First driving source For for driving the first driving motor of the first driving gear structure operating；The second gear actuator is the second driving Gear structure；Second driving source is the second driving motor for driving the second driving gear structure operating.

In some embodiments, in first fixture, at least one of at least two first clamping member first Clamping piece is equipped with the first guiding driving mechanism, for driving it along the first fixture installation part movement, with adjust it is described to The spacing of few two first clamping member；In second fixture, at least one of at least two second clamping pieces second are pressed from both sides Gripping member is equipped with the second guiding driving mechanism, described at least with adjusting for driving it along the second fixture installation part movement The spacing of two the second clamping pieces.

In some embodiments, the workpiece transporter further includes height testing instrument, is set on the commutation carrier, For detecting the height of the first form workpiece.

In some embodiments, first fixture is round piece fixture, and second fixture is square cross folder Tool.

The application discloses a kind of workpiece conveyer method on the other hand, is applied in foregoing workpiece transporter, The workpiece conveyer method includes: the first shape clamped using the first fixture in workpiece transporter positioned at loading and unloading station State workpiece；Driving commutation carrier makees commutation movement, so that first fixture is with the first form workpiece clamped by upper and lower Material station is converted to operation station；First fixture is discharged, by the first form work-piece clamped in operation work Position；The commutation carrier is driven to make commutation movement, so that the second fixture in workpiece transporter is converted to operation station；It utilizes Second fixture clamps the second form workpiece positioned at the operation station, and the second form workpiece is to first form It is formed after workpiece progress cutting operation；The commutation carrier is driven to make commutation movement, so that the second fixture is with clamping Second form workpiece converts supreme discharge station by operation station；The second fixture is discharged, the second work form part clamped is set It is put in loading and unloading station and carries out blanking.

Workpiece conveyer method disclosed in the present application will be located at the first form workpiece of loading and unloading station first with the first fixture It clamps and the first form workpiece is transported to by loading and unloading station by operation station by commutation movement, it is subsequent, recycle second The the second form workpiece clamp for being located at operation station is handled and is moved the second form workpiece by commutation by operation work by fixture Position is transported to loading and unloading station, and compared with the existing technology, the application workpiece conveyer method improves the efficiency of workpiece transhipment, reduces Cost and avoid workpiece damage.

Detailed description of the invention

Fig. 1 is the first state schematic diagram of the application workpiece transporter in one embodiment.

Fig. 2 is the top view of Fig. 1.

Fig. 3 is the second status diagram of the application workpiece transporter in one embodiment.

Fig. 4 is the top view of Fig. 3.

Fig. 5 is the rear pseudosection of the first fixture.

Fig. 6 is the rear pseudosection of the second fixture.

Fig. 7 is the top view of the application workpiece transporter in another embodiment.

Fig. 8 is the flow diagram of the application workpiece conveyer method in one embodiment.

Fig. 9 is shown as state of the first fixture in workpiece transporter corresponding to the single-wafer silicon rod on loading and unloading station Schematic diagram.

The first fixture that Figure 10 is shown as in workpiece transporter clamps the single-wafer silicon rod positioned at loading and unloading station Status diagram.

Figure 11 be shown as commutation carrier make commutation movement after the first fixture with the single-wafer silicon rod clamped correspond to make The status diagram of industry station.

Single-wafer silicon rod is placed in the status diagram of operation station after Figure 12 is shown as the first fixture of release.

Figure 13 is shown as state of the second fixture in workpiece transporter corresponding to the monocrystalline silicon cube on operation station Schematic diagram.

The second fixture that Figure 14 is shown as in workpiece transporter clamps monocrystalline silicon cube and positioned at operation station One fixture clamps the status diagram of the new single-wafer silicon rod positioned at loading and unloading station.

Figure 15 be shown as commutation carrier make commutation movement after the second fixture with the monocrystal rod cube clamped correspond to it is upper Discharge station and the first fixture correspond to the status diagram of operation station with the single-wafer silicon rod clamped.

Monocrystalline silicon cube is placed in after the first fixture of loading and unloading station and release newly after Figure 16 is shown as the second fixture of release Single-wafer silicon rod be placed in the status diagram of operation station.

Specific embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

Fig. 1 is please referred to Figure 16.It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., are only used To cooperate the revealed content of specification, so that those skilled in the art understands and reads, being not limited to the application can The qualifications of implementation, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size It is whole, in the case where not influencing the effect of the application can be generated and the purpose that can reach, it should all still fall in skill disclosed herein Art content obtains in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", "left", "right", " centre " and The term of " one " etc. is merely convenient to being illustrated for narration, rather than to limit the enforceable range of the application, relativeness It is altered or modified, under the content of no substantial changes in technology, when being also considered as the enforceable scope of the application.

The inventors of the present application found that in the relevant cutting operation technology for crystalline silicon rod, each work for being related to Industry is independent arrangement, and operating equipment is dispersed in the different production areas of different production unit or workshop or workshop, The conversion needs for executing the crystalline silicon rod of different procedures are transported through allotment, and there are processes, and many and diverse, transfer device structure is answered The problems such as miscellaneous and transfer efficiency is low.In view of this, leading to present applicant proposes a kind of workpiece transporter and workpiece conveyer method Scrap build is crossed, quick and stable workpiece transporter and its workpiece conveyer method can at least be realized by providing, in this way, can account for The transhipment for completing different shape crystalline silicon rod in the case of certain by workpiece transporter with space, simplifies workpiece transporter Structure, reduce transhipment process, improve workpiece transhipment efficiency, reduce costs and avoid workpiece damage.

Fig. 1 and Fig. 2 are please referred to, the structural schematic diagram of the application workpiece transporter in one embodiment is shown as, In, Fig. 1 is the stereoscopic schematic diagram of the application workpiece transporter in the first state, and Fig. 2 is that the application workpiece transporter exists Stereoscopic schematic diagram under second state.The application workpiece transporter is applied in multi-wire saw equipment, for crystalline silicon rod Cutting operation is carried out to form the structure for closing rule.The multi-wire saw equipment at least has loading and unloading station and operation station, institute It states loading and unloading station and is used at least carry out the cutting operation of workpiece for carrying out the operation of feeding and discharging of workpiece, the operation station, Workpiece transporter is then used for workpiece (the preamble workpiece before including: cutting operation and the subsequent workpieces after cutting operation) Transhipment between loading and unloading station and operation station.

In conjunction with Fig. 1 to Fig. 6, workpiece transporter disclosed in the present application includes: commutation carrier 11, the first fixture 13, second Fixture 15, wherein the first fixture 13 and the second fixture 15 are configured at commutation carrier 11, make commutation fortune by driving commutation carrier 11 It is dynamic, it may make the first fixture 13 configured on commutation carrier 11 and the second fixture 15 to turn between loading and unloading station and operation station It changes to transport the associated workpiece clamped.

The carrier 11 that commutates is the agent set for other kinds component in workpiece transporter to be arranged, other kinds component It may include mainly the first fixture 13 and the second fixture 15, but be not limited thereto, other component also may be, for example, mechanical structure, electricity Gas control system and numerical control device etc..In the present embodiment, commutation carrier 11 may include pedestal 111, the top opposite with pedestal 111 Frame 113 and the supporting framework between pedestal 111 and upper frame 113.In addition, the commutation another important function of carrier 11 is By commutation movement to support the commutation of the first fixture 13 and the second fixture 15 to convert.Commutating carrier 11 can be for example by a commutation Mechanism makees commutation movement.In specific implementation, separately referring to Fig. 3, which show the application workpiece transporters at certain The upward cross-sectional view in side, as shown in figure 3, make commutate carrier 11 realize commutation movement reversing mechanism may include rotation axis and Rotary electric machine (is not shown) that (installation foundation can example by installation foundation of the rotation axis axis connection under it for commutation carrier 11 The for example pedestal of multi-wire saw equipment or the workbench of multi-wire saw equipment), for being connect with commutation carrier 11 in rotation axis Connecting pin can be equipped with the installation edge that extends out, the installation along it is upper it is uniformly distributed have a mounting hole, it is corresponding, in the carrier 11 that commutates The central position of pedestal 111 also is provided with mounting hole, and during installation, pedestal 111 is docked with rotation axis in the carrier 11 that commutates, pedestal Mounting hole on 111 is aligned with the mounting hole in rotation axis, later, by additional locking elements such as such as bolts through the mounting hole of alignment After locked, complete commutation carrier 11 assembly.When implementing divertical motion, then start rotary electric machine, driving rotation axis turns It is dynamic to realize commutation movement to drive commutation carrier 11 to rotate.Aforementioned driving rotation axis rotation, which may be designed as one-directional rotation, to be set It is calculated as Double-directional rotary, the one-directional rotation may be, for example, to rotate clockwise or rotate counterclockwise, and the Double-directional rotary then can be such as To rotate clockwise and rotating counterclockwise.In addition, the angle of driving rotation axis rotation can be according to the practical structure of workpiece transporter Make (such as: according to the structure of commutation carrier 11 and it is set to the first fixture 13 and the second fixture 15 to commutate on carrier 11 Setting positional relationship etc.) and set.Furthermore the pedestal 111 in the carrier 11 that commutates can be used disc structure, central location with turn Moving axis connection, but the shape of pedestal 111 is not limited to this, and in other embodiments, square plate or ellipse can also be used in pedestal 111 Disk.

At least two fixtures are provided on commutation carrier 11, for clamping corresponding workpiece.In this example, it is assumed that There are two fixtures for setting on commutation carrier 11, they are referred to as the first fixture 13 and the second fixture 15, wherein the first fixture 13 are set to the first fixture area of commutation carrier 11, and for clamping the first form workpiece, the second fixture 15 is set to commutation carrier 11 Second fixture area, for clamping the second form workpiece.In this way, making commutation movement by driving commutation carrier 11, so that commutation carries The first fixture 13 on tool 11 converts workpiece and the second fixture in the form of transporting first between loading and unloading station and operation station 15 convert the workpiece in the form of transporting second between operation station and loading and unloading station.It is changed as previously mentioned, the first fixture 13 is set to To the first fixture area of carrier 11, the second fixture 15 is set to the second fixture area of commutation carrier 11, the first fixture area and the second folder Tool area can be set according to actual device structure.For example, the first fixture area and the second fixture area are in commutation carrier 11 backwards to setting Two positions, further, the first fixture area and the second fixture area can differ 180 °, so that loading and unloading station and operation Station connects being aligned, and (can certainly be understood that: loading and unloading station and operation station connect being aligned and are located at commutation load The opposite sides of tool 11, therefore, for the first fixture area of the first fixture 13 to be arranged and for being arranged second in the carrier 11 that commutates Second fixture area of fixture 15 can differ 180 °), in this way, after the carrier 11 that will commutate rotates 180 °, the first fixture 13 and the Two fixtures 15 can realize transposition, it may be assumed that original the first fixture 13 corresponding to loading and unloading station is after commutation carrier 11 commutates It is changed through commutation carrier 11 backward corresponding to upper and lower corresponding to operation station and original the second fixture 15 corresponding to operation station Station is expected, alternatively, originally changing through commutation carrier 11 backward corresponding to loading and unloading station corresponding to the first fixture 13 of operation station And original the second fixture 15 corresponding to loading and unloading station is changed through commutation carrier 11 backward corresponding to operation station.But, exist In practical application, the setting relationship for the first fixture area and the second fixture area or loading and unloading station and operation station is not palpus So overcritical, the first fixture area and the second fixture area can also for example differ 90 °, even, the first fixture area and the second fixture area Any position in OK range can be differed, as long as ensuring to generate between the first fixture area and the second fixture area unnecessary dry If disturbing.

As previously mentioned, the application workpiece transporter is applied in multi-wire saw equipment, for for example, crystalline silicon rod Workpiece, the multi-wire saw equipment to cutting operation made by crystalline silicon rod include at least crystalline silicon rod evolution operation, lead to Evolution operation is crossed, can will be formed as the monocrystalline silicon that section is in class rectangle after evolution operation in the single-wafer silicon rod of cylinder morphology Cube.Therefore, the first fixture 13 may be, for example, round piece fixture, for corresponding clamping single-wafer silicon rod；Second fixture 15 is then It may be, for example, square workpiece fixture, for corresponding clamping monocrystalline silicon cube.

The first fixture 13 and the second fixture 15 are described in detail individually below.

First fixture 13 further comprises the first fixture installation part 131 and at least two first clamping member 132, wherein extremely Few two first clamping member 132 are spaced setting relative to the first fixture installation part 131, for clamping the first form workpiece.? In one embodiment, as the single-wafer silicon rod of the first form workpiece 101, either in loading and unloading station still in operation work Position is all to erect to place, and therefore, at least two first clamping member 132 are vertically spaced and set relative to the first fixture installation part 131 It sets, that is, at least two first clamping member 132 are setting up and down.

In specific implementation, any one first clamping member 132 is further included: the first clamp arm mounting base 133 and at least two A first clamp arm 134, wherein the first clamp arm mounting base 133 is provided on the first fixture installation part 131, at least two first folders Arm 134 is movably arranged in the first clamp arm mounting base 133.In view of the section of the single-wafer silicon rod as the first form workpiece 101 For circle, in an alternative embodiment, generally speaking first clamping member 132 is round piece fixture, forms first clamping member 132 the first clamp arm 134 is two of symmetric design, and single first clamp arm 134 is designed as with arc clamping face, preferably, The arc clamping face of single first clamp arm 134 will be more than the circular arc of a quarter, in this way, being made of two the first clamp arm 134 First clamping member 132 arc clamping face will be more than half circular arc.Certainly, the arc clamping in the first clamp arm 134 On face can also additional cushion, for avoiding during clamping single-wafer silicon rod as the first form workpiece 101 The damage to single-wafer silicon rod surface is caused, the good result of protection single-wafer silicon rod is played.Extraly, first clamping member is utilized 132 can more have both the effect for the adjusting that centers.Under general scenario, the first clamp arm 134 in first clamping member 132 is in clamping state Under, the center for the grasping part that two the first clamp arm 134 are constituted is coincided with the center of single-wafer silicon rod.Therefore, when When using erectting the single-wafer silicon rod 101 of placement on 132 de-clamping loading and unloading station of first clamping member, in first clamping member 132 Two the first clamp arm 134 shrink, single-wafer silicon rod 101 is resisted against by the arc clamping face in the first clamp arm 134.In the first folder During arm 134 shrinks simultaneously clamping single-wafer silicon rod 101, single-wafer silicon rod 101 is pushed away by two the first clamp arm 134 of both sides It is dynamic and mobile towards the middle section of grasping part, until single-wafer silicon rod 101 is by two first folders in first clamping member 132 Arm 134 clamps, at this point, the center of single-wafer silicon rod 101 can be located at the center of the grasping part of first clamping member 132.

To enable at least two first clamp arm 134 in first clamping member 132 smooth and being held fixedly different rulers The single-wafer silicon rod of very little specification, first clamping member 132 further include the first clamp arm driving mechanism, for driving at least two first folders Arm 134 makees opening and closing movement.

Referring to Fig. 5, its rear pseudosection for being schematically shown as the first fixture 13.In specific implementation, as shown in figure 5, first Clamp arm driving mechanism further comprises: the first folding gear 135, first gear actuator 136 and the first driving source 137.The One folding gear 135 is set in corresponding first clamp arm 134.First gear actuator 136 have in the first clamp arm 134 First folding gear 135 engage groove.Driving source is connected to first gear actuator 136, for driving first gear to drive Moving part 136 moves.On a kind of implementation, first gear actuator 136 is the first rack gear, which is located at two The centre of a first clamp arm 134, respectively on two lateral surfaces of the first clamp arm 134 of two sides points in the first rack gear 136 Gear 135 She You not being opened and closed with first in two the first clamp arm 134 and engaging corresponding groove, the first driving source 137 can be such as For driving motor or or cylinder.In this way, according to above-mentioned implementation, in practical applications, when need to realize 134 clamping of the first clamp arm When, from as the first driving source driving motor or cylinder driving as first gear actuator the first rack gear 136 to moving up It is dynamic, drive the first folding gear 135 of both sides engagement to make outward turning movement by the first rack gear 136, the first folding gear 135 is in outward turning Drive in the process the first clamp arm 134 (the first folding gear 135 can be connect with the first clamp arm 134 by shaft) make decentralization act with Clamping state is transferred to by releasing orientation；Conversely, when that need to realize that the first clamp arm 134 is unclamped, by the driving as the first driving source Motor (or cylinder) drives the first rack gear 136 as first gear actuator to move down, and drives both sides by the first rack gear 136 First folding gear 135 of engagement makees pronation, and the first folding gear 135 drives the first clamp arm 134 (the during revolving inside One folding gear 135 can be connect with the first clamp arm 134 by shaft) raising up acts to be transferred to releasing orientation by clamping state. Certainly, it above are only an embodiment, be not intended to limit the working condition of first clamping member 132, in fact, in aforementioned " to On ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change can be according to first The structure and function mode of clamp arm 134, the first clamp arm driving mechanism construction and have other changes.

Just as it is known by a person skilled in the art that being by carrying out truncation work to long silicon rod originally for single-wafer silicon rod Industry and formed, be bound to so that the size difference between single-wafer silicon rod is totally different, be for being put to setting in view of the first fixture 13 The single-wafer silicon rod 101 set under state is clamped, therefore, for the first fixture 13, the influence master of aforementioned dimensions difference Just to show that the length difference opposite sex of single-wafer silicon rod is clamped to whether first clamping member 132 in the first fixture 13 can correspond to The secret worry of single-wafer silicon rod.

To reduce the risk even exempted above-mentioned first clamping member 132 and may can not be clamped to single-wafer silicon rod, the One fixture 13 has different design schemes.

In one implementation, the first fixture 13 uses fixed clamping piece, that is, with vertical side on commutation carrier 11 First clamping member as much as possible is fixedly installed in formula, and, two neighboring first clamping member 132 in these first clamping member 132 Spacing is as small as possible, in this way, using these first clamping member 132 can cover all kinds scale lengths single-wafer silicon rod.For example, If the length of single-wafer silicon rod is longer, clamping is participated in using first clamping member 132 more on commutation carrier 11；If single-wafer The length of silicon rod is shorter, then clamping is participated in using first clamping member 132 less on commutation carrier 11, for example, underlying Several first clamping member 132 participate in clamping, and be located above and be higher than those of single-wafer silicon rod first clamping member 132 Just it is not involved in.

In other implementations, the first fixture 13 uses movable clamping piece, that is, in the first installation of commutation carrier 11 First clamping member 132 is arranged in activity in a manner of vertical on face, since first clamping member 132 is movable design, therefore, first The quantity of clamping piece 132 can be greatly decreased, and generally two or three can meet.In this way, can using movable clamping piece The single-wafer silicon rod of cover all kinds scale lengths.For example, moving the first of activity setting if the length of single-wafer silicon rod is longer Clamping piece 132 extends the clamping spacing of two first clamping member 132；If the length of single-wafer silicon rod is shorter, the activity of movement is set The first clamping member 132 set shortens the clamping spacing of two first clamping member 132.Movable clamping is used in the first fixture 13 In the implementation of part, to be smooth smoothly up and down to adjust position convenient for movable clamping piece, using the first fixture The first fixture installation part 131 in 13 plays the guiding role of first clamping member 132 of boot activity setting, a kind of achievable In mode, guide post structure is can be used in the first fixture installation part 131, and the first clamp arm mounting base 133 then uses and is socketed on guide post The movable block structure of structure.Specifically, as the guide post structure of the first fixture installation part 131 include erect setting and simultaneously Two capable guide posts, as being then equipped in the movable block structure of the first clamp arm mounting base 133 and the guide post structure In corresponding two perforations of two guide posts or two clips.According to perforation, the movable block is sheathed on the guide post And it can realize and be slid along the guide post.According to clip, the movable block be clipped on the guide post and can realize along The guide post sliding, wherein in practical applications, the clip can be clipped on an at least half part for the guide post.

For first fixture 13 of movable first clamping member, different change case is also had.With two first clamping member For 132, in an alternative embodiment, first clamping member 132 in two first clamping member 132 is movable design Another first clamping member 132 is then fixed design, in this way, being all by the movable design of movement in practical applications That first clamping member 132 adjusts the clamping spacing between first clamping member 132 of fixed design.From the foregoing, it will be observed that Single-wafer silicon rod 101 is to erect to place, therefore, no matter the scale lengths of single-wafer silicon rod, always the bottom of single-wafer silicon rod 101 It can be relatively easy to determination, it is thus preferable to, that first clamping that can will be located above in two first clamping member 132 Part 132 be designed as it is movable, in this way, need to only adjust top first clamping member 132 position.

For the movement for realizing first clamping member 132, first clamping member 132 of the movable design can be equipped with lead first to Driving mechanism.First clamping member 132 of movable design can be driven to install along the first fixture using the first guiding driving mechanism Part 131 moves up and down.In one implementation, the first guiding driving mechanism can for example, the first guiding leading screw 138 and One guide motor 139, wherein the first guiding leading screw 138 is to erect setting, and one end of the first guiding leading screw 138 is connected to first Clamp arm mounting base 133, the other end of the first guiding leading screw 138 are then connected to the first guide motor 139, the first guide motor 139 It may be provided at the top of commutation carrier 11, but be not limited thereto, the first guide motor 139 may also be arranged on commutation carrier 11 Bottom.First guiding leading screw 138 has the characteristics that high-precision, invertibity and efficient, in this way, first above needing to adjust When the position of clamping piece 132, the first guiding leading screw 138 is driven to rotate by the first guide motor 139, the first guiding leading screw 138 exists First clamping member 132 of top is driven to move up and down along the first fixture installation part 131 in rotary course.Such as: the first guiding Motor 139 drives the first guiding leading screw 138 to rotate clockwise, then first clamping member 132 of top is driven to pacify along the first fixture Piece installing 131 is moved upwards with first clamping member 132 far from lower section, increases the clamping spacing between two first clamping member 132； The rotation counterclockwise of the first guiding leading screw 138 of first guide motor 139 driving then drives first clamping member 132 of top along the One fixture installation part 131 is moved downward to reduce between two first clamping member 132 close to first clamping member 132 of lower section Clamp spacing.In this way, can adjust between two first clamping member 132 by the first clamping member 132 for controlling movable design Spacing is clamped, so that the single-wafer silicon rod 101 to different size length is effectively clamped.

In another alternative embodiment, two first clamping member 132 are movable design, in this way, in practical application In, their mutual clamping spacing can be adjusted by the movement of two first clamping member 132 of movable design.Due to First clamping member 132 is movable design, then, at least one first clamping member 132 in two first clamping member 132 need to be set The first guiding driving mechanism is set, for driving two first clamping member 132 to move along the first fixture installation part 131.Relative to Former alternative embodiment, in this alternative embodiment, since two first clamping member 132 in the first fixture 13 are activity Formula, then will have the first guiding of setting driving machine in some first clamping member 132 in two first clamping member 132 Structure is still respectively provided with the situation of the first guiding driving mechanism in two first clamping member 132.

Now being provided with the first guiding driving mechanism with first clamping member 132 of the top in two first clamping member 132 is Example, in this case, the first clamp arm mounting base 133 and the first fixture installation part in one, two first clamping member 132 To be flexibly connected between 131, that is, the first clamp arm mounting base 133 and the first clamp arm thereon in any one first clamping member 132 134 is up and down along the first fixture installation part 131, in addition, the first guiding driving mechanism of setting includes the first guide wire Thick stick 138 and the first guide motor 139, wherein one end of the first guiding leading screw 138 is connected in first clamping member 132 of top The first clamp arm mounting base 133 on, the other end of the first guiding leading screw 138 is then connected to the first guide motor, the first guiding electricity Machine 139 may be provided at the top of commutation carrier 11.In this way, when the position of first clamping member 132 above needing to adjust, by the One guide motor 139 drives the rotation of the first guiding leading screw 138, drives first clamping member in 138 rotary course of the first guiding leading screw 132 move up and down along the first fixture installation part 131, such as: the first guide motor 139 drives 138 up time of the first guiding leading screw Needle rotation, then drive first clamping member 132 of top to move upwards along the first fixture installation part 131 with first far from lower section Clamping piece 132 increases the clamping spacing between two first clamping member 132；First guide motor 139 drives the first guiding leading screw 138 counter-rotatings then drive first clamping member 132 of top to move downward along the first fixture installation part 131 close to lower section First clamping member 132, reduce the clamping spacing between two first clamping member 132.In this way, by controlling movable design First clamping member 132 can adjust the clamping spacing between two first clamping member 132, thus to the monocrystalline of different size length Circle silicon rod 101 is effectively clamped.

In fact, utilizing the first guiding driving mechanism in the case of two first clamping member 132 are movable design The clamping spacing between two first clamping member 132 not only can adjust to carry out the single-wafer silicon rod 101 of different size length Effectively except clamping, the purpose of lifting can be also realized to the single-wafer silicon rod 101 of clamping, when two first clamping member 132 are effective After clamping single-wafer silicon rod 101, single-wafer silicon rod 101 is gone up and down and moving up and down by drive first clamping member 132.Tool Body, still by taking first clamping member 132 of top is provided with the first guiding driving mechanism as an example, firstly, first clamping member of top 132 are moved up and down along the first fixture installation part 131 by the first guiding driving mechanism and have adjusted and lower section first clamping member Clamping spacing between 132；Then, it is driven using the first clamp arm driving mechanism in each first clamping member 132 corresponding Two the first clamp arm 134 make clamping movement with smooth and be held fixedly single-wafer silicon rod 101；Then, the first folder of top Gripping member 132 is driven by the first guiding driving mechanism move upwards along the first fixture installation part 131 again, at this point, due to rubbing Power effect is wiped, first clamping member 132 of the single-wafer silicon rod 101 and lower section that clamp moves upwards therewith together, wherein clamping Single-wafer silicon rod 101 firmly move upwards utilize be top first clamping member 132 and single-wafer silicon rod 101 between friction Power effect, first clamping member 132 move upwards, and what is utilized is between single-wafer silicon rod 101 and first clamping member 132 of lower section Frictional force effect, thus realize lifting single-wafer silicon rod 101 effect.First clamping member 132 of top is driven in the first guiding Driving first clamping member 132 of single-wafer silicon rod 101 and lower section to move downward under the driving of motivation structure is also identical process, from And realize the effect of landing single-wafer silicon rod 101, details are not described herein.

It should be noted that in other change case, first clamping member of lower section e.g. in two first clamping member 132 First guiding driving mechanism is set on 132, and structure, set-up mode and the driving working method of the first guiding driving mechanism are with before State top first clamping member 132 the first guiding driving mechanism it is similar, such as by lower section first clamping member 132 first Moved up and down under the driving of guiding driving mechanism along the first fixture installation part 131 and adjust with top first clamping member 132 it Between clamping spacing, and single-wafer silicon is driven under the driving of the first guiding driving mechanism by first clamping member 132 of lower section First clamping member 132 of stick 101 and top the modes such as moves up and down along the first fixture installation part 131 together.Such as two again First clamping member 132 is provided with the first guiding driving mechanism, then the set-up mode of the first guiding driving mechanism and driving work The motion mode of mode and two first clamping member 132 is self-evident, and details are not described herein.

It moves up and down in first clamping member 132 for movable setting along the first fixture installation part 131 to adapt to In the situation that the single-wafer silicon rod of different size length is clamped, in addition to first clamping member 132 is set using movable structure Meter, first clamping member 132 need to be arranged except first guiding driving mechanism etc., certainly will also need to know the monocrystalline for currently needing to clamp The scale lengths of circle silicon rod.In view of this, the workpiece transporter in the application may also include height testing instrument (not in the drawings Shown), for erectting the height for the single-wafer silicon rod placed, so that first clamping member 132 as movable setting exists It is subsequent to move up or move down along the first fixture installation part 131 and the foundation of moving distance.

Second fixture 15 further comprises the second fixture installation part 151 and at least two second clamping pieces 152, wherein extremely Few two the second clamping pieces 152 are spaced setting relative to the second fixture installation part 151, for clamping the second form workpiece.? In one embodiment, as the monocrystalline silicon cube of the second form workpiece 102, either in loading and unloading station still in operation work Position is all to erect to place, and therefore, at least two second clamping pieces 152 are vertically spaced and set relative to the second fixture installation part 151 It sets, that is, at least two second clamping pieces 152 are setting up and down.

In specific implementation, any one second clamping piece 152 is further included: the second clamp arm mounting base 153 and at least two A second clamp arm 154, wherein the second clamp arm mounting base 153 is provided on the second fixture installation part 151, at least two second folders Arm 154 is movably arranged in the second clamp arm mounting base 153.In view of the section of the monocrystalline silicon cube as the second form workpiece 102 For class rectangle, in an alternative embodiment, generally speaking the second clamping piece 152 is square workpiece fixture, the second clamping of composition Second clamp arm 154 of part 152 is two of symmetric design, and single second clamp arm 154 is designed as having single clamped flat face (ginseng See Fig. 2 and Fig. 4) or dog-ear clamping face (referring to Fig. 7, be shown as the vertical view of the application workpiece transporter in other embodiments Figure), wherein the dog-ear clamping face is made of continuous two clamped flat faces, has one between two clamped flat faces Dog-ear.Certainly, on the arc clamping face in the second clamp arm 154 can also additional cushion, for avoiding in clamping as the The damage to monocrystalline silicon cube surface is caused during the monocrystalline silicon cube of two form workpiece 102, plays protection monocrystalline silicon side The good result of body.Extraly, the effect for the adjusting that centers can be more had both using the second clamping piece 152.Under general scenario, second Under clamping state, the center for the grasping part that two the second clamp arm 154 are constituted is the second clamp arm 154 in clamping piece 152 It coincides with the center of monocrystalline silicon cube.Therefore, with the of the second clamp arm 154 with tool dog-ear clamping face shown in Fig. 7 For two clamping pieces 152, when erectting the monocrystalline silicon cube 102 of placement on using 152 de-clamping operation station of the second clamping piece, Two the second clamp arm 154 in second clamping piece 152 are shunk, and are resisted against monocrystalline silicon by the dog-ear clamping face in the second clamp arm 154 Cube 102, wherein two clamped flat faces in the dog-ear clamping face correspond respectively to adjacent in monocrystalline silicon cube 102 Two sides.During the second clamp arm 154 shrinks simultaneously clamping monocrystalline silicon cube 102, monocrystalline silicon cube 102 is by the two of both sides A second clamp arm 154 pushes and towards the movement of the middle section of grasping part, until monocrystalline silicon cube 102 is by the second clamping piece Two the second clamp arm 154 in 152 clamp, at this point, the center of monocrystalline silicon cube 102 can be located at the second clamping piece 152 The center of grasping part.

Particularly, to enable at least two second clamp arm 154 in the second clamping piece 152 smooth and be held fixedly The silicon rod of different type difference dimensions, the second clamping piece 152 further include the second clamp arm driving mechanism, for driving at least two A second clamp arm 154 makees opening and closing movement.

To enable at least two second clamp arm 154 in the second clamping piece 152 smooth and being held fixedly different rulers The monocrystalline silicon cube of very little specification, the second clamping piece 152 further include the second clamp arm driving mechanism, for driving at least two second folders Arm 154 makees opening and closing movement.

Referring to Fig. 6, its rear pseudosection for being schematically shown as the second fixture 15.In specific implementation, as shown in fig. 6, second Clamp arm driving mechanism further comprises: the second folding gear 155, second gear actuator 156 and the second driving source 157.The Two folding gears 155 are set in corresponding second clamp arm 154.Second gear actuator 156 have in the second clamp arm 154 Second folding gear 155 engage groove.Driving source is connected to second gear actuator 156, for driving second gear to drive Moving part 156 moves.On a kind of implementation, second gear actuator 156 is the second rack gear, which is located at two The centre of a second clamp arm 154, respectively on two lateral surfaces of the second clamp arm 154 of two sides points in the second rack gear 156 Gear 155 She You not being opened and closed with second in two the second clamp arm 154 and engaging corresponding groove, the second driving source 157 can be such as For driving motor or or cylinder.In this way, according to above-mentioned implementation, in practical applications, when need to realize 154 clamping of the second clamp arm When, from as the second driving source driving motor or cylinder driving as second gear actuator the second rack gear 156 to moving up It is dynamic, drive the second folding gear 155 of both sides engagement to make outward turning movement by the second rack gear 156, the second folding gear 155 is in outward turning Drive in the process the second clamp arm 154 (the second folding gear 155 can be connect with the second clamp arm 154 by shaft) make decentralization act with Clamping state is transferred to by releasing orientation；Conversely, when that need to realize that the second clamp arm 154 is unclamped, by the driving as the second driving source Motor (or cylinder) drives the second rack gear 156 as second gear actuator to move down, and drives both sides by the second rack gear 156 Second folding gear 155 of engagement makees pronation, and the second folding gear 155 drives the second clamp arm 154 (the during revolving inside Two folding gears 155 can be connect with the second clamp arm 154 by shaft) raising up acts to be transferred to releasing orientation by clamping state. Certainly, it above are only an embodiment, be not intended to limit the working condition of the second clamping piece 152, in fact, in aforementioned " to On ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change can be according to second The structure and function mode of clamp arm 154, the second clamp arm driving mechanism construction and have other changes.

Similarly, in view of the second fixture 15 be for erect placement status under monocrystalline silicon cube 102 clamp, because This, for the second fixture 15, the length difference opposite sex of monocrystalline silicon cube to the second clamping piece 152 in the second fixture 15 whether It corresponding can be clamped to the secret worry of monocrystalline silicon cube.

To reduce the risk even exempted above-mentioned second clamping piece 152 and may can not be clamped to monocrystalline silicon cube, the Two fixtures 15 have different design schemes.

In one implementation, the second fixture 15 uses fixed clamping piece, that is, with vertical side on commutation carrier 11 The second clamping piece as much as possible is fixedly installed in formula, and, two neighboring second clamping piece 152 in these second clamping pieces 152 Spacing is as small as possible, in this way, using these second clamping pieces 152 can cover all kinds scale lengths monocrystalline silicon cube.For example, If the length of monocrystalline silicon cube is longer, clamping is participated in using the second clamping piece 152 more on commutation carrier 11；If monocrystalline silicon The length of cube is shorter, then clamping is participated in using the second clamping piece 152 less on commutation carrier 11, for example, underlying Several second clamping pieces 152 participate in clamping, and be located above and be higher than the second clamping piece 152 of those of monocrystalline silicon cube Just it is not involved in.

In other implementations, the second fixture 15 uses movable clamping piece, that is, in the second installation of commutation carrier 11 The second clamping piece 152 is arranged in activity in a manner of vertical on face, since the second clamping piece 152 is movable design, therefore, second The quantity of clamping piece 152 can be greatly decreased, and generally two or three can meet.In this way, can using movable clamping piece The monocrystalline silicon cube of cover all kinds scale lengths.For example, moving the second of activity setting if the length of monocrystalline silicon cube is longer Clamping piece 152 extends the clamping spacing of two the second clamping pieces 152；If the length of monocrystalline silicon cube is shorter, the activity of movement is set The second clamping piece 152 set shortens the clamping spacing of two the second clamping pieces 152.Movable clamping is used in the second fixture 15 In the implementation of part, to be smooth smoothly up and down to adjust position convenient for movable clamping piece, using the second fixture The second fixture installation part 151 in 15 plays the guiding role of the second clamping piece 152 of boot activity setting, a kind of achievable In mode, guide post structure is can be used in the second fixture installation part 151, and the second clamp arm mounting base 153 then uses and is socketed on guide post The movable block structure of structure.Specifically, as the guide post structure of the second fixture installation part 151 include erect setting and simultaneously Two capable guide posts, as being then equipped in the movable block structure of the second clamp arm mounting base 153 and the guide post structure In corresponding two perforations of two guide posts or two clips.According to perforation, the movable block is sheathed on the guide post And it can realize and be slid along the guide post.According to clip, the movable block be clipped on the guide post and can realize along The guide post sliding, wherein in practical applications, the clip can be clipped on an at least half part for the guide post.

For the second fixture 15 of movable second clamping piece, different change case is also had.With two the second clamping pieces For 152, in an alternative embodiment, second clamping piece 152 in two the second clamping pieces 152 is movable design Another second clamping piece 152 is then fixed design, in this way, being all by the movable design of movement in practical applications That second clamping piece 152 adjusts the clamping spacing between the second clamping piece 152 of fixed design.From the foregoing, it will be observed that Monocrystalline silicon cube 102 is to erect to place, therefore, no matter the scale lengths of monocrystalline silicon cube, always the bottom of monocrystalline silicon cube 102 It can be relatively easy to determination, it is thus preferable to, that second clamping that can will be located above in two the second clamping pieces 152 Part 152 be designed as it is movable, in this way, need to only adjust top the second clamping piece 152 position.

For the movement for realizing the second clamping piece 152, the second clamping piece 152 of the movable design can be equipped with lead second to Driving mechanism.The second clamping piece 152 of movable design can be driven to install along the second fixture using the second guiding driving mechanism Part 151 moves up and down.In one implementation, the second guiding driving mechanism can for example, the second guiding leading screw 158 and Two guide motors 159, wherein the second guiding leading screw 158 is to erect setting, and one end of the second guiding leading screw 158 is connected to second Clamp arm mounting base 153, the other end of the second guiding leading screw 158 are then connected to the second guide motor 159, the second guide motor 159 It may be provided at the top of commutation carrier 11, but be not limited thereto, the second guide motor 159 may also be arranged on commutation carrier 11 Bottom.Second guiding leading screw 158 has the characteristics that high-precision, invertibity and efficient, in this way, second above needing to adjust When the position of clamping piece 152, the second guiding leading screw 158 is driven to rotate by the second guide motor 159, the second guiding leading screw 158 exists The second clamping piece 152 of top is driven to move up and down along the second fixture installation part 151 in rotary course.Such as: the second guiding Motor 159 drives the second guiding leading screw 158 to rotate clockwise, then the second clamping piece 152 of top is driven to pacify along the second fixture Piece installing 151 is moved upwards with the second clamping piece 152 far from lower section, increases the clamping spacing between two the second clamping pieces 152； The rotation counterclockwise of the second guiding leading screw 158 of second guide motor 159 driving then drives the second clamping piece 152 of top along the Two fixture installation parts 151 are moved downward to reduce between two the second clamping pieces 152 close to the second clamping piece 152 of lower section Clamp spacing.In this way, can adjust between two the second clamping pieces 152 by the second clamping piece 152 for controlling movable design Spacing is clamped, so that the monocrystalline silicon cube 102 to different size length is effectively clamped.

In another alternative embodiment, two the second clamping pieces 152 are movable design, in this way, in practical application In, their mutual clamping spacing can be adjusted by the movement of two the second clamping pieces 152 of movable design.Due to Second clamping piece 152 is movable design, then, second clamping piece 152 of at least one of two second clamping pieces 152 need to be set The second guiding driving mechanism is set, for driving two the second clamping pieces 152 to move along the second fixture installation part 151.Relative to Former alternative embodiment, in this alternative embodiment, since two the second clamping pieces 152 in the second fixture 15 are activity Formula, then will have the second guiding of setting driving machine on some second clamping piece 152 in two the second clamping pieces 152 Structure is still respectively provided with the situation of the second guiding driving mechanism on two the second clamping pieces 152.

Now being provided with the second guiding driving mechanism with the second clamping piece 152 of the top in two the second clamping pieces 152 is Example, in this case, the second clamp arm mounting base 153 and the second fixture installation part in one, two the second clamping pieces 152 To be flexibly connected between 151, that is, the second clamp arm mounting base 153 and the second clamp arm thereon in any one second clamping piece 152 154 is up and down along the second fixture installation part 151, in addition, the second guiding driving mechanism of setting includes the second guide wire Thick stick 158 and the second guide motor 159, wherein one end of the second guiding leading screw 158 is connected in the second clamping piece 152 of top The second clamp arm mounting base 153 on, the other end of the second guiding leading screw 158 is then connected to the second guide motor, the second guiding electricity Machine 159 may be provided at the top of commutation carrier 11.In this way, when the position of the second clamping piece 152 above needing to adjust, by the Two guide motors 159 drive the rotation of the second guiding leading screw 158, drive the second clamping piece in 158 rotary course of the second guiding leading screw 152 move up and down along the second fixture installation part 151, such as: the second guide motor 159 drives 158 up time of the second guiding leading screw Needle rotation, then drive the second clamping piece 152 of top to move upwards along the second fixture installation part 151 with second far from lower section Clamping piece 152 increases the clamping spacing between two the second clamping pieces 152；Second guide motor 159 drives the second guiding leading screw 158 counter-rotatings then drive the second clamping piece 152 of top to move downward along the second fixture installation part 151 close to lower section The second clamping piece 152, reduce two the second clamping pieces 152 between clamping spacing.In this way, by controlling movable design Second clamping piece 152 can adjust the clamping spacing between two the second clamping pieces 152, thus to the monocrystalline of different size length Silicon cube 102 is effectively clamped.

In fact, utilizing the second guiding driving mechanism in the case of two the second clamping pieces 152 are movable design The clamping spacing between two the second clamping pieces 152 not only can adjust to carry out the monocrystalline silicon cube 102 of different size length Effectively except clamping, the purpose of lifting can be also realized to the monocrystalline silicon cube 102 of clamping, when two the second clamping pieces 152 are effective After clamping monocrystalline silicon cube 102, by driving moving up and down for the second clamping piece 152 to go up and down monocrystalline silicon cube 102.Tool Body, still by taking the second clamping piece 152 of top is provided with the second guiding driving mechanism as an example, firstly, the second clamping piece of top 152 are moved up and down along the second fixture installation part 151 by the second guiding driving mechanism and have adjusted and the second clamping piece of lower section Clamping spacing between 152；Then, it is driven using the second clamp arm driving mechanism in each second clamping piece 152 corresponding Two the second clamp arm 154 make clamping movement with smooth and be held fixedly monocrystalline silicon cube 102；Then, the second folder of top Gripping member 152 is driven by the second guiding driving mechanism move upwards along the second fixture installation part 151 again, at this point, due to rubbing Power effect is wiped, the second clamping piece 152 of the monocrystalline silicon cube 102 and lower section clamped moves upwards therewith together, wherein clamping Monocrystalline silicon cube 102 firmly move upwards utilize be top the second clamping piece 152 and monocrystalline silicon cube 102 between friction Power effect, the second clamping piece 152 move upwards, and what is utilized is between monocrystalline silicon cube 102 and the second clamping piece 152 of lower section Frictional force effect, thus realize lifting monocrystalline silicon cube 102 effect.Second silicon rod clamping piece of top drives in the second guiding Driving the second clamping piece 152 of monocrystalline silicon cube 102 and lower section to move downward under the driving of motivation structure is also identical process, from And realize the effect of landing monocrystalline silicon cube 102, details are not described herein.

It should be noted that in other change case, second clamping piece of lower section e.g. in two the second clamping pieces 152 Second guiding driving mechanism is set on 152, and structure, set-up mode and the driving working method of the second guiding driving mechanism are with before State top the second clamping piece 152 the second guiding driving mechanism it is similar, such as by lower section the second clamping piece 152 second Moved up and down under the driving of guiding driving mechanism along the second fixture installation part 151 and adjust with the second clamping piece of top 152 it Between clamping spacing, and monocrystalline silicon side is driven under the driving of the second guiding driving mechanism by the second clamping piece 152 of lower section Body 102 and the second clamping piece 152 of top the modes such as move up and down along the second fixture installation part 151 together.Such as two again Second clamping piece 152 is provided with the second guiding driving mechanism, then the set-up mode of the second guiding driving mechanism and driving work The motion mode of mode and two the second clamping pieces 152 is self-evident, and details are not described herein.

It moves up and down in the second clamping piece 152 for movable setting along the second fixture installation part 151 to adapt to In the situation that the monocrystalline silicon cube of different size length is clamped, in addition to the second clamping piece 152 is set using movable structure Meter, the second clamping piece 152 need to be arranged except second guiding driving mechanism etc., certainly will also need to know the monocrystalline for currently needing to clamp The scale lengths of silicon cube.In view of this, the workpiece transporter in the application may also include height testing instrument (not in the drawings Shown), for erectting the height for the monocrystalline silicon cube placed, so that the second clamping piece 152 as movable setting exists It is subsequent to move up or move down along the second fixture installation part 151 and the foundation of moving distance.But, in this embodiment party In formula, the single-wafer silicon rod 101 as the first form workpiece forms monocrystalline silicon after evolution operation and other related operations Cube 102 is used as the second form workpiece, during being formed as monocrystalline silicon cube 102 by single-wafer silicon rod 101, generally, Length be it is constant, therefore, for the second fixture 15, height testing instrument not be necessary.In practical applications, for For same workpiece, as long as the second clamping piece 152 in the second fixture 15 is followed by first clamping member 132 in the first fixture 13 Adjusting paces, that is, how first clamping member 132 in the first fixture 13 moves up and down, then, the in the second fixture 15 Two clamping pieces 152 are also made to move up and down accordingly, so that, the clamping between two the second clamping pieces 152 in the second fixture 15 The clamping spacing between two first clamping member 132 in spacing and the first fixture 13 is consistent.

The application separately discloses a kind of workpiece conveyer method, for being transported through to the workpiece for implementing operation.Implement one In mode, the workpiece conveyer method is applied in a workpiece transporter, and the workpiece transporter includes that commutation carries Tool, the first fixture and the second fixture.

It is the flow diagram of the application workpiece conveyer method in one embodiment refering to Fig. 8.As shown in figure 8, this Shen Please workpiece conveyer method the following steps are included:

Step S101 clamps the first form work positioned at loading and unloading station using the first fixture in workpiece transporter Part.In step s101, firstly, the first form workpiece is placed on loading and unloading station to erect, and it must ensure that workpiece turns simultaneously The first fixture in shipping unit corresponds to loading and unloading station, wherein the first form workpiece can pass through manual handling or manipulator Machinery crawl etc. modes and erect and be placed in loading and unloading station, the first fixture in workpiece transporter then can pass through driving commutation Carrier rotates to adjust position to realize and correspond to loading and unloading station.Then, when necessary, put according to the setting of the first form workpiece It sets the height under state, drives the moving up and down on commutation carrier of corresponding first clamping member in the first fixture each to adjust First clamping member is formed by clamping spacing.Then, the in each first clamping member for participating in clamping in the first fixture is driven One clamp arm makees clamping movement, so that these first clamping member can handle the first form workpiece clamp on loading and unloading station.

Step S103, driving commutation carrier makees commutation movement, so that the first fixture is with the first form workpiece clamped It is converted by loading and unloading station to operation station.In step s 103, firstly, before driving commutation carrier makees commutation movement, compared with Goodly, the first form workpiece clamped by the first fixture need to be detached from loading and unloading station, realizes that the mode of disengaging can be taken Following any or their combination: one, in the case of ensuring that the first fixture 13 clamps the first form workpiece, utilize First fixture moves up the workpiece in the form of being lifted first along commutation carrier；Two, driving commutation carrier with respect to installation foundation to Upper movement workpiece in the form of being lifted first；Three, it drives on loading and unloading station or loading and unloading station for carrying the first form workpiece Plummer make decline movement, disengaging configuration is dropped to by original carrying position.Then, driving commutation carrier is opposite installs base Plinth rotation, so that the first carrier on commutation carrier corresponds to operation station by commutation movement.

Step S105 discharges the first fixture, by the first form work-piece clamped in operation station.In step S105 In, it further include having one and step in the case of ensuring that the first fixture in workpiece transporter corresponds to operation station The first form workpiece is detached from the first form workpiece dropping place in loading and unloading station contrary in the operation of operation station in S103 Step specifically realizes that the mode of dropping place can take following any or their combination: one, ensuring the first fixture In the case of clamping the first form workpiece, moved down along commutation carrier by work in the form of first of landing using the first fixture Part；Two, driving commutation carrier is moved down with respect to installation foundation by the workpiece in the form of first that lands；Three, drive operation station or work Make to rise movement for carrying the plummer of the first form workpiece on industry station, carrying position is risen to by original disengaging configuration It sets.Then, the first clamp arm in each first clamping member for participating in clamping in the first fixture is driven to make release movement, so that this A little first clamping member unclamp the first form workpiece, so that the first form workpiece dropping place after unclamping is on operation station.

Subsequent, just implementing to include at least to the first form workpiece on operation station by multi-wire saw equipment has cutting to make The processing operation of industry, so that the first form workpiece forms the second form workpiece after these processing operations.

Step S107, driving commutation carrier makees commutation movement, so that the second fixture in workpiece transporter is converted to work Industry station.

Step S109 clamps the second form workpiece positioned at the operation station using the second fixture.In step S107 In, when necessary, according to the height of the second form workpiece erect under placement status, drive corresponding second clamping in the second fixture Part moving up and down to adjust each second clamping piece and be formed by clamping spacing on commutation carrier.Then, the second folder of driving The second clamp arm participated in each second clamping piece of clamping in tool makees clamping movement, so that these second clamping pieces can will be made The second form workpiece clamp on industry station handles.

Step S111, driving commutation carrier makees commutation movement, so that the second fixture is with the second form workpiece clamped Supreme discharge station is converted by operation station.In step S111, firstly, before driving commutation carrier makees commutation movement, compared with Goodly, the second form workpiece clamped by the second fixture need to be detached from operation station, realize the mode of disengaging can take as Under any or their combination: one, in the case of ensuring that the second fixture 15 clamps the second form workpiece, utilize Two fixtures move up the workpiece in the form of being lifted second along commutation carrier；Two, driving commutation carrier is upward with respect to installation foundation The mobile workpiece in the form of being lifted second；Three, it drives on operation station or operation station for carrying the carrying of the second form workpiece Platform makees decline movement, drops to disengaging configuration by original carrying position.Then, driving commutation carrier turns with respect to installation foundation It is dynamic, so that the second carrier on commutation carrier corresponds to loading and unloading station by commutation movement.

Step S113 discharges the second fixture, the second work form part clamped is placed in loading and unloading station and is carried out down Material.In step S113, in the case of ensuring that the second fixture in workpiece transporter corresponds to loading and unloading station, also wrap One is included the second form workpiece is detached from the second form workpiece dropping place in operation station contrary in upper with step S111 The operating procedure of discharge station specifically realizes that the mode of dropping place can take following any or their combination: one, In the case of ensuring that the second fixture 15 clamps the second form workpiece, using the second fixture along commutation carrier move down with Land the second form workpiece；Two, driving commutation carrier is moved down with respect to installation foundation by the workpiece in the form of second that lands；Three, it drives Make to rise movement for carrying the plummer of the second form workpiece on dynamic loading and unloading station or loading and unloading station, by original disengaging Position rises to carrying position.Then, the first clamp arm in each first clamping member for participating in clamping in the second fixture is driven to make Release movement so that these first clamping member unclamp the second form workpiece so that unclamp after the second form workpiece dropping place in On loading and unloading station.

Workpiece conveyer method disclosed in the present application, applied to the workpiece with commutation carrier and the first fixture and the second fixture In transfer device, commutation movement is made by commutation carrier, the first fixture may make to turn between loading and unloading station and operation station Change the workpiece in the form of will be located at loading and unloading station first be transported to operation station and the second fixture operation station and up and down Material station between conversion by will be located at be completed at operation station cutting operation second in the form of workpiece be transported to loading and unloading station, So, it can be achieved that workpiece quick and easily transporting, the transfer efficiency of workpiece is improved.

Below in conjunction with Fig. 9 to Figure 16, workpiece transhipment is executed to the application workpiece transporter in some instances and is carried out in detail Thin description.In the following example, first make following setting: workpiece transporter is applied in silicon rod multi-wire saw equipment, the silicon Stick multi-wire saw equipment can implement evolution and other operations (such as round as a ball and flour milling etc.), the silicon rod multi-wire cutting to silicon single crystal rod Equipment is cut with loading and unloading station and operation station, the first form workpiece is single-wafer silicon rod, and the second form workpiece is monocrystalline silicon Cube, workpiece transporter include commutate carrier and the first fixture and the second fixture on commutation carrier, the first folder Tool and the second fixture are respectively arranged on the opposite sides of commutation carrier, and the first fixture and the second fixture can differ 180 ° of phases, and, the It include at least two first clamping member in one fixture, at least two first clamping member are movable design, and be located above First clamping member is more configured with the first guiding driving mechanism, includes at least two second clamping pieces in the second fixture, and at least two Second clamping piece is movable design, and the second clamping piece being located above more is configured with the second guiding driving mechanism.

Step 1, the first fixture in workpiece transporter is corresponded to the single-wafer silicon rod on loading and unloading station.In the step In rapid 1, the first fixture in workpiece transporter then can adjust position by driving commutation carrier 11 rotation to realize correspondence In loading and unloading station, at this point, the first clamp arm 134 in two first clamping member 132 in the first fixture is releasing orientation, it will be single The setting of wafer silicon rod 101 is placed on loading and unloading station.Implement aforesaid operations after workpiece transporter state for details, reference can be made to Fig. 9, Fig. 9 are shown as state signal of the first fixture in workpiece transporter corresponding to the single-wafer silicon rod on loading and unloading station Figure.

Step 2, the single-wafer silicon rod positioned at loading and unloading station is clamped using the first fixture in workpiece transporter.? In the step 2, when necessary, the height of the single-wafer silicon rod 101 on loading and unloading station is located at using height testing instrument detection, according to The elevation information measured drives the opposite commutation carrier 11 of the first clamping member 132 being located above in the first fixture to move up Or move down, adjust the clamping spacing between two first clamping member 132.Then, two first in the first fixture are driven The first clamp arm 134 in clamping piece 132 makees clamping movement, and the single-wafer silicon rod 101 on loading and unloading station is clamped.Implement The state of workpiece transporter is shown as the first fixture in workpiece transporter for details, reference can be made to Figure 10, Figure 10 after aforesaid operations Clamp the status diagram of the single-wafer silicon rod positioned at loading and unloading station.

Step 3, driving commutation carrier makees commutation movement, so that the first fixture is with the single-wafer silicon rod clamped by upper and lower Material station is converted to operation station.In step 3, firstly, before driving commutation carrier 11 makees commutation movement, preferably, needing The single-wafer silicon rod 101 clamped by first clamping member 132 in the first fixture is detached from loading and unloading station.Then, it drives The carrier 11 that commutates rotates 180 °, so that the single-wafer silicon rod 101 handled folded by the first carrier on commutation carrier 11 passes through commutation It moves and corresponds to operation station.For details, reference can be made to Figure 11, Figure 11 to show for the state of workpiece transporter after implementation aforesaid operations The first fixture is illustrated with the state that the single-wafer silicon rod clamped corresponds to operation station after making commutation movement for commutation carrier Figure.

Step 4, the first fixture is discharged, the single-wafer silicon rod clamped is placed in operation station.In step 4, true The first fixture protected in workpiece transporter corresponds in the case of operation station, the single-wafer silicon rod dropping place that will first clamp In on operation station.Then, it drives the first clamp arm 134 in the first fixture in two first clamping member 132 to make release movement, makes The setting of single-wafer silicon rod 101 after must unclamping is placed on operation station.The state of workpiece transporter after implementation aforesaid operations Single-wafer silicon rod is placed in the status diagram of operation station after being shown as the first fixture of release for details, reference can be made to Figure 12, Figure 12.

Subsequent, just implementing to include at least to the single-wafer silicon rod on operation station by silicon rod multi-wire saw equipment has evolution Each road of operation processes operation, so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.Wherein, for list The evolution operation of wafer silicon rod, the specific embodiment of the evolution operation then can refer to the patent disclosures such as CN105818285A text It offers, details are not described herein.In addition, may also include other processing such as corase grinding, round as a ball, fine grinding or polishing other than evolution operation Operation.

Step 5, driving commutation carrier makees commutation movement, so that the second fixture in workpiece transporter is converted to operation work Position.In the step 5, the second fixture in workpiece transporter then can rotate 180 ° by driving commutation carrier 11 to adjust position It sets to realize and correspond to operation station, at this point, the second clamp arm 154 in two the second clamping pieces 152 in the second fixture is pine Completion is accordingly processed the post-job setting of monocrystalline silicon cube 102 and is placed on operation station by open state.After implementing aforesaid operations For details, reference can be made to Figure 13, Figure 13 to be shown as the second fixture in workpiece transporter corresponding to operation for the state of workpiece transporter The status diagram of monocrystalline silicon cube on station.

Step 6, the monocrystalline silicon cube positioned at the operation station is clamped using the second fixture.In step 6, necessary When, the height of the monocrystalline silicon cube 102 on operation station is located at using height testing instrument detection, according to the elevation information measured, It drives the opposite commutation carrier 11 of the second clamping piece 152 being located above in the second fixture to move up or move down, adjusts Clamping spacing between two the second clamping pieces 152.Then, the in two the second clamping pieces 152 in the second fixture is driven Two clamp arm 154 make clamping movement, and the monocrystalline silicon cube 102 on operation station is clamped.

In practical applications, when two the second clamping pieces 152 of the second fixture on commutation carrier 11 correspond to operation work When position, at this point, two first clamping member of the first fixture on commutation carrier 11 correspond to loading and unloading station, therefore, work as benefit When clamping the monocrystalline silicon cube on operation station with two the second clamping pieces 152 in the second fixture, at this point, available Two first clamping member 132 in first fixture clamp the new single-wafer silicon rod to be processed on loading and unloading station 103。

For details, reference can be made to Figure 14, Figure 14 to be shown as workpiece transporter for the state of workpiece transporter after implementation aforesaid operations In the second fixture clamp and clamp positioned at the monocrystalline silicon cube of operation station and the first fixture positioned at the new of loading and unloading station Single-wafer silicon rod status diagram.

Step 7, driving commutation carrier makees commutation movement, so that the second fixture is with the monocrystal rod cube clamped by operation Station converts supreme discharge station.In step 7, firstly, before driving commutation carrier 11 makees commutation movement, preferably, needing The monocrystalline silicon cube 102 clamped by the second clamping piece 152 in the second fixture is detached from operation station.Then, driving is changed 180 ° are rotated to carrier 11, so that the monocrystalline silicon cube 102 handled folded by the second carrier on commutation carrier 11 passes through commutation fortune It moves and corresponds to loading and unloading station.Similarly, the first fixture after rotating 180 ° by commutation carrier 11, on commutation carrier 11 The folded new single-wafer silicon rod 103 handled by commutation movement corresponding to operation station.Workpiece after implementation aforesaid operations For details, reference can be made to Figure 15, Figure 15 to be shown as after commutation carrier makees commutation movement the second fixture with clamping for the state of transfer device Monocrystal rod cube correspond to loading and unloading station and the first fixture and correspond to operation station with the single-wafer silicon rod clamped Status diagram.

Step 8, the second fixture is discharged, the monocrystalline silicon cube clamped is placed in loading and unloading station and and carries out blanking. In step 8, in the case of ensuring that the second fixture in workpiece transporter corresponds to loading and unloading station, first by the second folder Has 102 dropping place of monocrystalline silicon cube clamped on loading and unloading station.Then, two the second clamping pieces in the second fixture are driven The second clamp arm 154 in 152 makees release movement, so that the setting of monocrystalline silicon cube 102 after unclamping is placed on loading and unloading station. At the same time, for the first fixture, new 103 dropping place of single-wafer silicon rod for first clamping the first fixture is in operation station On, then the first clamp arm 134 in the first fixture in two first clamping member 132 is driven to make release movement, so that new after unclamping Single-wafer silicon rod 103 setting be placed on operation station.The state of workpiece transporter can specifically join after implementation aforesaid operations See that monocrystalline silicon cube after Figure 16, Figure 16 are shown as the second fixture of release is placed in loading and unloading station and discharges new after the first fixture Single-wafer silicon rod is placed in the status diagram of operation station.

The principles and effects of the application are only illustrated in above-described embodiment, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, carry out modifications and changes to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technical idea such as At all equivalent modifications or change, should be covered by claims hereof.

Claims

1. a kind of workpiece transporter, be applied in multi-wire saw equipment, the multi-wire saw equipment have loading and unloading station and Operation station characterized by comprising

Commutate carrier；

First fixture, set on the first fixture area of the commutation carrier, for clamping the first form workpiece；

Second fixture, set on the second fixture area of the commutation carrier, for clamping the second form workpiece；

Wherein, by driving the commutation carrier to make commutation movement, so that first fixture on the commutation carrier is upper Between discharge station and operation station conversion in the form of transporting first workpiece and second fixture in operation station and loading and unloading Conversion workpiece in the form of transporting second between station.

2. workpiece transporter according to claim 1, which is characterized in that

First fixture includes:

First fixture installation part is set on the commutation carrier；And

At least two first clamping member are arranged along the first fixture installation part spacing；

Second fixture includes:

Second fixture installation part is set on the commutation carrier；And

At least two second clamping pieces are arranged along the second fixture installation part spacing.

3. workpiece transporter according to claim 2, which is characterized in that

Described first clamping member includes:

First clamp arm mounting base is set on the fixture installation part；

At least two first clamp arm are movably arranged in the first clamp arm mounting base；And

First clamp arm driving mechanism, for driving at least two first clamp arm to make opening and closing movement；

Second clamping piece includes:

Second clamp arm mounting base is set on the fixture installation part；

At least two second clamp arm are movably arranged in the second clamp arm mounting base；And

Second clamp arm driving mechanism, for driving at least two second clamp arm to make opening and closing movement.

4. workpiece transporter according to claim 3, which is characterized in that

The first clamp arm driving mechanism includes:

First folding gear, is set in first clamp arm；

First gear actuator has the first groove engaged with the first folding gear in first clamp arm；And

First driving source is connected to the first gear actuator, for driving the first gear actuator to move；

The second clamp arm driving mechanism includes:

Second folding gear, is set in second clamp arm；

Second gear actuator has the second groove engaged with the second folding gear in second clamp arm；And

Second driving source is connected to the second gear actuator, for driving the second gear actuator to move.

5. workpiece transporter according to claim 4, which is characterized in that

The first gear actuator is the first rack gear, and the opposite sides of first rack gear is respectively equipped with and described at least two The first folding gear in first clamp arm engages corresponding first groove；

First driving source is the first cylinder or the first driving motor for driving first rack movement；

The second gear actuator is the second rack gear, and the opposite sides of second rack gear is respectively equipped with and described at least two The second folding gear in second clamp arm engages corresponding second groove；And

Second driving source is the second cylinder or the second driving motor for driving second rack movement.

6. workpiece transporter according to claim 4, which is characterized in that

The first gear actuator is the first driving gear structure；

First driving source is the first driving motor for driving the first driving gear structure operating；

The second gear actuator is the second driving gear structure；And

Second driving source is the second driving motor for driving the second driving gear structure operating.

7. workpiece transporter according to claim 2, which is characterized in that

In first fixture, at least one first clamping member at least two first clamping member is equipped with the first guiding driving Mechanism, for driving it along the first fixture installation part movement, to adjust the spacing of described at least two first clamping member； And

In second fixture, the second clamping piece of at least one of at least two second clamping pieces is equipped with the second guiding driving Mechanism, for driving it along the second fixture installation part movement, to adjust the spacing of at least two second clamping piece.

8. the workpiece transporter according to claim 2 or 7, which is characterized in that further include height testing instrument, be set to described It commutates on carrier, for detecting the height of the first form workpiece.

9. workpiece transporter according to claim 1, which is characterized in that first fixture is round piece fixture, Second fixture is square workpiece fixture.

10. a kind of workpiece conveyer method is applied in workpiece transporter as claimed in any one of claims 1-9 wherein, special Sign is that the workpiece conveyer method includes:

The first form workpiece positioned at loading and unloading station is clamped using the first fixture in workpiece transporter；

Driving commutation carrier makees commutation movement, so that first fixture is with the first form workpiece clamped by loading and unloading work It converts to operation station position；

First fixture is discharged, by the first form work-piece clamped in operation station；

The commutation carrier is driven to make commutation movement, so that the second fixture in workpiece transporter is converted to operation station；

The second form workpiece positioned at the operation station is clamped using the second fixture；The second form workpiece is to described It is formed after first form workpiece progress cutting operation；

The commutation carrier is driven to make commutation movement, so that the second fixture is with the second form workpiece clamped by operation station Convert supreme discharge station；And

The second fixture is discharged, the second work form part clamped is placed in loading and unloading station and carries out blanking.