CN207058951U

CN207058951U - Workpiece transporter

Info

Publication number: CN207058951U
Application number: CN201720563938.3U
Authority: CN
Inventors: 卢建伟; 李鑫
Original assignee: Shanghai Nissin Machine Tool Co Ltd
Current assignee: Tiantong Tijin Precision Technology Co., Ltd.
Priority date: 2017-05-19
Filing date: 2017-05-19
Publication date: 2018-03-02
Anticipated expiration: 2027-05-19

Abstract

This application discloses a kind of workpiece transporter, the first fixture and the second fixture including commutation carrier and on commutation carrier, first fixture is used to clamp the first form workpiece, second fixture is used to clamp the second form workpiece, by driving commutation carrier to make commutation motion, may be such that the first fixture changed between loading and unloading station and operation station by by positioned at workpiece in the form of the first of loading and unloading station be transported to operation station and the second fixture changed between operation station and loading and unloading station by by completed at operation station cutting operation second in the form of workpiece be transported to loading and unloading station, so, it can not only consolidate and clamp workpiece, the quick of workpiece can more be realized and easily transported, improve the transport efficacy of workpiece.

Description

Workpiece transporter

Technical field

The application is related to wire cutting technology field, more particularly to a kind of workpiece transporter.

Background technology

When manufacturing various semiconductor devices or photovoltaic device, by half comprising hard brittle materials such as silicon, sapphire or ceramics Conductor work piece cut is the structure of specification.Because semiconductor workpiece cutting is the important procedure that restricts follow-up finished product, thus To its job requirements also more and more higher.At present, multi-wire cutting technology is due to production efficiency is high, operating cost is low, operation is smart The features such as high is spent, is widely used in the semiconductor workpiece cutting production of industry.

Multi-wire cutting technology is relatively advanced semiconductor workpiece cutting technique in the world at present, and its principle is to pass through height The semiconductor workpiece that the fast diamond wire moved treats operation carries out cutting and forms target product.

So that crystalline silicon rod is cut as an example, usually, flow chart substantially includes：First using shear to long silicon originally Rod block operation to form the short silicon rod of multistage, after the completion of blocking, and the short silicon rod after blocking is opened using excavation machine Crystal silicon cube is formed after Fang Zuoye, slicer is subsequently reused and section operation is carried out to crystal silicon cube, then obtain silicon chip.But, Generally, in the related art, the operation needed for each procedures is independent arrangement, and implement is dispersed in different The different producing regions of production unit or workshop or workshop, perform the conversion of the workpiece of different procedures need into Row carries allotment, and so, process is numerous and diverse, and efficiency is low, needs more manpowers or transloading equipment, potential safety hazard is big, in addition, each Flowing link between the implement of process is more, and the risk of workpiece damage is improved during workpiece transfer, is also easy to produce non- It is unqualified caused by the factor of production, reduce product qualification rate and existing processing mode caused by unreasonable loss, be The major improvement problem that each company faces.

Utility model content

Disadvantages in view of the above, the purpose of the application is to disclose a kind of workpiece transporter, for solving The problems such as workpiece transport efficacy is low present in correlation technique.

To achieve the above object and other purposes, the application discloses a kind of workpiece transporter on the one hand, applied to more In linear cutting equipment, the multi-wire saw equipment has loading and unloading station and operation station, and the workpiece transporter includes：Change To carrier；First fixture, located at the first fixture area of the commutation carrier, for clamping the first form workpiece；Second fixture, if In the second fixture area of the commutation carrier, for clamping the second form workpiece；Wherein, by driving the commutation carrier to change To motion so that first fixture and second fixture on the commutation carrier loading and unloading station and operation station it Between change the associated workpiece that is clamped to transport.

Workpiece transporter disclosed in the present application, including commutation carrier and the first fixture and second on commutation carrier Fixture, the first fixture are used to clamp the first form workpiece, and the second fixture is used to clamp the second form workpiece, by driving commutation to carry Tool makees commutation motion, may be such that the first fixture is changed with by positioned at loading and unloading station between loading and unloading station and operation station First form workpiece is transported to operation station and the second fixture and changed between operation station and loading and unloading station that will be located at The second form workpiece that cutting operation has been completed at operation station is transported to loading and unloading station, in this way, the quick of workpiece can be realized And easily transport, the transport efficacy of workpiece is improved, in addition, the first fixture and the second clamp structure are simple and can firmly press from both sides Handle workpiece.

In some embodiments, first fixture includes：First fixture installed part, on the commutation carrier； At least two first holders, set along the first fixture installed part spacing；Second fixture includes：Second fixture is pacified Piece installing, on the commutation carrier；At least two second holders, set along the second fixture installed part spacing.

In some embodiments, first holder includes：First jig arm mounting seat, located at the fixture installed part On；At least two first jig arm, it is movably arranged in the first jig arm mounting seat；First jig arm drive mechanism, for driving State at least two first jig arm and make opening and closing movement；Second holder includes：Second jig arm mounting seat, pacify located at the fixture In piece installing；At least two second jig arm, it is movably arranged in the second jig arm mounting seat；Second jig arm drive mechanism, for driving Move at least two second jig arm and make opening and closing movement.

In some embodiments, the first jig arm drive mechanism includes：First folding gear, located at the described first folder On arm；First gear actuator, there is the first groove engaged with the first folding gear in first jig arm；First driving Source, the first gear actuator is connected to, for driving the first gear actuator to move；The second jig arm driving machine Structure includes：Second folding gear, in second jig arm；Second gear actuator, have with second jig arm Second groove of the second folding gear engagement；Second driving source, the second gear actuator is connected to, for driving described Two gear drives move.

In some embodiments, the first gear actuator is the first rack, the opposite sides of first rack It is respectively equipped with the first groove corresponding with the first folding gear engagement at least two first jig arm；First driving Source is the first cylinder or the first motor for driving the first rack motion；The second gear actuator is second Rack, the opposite sides of second rack is respectively equipped with to be engaged with the second folding gear at least two second jig arm Corresponding second groove；Second driving source is the second cylinder or the second driving electricity for driving the second rack motion Machine.

In some embodiments, the first gear actuator is the first drive gear structure；First driving source For the first motor for driving the first drive gear structure operating；The second gear actuator is the second driving Gear structure；Second driving source is the second motor for driving the second drive gear structure operating.

In some embodiments, in first fixture, at least one first at least two first holders Holder is provided with the first guiding driving mechanism, for driving it along the first fixture installed part motion, with adjust it is described to The spacing of few two the first holders；In second fixture, at least one second folder at least two second holders Gripping member is provided with the second guiding driving mechanism, for driving it along the second fixture installed part motion, with described in regulation at least The spacing of two the second holders.

In some embodiments, first guiding driving mechanism includes：First guiding leading screw and the first guide motor, Wherein, one end of first guiding leading screw is connected to first holder, the other end connection of first guiding leading screw In first guide motor；Second guiding driving mechanism includes：Second guiding leading screw and the second guide motor, wherein, One end of second guiding leading screw is connected to second holder, and the other end of second guiding leading screw is connected to described Second guide motor.

In some embodiments, the workpiece transporter also includes height testing instrument, on the commutation carrier, For detecting the height of the first form workpiece.

In some embodiments, first fixture is round piece fixture, and second fixture presss from both sides for square cross Tool.

Brief description of the drawings

Fig. 1 is the first state schematic diagram of the application workpiece transporter in one embodiment.

Fig. 2 is Fig. 1 top view.

Fig. 3 is the second view of the application workpiece transporter in one embodiment.

Fig. 4 is Fig. 3 top view.

Fig. 5 is the rear pseudosection of the first fixture.

Fig. 6 is the rear pseudosection of the second fixture.

Fig. 7 is the top view of the application workpiece transporter in another embodiment.

Fig. 8 is schematic flow sheet of the application workpiece transporter in workpiece transhipment operation is performed.

Fig. 9 is shown as state of the first fixture in workpiece transporter corresponding to the single-wafer silicon rod on loading and unloading station Schematic diagram.

The first fixture that Figure 10 is shown as in workpiece transporter clamps the single-wafer silicon rod positioned at loading and unloading station View.

Figure 11 is shown as the first fixture after commutation carrier makees commutation motion and corresponds to work with the single-wafer silicon rod clamped The view of industry station.

Figure 12 is shown as single-wafer silicon rod after discharging the first fixture and is placed in the view of operation station.

Figure 13 is shown as state of the second fixture in workpiece transporter corresponding to the monocrystalline silicon cube on operation station Schematic diagram.

The second fixture that Figure 14 is shown as in workpiece transporter clamps the monocrystalline silicon cube and positioned at operation station One fixture clamps the view of the new single-wafer silicon rod positioned at loading and unloading station.

Figure 15 be shown as commutate carrier make commutation motion after the second fixture with the monocrystal rod cube clamped correspond to it is upper Discharge station and the first fixture correspond to the view of operation station with the single-wafer silicon rod clamped.

Figure 16 is shown as monocrystalline silicon cube after discharging the second fixture and is placed in after the first fixture of loading and unloading station and release newly Single-wafer silicon rod be placed in the view of operation station.

Embodiment

Presently filed embodiment is illustrated by particular specific embodiment below, those skilled in the art can be by this explanation Content disclosed by book understands other advantages and effect of the application easily.

Fig. 1 is referred to Figure 16.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., is only used To coordinate the content disclosed in specification, so that those skilled in the art understands and reads, being not limited to the application can The qualifications of implementation, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size It is whole, in the case where not influenceing the effect of the application can be generated and the purpose that can reach, all should still fall in skill disclosed herein Art content is obtained in the range of covering.Meanwhile in this specification it is cited as " on ", " under ", "left", "right", " centre " and The term of " one " etc., understanding for narration is merely convenient to, and is not used to limit the enforceable scope of the application, its relativeness It is altered or modified, in the case where changing technology contents without essence, when being also considered as the enforceable category of the application.

Inventors herein have recognized that in the cutting operation technology for crystalline silicon rod of correlation, each work for being related to Industry is independent arrangement, and implement is dispersed in the different producing regions of different production units or workshop or workshop, Performing the conversion of the crystalline silicon rod of different procedures needs to be transported through allotment, there is that process is numerous and diverse, transporter structure is answered The problems such as miscellaneous and transport efficacy is low.In view of this, present applicant proposes a kind of workpiece transporter and, by scrap build, Quick and stable workpiece transporter can at least be realized by providing, in this way, can be turned in the case of space-consuming is certain by workpiece Shipping unit completes the transhipment of different shape crystalline silicon rod, simplifies the structure of workpiece transporter, reduces transhipment process, is lifted The efficiency of workpiece transhipment, reduce cost and avoid workpiece damage.

Fig. 1 and Fig. 2 are referred to, is shown as the structural representation of the application workpiece transporter in one embodiment, its In, Fig. 1 is the schematic perspective view of the application workpiece transporter in the first state, and Fig. 2 is that the application workpiece transporter exists Schematic perspective view under second state.The application workpiece transporter is applied in multi-wire saw equipment, for crystalline silicon rod Carry out cutting operation and close the structure advised to be formed.The multi-wire saw equipment at least has loading and unloading station and operation station, institute The operation of feeding and discharging that loading and unloading station is used to carry out workpiece is stated, the operation station is used for the cutting operation at least carrying out workpiece, Workpiece transporter then be used for by workpiece (including：The subsequent workpieces after preamble workpiece and cutting operation before cutting operation) Transhipment between loading and unloading station and operation station.

With reference to Fig. 1 to Fig. 6, workpiece transporter disclosed in the present application includes：Commutate carrier 11, the first fixture 13, second Fixture 15, wherein, the first fixture 13 and the second fixture 15 are configured at commutation carrier 11, make commutation fortune by driving commutation carrier 11 It is dynamic, it may be such that the first fixture 13 configured on commutation carrier 11 and the second fixture 15 turn between loading and unloading station and operation station Change to transport the associated workpiece clamped.

Commutation carrier 11 is agent set for setting other kinds part in workpiece transporter, other kinds part It mainly may include the first fixture 13 and the second fixture 15, but be not limited thereto, miscellaneous part also may be, for example, mechanical structure, electricity Gas control system and numerical control device etc..In the present embodiment, commutation carrier 11 may include base 111, the top relative with base 111 Frame 113 and the supporting framework between base 111 and upper frame 113.In addition, commutation 11 another important function of carrier is The commutation of the first fixture 13 and the second fixture 15 conversion is supported by commutating motion.Commutating carrier 11 can be for example by a commutation Mechanism makees commutation motion.In specific implementation, separately referring to Fig. 3, which show the application workpiece transporter at certain One sectional view on the side, as shown in Figure 3 so that commutation carrier 11 realize commutation motion changement may include rotary shaft and Rotary electric machine (do not shown), and (installation foundation can example by installation foundation of the rotary shaft axis connection under it for commutation carrier 11 The workbench of pedestal or multi-wire saw equipment such as multi-wire saw equipment), it is used in rotary shaft be connected with commutation carrier 11 Connection end can be provided with the installation edge that extends out, uniformly be laid with mounting hole along upper in the installation, it is corresponding, in commutation carrier 11 The central position of base 111 also is provided with mounting hole, and when mounted, the commutation center base 111 of carrier 11 is docked with rotary shaft, base Mounting hole on 111 is aligned with the mounting hole in rotary shaft, afterwards, the mounting hole by the additional locking elements such as bolt through alignment After locked, complete commutation carrier 11 assembling.When implementing divertical motion, then start rotary electric machine, driving rotary shaft turns It is dynamic to realize commutation motion to drive commutation carrier 11 to rotate.Foregoing driving rotary shaft rotation, which may be designed as one-directional rotation, can also set Double-directional rotary is calculated as, the one-directional rotation may be, for example, to rotate clockwise or rotate counterclockwise, and the Double-directional rotary then can be such as To rotate clockwise and rotating counterclockwise.In addition, the angle that driving rotary shaft rotates can be according to the actual structure of workpiece transporter Make (such as：According to the structure of commutation carrier 11 and the first fixture 13 and second fixture 15 that are arranged on commutation carrier 11 Set location relation etc.) and set.Furthermore the base 111 in commutation carrier 11 can use disc structure, and its middle position is with turning Moving axis connects, but the shape of base 111 is not limited to this, and in other embodiments, base 111 can also use square plate or ellipse Disk.

At least two fixtures are provided with commutation carrier 11, for clamping corresponding workpiece.In this example, it is assumed that Two fixtures are provided with commutation carrier 11, they are referred to as the first fixture 13 and the second fixture 15, wherein, the first fixture 13 located at the first fixture area of commutation carrier 11, and for clamping the first form workpiece, the second fixture 15 is located at commutation carrier 11 Second fixture area, for clamping the second form workpiece.So, by driving commutation carrier 11 to make commutation motion so that commutation carries The first fixture 13 on tool 11 changes workpiece and the second fixture in the form of transporting first between loading and unloading station and operation station 15 change the workpiece in the form of transporting second between operation station and loading and unloading station.Changed as it was previously stated, the first fixture 13 is located at To the first fixture area of carrier 11, the second fixture 15 is located at the second fixture area of commutation carrier 11, the first fixture area and the second folder Tool area can be set according to actual device structure.For example, the first fixture area and the second fixture area are setting backwards in commutation carrier 11 Two positions, further, the first fixture area and the second fixture area can differ 180 °, so that loading and unloading station and operation Station, which connects being aligned, (can certainly be understood that：Loading and unloading station connects being aligned with operation station and carried respectively positioned at commutation The opposite sides of tool 11, therefore, the first fixture area of the first fixture 13 of setting is used in the carrier 11 that commutates and for setting second Second fixture area of fixture 15 can differ 180 °), so, when will commutation carrier 11 rotate 180 ° after, the first fixture 13 and the Two fixtures 15 can realize transposition, i.e.,：Original the first fixture 13 corresponding to loading and unloading station is after commutation carrier 11 commutates Changed corresponding to operation station and original the second fixture 15 corresponding to operation station through the carrier 11 that commutates backward corresponding to upper and lower Expect station, or, original the first fixture 13 corresponding to operation station is changed backward corresponding to loading and unloading station through the carrier 11 that commutates And original the second fixture 15 corresponding to loading and unloading station is changed backward corresponding to operation station through the carrier 11 that commutates.But, exist It is not palpus for the first fixture area and the second fixture area or the setting relation of loading and unloading station and operation station in practical application So overcritical, the first fixture area and the second fixture area also can for example differ 90 °, even, the first fixture area and the second fixture area Any position in OK range can be differed, as long as ensuring that unnecessary do will not be produced between the first fixture area and the second fixture area If disturbing.

As it was previously stated, the application workpiece transporter is applied in multi-wire saw equipment, for being, for example, crystalline silicon rod Workpiece, the cutting operation that the multi-wire saw equipment is made to crystalline silicon rod comprise at least crystalline silicon rod evolution operation, lead to Evolution operation is crossed, can will be formed as the monocrystalline silicon that section is in class rectangle after evolution operation in the single-wafer silicon rod of cylinder morphology Cube.Therefore, the first fixture 13 may be, for example, round piece fixture, and single-wafer silicon rod is clamped for corresponding；Second fixture 15 is then It may be, for example, square workpiece fixture, monocrystalline silicon cube clamped for corresponding.

The first fixture 13 and the second fixture 15 are described in detail individually below.

First fixture 13 further comprises the first fixture installed part 131 and at least two first holders 132, wherein, extremely Few two the first holders 132 are arranged at intervals relative to the first fixture installed part 131, for clamping the first form workpiece. In one embodiment, as the single-wafer silicon rod of the first form workpiece 101, it is either in loading and unloading station still in operation work Position is all to erect to place, and therefore, at least two first holders 132 are vertically spaced and set relative to the first fixture installed part 131 Put, i.e. at least two first holders 132 are setting up and down.

In specific implementation, any one first holder 132 further includes：First jig arm mounting seat 133 and at least two Individual first jig arm 134, wherein, the first jig arm mounting seat 133 is provided on the first fixture installed part 131, at least two first folders Arm 134 is movably arranged in the first jig arm mounting seat 133.In view of the section of the single-wafer silicon rod as the first form workpiece 101 For circle, in a kind of alternative embodiment, generally speaking the first holder 132 is round piece fixture, forms the first holder 132 the first jig arm 134 is two of symmetric design, and single first jig arm 134 is designed as with arc clamping face, it is preferred that The arc clamping face of single first jig arm 134 will exceed the circular arc of a quarter, so, be made up of two the first jig arm 134 The first holder 132 arc clamping face will exceed half circular arc.Certainly, the arc clamping in the first jig arm 134 On face can also additional cushion pad, for avoiding during single-wafer silicon rod of the clamping as the first form workpiece 101 The damage to single-wafer silicon rod surface is caused, plays the good result of protection single-wafer silicon rod.Extraly, the first holder is utilized 132 can more have the effect for the regulation that centers concurrently.Under general scenario, the first jig arm 134 in the first holder 132 is in clamping state Under, the center for the grasping part that two the first jig arm 134 are formed is coincided with the center of single-wafer silicon rod.Therefore, when During using erectting the single-wafer silicon rod 101 of placement on the de-clamping loading and unloading station of the first holder 132, in the first holder 132 Two the first jig arm 134 shrink, single-wafer silicon rod 101 is resisted against by the arc clamping face in the first jig arm 134.In the first folder During arm 134 shrinks simultaneously clamping single-wafer silicon rod 101, single-wafer silicon rod 101 is pushed away by two the first jig arm 134 of both sides Dynamic and towards grasping part middle section moves, until single-wafer silicon rod 101 is by two first folders in the first holder 132 Arm 134 clamps, and now, the center of single-wafer silicon rod 101 can be located at the center of the grasping part of the first holder 132.

To enable at least two first jig arm 134 in the first holder 132 smooth and being held fixedly different chis The single-wafer silicon rod of very little specification, the first holder 132 also include the first jig arm drive mechanism, for driving at least two first folders Arm 134 makees opening and closing movement.

Referring to Fig. 5, it is schematically shown as the rear pseudosection of the first fixture 13.In specific implementation, as shown in figure 5, first Jig arm drive mechanism further comprises：First folding gear 135, the driving source 137 of first gear actuator 136 and first.The One folding gear 135 is disposed in corresponding first jig arm 134.First gear actuator 136 have with the first jig arm 134 The first folding gear 135 engagement groove.Driving source is connected to first gear actuator 136, for driving first gear to drive Moving part 136 moves.In a kind of implementation, first gear actuator 136 is the first rack, and first rack 136 is located at two The centre of individual first jig arm 134, respectively on two lateral surfaces of the first jig arm 134 of both sides points in the first rack 136 Corresponding groove She You not be engaged with the first folding gear 135 in two the first jig arm 134, the first driving source 137 can be such as For motor or or cylinder.So, according to above-mentioned implementation, in actual applications, when the clamping of the first jig arm 134 need to be realized When, from the motor as the first driving source or cylinder driving as first gear actuator the first rack 136 to moving up Dynamic, the first folding gear 135 for driving both sides to engage by the first rack 136 makees outward turning action, and the first folding gear 135 is in outward turning During drive the first jig arm 134 (the first folding gear 135 can be connected with the first jig arm 134 by rotating shaft) make decentralization action with Clamping state is transferred to by releasing orientation；Conversely, when that need to realize that the first jig arm 134 is unclamped, by the driving as the first driving source Motor (or cylinder) drives to be moved down as the first rack 136 of first gear actuator, and both sides is driven by the first rack 136 First folding gear 135 of engagement makees pronation, and the first folding gear 135 drives the first jig arm 134 (the during revolving inside One folding gear 135 can be connected with the first jig arm 134 by rotating shaft) action is raised up to be transferred to releasing orientation by clamping state. Certainly, an embodiment is above are only, is not intended to limit the working condition of the first holder 132, in fact, in foregoing " to On ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change can be according to first The structure and function mode of jig arm 134, the first jig arm drive mechanism construction and have other changes.

It is by carrying out blocking work to long silicon rod originally just as it is known by a person skilled in the art that be directed to single-wafer silicon rod Industry and formed, certainly will make it that the size difference between single-wafer silicon rod is totally different, in view of the first fixture 13 be used for setting put Single-wafer silicon rod 101 under configuration state is clamped, therefore, for the first fixture 13, the influence master of aforementioned dimensions difference Just to show that the length difference opposite sex of single-wafer silicon rod is clamped to whether the first holder 132 in the first fixture 13 can correspond to The secret worry of single-wafer silicon rod.

The risk of single-wafer silicon rod may can not be clamped to by even exempting above-mentioned first holder 132 for reduction, the One fixture 13 has different designs.

In one implementation, the first fixture 13 uses fixed holder, i.e. with vertical side on commutation carrier 11 The first holder as much as possible is fixedly installed in formula, and, two neighboring first holder 132 in these first holders 132 Spacing is small as much as possible, in this way, using these first holders 132 can cover all kinds scale lengths single-wafer silicon rod.For example, If the length of single-wafer silicon rod is longer, clamping is participated in using the first holder 132 more on commutation carrier 11；If single-wafer The length of silicon rod is shorter, then clamping is participated in using the first holder 132 less on commutation carrier 11, for example, underlying Several first holders 132 participate in clamping, and those first holders 132 above and higher than single-wafer silicon rod Just it is not involved in.

In other implementations, the first fixture 13 uses movable holder, i.e. in the first installation of commutation carrier 11 Activity sets the first holder 132 in a manner of vertical on face, because the first holder 132 is movable design, therefore, first The quantity of holder 132 can be greatly decreased, and generally two or three can meet.In this way, can using movable holder The single-wafer silicon rod of cover all kinds scale lengths.For example, if the length of single-wafer silicon rod is longer, the first of activity setting is moved Holder 132, extend the clamping spacing of two the first holders 132；If the length of single-wafer silicon rod is shorter, the activity of movement is set The first holder 132 put, shorten the clamping spacing of two the first holders 132.Movable clamping is used in the first fixture 13 It is smooth smoothly up and down with adjustment position for ease of movable holder in the implementation of part, using the first fixture The first fixture installed part 131 in 13 plays the guide effect of the first holder 132 of boot activity setting, a kind of achievable In mode, the first fixture installed part 131 can use guide post structure, and the first jig arm mounting seat 133 then uses and is socketed on lead The movable block structure of structure.Specifically, as the first fixture installed part 131 the guide post structure include erect set and simultaneously Two capable leads, as in the movable block structure of the first jig arm mounting seat 133 then be provided with and the guide post structure In two leads corresponding to two perforations or two clips.According to perforation, the movable block is sheathed on the lead And it can realize and be slid along the lead.According to clip, the movable block be clipped on the lead and can realize along The lead sliding, wherein, in actual applications, the clip can be clipped on an at least half part for the lead.

For the first fixture 13 of movable first holder, different change case is also had.With two the first holders Exemplified by 132, in a kind of alternative embodiment, first holder 132 in two the first holders 132 is movable design Another first holder 132 is then fixed design, is all by the movable design of movement in actual applications so That first holder 132 adjusts the clamping spacing between the first holder 132 of fixed design.From the foregoing, it will be observed that Single-wafer silicon rod 101 is placed to erect, therefore, no matter the scale lengths of single-wafer silicon rod, always the bottom of single-wafer silicon rod 101 It can be relatively easy to what is determined, it is thus preferable to, can be by that first clamping above in two the first holders 132 Part 132 be designed as it is movable, so, only need to adjust top the first holder 132 position.

To realize the movement of the first holder 132, the first holder 132 of the movable design can be provided with lead first to Drive mechanism.The first holder 132 that can drive movable design using the first guiding driving mechanism is installed along the first fixture Part 131 moves up and down.In one implementation, the first guiding driving mechanism can for example including：First guiding leading screw 138 and One guide motor 139, wherein, the first guiding leading screw 138 is set to erect, and one end of the first guiding leading screw 138 is connected to first Jig arm mounting seat 133, the other end of the first guiding leading screw 138 are then connected to the first guide motor 139, the first guide motor 139 The top of commutation carrier 11 is may be provided at, but is not limited thereto, the first guide motor 139 may also be arranged on commutation carrier 11 Bottom.First guiding leading screw 138 has high accuracy, invertibity and efficient feature, in this way, needing first above adjustment During the position of holder 132, the first guiding leading screw 138 is driven to rotate by the first guide motor 139, the first guiding leading screw 138 exists The first holder 132 of top is driven to be moved up and down along the first fixture installed part 131 in rotary course.Such as：First is oriented to Motor 139 drives the first guiding leading screw 138 to turn clockwise, then drives the first holder 132 of top to pacify along the first fixture Motion with the first holder 132 away from lower section, increases the clamping spacing between two the first holders 132 upwards for piece installing 131； First guide motor 139 drives the rotate counterclockwise of the first guiding leading screw 138, then drives the first holder 132 of top along the One fixture installed part 131 is moved downward between the first holder 132 of lower section, two the first holders 132 of reduction Clamp spacing.In this way, the first holder 132 by controlling movable design, can adjust between two the first holders 132 Spacing is clamped, so as to effectively be clamped to the single-wafer silicon rod 101 of different size length.

In another alternative embodiment, two the first holders 132 are movable design, so, in practical application In, their mutual clamping spacing can be adjusted by the movement of two the first holders 132 of movable design.Due to First holder 132 is movable design, then, at least one first holder 132 in two the first holders 132 need to be set The first guiding driving mechanism is put, for driving two the first holders 132 to be moved along the first fixture installed part 131.Relative to Former alternative embodiment, in this alternative embodiment, since two the first holders 132 in the first fixture 13 are activity Formula, then will exist and set first to be oriented to driving machine on some first holder 132 in two the first holders 132 Structure is still respectively provided with the situation of the first guiding driving mechanism on two the first holders 132.

Now using in two the first holders 132 top the first holder 132 be provided with the first guiding driving mechanism as Example, in this case, the first jig arm mounting seat 133 and the first fixture installed part in one, two the first holders 132 To be flexibly connected between 131, i.e. the first jig arm mounting seat 133 and the first jig arm thereon in any one first holder 132 134 along the first fixture installed part 131 and it is up and down, in addition, set the first guiding driving mechanism include the first guide wire The guide motor 139 of thick stick 138 and first, wherein, one end of the first guiding leading screw 138 is connected in the first holder 132 of top The first jig arm mounting seat 133 on, the other end of the first guiding leading screw 138 is then connected to the first guide motor, and first is oriented to electricity Machine 139 may be provided at the top of commutation carrier 11.In this way, during the position of the first holder 132 above needing to adjust, by the One guide motor 139 drives the first guiding leading screw 138 to rotate, and the first holder is driven in the rotary course of the first guiding leading screw 138 132 move up and down along the first fixture installed part 131, such as：First guide motor 139 drives the up time of the first guiding leading screw 138 Pin rotates, then drives the first holder 132 of top to be moved upwards with first away from lower section along the first fixture installed part 131 Holder 132, increase the clamping spacing between two the first holders 132；First guide motor 139 drives the first guiding leading screw 138 counter-rotatings, then the first holder 132 of top is driven to be moved downward along the first fixture installed part 131 with close to lower section The first holder 132, reduce two the first holders 132 between clamping spacing.In this way, by controlling movable design First holder 132, the clamping spacing between two the first holders 132 is can adjust, so as to the monocrystalline to different size length Circle silicon rod 101 is effectively clamped.

In fact, in the case of two the first holders 132 are movable design, the first guiding driving mechanism is utilized The clamping spacing between two the first holders 132 not only be can adjust to be carried out to the single-wafer silicon rod 101 of different size length Effectively outside clamping, the purpose of lifting can be also realized to the single-wafer silicon rod 101 of clamping, when two the first holders 132 are effective After clamping single-wafer silicon rod 101, pass through moving up and down to lift single-wafer silicon rod 101 for the first holder 132 of driving.Tool Body, still so that the first holder 132 of top is provided with the first guiding driving mechanism as an example, first, the first holder of top 132 are moved up and down by the first guiding driving mechanism along the first fixture installed part 131 have adjusted and the holder of lower section first Clamping spacing between 132；Then, driven using the first jig arm drive mechanism in each first holder 132 corresponding Two the first jig arm 134 make clamping action with smooth and be held fixedly single-wafer silicon rod 101；Then, the first folder of top Gripping member 132 is driven by the first guiding driving mechanism to be moved upwards along the first fixture installed part 131, now, due to rubbing again Power effect is wiped, the single-wafer silicon rod 101 and the first holder 132 of lower section clamped moves upwards therewith in the lump, wherein, clamping Single-wafer silicon rod 101 firmly upwards motion utilize be top the first holder 132 and single-wafer silicon rod 101 between friction Power acts on, and what the 132 upward motion of the first holder then utilized is between single-wafer silicon rod 101 and the first holder 132 of lower section Frictional force effect, so as to realize the effect of lifting single-wafer silicon rod 101.First holder 132 of top is oriented to first and driven It is also identical process that drive single-wafer silicon rod 101 and the first holder 132 of lower section, which move downward, under the driving of motivation structure, from And the effect of landing single-wafer silicon rod 101 is realized, it will not be repeated here.

It should be noted that in other change case, first holder of lower section e.g. in two the first holders 132 First guiding driving mechanism is set on 132, and structure, set-up mode and the driving working method of the first guiding driving mechanism are with before State top the first holder 132 the first guiding driving mechanism it is similar, such as by lower section the first holder 132 first Moved up and down under the driving of guiding driving mechanism along the first fixture installed part 131 and adjust with the first holder of top 132 it Between clamping spacing, and single-wafer silicon is driven under the driving of the first guiding driving mechanism by the first holder 132 of lower section Rod 101 and the first holder 132 of top the mode such as move up and down along the first fixture installed part 131 together.Such as two again First holder 132 is provided with the first guiding driving mechanism, then the set-up mode of the first guiding driving mechanism and driving work The motion mode of mode and two the first holders 132 is self-evident, will not be repeated here.

Moved up and down in the first holder 132 for movable setting along the first fixture installed part 131 to adapt to In the situation that the single-wafer silicon rod of different size length is clamped, except the first holder 132 uses movable structure to set Meter, the first holder 132 need to be set outside first guiding driving mechanism etc., certainly will also need to know the monocrystalline for being currently needed for clamping The scale lengths of circle silicon rod.In view of this, the workpiece transporter in the application may also include height testing instrument (not in the drawings Shown), for erectting the height for the single-wafer silicon rod placed, so as to which the first holder 132 as movable setting exists Subsequently along the first fixture installed part 131 move up or move down and the foundation of displacement.

Second fixture 15 further comprises the second fixture installed part 151 and at least two second holders 152, wherein, extremely Few two the second holders 152 are arranged at intervals relative to the second fixture installed part 151, for clamping the second form workpiece. In one embodiment, as the monocrystalline silicon cube of the second form workpiece 102, it is either in loading and unloading station still in operation work Position is all to erect to place, and therefore, at least two second holders 152 are vertically spaced and set relative to the second fixture installed part 151 Put, i.e. at least two second holders 152 are setting up and down.

In specific implementation, any one second holder 152 further includes：Second jig arm mounting seat 153 and at least two Individual second jig arm 154, wherein, the second jig arm mounting seat 153 is provided on the second fixture installed part 151, at least two second folders Arm 154 is movably arranged in the second jig arm mounting seat 153.In view of the section of the monocrystalline silicon cube as the second form workpiece 102 For class rectangle, in a kind of alternative embodiment, generally speaking the second holder 152 is square workpiece fixture, the clamping of composition second Second jig arm 154 of part 152 is two of symmetric design, and single second jig arm 154 is designed as having single clamped flat face (ginseng See Fig. 2 and Fig. 4) or knuckle clamping face (referring to Fig. 7, be shown as the vertical view of the application workpiece transporter in other embodiments Figure), wherein, the knuckle clamping face is made up of continuous two clamped flat faces, has one between two clamped flat faces Knuckle.Certainly, on the arc clamping face in the second jig arm 154 can also additional cushion pad, for avoiding being used as the in clamping The damage to monocrystalline silicon cube surface is caused during the monocrystalline silicon cube of two form workpiece 102, plays protection monocrystalline silicon side The good result of body.Extraly, the effect for the regulation that centers can more be had concurrently using the second holder 152.Under general scenario, second Under clamping state, the center for the grasping part that two the second jig arm 154 are formed is the second jig arm 154 in holder 152 Coincided with the center of monocrystalline silicon cube.Therefore, with the of the second jig arm 154 with the tool knuckle clamping face shown in Fig. 7 Exemplified by two holders 152, when erectting the monocrystalline silicon cube 102 of placement on using the de-clamping operation station of the second holder 152, Two the second jig arm 154 in second holder 152 are shunk, and monocrystalline silicon is resisted against by the knuckle clamping face in the second jig arm 154 Cube 102, wherein, two clamped flat faces in the knuckle clamping face correspond respectively to adjacent in monocrystalline silicon cube 102 Two sides.During the second jig arm 154 shrinks simultaneously clamping monocrystalline silicon cube 102, monocrystalline silicon cube 102 is by the two of both sides Individual second jig arm 154 is promoted and moved towards the middle section of grasping part, until monocrystalline silicon cube 102 is by the second holder Two the second jig arm 154 in 152 clamp, and now, the center of monocrystalline silicon cube 102 can be located at the second holder 152 The center of grasping part.

Especially, to enable at least two second jig arm 154 in the second holder 152 smooth and be held fixedly The silicon rod of different type difference dimensions, the second holder 152 also include the second jig arm drive mechanism, for driving at least two Individual second jig arm 154 makees opening and closing movement.

To enable at least two second jig arm 154 in the second holder 152 smooth and being held fixedly different chis The monocrystalline silicon cube of very little specification, the second holder 152 also include the second jig arm drive mechanism, for driving at least two second folders Arm 154 makees opening and closing movement.

Referring to Fig. 6, it is schematically shown as the rear pseudosection of the second fixture 15.In specific implementation, as shown in fig. 6, second Jig arm drive mechanism further comprises：Second folding gear 155, the driving source 157 of second gear actuator 156 and second.The Two folding gears 155 are disposed in corresponding second jig arm 154.Second gear actuator 156 have with the second jig arm 154 The second folding gear 155 engagement groove.Driving source is connected to second gear actuator 156, for driving second gear to drive Moving part 156 moves.In a kind of implementation, second gear actuator 156 is the second rack, and second rack 156 is located at two The centre of individual second jig arm 154, respectively on two lateral surfaces of the second jig arm 154 of both sides points in the second rack 156 Corresponding groove She You not be engaged with the second folding gear 155 in two the second jig arm 154, the second driving source 157 can be such as For motor or or cylinder.So, according to above-mentioned implementation, in actual applications, when the clamping of the second jig arm 154 need to be realized When, from the motor as the second driving source or cylinder driving as second gear actuator the second rack 156 to moving up Dynamic, the second folding gear 155 for driving both sides to engage by the second rack 156 makees outward turning action, and the second folding gear 155 is in outward turning During drive the second jig arm 154 (the second folding gear 155 can be connected with the second jig arm 154 by rotating shaft) make decentralization action with Clamping state is transferred to by releasing orientation；Conversely, when that need to realize that the second jig arm 154 is unclamped, by the driving as the second driving source Motor (or cylinder) drives to be moved down as the second rack 156 of second gear actuator, and both sides is driven by the second rack 156 Second folding gear 155 of engagement makees pronation, and the second folding gear 155 drives the second jig arm 154 (the during revolving inside Two folding gears 155 can be connected with the second jig arm 154 by rotating shaft) action is raised up to be transferred to releasing orientation by clamping state. Certainly, an embodiment is above are only, is not intended to limit the working condition of the second holder 152, in fact, in foregoing " to On ", " outward turning ", " decentralization ", " downward ", " inward turning ", " raising up " and " release " and " clamping " state change can be according to second The structure and function mode of jig arm 154, the second jig arm drive mechanism construction and have other changes.

Similarly, in view of the second fixture 15 is for being clamped to erectting the monocrystalline silicon cube 102 under laying state, because This, for the second fixture 15, the length difference opposite sex of monocrystalline silicon cube to the second holder 152 in the second fixture 15 whether The secret worry for being clamped to monocrystalline silicon cube can be corresponded to.

The risk of monocrystalline silicon cube may can not be clamped to by even exempting above-mentioned second holder 152 for reduction, the Two fixtures 15 have different designs.

In one implementation, the second fixture 15 uses fixed holder, i.e. with vertical side on commutation carrier 11 The second holder as much as possible is fixedly installed in formula, and, two neighboring second holder 152 in these second holders 152 Spacing is small as much as possible, in this way, using these second holders 152 can cover all kinds scale lengths monocrystalline silicon cube.For example, If the length of monocrystalline silicon cube is longer, clamping is participated in using the second holder 152 more on commutation carrier 11；If monocrystalline silicon The length of cube is shorter, then clamping is participated in using the second holder 152 less on commutation carrier 11, for example, underlying Several second holders 152 participate in clamping, and those second holders 152 above and higher than monocrystalline silicon cube Just it is not involved in.

In other implementations, the second fixture 15 uses movable holder, i.e. in the second installation of commutation carrier 11 Activity sets the second holder 152 in a manner of vertical on face, because the second holder 152 is movable design, therefore, second The quantity of holder 152 can be greatly decreased, and generally two or three can meet.In this way, can using movable holder The monocrystalline silicon cube of cover all kinds scale lengths.For example, if the length of monocrystalline silicon cube is longer, the second of activity setting is moved Holder 152, extend the clamping spacing of two the second holders 152；If the length of monocrystalline silicon cube is shorter, the activity of movement is set The second holder 152 put, shorten the clamping spacing of two the second holders 152.Movable clamping is used in the second fixture 15 It is smooth smoothly up and down with adjustment position for ease of movable holder in the implementation of part, using the second fixture The second fixture installed part 151 in 15 plays the guide effect of the second holder 152 of boot activity setting, a kind of achievable In mode, the second fixture installed part 151 can use guide post structure, and the second jig arm mounting seat 153 then uses and is socketed on lead The movable block structure of structure.Specifically, as the second fixture installed part 151 the guide post structure include erect set and simultaneously Two capable leads, as in the movable block structure of the second jig arm mounting seat 153 then be provided with and the guide post structure In two leads corresponding to two perforations or two clips.According to perforation, the movable block is sheathed on the lead And it can realize and be slid along the lead.According to clip, the movable block be clipped on the lead and can realize along The lead sliding, wherein, in actual applications, the clip can be clipped on an at least half part for the lead.

For the second fixture 15 of movable second holder, different change case is also had.With two the second holders Exemplified by 152, in a kind of alternative embodiment, second holder 152 in two the second holders 152 is movable design Another second holder 152 is then fixed design, is all by the movable design of movement in actual applications so That second holder 152 adjusts the clamping spacing between the second holder 152 of fixed design.From the foregoing, it will be observed that Monocrystalline silicon cube 102 is placed to erect, therefore, no matter the scale lengths of monocrystalline silicon cube, always the bottom of monocrystalline silicon cube 102 It can be relatively easy to what is determined, it is thus preferable to, can be by that second clamping above in two the second holders 152 Part 152 be designed as it is movable, so, only need to adjust top the second holder 152 position.

To realize the movement of the second holder 152, the second holder 152 of the movable design can be provided with lead second to Drive mechanism.The second holder 152 that can drive movable design using the second guiding driving mechanism is installed along the second fixture Part 151 moves up and down.In one implementation, the second guiding driving mechanism can for example including：Second guiding leading screw 158 and Two guide motors 159, wherein, the second guiding leading screw 158 is set to erect, and one end of the second guiding leading screw 158 is connected to second Jig arm mounting seat 153, the other end of the second guiding leading screw 158 are then connected to the second guide motor 159, the second guide motor 159 The top of commutation carrier 11 is may be provided at, but is not limited thereto, the second guide motor 159 may also be arranged on commutation carrier 11 Bottom.Second guiding leading screw 158 has high accuracy, invertibity and efficient feature, in this way, needing second above adjustment During the position of holder 152, the second guiding leading screw 158 is driven to rotate by the second guide motor 159, the second guiding leading screw 158 exists The second holder 152 of top is driven to be moved up and down along the second fixture installed part 151 in rotary course.Such as：Second is oriented to Motor 159 drives the second guiding leading screw 158 to turn clockwise, then drives the second holder 152 of top to pacify along the second fixture Motion with the second holder 152 away from lower section, increases the clamping spacing between two the second holders 152 upwards for piece installing 151； Second guide motor 159 drives the rotate counterclockwise of the second guiding leading screw 158, then drives the second holder 152 of top along the Two fixture installed parts 151 are moved downward between the second holder 152 of lower section, two the second holders 152 of reduction Clamp spacing.In this way, the second holder 152 by controlling movable design, can adjust between two the second holders 152 Spacing is clamped, so as to effectively be clamped to the monocrystalline silicon cube 102 of different size length.

In another alternative embodiment, two the second holders 152 are movable design, so, in practical application In, their mutual clamping spacing can be adjusted by the movement of two the second holders 152 of movable design.Due to Second holder 152 is movable design, then, at least one second holder 152 in two the second holders 152 need to be set The second guiding driving mechanism is put, for driving two the second holders 152 to be moved along the second fixture installed part 151.Relative to Former alternative embodiment, in this alternative embodiment, since two the second holders 152 in the second fixture 15 are activity Formula, then will exist and set second to be oriented to driving machine on some second holder 152 in two the second holders 152 Structure is still respectively provided with the situation of the second guiding driving mechanism on two the second holders 152.

Now using in two the second holders 152 top the second holder 152 be provided with the second guiding driving mechanism as Example, in this case, the second jig arm mounting seat 153 and the second fixture installed part in one, two the second holders 152 To be flexibly connected between 151, i.e. the second jig arm mounting seat 153 and the second jig arm thereon in any one second holder 152 154 along the second fixture installed part 151 and it is up and down, in addition, set the second guiding driving mechanism include the second guide wire The guide motor 159 of thick stick 158 and second, wherein, one end of the second guiding leading screw 158 is connected in the second holder 152 of top The second jig arm mounting seat 153 on, the other end of the second guiding leading screw 158 is then connected to the second guide motor, and second is oriented to electricity Machine 159 may be provided at the top of commutation carrier 11.In this way, during the position of the second holder 152 above needing to adjust, by the Two guide motors 159 drive the second guiding leading screw 158 to rotate, and the second holder is driven in the rotary course of the second guiding leading screw 158 152 move up and down along the second fixture installed part 151, such as：Second guide motor 159 drives the up time of the second guiding leading screw 158 Pin rotates, then drives the second holder 152 of top to be moved upwards with second away from lower section along the second fixture installed part 151 Holder 152, increase the clamping spacing between two the second holders 152；Second guide motor 159 drives the second guiding leading screw 158 counter-rotatings, then the second holder 152 of top is driven to be moved downward along the second fixture installed part 151 with close to lower section The second holder 152, reduce two the second holders 152 between clamping spacing.In this way, by controlling movable design Second holder 152, the clamping spacing between two the second holders 152 is can adjust, so as to the monocrystalline to different size length Silicon cube 102 is effectively clamped.

In fact, in the case of two the second holders 152 are movable design, the second guiding driving mechanism is utilized The clamping spacing between two the second holders 152 not only be can adjust to be carried out to the monocrystalline silicon cube 102 of different size length Effectively outside clamping, the purpose of lifting can be also realized to the monocrystalline silicon cube 102 of clamping, when two the second holders 152 are effective After clamping monocrystalline silicon cube 102, pass through moving up and down to lift monocrystalline silicon cube 102 for the second holder 152 of driving.Tool Body, still so that the second holder 152 of top is provided with the second guiding driving mechanism as an example, first, the second holder of top 152 are moved up and down by the second guiding driving mechanism along the second fixture installed part 151 have adjusted and the holder of lower section second Clamping spacing between 152；Then, driven using the second jig arm drive mechanism in each second holder 152 corresponding Two the second jig arm 154 make clamping action with smooth and be held fixedly monocrystalline silicon cube 102；Then, the second folder of top Gripping member 152 is driven by the second guiding driving mechanism to be moved upwards along the second fixture installed part 151, now, due to rubbing again Power effect is wiped, the monocrystalline silicon cube 102 and the second holder 152 of lower section clamped is moved upwards therewith in the lump, wherein, clamping What the upward motion of monocrystalline silicon cube 102 firmly utilized is the friction between the second holder 152 of top and monocrystalline silicon cube 102 Power acts on, and what the 152 upward motion of the second holder then utilized is between monocrystalline silicon cube 102 and the second holder 152 of lower section Frictional force effect, so as to realize the effect of lifting monocrystalline silicon cube 102.Second silicon rod holder of top is oriented to second and driven It is also identical process to drive the second holder 152 of monocrystalline silicon cube 102 and lower section to move downward under the driving of motivation structure, from And the effect of landing monocrystalline silicon cube 102 is realized, it will not be repeated here.

It should be noted that in other change case, second holder of lower section e.g. in two the second holders 152 Second guiding driving mechanism is set on 152, and structure, set-up mode and the driving working method of the second guiding driving mechanism are with before State top the second holder 152 the second guiding driving mechanism it is similar, such as by lower section the second holder 152 second Moved up and down under the driving of guiding driving mechanism along the second fixture installed part 151 and adjust with the second holder of top 152 it Between clamping spacing, and monocrystalline silicon side is driven under the driving of the second guiding driving mechanism by the second holder 152 of lower section Body 102 and the second holder 152 of top the mode such as move up and down along the second fixture installed part 151 together.Such as two again Second holder 152 is provided with the second guiding driving mechanism, then the set-up mode of the second guiding driving mechanism and driving work The motion mode of mode and two the second holders 152 is self-evident, will not be repeated here.

Moved up and down in the second holder 152 for movable setting along the second fixture installed part 151 to adapt to In the situation that the monocrystalline silicon cube of different size length is clamped, except the second holder 152 uses movable structure to set Meter, the second holder 152 need to be set outside second guiding driving mechanism etc., certainly will also need to know the monocrystalline for being currently needed for clamping The scale lengths of silicon cube.In view of this, the workpiece transporter in the application may also include height testing instrument (not in the drawings Shown), for erectting the height for the monocrystalline silicon cube placed, so as to which the second holder 152 as movable setting exists Subsequently along the second fixture installed part 151 move up or move down and the foundation of displacement.But, in this embodiment party In formula, the single-wafer silicon rod 101 as the first form workpiece forms monocrystalline silicon after evolution operation and other related operations Cube 102 is used as the second form workpiece, during monocrystalline silicon cube 102 is formed as by single-wafer silicon rod 101, usually, Length is constant, and therefore, for the second fixture 15, it is necessary that height testing instrument, which is not,.In actual applications, for For same workpiece, as long as the second holder 152 in the second fixture 15 followed by the first holder 132 in the first fixture 13 Adjust paces, i.e. how the first holder 132 in the first fixture 13 moves up and down, then, the in the second fixture 15 Two holders 152 are also made to move up and down accordingly so that, the clamping between two the second holders 152 in the second fixture 15 The clamping spacing between two the first holders 132 in spacing and the first fixture 13 is consistent.

It is that Fig. 8 is schematic flow sheet of the application workpiece transporter in workpiece transhipment operation is performed refering to Fig. 8.Such as Shown in Fig. 8, the process for performing workpiece transhipment operation comprises the following steps：

Step S101, the first form work positioned at loading and unloading station is clamped using the first fixture in workpiece transporter Part.In step S101, first, the first form workpiece is positioned on loading and unloading station with erectting, and must ensure that workpiece turns simultaneously The first fixture in shipping unit corresponds to loading and unloading station, wherein, the first form workpiece can be by manually carrying or manipulator Machinery crawl etc. mode and erect and be positioned over loading and unloading station, the first fixture in workpiece transporter then can pass through drive commutation Carrier rotation carrys out adjustment position and corresponds to loading and unloading station to realize.Then, if necessary, put according to the setting of the first form workpiece Height under configuration state, drive the first fixture in corresponding first holder commutation carrier on move up and down it is each to adjust The clamping spacing that first holder is formed.Then, the in each first holder that clamping is participated in the first fixture is driven One jig arm makees clamping action, to enable these first holders to handle workpiece clamp in the form of first on loading and unloading station.

Step S103, driving commutation carrier make commutation motion so that the first fixture is with the first form workpiece clamped Changed by loading and unloading station to operation station.In step s 103, first, before driving commutation carrier makees commutation motion, compared with Goodly, the first form workpiece clamped by the first fixture need to be departed from and in loading and unloading station, realizes that the mode of disengaging can be taken Following any or their combination：One, in the case of ensuring that the first fixture 13 clamps the first form workpiece, utilize First fixture moves up the workpiece in the form of lifting first along commutation carrier；Two, driving commutation carrier be mounted opposite basis to Upper movement workpiece in the form of lifting first；Three, drive and be used to carry the first form workpiece on loading and unloading station or loading and unloading station Plummer make decline movement, disengaging configuration is dropped to by original carrying position.Then, driving commutation carrier is mounted opposite base Plinth rotates so that the first carrier on commutation carrier corresponds to operation station by commutating motion.

Step S105, the first fixture is discharged, by the first form work-piece clamped in operation station.In step S105 In, in the case of the first fixture in ensuring workpiece transporter corresponds to operation station, also include one and step The first form workpiece is departed from the first form workpiece dropping place in loading and unloading station contrary in the operation of operation station in S103 Step, specifically, following any or their combination can be taken by realizing the mode of dropping place：One, ensuring the first fixture In the case of clamping the first form workpiece, moved down using the first fixture along commutation carrier by work in the form of first of landing Part；Two, driving commutation carrier is mounted opposite basis and moved down by the workpiece in the form of first that lands；Three, drive operation station or work The plummer for being used to carry the first form workpiece on industry station is made to rise movement, and carrying position is risen to by original disengaging configuration Put.Then, the first jig arm in each first holder for participating in clamping in the first fixture is driven to make release action, to cause this A little first holders unclamp the first form workpiece so that the first form workpiece dropping place after release is on operation station.

Follow-up, just the first form workpiece on operation station is implemented to comprise at least by multi-wire saw equipment has cutting to make The processing operation of industry so that the first form workpiece forms the second form workpiece after these processing operations.

Step S107, driving commutation carrier make commutation motion so that the second fixture in workpiece transporter is changed to work Industry station.

Step S109, the second form workpiece positioned at the operation station is clamped using the second fixture.In step S107 In, if necessary, according to the height erect under laying state of the second form workpiece, drive corresponding second clamping in the second fixture Part moving up and down to adjust the clamping spacing that each second holder is formed on commutation carrier.Then, the folder of driving second The second jig arm participated in tool in each second holder of clamping makees clamping action, to enable these second holders to make The second form workpiece clamp on industry station handles.

Step S111, driving commutation carrier make commutation motion so that the second fixture is with the second form workpiece clamped Supreme discharge station is changed by operation station.In step S111, first, before driving commutation carrier makees commutation motion, compared with Goodly, the second form workpiece clamped by the second fixture need to be departed from operation station, realize disengaging mode can take as Under any or their combination：One, in the case of ensuring that the second fixture 15 clamps the second form workpiece, utilize Two fixtures move up the workpiece in the form of lifting second along commutation carrier；Two, driving commutation carrier is mounted opposite basic upward The mobile workpiece in the form of lifting second；Three, drive and be used for the carrying for carrying the second form workpiece on operation station or operation station Platform is made to decline movement, drops to disengaging configuration by original carrying position.Then, driving commutation carrier is mounted opposite basis and turned It is dynamic so that the second carrier on commutation carrier corresponds to loading and unloading station by commutating motion.

Step S113, the second fixture is discharged, the second work form part clamped is placed in loading and unloading station and carried out down Material.In step S113, in the case of the second fixture in ensuring workpiece transporter corresponds to loading and unloading station, also wrap One is included with departing from the second form workpiece dropping place the second form workpiece in operation station contrary in upper in step S111 The operating procedure of discharge station, specifically, following any or their combination can be taken by realizing the mode of dropping place：One, In the case of ensuring that the second fixture 15 clamps the second form workpiece, using the second fixture along commutation carrier move down with Land the second form workpiece；Two, driving commutation carrier is mounted opposite basis and moved down by the workpiece in the form of second that lands；Three, drive The plummer for being used to carry the second form workpiece on dynamic loading and unloading station or loading and unloading station is made to rise movement, by original disengaging Position rises to carrying position.Then, the first jig arm in each first holder for participating in clamping in the second fixture is driven to make Release acts, the workpiece in the form of causing these first holders to unclamp second so that the second form workpiece dropping place after release in On loading and unloading station.

The application workpiece transporter makees commutation motion during workpiece transhipment operation is performed, by the carrier that commutates, It may be such that the first fixture is changed between loading and unloading station and operation station by by the workpiece in the form of the first of loading and unloading station Operation station and the second fixture is transported to change will be located at operation station between operation station and loading and unloading station The the second form workpiece for completing cutting operation is transported to loading and unloading station, in this way, the quick of workpiece can be realized and easily transported, Improve the transport efficacy of workpiece.

Below in conjunction with Fig. 9 to Figure 16, perform workpiece transhipment in some instances to the application workpiece transporter and carry out in detail Thin description.In the following example, following setting is first made：Workpiece transporter is applied in silicon rod multi-wire saw equipment, the silicon Rod multi-wire saw equipment can implement evolution and other operations (such as round as a ball and flour milling etc.), the silicon rod multi-wire cutting to silicon single crystal rod Cutting equipment has loading and unloading station and operation station, and the first form workpiece is single-wafer silicon rod, and the second form workpiece is monocrystalline silicon Cube, workpiece transporter include commutation carrier and the first fixture and the second fixture on commutation carrier, the first folder Tool and the second fixture are respectively arranged on the opposite sides of commutation carrier, and the first fixture and the second fixture can differ 180 ° of phases, and, the One fixture includes at least two first holders, and at least two first holders are movable design, and above First holder is more configured with the first guiding driving mechanism, and the second fixture includes at least two second holders, and at least two Second holder is movable design, and the second holder above is more configured with the second guiding driving mechanism.

Step 1, the single-wafer silicon rod the first fixture in workpiece transporter corresponded on loading and unloading station.In the step In rapid 1, the first fixture in workpiece transporter then can be by driving commutation carrier 11 to rotate come adjustment position to realize correspondingly In loading and unloading station, now, the first jig arm 134 in two the first holders 132 in the first fixture is releasing orientation, will be single Wafer silicon rod 101 is erect and is positioned on loading and unloading station.The state of workpiece transporter for details, reference can be made to after implementation aforesaid operations Fig. 9, Fig. 9 are shown as state signal of the first fixture in workpiece transporter corresponding to the single-wafer silicon rod on loading and unloading station Figure.

Step 2, the single-wafer silicon rod positioned at loading and unloading station is clamped using the first fixture in workpiece transporter. In the step 2, if necessary, the height of the single-wafer silicon rod 101 on loading and unloading station is located at using height testing instrument detection, according to The elevation information measured, 132 relative commutation carrier 11 of the first holder above in the first fixture is driven to move up Or move down, adjust the clamping spacing between two the first holders 132.Then, two first in the first fixture are driven The first jig arm 134 in holder 132 makees clamping action, and the single-wafer silicon rod 101 on loading and unloading station is clamped.Implement The state of workpiece transporter for details, reference can be made to Figure 10 after aforesaid operations, and Figure 10 is shown as the first fixture in workpiece transporter Clamp the view of the single-wafer silicon rod positioned at loading and unloading station.

Step 3, driving commutation carrier makees commutation motion so that the first fixture is with the single-wafer silicon rod clamped by upper and lower Material station is changed to operation station.In step 3, first, before driving commutation carrier 11 makees commutation motion, it is preferred that needing The single-wafer silicon rod 101 clamped by the first holder 132 in the first fixture is departed from loading and unloading station.Then, drive The carrier 11 that commutates rotates 180 ° so that the single-wafer silicon rod 101 handled folded by the first carrier on commutation carrier 11 passes through commutation Move and correspond to operation station.The state of workpiece transporter for details, reference can be made to Figure 11 after implementation aforesaid operations, and Figure 11 is shown The first fixture is illustrated with state of the single-wafer silicon rod clamped corresponding to operation station after making commutation motion for commutation carrier Figure.

Step 4, the first fixture is discharged, the single-wafer silicon rod clamped is placed in operation station.In step 4, true The first fixture protected in workpiece transporter is in the case of correspond to operation station, the single-wafer silicon rod dropping place that will first clamp In on operation station.Then, drive the first jig arm 134 in the first fixture in two the first holders 132 to make release action, make Single-wafer silicon rod 101 after must unclamping, which is erect, to be positioned on operation station.The state of workpiece transporter after implementation aforesaid operations It for details, reference can be made to Figure 12, Figure 12 is shown as discharging the view that single-wafer silicon rod after the first fixture is placed in operation station.

Follow-up, just the single-wafer silicon rod on operation station is implemented to comprise at least by silicon rod multi-wire saw equipment has evolution Each road processing operation of operation so that single-wafer silicon rod forms monocrystalline silicon cube after these processing operations.Wherein, for list The evolution operation of wafer silicon rod, the embodiment of the evolution operation then refer to the patents such as CN105818285A and disclose text Offer, will not be repeated here.In addition, in addition to evolution operation, other processing such as corase grind, round as a ball, fine grinding or polishing are may also include Operation.

Step 5, driving commutation carrier makees commutation motion so that the second fixture in workpiece transporter is changed to operation work Position.In the step 5, the second fixture in workpiece transporter then can be by driving commutation carrier 11 to rotate 180 ° to adjust position Put and correspond to operation station to realize, now, the second jig arm 154 in two the second holders 152 in the second fixture is pine Open state, the post-job setting of monocrystalline silicon cube 102 is accordingly processed into completion and is positioned on operation station.After implementing aforesaid operations The state of workpiece transporter for details, reference can be made to Figure 13, and the second fixture that Figure 13 is shown as in workpiece transporter corresponds to operation The view of monocrystalline silicon cube on station.

Step 6, the monocrystalline silicon cube positioned at the operation station is clamped using the second fixture.In step 6, it is necessary When, using the height of monocrystalline silicon cube 102 of the height testing instrument detection on the operation station, according to the elevation information measured, Drive 152 relative commutation carrier 11 of the second holder above in the second fixture to move up or move down, adjust Clamping spacing between two the second holders 152.Then, the in two the second holders 152 in the second fixture is driven Two jig arm 154 make clamping action, and the monocrystalline silicon cube 102 on operation station is clamped.

In actual applications, when two the second holders 152 of the second fixture on commutation carrier 11 correspond to operation work During position, now, two the first holders of the first fixture on carrier 11 that commutates correspond to loading and unloading station, therefore, work as profit It is now, available when clamping the monocrystalline silicon cube on operation station with two the second holders 152 in the second fixture Two the first holders 132 in first fixture clamp the new single-wafer silicon rod to be processed on loading and unloading station 103。

The state of workpiece transporter for details, reference can be made to Figure 14 after implementation aforesaid operations, and Figure 14 is shown as workpiece transporter In the second fixture clamp and clamped positioned at the monocrystalline silicon cube of operation station and the first fixture positioned at the new of loading and unloading station Single-wafer silicon rod view.

Step 7, driving commutation carrier makees commutation motion so that the second fixture is with the monocrystal rod cube clamped by operation Station changes supreme discharge station.In step 7, first, before driving commutation carrier 11 makees commutation motion, it is preferred that needing The monocrystalline silicon cube 102 clamped by the second holder 152 in the second fixture is departed from operation station.Then, driving is changed 180 ° are rotated to carrier 11 so that the monocrystalline silicon cube 102 handled folded by the second carrier on commutation carrier 11 is transported by commutating Move and correspond to loading and unloading station.Similarly, after rotating 180 ° by the carrier 11 that commutates, the first fixture on commutation carrier 11 The folded new single-wafer silicon rod 103 handled correspond to operation station by commutating motion.Workpiece after implementation aforesaid operations The state of transporter for details, reference can be made to Figure 15, and Figure 15 carriers that are shown as commutating make after commutation motion the second fixture with clamping Monocrystal rod cube correspond to loading and unloading station and the first fixture and correspond to operation station with the single-wafer silicon rod clamped View.

Step 8, the second fixture is discharged, the monocrystalline silicon cube clamped is placed in loading and unloading station and and carries out blanking. In step 8, in the case of the second fixture in ensuring workpiece transporter corresponds to loading and unloading station, first by the second folder Has the dropping place of monocrystalline silicon cube 102 clamped on loading and unloading station.Then, two the second holders in the second fixture are driven The second jig arm 154 in 152 makees release action so that the monocrystalline silicon cube 102 after release, which is erect, to be positioned on loading and unloading station. At the same time, for the first fixture, the new dropping place of single-wafer silicon rod 103 for first clamping the first fixture is in operation station On, then drive the first jig arm 134 in the first fixture in two the first holders 132 to make release action so that it is new after release Single-wafer silicon rod 103 erect be positioned on operation station.The state of workpiece transporter can specifically join after implementation aforesaid operations See that Figure 16, Figure 16 are shown as discharging monocrystalline silicon cube after the second fixture and are placed in loading and unloading station and discharge new after the first fixture Single-wafer silicon rod is placed in the view of operation station.

The principle and its effect of above-described embodiment only illustrative the application, not for limitation the application.It is any ripe Know the personage of this technology all can without prejudice to spirit herein and under the scope of, modifications and changes are carried out to above-described embodiment.Cause This, those of ordinary skill in the art is complete without departing from spirit disclosed herein and institute under technological thought such as Into all equivalent modifications or change, should be covered by claims hereof.

Claims

1. a kind of workpiece transporter, applied in multi-wire saw equipment, the multi-wire saw equipment have loading and unloading station and Operation station, it is characterised in that including：

Commutate carrier；

First fixture, located at the first fixture area of the commutation carrier, for clamping the first form workpiece；

Second fixture, located at the second fixture area of the commutation carrier, for clamping the second form workpiece；

Wherein, by driving the commutation carrier to make commutation motion so that first fixture on the commutation carrier is upper Between discharge station and operation station conversion in the form of transporting first workpiece and second fixture in operation station and loading and unloading Conversion workpiece in the form of transporting second between station.

2. workpiece transporter according to claim 1, it is characterised in that

First fixture includes：

First fixture installed part, on the commutation carrier；And

At least two first holders, set along the first fixture installed part spacing；

Second fixture includes：

Second fixture installed part, on the commutation carrier；And

At least two second holders, set along the second fixture installed part spacing.

3. workpiece transporter according to claim 2, it is characterised in that

First holder includes：

First jig arm mounting seat, on the fixture installed part；

At least two first jig arm, it is movably arranged in the first jig arm mounting seat；And

First jig arm drive mechanism, for driving at least two first jig arm to make opening and closing movement；

Second holder includes：

Second jig arm mounting seat, on the fixture installed part；

At least two second jig arm, it is movably arranged in the second jig arm mounting seat；And

Second jig arm drive mechanism, for driving at least two second jig arm to make opening and closing movement.

4. workpiece transporter according to claim 3, it is characterised in that

The first jig arm drive mechanism includes：

First folding gear, in first jig arm；

First gear actuator, there is the first groove engaged with the first folding gear in first jig arm；And

First driving source, the first gear actuator is connected to, for driving the first gear actuator to move；

The second jig arm drive mechanism includes：

Second folding gear, in second jig arm；

Second gear actuator, there is the second groove engaged with the second folding gear in second jig arm；And

Second driving source, the second gear actuator is connected to, for driving the second gear actuator to move.

5. workpiece transporter according to claim 4, it is characterised in that

The first gear actuator is the first rack, and the opposite sides of first rack is respectively equipped with and described at least two First groove corresponding to the first folding gear engagement in first jig arm；

First driving source is the first cylinder or the first motor for driving the first rack motion；

The second gear actuator is the second rack, and the opposite sides of second rack is respectively equipped with and described at least two Second groove corresponding to the second folding gear engagement in second jig arm；And

Second driving source is the second cylinder or the second motor for driving the second rack motion.

6. workpiece transporter according to claim 4, it is characterised in that

The first gear actuator is the first drive gear structure；

First driving source is the first motor for driving the first drive gear structure operating；

The second gear actuator is the second drive gear structure；And

Second driving source is the second motor for driving the second drive gear structure operating.

7. workpiece transporter according to claim 2, it is characterised in that

In first fixture, at least one first holder at least two first holders is provided with first and is oriented to driving Mechanism, for driving it along the first fixture installed part motion, to adjust the spacing of at least two first holder； And

In second fixture, at least one second holder at least two second holders is provided with second and is oriented to driving Mechanism, for driving it along the second fixture installed part motion, to adjust the spacing of at least two second holder.

8. workpiece transporter according to claim 7, it is characterised in that

First guiding driving mechanism includes：First guiding leading screw and the first guide motor, wherein, first guiding leading screw One end be connected to first holder, the other end of first guiding leading screw is connected to first guide motor；With And

Second guiding driving mechanism includes：Second guiding leading screw and the second guide motor, wherein, second guiding leading screw One end be connected to second holder, the other end of second guiding leading screw is connected to second guide motor.

9. the workpiece transporter according to claim 2 or 7, it is characterised in that also including height testing instrument, located at described Commutate on carrier, for detecting the height of the first form workpiece.

10. workpiece transporter according to claim 1, it is characterised in that first fixture is round piece fixture, Second fixture is square workpiece fixture.