CN110154254A - Material clamping device on a kind of crystal bar evolution - Google Patents
Material clamping device on a kind of crystal bar evolution Download PDFInfo
- Publication number
- CN110154254A CN110154254A CN201910594157.4A CN201910594157A CN110154254A CN 110154254 A CN110154254 A CN 110154254A CN 201910594157 A CN201910594157 A CN 201910594157A CN 110154254 A CN110154254 A CN 110154254A
- Authority
- CN
- China
- Prior art keywords
- crystal bar
- feeding
- centering
- workbench
- support base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 76
- 239000000463 material Substances 0.000 title claims abstract description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 23
- 210000000078 claw Anatomy 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 12
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052710 silicon Inorganic materials 0.000 abstract description 10
- 239000010703 silicon Substances 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 7
- 238000005520 cutting process Methods 0.000 abstract description 6
- 229910003460 diamond Inorganic materials 0.000 abstract description 4
- 239000010432 diamond Substances 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The present invention relates to material clamping devices on a kind of crystal bar evolution, belong to crystal silicon processing technique field, including pedestal, the pedestal is equipped with workbench and centering component, the workbench is equipped with support base, feeding holds down assembly and driving assembly, support base is used to support crystal bar, the top that feeding holds down assembly for compressing the crystal bar being located on support base, centering component is used to clamp the side for the crystal bar being located on support base, realize centering operation, driving assembly drives support base, feeding holds down assembly along the guide rail sliding on pedestal, realize feeding, the present invention holds down assembly by feeding and is suitable for circle, the crystal bar clamping of different shapes of rectangular and diamond shape, eliminate a large amount of non-cutting times when upper and lower crystal bar, crystal bar is clamped by the way of upper-lower compacting, clamping is stablized, simultaneously, accuracy of alignment is improved by centering component, keep crystal bar long Degree is oriented parallel to guide rail direction, it is ensured that evolution verticality improves workbench transverse shifting precision by driving assembly.
Description
Technical field
The invention belongs to crystal silicon processing technique field, material clamping device on a kind of crystal bar evolution is related in particular to.
Background technique
The manufacturing process of silicon wafer used in production solar panel is divided into: crystal pulling, truncation, evolution, mill fall, slice etc. is several
Step.Crystal pulling is the silicon single crystal rod for generating cylinder type by way of chemical deposition in crystal pulling furnace, and length maximum is up to 6
Rice；Truncation refers to that the silicon single crystal rod that crystal pulling is come out is cut into the segment that length does not wait (100~700mm)；Evolution refers to truncation
The silicon single crystal rod of different length out is cut into cuboid-type；Mill on the contrary refers to grinding tool the silicon single crystal rod of cuboid-type after evolution
Four surfaces carry out grinding and polishing and four seamed edges carry out the process of rounding.Slice refers to the monocrystalline the cuboid-type after grinding
The silicon wafer that silicon rod is cut into 0.15mm or so thickness is used for the production of last solar panel.Wherein the process of evolution is cylinder
The silicon single crystal rod of type is cut into cuboid-type, then the clout that can generate four block-shaped irregular (the arc-shaped ⌒ in section) (claims in industry
For flaw-piece).Crystal bar after evolution also needs to carry out the cutting of four corner angle, in order to save grinding machine station grinding corner angle when
Between.Different cutting techniques need to switch different clamp methods, and whens crystal bar loading and unloading expends a large amount of non-cutting times.
Summary of the invention
For various deficiencies of the prior art, to solve the above-mentioned problems, it is proposed that material clamping dress on a kind of crystal bar evolution
It sets, is suitable for round, rectangular, three kinds of prismatic crystal bar clampings of different shapes.
To achieve the above object, the invention provides the following technical scheme:
Material clamping device on a kind of crystal bar evolution, including pedestal, the pedestal are equipped with workbench, set on the workbench
Have:
Support base is used to support crystal bar；
Feeding holds down assembly, and is located above support base, for compressing the top for the crystal bar being located on support base；
Driving assembly, the pedestal are equipped with guide rail, and it is sliding along guide rail that driving assembly drives support base, feeding to hold down assembly
It is dynamic, realize feeding；
Centering component is located above workbench and is connected with pedestal, for clamping the crystal bar being located on support base
Centering operation is realized in side.
Preferably, the feeding holds down assembly including support frame, feeding cylinder and feeding pressing plate, the feeding cylinder along
Vertical direction setting, cylinder body end are connect by support frame with workbench, and piston end is connect with feeding pressing plate, the feeding pressure
Plate is arranged along the length direction of crystal bar.
Preferably, the lower section of the feeding pressing plate is equipped with feeding briquetting, and feeding briquetting is set as V-structure, and V-structure
Opening face crystal bar.
Preferably, support briquetting identical with feeding briquette structure is equipped with above the support base.
Preferably, it has been placed in the vertical direction backup plate on support frame as described above, offseted for the end face with crystal bar.
Preferably, the centering component includes centering bracket, claw cylinder and centering backup plate, and the centering bracket is along perpendicular
Histogram is to setting, and bottom and pedestal are connected, and the claw cylinder is arranged along perpendicular to boule length direction, cylinder body end with
Centering bracket is connected, and piston end is connect with centering backup plate, and the centering backup plate is placed in the vertical direction.
Preferably, the claw cylinder and centering backup plate be equipped with it is symmetrical be equipped with 2, and centering backup plate and crystal bar are cut
Face is affixed.
Preferably, the centering component is at least arranged 1 along the length direction of crystal bar.
Preferably, the driving component includes driving motor, axial clearance gear, lateral clearance gear and rack gear, described
Rack gear is fixedly arranged on pedestal, and the axial clearance gear, lateral clearance gear are meshed with rack gear respectively, and the driving motor is logical
Speed reducer is crossed to connect with axial clearance gear drive.
Preferably, the axial clearance gear is connect by fixed plate one with workbench, and fixed plate one is equipped with longitudinal direction
Strip groove, lateral clearance gear are connect by fixed plate two with workbench, and fixed plate two is equipped with lateral strip groove, fixed plate
One, fixed plate two and the relative position of workbench are adjustable.
The beneficial effects of the present invention are:
It holds down assembly by feeding and is suitable for round, rectangular and diamond shape crystal bar clamping of different shapes, eliminate crystalline substance up and down
A large amount of non-cutting times when stick clamp crystal bar by the way of upper-lower compacting, and clamping is stablized, meanwhile, it is mentioned by centering component
High accuracy of alignment, makes boule length be oriented parallel to guide rail direction, it is ensured that evolution verticality improves workbench by driving assembly
Transverse shifting precision.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is overall structure side view of the invention；
Fig. 3 is the schematic diagram that the present invention clamps round crystal bar；
Fig. 4 is the schematic diagram of clamping square crystal bar of the present invention；
Fig. 5 is the schematic diagram of present invention clamping crystal bar cutting corner angle.
In attached drawing: 1- support base, 2- feeding hold down assembly, 3- centering component, 4- crystal bar, 5- driving assembly, 6- guide rail, 7-
Support frame, 8- feeding cylinder, 9- feeding pressing plate, 10- backup plate, 11- feeding briquetting, 12- centering bracket, 13- claw cylinder, 14-
Centering backup plate, 15- support briquetting, 16- driving motor, 17- lateral clearance gear, 18- rack gear, 19- workbench, 20- fixed plate
One, 21- fixed plate two, the longitudinal direction 22- strip groove, 23- transverse direction strip groove.
Specific embodiment
It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention
Technical solution of the present invention carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist
Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application.
In addition, the direction word mentioned in following embodiment, such as "upper" "lower" " left side " " right side " etc. are only the directions with reference to attached drawing, because
This, the direction word used is for illustrative and not limiting the invention.
Embodiment one:
As depicted in figs. 1 and 2, material clamping device on a kind of crystal bar evolution, including pedestal, pedestal are connect with lathe, described
Pedestal is equipped with workbench 19 and centering component 3, and the workbench 19 is equipped with support base 1, feeding and holds down assembly 2 and driving
Component 5.Wherein, support base 1 is used to support crystal bar 4.Feeding holds down assembly 2 positioned at 1 top of support base, supports for compressing to be located at
The top of crystal bar 4 on seat 1.Centering component 3 is located above workbench and is connected with pedestal, is located at support base 1 for clamping
On crystal bar 4 side, realize centering operation.The pedestal is equipped with guide rail 6, and driving assembly 5 drives support base 1, feeding pressure
Tight component 2 is slided along guide rail 6, realizes feeding.
Specifically, as shown in Figure 1 to Figure 3, the feeding hold down assembly 2 include support frame 7, feeding cylinder 8 and feeding pressure
Plate 9, the feeding cylinder 8 are placed in the vertical direction, and cylinder body end is connect by support frame 7 with workbench 19, piston end
It is connect with feeding pressing plate 9, that is to say, that support frame 7, feeding cylinder 8, feeding pressing plate 9 and workbench 19 become one.It is described
Feeding pressing plate 9 is arranged along the length direction of crystal bar 4, meanwhile, the lower section of the feeding pressing plate 9 is equipped with feeding briquetting 11, also
It is to say, elongation or retraction along with feeding cylinder 8, feeding briquetting 11 compress or unclamp crystal bar 4, can be to the crystal bar of different-diameter
4 are compressed, and avoid crystal bar 4 unstable in subsequent progress processing action.As shown in Figures 3 to 5, in order to adapt to different shape
The clipping operation of (round, rectangular and diamond shape) crystal bar 4, the feeding briquetting 11 is set as V-structure, and the opening of V-structure is just
It is corresponding to crystal bar 4, support briquetting 15 identical with 11 structure of feeding briquetting is equipped with above the support base 1.In addition, institute
It states and has been placed in the vertical direction backup plate 10 on support frame 7, for offseting with the end face of crystal bar 4, that is to say, that 10 conduct of backup plate
Place initial position when crystal bar 4.
When original state, feeding cylinder 8 is in elongation state, crystal bar 4 is placed on support base 1, and promote the end of crystal bar 4
Face offsets with backup plate 10, and when impaction state, feeding cylinder 8 is in retracted state, and feeding briquetting 11 is promoted to compress the top of crystal bar 4
Portion.
Embodiment two:
As shown in figures 1 and 3, the centering component 3 is at least arranged 1 along the length direction of crystal bar 4.The present embodiment
In, centering component 3 is equipped with 2.Specifically, the centering component 3 includes centering bracket 12, claw cylinder 13 and centering backup plate
14, the centering bracket 14 is placed in the vertical direction, and bottom and pedestal are connected, and the claw cylinder 13 is along perpendicular to crystalline substance
The setting of 4 length direction of stick, cylinder body end and centering bracket 12 are connected, and piston end is connect with centering backup plate 14, meanwhile, it is described right
Middle backup plate 14 is placed in the vertical direction.In addition, the claw cylinder 13 and centering backup plate 14, which are equipped with, is symmetrically equipped with 2,
And centering backup plate 14 and the cut surface of crystal bar 4 are affixed.That is, elongation or retraction along with claw cylinder 13, centering are leaned on
Plate 14 is adjacent to or the cut surface far from crystal bar 4, guarantees that cut surface is parallel with guide pass when processing crystal bar.
When support base 1 places round crystal bar and diamond shape crystal bar, since feeding briquetting 11 is set as V-structure, crystal bar can be certainly
Centering does not need the work of centering component 3.When placement ends the round crystal bar of 2 sides, crystal bar needs to overturn 90 ° and opens another 2 sides
Face corrects crystal bar by claw cylinder 13, so that boule length is oriented parallel to guide rail direction, it is ensured that evolution verticality, claw gas
Reachable ± the 0.1mm of 13 centering repeatable accuracy of cylinder.
Embodiment three:
As shown in Figure 1, Figure 2 and Figure 4, the driving component 5 is fixedly arranged on workbench 19 comprising driving motor 16 is indulged
To gap gear, lateral clearance gear 17 and rack gear 18, the rack gear 18 is fixedly arranged on pedestal, and rack gear 18 is parallel with guide rail 6
Setting.The axial clearance gear is connect by fixed plate 1 with workbench 19, and fixed plate 1 is equipped with longitudinal bar shaped
Slot 22, lateral clearance gear 17 are connect by fixed plate 2 21 with workbench 19, and fixed plate 2 21 is equipped with lateral strip groove
23, fixed plate 1, fixed plate 2 21 and the relative position of workbench 19 are adjustable, and axial clearance gear, lateral clearance gear
17 are meshed with rack gear 18 respectively.The driving motor 16 is connect by speed reducer with axial clearance gear drive.
By vertical adjustment fixed plate 1, the spacing of axial clearance wheel and rack 18 is adjusted, realizes transmission, but single
Wheel and rack has backlash when engaging, and influences transmission accuracy, causes feeding physical location and theoretical position there are deviation, because
This adjusts the spacing of lateral clearance gear 17 and axial clearance gear by lateral adjustments fixed plate 2 21, can eliminate single
Backlash when gear and rack-driving achievees the effect that improve gear, rack-driving precision, reduces error.
The above has been described in detail, described above, is only a preferred embodiment of the present invention, when cannot
It limit the scope of implementation of the present invention, i.e., it is all according to the made equivalent changes and modifications of the application range, it should still belong to covering scope of the present invention
It is interior.
Claims (10)
1. material clamping device on a kind of crystal bar evolution, including pedestal, the pedestal is equipped with workbench (19), which is characterized in that
The workbench (19) is equipped with:
Support base (1) is used to support crystal bar (4)；
Feeding holds down assembly (2), is located above support base (1), for compressing the top for the crystal bar (4) being located on support base (1)
Portion；
Driving assembly (5), the pedestal are equipped with guide rail (6), and driving assembly (5) drives support base (1), feeding to hold down assembly
(2) it is slided along guide rail (6), realizes feeding；
It is additionally provided with centering component (3) on the pedestal, be located above workbench (19) and is connected with pedestal, for clamping position
In the side of the crystal bar (4) on support base (1), centering operation is realized.
2. clamping device according to claim 1, which is characterized in that the feeding hold down assembly (2) include support frame
(7), feeding cylinder (8) and feeding pressing plate (9), the feeding cylinder (8) are placed in the vertical direction, and cylinder body end passes through support
Frame (7) is connect with workbench (19), and piston end is connect with feeding pressing plate (9), and the feeding pressing plate (9) is along crystal bar (4)
Length direction setting.
3. clamping device according to claim 2, which is characterized in that the lower section of the feeding pressing plate (9) is equipped with feeding pressure
Block (11), and feeding briquetting (11) is set as V-structure, and the opening face crystal bar (4) of V-structure.
4. clamping device according to claim 3, which is characterized in that be equipped with and feeding briquetting above the support base (1)
(11) the identical support briquetting (15) of structure.
5. clamping device according to claim 2, which is characterized in that support frame as described above is placed in the vertical direction on (7)
There are backup plate (10), offsets for the end face with crystal bar (4).
6. clamping device according to claim 1, which is characterized in that the centering component (3) include centering bracket (12),
Claw cylinder (13) and centering backup plate (14), the centering bracket (12) are placed in the vertical direction, and bottom and pedestal are connected,
The claw cylinder (13) is arranged along perpendicular to crystal bar (4) length direction, and cylinder body end and centering bracket (12) are connected, and lives
Plug end is connect with centering backup plate (14), and the centering backup plate (14) is placed in the vertical direction.
7. clamping device according to claim 6, which is characterized in that the claw cylinder (13) and centering backup plate (14) are equal
2 are equipped with equipped with symmetrical, and centering backup plate (14) and the cut surface of crystal bar (4) are affixed.
8. -7 any clamping device according to claim 1, which is characterized in that the centering component (3) is along crystal bar (4)
Length direction be at least arranged 1.
9. clamping device according to claim 8, which is characterized in that the driving component (5) include driving motor (16),
Axial clearance gear, lateral clearance gear (17) and rack gear (18), the rack gear (18) are fixedly arranged on pedestal, the axial clearance
Gear, lateral clearance gear (17) are meshed with rack gear (18) respectively, and the driving motor (16) passes through between speed reducer and longitudinal direction
Gap gear drive connection.
10. clamping device according to claim 9, which is characterized in that the axial clearance gear passes through fixed plate one
(20) it is connect with workbench (19), and fixed plate one (20) is equipped with longitudinal strip groove (22), lateral clearance gear (17) passes through
Fixed plate two (21) is connect with workbench (19), and fixed plate two (21) is equipped with lateral strip groove (23), fixed plate one (20),
Fixed plate two (21) and the relative position of workbench (19) are adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910594157.4A CN110154254A (en) | 2019-07-03 | 2019-07-03 | Material clamping device on a kind of crystal bar evolution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910594157.4A CN110154254A (en) | 2019-07-03 | 2019-07-03 | Material clamping device on a kind of crystal bar evolution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110154254A true CN110154254A (en) | 2019-08-23 |
Family
ID=67637763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910594157.4A Pending CN110154254A (en) | 2019-07-03 | 2019-07-03 | Material clamping device on a kind of crystal bar evolution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110154254A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110962238A (en) * | 2019-12-20 | 2020-04-07 | 红河州新型建筑科技发展有限公司 | Numerical control machining equipment for edges of lightweight concrete wallboard |
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| CN207388034U (en) * | 2017-05-27 | 2018-05-22 | 上海日进机床有限公司 | Silicon single crystal rod transfer device |
| CN207414980U (en) * | 2017-11-02 | 2018-05-29 | 上海日进机床有限公司 | Total silicon stick drum sanding equipment |
| CN207772139U (en) * | 2018-01-17 | 2018-08-28 | 大连连城数控机器股份有限公司 | A kind of new automatic diamond wire single line cutting machine |
| CN108656375A (en) * | 2018-05-11 | 2018-10-16 | 青岛高测科技股份有限公司 | A kind of two line excavation machine of silicon single crystal rod |
| CN108724490A (en) * | 2018-06-12 | 2018-11-02 | 山东大海新能源发展有限公司 | The method for improving chip crystal bar utilization rate |
| CN208375635U (en) * | 2018-05-11 | 2019-01-15 | 青岛高测科技股份有限公司 | A kind of feeding device of two lines excavation machine |
| CN109773641A (en) * | 2019-03-22 | 2019-05-21 | 天通日进精密技术有限公司 | The vertical round as a ball groover of semiconductor crystal bar |
| CN210910672U (en) * | 2019-07-03 | 2020-07-03 | 青岛高测科技股份有限公司 | Crystal bar squaring and feeding clamping device |
-
2019
- 2019-07-03 CN CN201910594157.4A patent/CN110154254A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03173610A (en) * | 1989-02-27 | 1991-07-26 | Wacker Chemitronic Ges Elektron Grundstoffe Mbh | Method of slicing rod-like work piece into sheets using inner periphery blade saw and inner periphery blade saw using said method |
| CN207388034U (en) * | 2017-05-27 | 2018-05-22 | 上海日进机床有限公司 | Silicon single crystal rod transfer device |
| CN207256594U (en) * | 2017-08-26 | 2018-04-20 | 福州天瑞线锯科技有限公司 | The feed device of the diamond fretsaw cutting equipment of monocrystalline bar |
| CN207414980U (en) * | 2017-11-02 | 2018-05-29 | 上海日进机床有限公司 | Total silicon stick drum sanding equipment |
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| CN108656375A (en) * | 2018-05-11 | 2018-10-16 | 青岛高测科技股份有限公司 | A kind of two line excavation machine of silicon single crystal rod |
| CN208375635U (en) * | 2018-05-11 | 2019-01-15 | 青岛高测科技股份有限公司 | A kind of feeding device of two lines excavation machine |
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| CN210910672U (en) * | 2019-07-03 | 2020-07-03 | 青岛高测科技股份有限公司 | Crystal bar squaring and feeding clamping device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110962238A (en) * | 2019-12-20 | 2020-04-07 | 红河州新型建筑科技发展有限公司 | Numerical control machining equipment for edges of lightweight concrete wallboard |
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