CN108656375A - A kind of two line excavation machine of silicon single crystal rod - Google Patents
A kind of two line excavation machine of silicon single crystal rod Download PDFInfo
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- CN108656375A CN108656375A CN201810449866.9A CN201810449866A CN108656375A CN 108656375 A CN108656375 A CN 108656375A CN 201810449866 A CN201810449866 A CN 201810449866A CN 108656375 A CN108656375 A CN 108656375A
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- single crystal
- silicon single
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 239000013078 crystal Substances 0.000 title claims abstract description 70
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 70
- 239000010703 silicon Substances 0.000 title claims abstract description 70
- 238000009412 basement excavation Methods 0.000 title claims abstract description 19
- 238000005520 cutting process Methods 0.000 claims abstract description 127
- 238000000429 assembly Methods 0.000 claims abstract description 38
- 230000000712 assembly Effects 0.000 claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000004804 winding Methods 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 238000007667 floating Methods 0.000 claims description 9
- 230000003139 buffering effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000035611 feeding Effects 0.000 description 47
- 230000007704 transition Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000004484 Briquette Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 208000035126 Facies Diseases 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to a kind of two line excavation machines of silicon single crystal rod,Belong to silicon single crystal rod technical field of processing equipment,Including pedestal,The pedestal is equipped with loading assemblies,Blanking component,Cutting head mechanism,Clamping device and feeding slide unit component,The loading assemblies and blanking component are connect by support component with pedestal,The feeding slide unit component is set to by column frame above pedestal,The clamping device is fixedly arranged on the lower section of feeding slide unit component,Cutting line forms parallel lines to cut silicon single crystal rod around cutting head mechanism,Compared to four traditional line excavation machines,The present invention carries out evolution using two cutting lines,Both cutting head mechanism had been optimized,Keep operation more stable,It is suitable for the evolution demand of flaw-piece and crest line difference back gauge again,Realize cutting line away from it is electrodeless adjustable,Improve equipment cutting efficiency,Full-automatic operation,With production capacity height,Cut quality is stablized,The low feature of labor intensity,To realize that industrial automation has profound significance.
Description
Technical field
The invention belongs to silicon single crystal rod technical field of processing equipment, relate in particular to a kind of two line evolution of silicon single crystal rod
Machine.
Background technology
The manufacturing process for making silicon chip used in solar panel is divided into：Crystal pulling, block, evolution, mill fall, slice etc. it is several
Step.Crystal pulling is to generate the silicon single crystal rod of cylinder type by way of chemical deposition in crystal pulling furnace, and length maximum is up to 6
Rice；It refers to the segment for the silicon single crystal rod of crystal pulling out being cut into length not equal (100~700mm) to block；Evolution refers to that handle blocks
The silicon single crystal rod of the different length gone out is cut into cuboid-type, generates the clout (row of four block-shaped irregular (the arc-shaped ⌒ in section)
It is known as flaw-piece in the industry)；Mill on the contrary refers to carries out grinding and polishing with grinding tool four surfaces of the silicon single crystal rod of cuboid-type after evolution, and
Four seamed edges carry out the process of rounding.Slice refers to that the silicon single crystal rod of the cuboid-type after grinding is cut into 0.15mm or so thickness
Silicon chip is used for the making of last solar panel.Currently, mostly using " four lines " excavation machine in industry realizes silicon single crystal rod
Evolution, i.e., the cutting line at cutting head form " well " font, this kind of device structure complexity is of high cost, in addition, between cutting line
Away from fixation, it is simply possible to use in the excision for cutting off flaw-piece and cannot achieve silicon rod crest line.
Invention content
For various deficiencies of the prior art, to solve the above-mentioned problems, it is proposed that a kind of two line excavation machine of silicon single crystal rod.
To achieve the above object, the present invention provides the following technical solutions：
A kind of two line excavation machine of silicon single crystal rod, including pedestal, the pedestal are equipped with loading assemblies, blanking component, cutting
Head mechanism, clamping device and feeding slide unit component, the loading assemblies and blanking component are connect by support component with pedestal, institute
Direction of feed setting of the support component perpendicular to feeding slide unit component is stated, the loading assemblies and blanking component are located at support
The both ends of component, and the direction of feed of loading assemblies and blanking component is perpendicular to the direction of feed of feeding slide unit component；
The feeding slide unit component is set to by column frame above pedestal, and the clamping device is fixedly arranged on feeding slide unit group
The lower section of part, and clamping device and slipway mechanism synchro-feed, the cutting head mechanism are located at the side of support component, cutting line
Parallel lines are formed to cut silicon single crystal rod around cutting head mechanism.
Further, the loading assemblies include feeding fixed plate, the first clamping jaw and the second clamping jaw, first clamping jaw and
Or second clamping jaw be flexibly connected with feeding fixed plate, the longitudinal section of first clamping jaw and the second clamping jaw is V-shaped, and the two
V-type opening be oppositely arranged with formed accommodate silicon single crystal rod space, the upper surface of the feeding fixed plate and positioned at the first clamping jaw,
Feeding tray is equipped between second clamping jaw.
Further, the blanking component includes blanking fixed plate, blanking cylinder, the L-shaped lower material torr of supporting plate and longitudinal section
Block, the cylinder body end of the blanking cylinder are connected with the upper surface of blanking fixed plate, and the lower surface of piston end and supporting plate is connected, institute
State blanking tray and be set as 2, and 2 blanking trays it is opposite set on the upper surface of supporting plate, the blanking fixed plate and supporting plate it
Between be equipped with guide post.
Further, the support component includes backing plate, feeding electric cylinders module and blanking electric cylinders module, the feeding electric cylinders mould
The guide rail slide block of group is equipped with loading assemblies support plate, and the guide rail slide block of the blanking electric cylinders module is equipped with and blanking fixed plate
Connected blanking component support plate, the loading assemblies support plate are equipped with feeding Buffer Unit, the feeding Buffer Unit packet
The first buffing pad, the second buffing pad and buffer spring are included, bottom and the loading assemblies support plate of first buffing pad are connected,
Top is free end, and the bottom of second buffing pad is free end, and top is connected with feeding fixed plate, the buffer spring
Both ends be separately connected the first buffing pad and the second buffing pad.
Further, the feeding slide unit component includes slide unit, slide unit driving motor and feed screw, the feed screw
Both ends are connected by leading screw supporting rack and column frame respectively, and the periphery of the feed screw is arranged with the cunning with its screw-thread fit
Dynamic seat, bottom and the slide unit of the sliding seat are connected, and one side is connect with the output end of slide unit driving motor, and the slide unit passes through
The sliding block being disposed below is slidably connected with column frame.
Further, the clamping device includes clamp head, dynamic collet and contained side skin component, the top of the clamp head and cunning
Platform is connected, and the top of the dynamic collet is slidably connected with slide unit, and the clamp head, dynamic collet are floating clamp, the floating
Collet includes Gripper body, the diaphragm being set on rear side of Gripper body and the ball being set between the Gripper body and diaphragm
Head.
Further, the contained side skin component is set as 2, and 2 contained side skin components are connect with clamp head, dynamic collet respectively,
The contained side skin component includes at least 2 contained side skin cylinders, and at least two contained side skin cylinder is located at clamp head or dynamic collet
Periphery, at least one of described 2 contained sides skin component are connect with flaw-piece rotating element.
Further, the cutting head mechanism includes left cutting assembly, right cutting assembly and wire-winding unit, and group is cut in the left cut
Part, right cutting assembly are symmetrical, and are equipped with the resigning gap that is passed through for silicon single crystal rod between the two, the left cutting assembly and
Right cutting assembly is described including wire-mesh scaffold and the first cutting wheel and the second cutting wheel that are vertically distributed on wire-mesh scaffold
In first cutting wheel and the second cutting wheel are generally aligned in the same plane, the wire-mesh scaffold for being located at left cutting assembly and right cutting assembly is opposite
Setting, cutting line bypasses successively to be used for positioned at the first cutting wheel of left cutting assembly and right cutting assembly, the formation of the second cutting wheel
Cut the parallel lines of silicon single crystal rod, bottom and the pedestal slidable connection of the wire-mesh scaffold.
Further, the winding mechanism includes wire winding tube and ureeling barrel, and the wire winding tube and ureeling barrel are each along horizontal direction
And it is parallel to wire-mesh scaffold setting, and the two is located at cutting mechanism not homonymy, and coiling is equipped at the wire winding tube and ureeling barrel
Drive component and winding displacement drive component.
Further, side of the pedestal far from support component is equipped with edge fit skin component, and the edge fit skin component includes connecing
Flaw-piece conveyer and picking-up container, the edge fit skin conveyer include edge fit skin motor, belt, slope and picking-up container, the edge fit
Skin motor drives belt operating, and the parallel lines that the top face cutting line of the picking-up container is formed are arranged, bottom end and Slope Facies
It connects, the slope and the rack of edge fit skin conveyer are connected.
The beneficial effects of the invention are as follows：
Compared to four traditional line excavation machines, the application carries out evolution using two cutting lines, had both optimized cutting head machine
Structure keeps operation more stable, and is suitable for the evolution demand of flaw-piece and crest line difference back gauge, realize cutting line away from it is electrodeless adjustable,
Equipment cutting efficiency is improved, full-automatic operation has the characteristics that production capacity is high, cut quality is stable, labor intensity is low, in addition,
Floating clamp adaptively silicon single crystal rod end face gradient, realization clamping device can be bonded with the complete of silicon single crystal rod end face, improve
Clamping stability, to realize that industrial automation has profound significance.
Description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is loading assemblies structural schematic diagram；
Fig. 3 is blanking component structure diagram；
Fig. 4 is support component structural schematic diagram；
Fig. 5 is clamping device and feeding slide unit component combination schematic diagram；
Fig. 6 is floating clamp structural schematic diagram；
Fig. 7 is cutting head mechanism structure schematic diagram；
Fig. 8 is that cutting line moves towards schematic diagram.
In attached drawing：1- pedestals, 2- loading assemblies, 3- blankings component, 4- support components, 5- cutting heads mechanism, 6- clamping machines
Structure, 7- feeding slide units component, 8- column frames, 9- edge fit skins component, 10- cutting lines；
201- feedings fixed plate, the first clamping jaws of 202-, the second clamping jaws of 203-, 204- feedings tray, 205- thrusts cylinder,
206- backup plates；
301- blankings fixed plate, 302- blankings cylinder, 303- supporting plates, 304- blankings tray, 305- guide posts, 306- upper props
Body, 307- lower props；
Under 401- backing plates, 402- feeding electric cylinders module, 403- blanking electric cylinders module, 404- loading assemblies support plate, 405-
Expect component support plate, the first buffing pads of 406-, the second buffing pads of 407-, 408- buffer springs；
The left cutting assemblies of 501-, the right cutting assemblies of 502-, 503- wire-mesh scaffolds, the first cutting wheels of 504-, 505- second are cut
Cut wheel, 506- wire winding tubes, 507- ureeling barrels, 508- tension supports, 509- tensile drive elements, 510 straining pulleys, 511- winding displacements
Wheel, 512- First Transitions wheel, 513- back gauges detection probe, 514- detect cylinder；
601- clamps head, 602- move collet, 603- contained side skins cylinder, 604- Gripper bodies, 605- diaphragms, 606- bulbs,
It is dynamic that 607- collets electric rotating machine, 608- move center of collet axis, 609- moves collet rotary shaft bearing sleeve, 610- moves collet holder, 611-
Collet leading screw, 612- move collet and feed motor；
701- slide units, 702- slide units driving motor, 703- feed screws, 704- leading screws supporting rack, 705- sliding blocks, 706- are slided
Dynamic seat；
901- edge fit skins motor, 902- belts, the slopes 903-.
Specific implementation mode
It is right with reference to the attached drawing of the present invention in order to make those skilled in the art more fully understand technical scheme of the present invention
Technical scheme of the present invention carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist
The other similar embodiments obtained under the premise of not making creative work, shall fall within the protection scope of the present application.
In addition, the direction word mentioned in following embodiment, such as "upper" "lower" " left side " " right side " etc. are only the directions of refer to the attached drawing, because
This, the direction word used is for illustrative and not limiting the invention.
Embodiment one：
With reference to figure 1, a kind of two line excavation machine of silicon single crystal rod, including pedestal 1, the pedestal 1 are equipped with column frame 8, institute
Pedestal 1 is stated equipped with loading assemblies 2, blanking component 3, cutting head mechanism 5, clamping device 6, feeding slide unit component 7 and edge fit
Skin component 9.Specially：Silicon single crystal rod is delivered to target location through loading assemblies 2, feeding slide unit component 7 drive clamping device 6 into
The silicon single crystal rod positioned at loading assemblies 2 is given and clamps, silicon single crystal rod is clamped to cutting head mechanism 5 and carries out once by clamping device 6
Evolution, then, clamping device 6 are clamped silicon single crystal rod and are once reset to target location, are rotated by 90 °, and clamping device 6 is by silicon single crystal rod
Clamping to cutting head mechanism 5 carries out secondary evolution, and the clamping silicon single crystal rod of clamping device 6 is secondary to be reset to target location, rotation
45 °, crest line excision is carried out, is rotated again, cut off another pair crest line, ultimately form monocrystalline silico briquette, clamping device 6 is by monocrystalline silico briquette
It is placed in blanking component 3 and completes blanking, meanwhile, the flaw-piece that an evolution and secondary evolution are formed is exported through edge fit skin component 9.
Referring to figs. 1 to Fig. 3, the loading assemblies 2 and blanking component 3 are connect by support component 4 with pedestal 1, the branch
Support component 4 is arranged perpendicular to the direction of feed of feeding slide unit component 7, specifically, the loading assemblies 2 and blanking component 3 are distinguished
Positioned at the both ends of support component 4, support component 4 can drive loading assemblies 2 and blanking component 3 to feed respectively, and loading assemblies 2
Direction of feed with blanking component 3 is perpendicular to the direction of feed for feeding slide unit component 7.
With reference to figure 2, the loading assemblies 2 include feeding fixed plate 201, the first clamping jaw 202 and the second clamping jaw 203, and institute
State the first clamping jaw 202 and or the second clamping jaw 203 be flexibly connected with feeding fixed plate 201, that is to say, that the first clamping jaw 202 and
Two clamping jaws 203 can be moved together to change spacing.In the present embodiment, the bottom of the first clamping jaw 202 and feeding fixed plate 201 are solid
Even, the bottom of the second clamping jaw 203 is flexibly connected by sliding rail and sliding block with feeding fixed plate 201, is connected at second clamping jaw 203
It is connected to for pushing the second clamping jaw 203 closer or far from the thrust cylinder 205 of the first clamping jaw 202.In order to improve silicon single crystal rod
The longitudinal section of clamping stability, first clamping jaw, 202 and second clamping jaw 203 is V-shaped, and the V-type opening of the two is set relatively
It sets to form the space for accommodating silicon single crystal rod.Meanwhile in order to which the silicon single crystal rod being opposite in space is limited, the feeding is solid
The side of fixed board 201 is equipped with the backup plate 206 with the space face setting for accommodating silicon single crystal rod, i.e. backup plate 206 and silicon single crystal rod
End face offsets, to be limited to silicon single crystal rod.In addition, the upper surface of the feeding fixed plate 201 and positioned at first folder
Multiple feeding trays 204 are equipped between pawl 202, the second clamping jaw 203, and 2 feeding trays 204 form tray group, the tray
The longitudinal section of group is V-shaped, and to adapt to the circumference arc of silicon single crystal rod, supporting role is played to silicon single crystal rod.
With reference to figure 3, the blanking component 3 includes that blanking fixed plate 301, blanking cylinder 302, supporting plate 303 and longitudinal section are in L
The blanking tray 304 of type, the cylinder body end of the blanking cylinder 302 and the upper surface of blanking fixed plate 301 are connected, piston end with
The lower surface of supporting plate 303 is connected, that is to say, that passes through the height of the flexible adjustable blanking component 3 of blanking cylinder 302.It is described
Blanking tray 304 is set as 2, and 2 blanking trays 304 it is opposite set on the upper surface of supporting plate 303 to form receiving monocrystalline silicon
The groove of block.
The guide post 305 playing the guiding role is equipped between the blanking fixed plate 301 and supporting plate 303.Preferably, described
Guide post 305 includes column body 306 and lower prop 307, and the column body 306 is internally provided with cavity, and the internal diameter of column body 306
More than the outer diameter of lower prop 307, bottom and the blanking fixed plate 301 of the lower prop 307 are connected, the embedded column body in top
In 306 cavitys, the outer wall of the lower prop 307 is equipped with flange, and the inner wall of the column body 306 is equipped with groove, described convex
Edge is embedded in groove, and flange and groove are arranged each along vertical direction, meanwhile, it is empty that the lower prop 307 is embedded in column body 306
The length of cavity segment is more than the range of blanking cylinder 302, that is to say, that in height adjustment process, flange is embedded in always
Inside grooves avoid column body 306 and lower prop 307 from being detached from.
With reference to figure 4, the support component 4 includes backing plate 401, feeding electric cylinders module 402 and blanking electric cylinders module 403, institute
The guide rail slide block for stating feeding electric cylinders module 402 is equipped with the loading assemblies support plate 404 being connect with loading assemblies 2, in drive
Expect that component 2 is fed, the guide rail slide block of the blanking electric cylinders module 403 is equipped with the blanking component being connected with blanking fixed plate 301
Support plate 405, to drive blanking component 3 to feed.Meanwhile feeding electric cylinders module 402 and blanking electric cylinders module 403 are oppositely arranged,
And the two is located at the both ends of backing plate 401, that is to say, that loading assemblies 2, blanking component 3 initial position be respectively positioned on backing plate
401 end.The backing plate 401 is arranged along the direction of feed perpendicular to feeding slide unit component 7, the feeding electric cylinders module
402 and blanking electric cylinders module 403 driven respectively by motor.
When specific operation, first, silicon single crystal rod is placed in above tray group, starts thrust cylinder 205, push the second clamping jaw
203 close to the first clamping jaw 202, to clamp silicon rod.Then, feeding electric cylinders module 402 drives loading assemblies 2 to be fed on pedestal 1
Target location, clamping device 6 is fed into target location and clamps silicon single crystal rod, at this point, the second clamping jaw 203 is far from the first clamping jaw
202, feeding electric cylinders module 402 drives loading assemblies 2 to reset, and silicon single crystal rod is clamped to cutting head mechanism and carries out by clamping device 6
Flaw-piece, crest line excision complete evolution and form monocrystalline silico briquette.Finally, blanking electric cylinders module 403 drives blanking component 3 to be fed into target
Position, between monocrystalline silico briquette is placed in 2 blanking trays 304 by clamping device 6, clamping device 6 resets, meanwhile, blanking electric cylinders mould
Group 403 drives blanking component 3 to reset and completes blanking operation.Meanwhile it being fed into target location in clamping device 6 and clamping monocrystalline silicon
In rod motion, in order to avoid chucking power pushes loading assemblies 2 to generate displacement, the loading assemblies support plate 404 is equipped with feeding
Buffer Unit, the feeding Buffer Unit include the first buffing pad 406, the second buffing pad 407 and buffer spring 408, and described the
The bottom of one buffing pad 406 is connected with loading assemblies support plate 404, and top is free end, the bottom of second buffing pad 407
Portion is free end, and top is connected with feeding fixed plate 201, and the both ends of the buffer spring 408 are separately connected the first buffing pad
406 and second buffing pad 407, to buffer chucking power.
Embodiment two：
With reference to figure 1, Fig. 5 and Fig. 6, the feeding slide unit component 7 is set to 1 top of pedestal, the clamping by column frame 8
Mechanism 6 is fixedly arranged on the lower section of feeding slide unit component 7, and clamping device 6 and 7 synchro-feed of slipway mechanism.
Specifically, the feeding slide unit component 7 includes slide unit 701, slide unit driving motor 702 and feed screw 703, it is described
The both ends of feed screw 703 are connected by leading screw supporting rack 704 and column frame 8 respectively, the periphery set of the feed screw 703
Equipped with the sliding seat 706 with its screw-thread fit, bottom and the slide unit 701 of the sliding seat 706 are connected, and one side drives with slide unit
The output end of motor 702 connects, meanwhile, the slide unit 701 by the sliding block 705 that is disposed below on column frame 8
Sliding rail be slidably connected, that is to say, that start slide unit driving motor 702, sliding seat 706, slide unit 701 can be driven along column frame
Frame 8 is fed, while clamping device 6 being driven integrally to feed.
The clamping device 6 includes clamp head 601, dynamic collet 602 and contained side skin component, the top of the clamp head 601
It is connected with slide unit 701, top and the slide unit 701 of the dynamic collet 602 are slidably connected, that is to say, that clamp head 601, dynamic collet
602 spacing is adjustable, silicon single crystal rod is clamped.Meanwhile in order to improve clamp head 601, dynamic collet 602 and silicon single crystal rod end face
Compactness, the clamp head 601, dynamic collet 602 are floating clamp, and the floating clamp includes Gripper body 604, is set to
The diaphragm 605 of 604 rear side of Gripper body and the bulb 606 being set between the Gripper body 604 and diaphragm 605, by
Adaptation function between bulb 606, Gripper body 604, diaphragm 605, realization floating clamp are complete with silicon single crystal rod end face
Fitting improves clamping stability.Meanwhile dynamic collet 602 is removed comprising further including collet electric rotating machine 607, diaphragm after floating clamp
605 side is fixedly connected with dynamic center of collet axis 608, and the output end of dynamic center of collet axis 608 and collet electric rotating machine 607
It is connected, that is to say, that collet electric rotating machine 607 can drive dynamic collet 602 to rotate.Dynamic collet 602 passes through dynamic collet holder 610
It is slidably connected with slide unit 701, collet leading screw 611 is moved in the preferably dynamic collet feeding driving of motor 612 that is slidably connected herein, moves collet
Holder 610 is set on dynamic collet leading screw 611 and the two screw-thread fit, the dynamic collet holder 610 and dynamic center of collet axis 608
Between be equipped with dynamic collet bearing, that is to say, that dynamic collet feeding motor 612 can drive dynamic collet 602 integrally to feed, meanwhile, move
Collet 602 can be rotated relative to dynamic collet holder 610.605 side of diaphragm in clamp head 601, which is connected with, determines center of collet
Axis, clamp head 601 are connected by clamp head bracket and slide unit 701, depending on be equipped between center of collet axis and clamp head bracket it is fixed
Collet bearing, that is to say, that clamp head 601 can be rotated relative to clamp head bracket, that is to say, that 602 rotary course of dynamic collet
In can drive 601 synchronous rotary of clamp head.
In order to be clamped the flaw-piece of silicon single crystal rod, it is equipped with contained side skin component at the clamp head 601, dynamic collet 602, it is described
Contained side skin component includes at least 2 contained side skin cylinders 603, and at least two contained side skin cylinder 603 is located at clamp head 601 or dynamic
The periphery of collet 602.Wherein, the periphery of clamp head bracket is equipped with clamp head swivel bearing, the clamp head swivel bearing periphery
It is arranged with clamp head rotary shaft bearing sleeve, is located at the contained side skin cylinder 603 at clamp head 601 and is connected with clamp head rotary shaft bearing sleeve,
Meanwhile the periphery of dynamic collet holder is equipped with dynamic collet swivel bearing, the dynamic collet swivel bearing periphery is arranged with dynamic collet rotation
Shaft bearing sleeve 609 is located at contained side skin cylinder 603 and the periphery of dynamic collet rotary shaft bearing sleeve 609 at dynamic collet 602 and is connected.Add
It, at least one of described 2 contained sides skin component is connect with flaw-piece rotating element 614.In the present embodiment, 2 contained side skin components
Place is equipped with flaw-piece rotating element 614, and 1 contained side skin gas is respectively set above and below clamp head 601, dynamic collet 602
Cylinder 603, the contained side skin cylinder 603 for being located at clamp head 601 have automatic fastening function, avoid in cutting process because of both ends air pressure not
It unanimously causes the edge skin material of cutting to be subjected to displacement and causes chipping.The contained side skin cylinder 603 rotates member by connecting rod 613 and flaw-piece
Part 614 connects, that is to say, that contained side skin cylinder 603 can be rotated relative to clamp head 601, dynamic collet 602.In addition, being located at clamp head
601, the initial position for moving 2 contained side skin cylinders 603 at collet 602 is placed in the vertical direction for 2.
When work, clamp head 601, dynamic collet 602 are clamped silicon single crystal rod and are fed at cutting head mechanism 5, later, contained side
Skin cylinder 603 is rotated by 90 ° and piston is stretched out so that flaw-piece is clamped, and carries out an evolution, the piston retraction of contained side skin cylinder 603, side
Skin is fallen, and then, clamping device 6 is clamped silicon single crystal rod and is once reset to target location, and dynamic collet 602 is rotated by 90 °, contained side skin gas
The piston of cylinder 603 is stretched out to be clamped another pair flaw-piece, clamping device 6 silicon single crystal rod is clamped to cutting head mechanism 5 carry out it is secondary
Evolution, piston retraction, flaw-piece falls, and silicon single crystal rod is secondary is reset to target location for the clamping of clamping device 6, moves collet 602 and rotates
45 °, contained side skin cylinder 603 is reset to initial position, and target location is reset to after carrying out crest line excision, and dynamic collet 602 revolves again
Turn, cuts off another pair crest line, ultimately form monocrystalline silico briquette.
In some other embodiment, there is one to be connect with flaw-piece rotating element 614 in 2 contained side skin components, another one
It is not provided with flaw-piece rotating element 614, as being not provided with flaw-piece rotating element 614 at clamp head 601, at this point, at clamp head 601
2 contained side skin cylinders 603 be located in the same horizontal plane with clamp head 601, the flaw-piece rotating element 614 selects motor or gas
Cylinder etc..
Embodiment three：
With reference to figure 1, Fig. 7 and Fig. 8, the cutting head mechanism 5 is located at the side of support component 4, and cutting line 10 is around cutting
Head mechanism 5 forms parallel lines for cutting silicon single crystal rod, that is to say, that cutting head mechanism 5 and support component 4 be located at into
To the both ends of the process of slide unit component 7.The cutting head mechanism 5 includes left cutting assembly 501, right cutting assembly 502 and coiling
Component, the left cutting assembly 501, right cutting assembly 502 are symmetrical, and are equipped with are passed through for silicon single crystal rod between the two
Resigning gap, clamp head 601, dynamic collet 602 are clamped silicon single crystal rod and pass through resigning gap to realize evolution.
The left cutting assembly 501 and right cutting assembly 502 include wire-mesh scaffold 503 and are located on wire-mesh scaffold 503
The first cutting wheel 504 and the second cutting wheel 505 being vertically distributed, first cutting wheel, 504 and second cutting wheel 505 are located at same
In one plane, first cutting wheel 504 is connect with cutting motor, i.e. the first cutting wheel 504 is used as driving wheel, the second cutting wheel
505 are used as driven wheel.Wire-mesh scaffold positioned at left cutting assembly 501 and right cutting assembly 502 is oppositely arranged, and cutting line 10 is successively
It is formed around positioned at the first cutting wheel of left cutting assembly 501 and right cutting assembly 502, the second cutting wheel for cutting monocrystalline silicon
The parallel lines of stick.In the present embodiment, the parallel lines are placed in the vertical direction, described parallel in some other embodiment
Line can be along horizontally arranged or be obliquely installed.
Meanwhile the bottom of the wire-mesh scaffold 503 and 1 slidable connection of pedestal, that is to say, that left cutting assembly 501, right
The spacing of cutting assembly 502 is adjustable, i.e. cutting line is highly practical away from adjustable.The top horizontal of the wire-mesh scaffold 503 is equipped with the
One transition wheel 512, and the race minimum point of the first cutting wheel 504 and the race of First Transition wheel 512 are located in the same horizontal plane,
The bottom of wire-mesh scaffold 503 is equipped with the second transition wheel parallel with First Transition wheel 512 and positioned at resigning gap, and second cuts
The race minimum point and the race of the second transition wheel for cutting wheel 505 are located in the same horizontal plane.In order to ensure the tensioning of cutting line 10
Degree, 2 sides of the wire-mesh scaffold 503 far from resigning gap are equipped with perpendicular tension support 508, the tension support
508 are equipped with tensile drive element 509, straining pulley 510, glass pulley 511, and tensile drive element 509 drives straining pulley 510 to rotate
To achieve the effect that be tensioned cutting line 10, the glass pulley 511 is obliquely installed, and is commutated for realizing cutting line 10, the tension
Driving element 509 is motor or cylinder etc..
In addition, in order to detect the practical back gauge size after silicon single crystal rod cutting, examine whether size is qualified after cutting and cuts
It cuts whether spacing needs to adjust, back gauge detection components is equipped on wire-mesh scaffold 503, the back gauge detection components include back gauge inspection
Probing needle 513 and detection cylinder 514, the back gauge detection probe 513 is connect with the piston end of detection cylinder 514, by detection gas
Cylinder 514 pushes back gauge detection probe 513 to generate displacement to detect the practical back gauge size after silicon single crystal rod cutting and store to control
System processed establishes cutting data library.
The winding mechanism includes wire winding tube 506 and ureeling barrel 507, and the wire winding tube 506 and ureeling barrel 507 are each along water
It puts down to and is parallel to the setting of wire-mesh scaffold 503, and the two is located at cutting mechanism not homonymy, the wire winding tube 506 and ureeling barrel 507
Place is equipped with coiling drive component and winding displacement drive component, and the coiling drive component is for driving wire winding tube 506 and ureeling barrel
Folding and unfolding cutting line 10 is realized in 507 rotations, and the winding displacement drive component is for driving wire winding tube 506 and ureeling barrel 507 to generate displacement
Realize winding displacement.By taking single wire-mesh scaffold 503 as an example, cutting line 10 leads to glass pulley 511, straining pulley successively through ureeling barrel 507
510, First Transition wheel 512, the first cutting wheel 504, the second cutting wheel 505, finally, cutting line 10 is led to separately through the second transition wheel
Second transition wheel of one wire-mesh scaffold, cutting line 10 another wire-mesh scaffold trend and above-mentioned trend on the contrary, final, cutting line
10 connect with wire winding tube 506.
Example IV：
With reference to figure 1, side of the pedestal 1 far from support component 4 is equipped with edge fit skin component 9, and the edge fit skin component 9 wraps
Edge fit skin conveyer and picking-up container are included, the edge fit skin conveyer includes edge fit skin motor 901, belt 902, slope 903 and connects
Hopper, the edge fit skin motor 901 drive belt 902 to operate, and the top face cutting line 10 of the picking-up container forms parallel
Line is arranged, and access flaw-piece and crest line, the bottom end of picking-up container is convenient for connect with slope 903, the slope 903 and edge fit skin conveyer
Rack be connected.
The present invention is described in detail above, described above, only the preferred embodiments of the invention, when cannot
Limit the scope of the present invention, i.e., it is all according to the made equivalent changes and modifications of the application range, it all should still belong to covering scope of the present invention
It is interior.
Claims (10)
1. a kind of two line excavation machine of silicon single crystal rod, including pedestal (1), the pedestal (1) is equipped with loading assemblies (2), blanking group
Part (3), cutting head mechanism (5), clamping device (6) and feeding slide unit component (7), which is characterized in that the loading assemblies (2) and
Blanking component (3) is connect by support component (4) with pedestal (1), and the support component (4) is perpendicular to feeding slide unit component (7)
Direction of feed setting, the loading assemblies (2) and blanking component (3) are located at the both ends of support component (4), and feeding group
Direction of feed of the direction of feed of part (2) and blanking component (3) perpendicular to feeding slide unit component (7)；
The feeding slide unit component (7) by column frame (8) be set to pedestal (1) above, the clamping device (6) be fixedly arranged on into
To the lower section of slide unit component (7), and clamping device (6) and slipway mechanism (7) synchro-feed, the cutting head mechanism (5) are located at
The side of support component (4), cutting line (10) form parallel lines to cut silicon single crystal rod around cutting head mechanism (5).
2. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that loading assemblies (2) packet
Include feeding fixed plate (201), the first clamping jaw (202) and the second clamping jaw (203), first clamping jaw (202) and or the second clamping jaw
(203) it is flexibly connected with feeding fixed plate (201), the longitudinal section of first clamping jaw (202) and the second clamping jaw (203) is in V
Type, and the V-type opening of the two is oppositely arranged to form the space for accommodating silicon single crystal rod, the upper table of the feeding fixed plate (201)
Face and between the first clamping jaw (202), the second clamping jaw (203) be equipped with feeding tray (204).
3. two line excavation machine of a kind of silicon single crystal rod according to claim 2, which is characterized in that blanking component (3) packet
Blanking fixed plate (301), blanking cylinder (302), the L-shaped blanking tray (304) of supporting plate (303) and longitudinal section are included, under described
The upper surface of the cylinder body end for expecting cylinder (302) and blanking fixed plate (301) is connected, the lower surface of piston end and supporting plate (303)
Be connected, the blanking tray (304) is set as 2, and 2 blanking trays (304) it is opposite set on the upper surface of supporting plate (303),
Guide post (305) is equipped between the blanking fixed plate (301) and supporting plate (303).
4. two line excavation machine of a kind of silicon single crystal rod according to claim 3, which is characterized in that support component (4) packet
Include backing plate (401), feeding electric cylinders module (402) and blanking electric cylinders module (403), the guide rail of the feeding electric cylinders module (402)
Sliding block is equipped with loading assemblies support plate (404), and the guide rail slide block of the blanking electric cylinders module (403) is equipped with to be fixed with blanking
The connected blanking component support plate (405) of plate (301), the loading assemblies support plate (404) are equipped with feeding Buffer Unit, institute
It includes the first buffing pad (406), the second buffing pad (407) and buffer spring (408), first buffering to state feeding Buffer Unit
The bottom of seat (406) is connected with loading assemblies support plate (404), and top is free end, the bottom of second buffing pad (407)
Portion is free end, and top is connected with feeding fixed plate (201), and the both ends of the buffer spring (408) are separately connected first and delay
Red seat (406) and the second buffing pad (407).
5. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that the feeding slide unit component
(7) include slide unit (701), slide unit driving motor (702) and feed screw (703), the both ends difference of the feed screw (703)
It is connected by leading screw supporting rack (704) and column frame (8), the periphery of the feed screw (703) is arranged with matches with its screw thread
The sliding seat (706) of conjunction, bottom and the slide unit (701) of the sliding seat (706) are connected, one side and slide unit driving motor
(702) output end connection, the slide unit (701) are connected by the sliding block (705) being disposed below with column frame (8) sliding
It connects.
6. two line excavation machine of a kind of silicon single crystal rod according to claim 5, which is characterized in that clamping device (6) packet
Clamp head (601), dynamic collet (602) and contained side skin component are included, top and the slide unit (701) of the clamp head (601) are connected, institute
The top and slide unit (701) for stating collet (602) are slidably connected, and the clamp head (601), dynamic collet (602) are the folder that floats
Head, the floating clamp include Gripper body (604), the diaphragm (605) being set on rear side of Gripper body and are set to described
Bulb (606) between Gripper body (604) and diaphragm (605).
7. two line excavation machine of a kind of silicon single crystal rod according to claim 6, which is characterized in that the contained side skin component is set as
2, and 2 contained side skin components are connect with clamp head (601), dynamic collet (602) respectively, the contained side skin component includes at least 2
A contained side skin cylinder (603), at least two contained side skin cylinder (603) are located at the outer of clamp head (601) or dynamic collet (602)
It encloses, at least one of described 2 contained sides skin component is connect with flaw-piece rotating element (614).
8. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that the cutting head mechanism (5)
Including left cutting assembly (501), right cutting assembly (502) and wire-winding unit, the left cutting assembly (501), right cutting assembly
(502) symmetrical, and it is equipped with the resigning gap passed through for silicon single crystal rod, the left cutting assembly (501) and the right side between the two
The first cutting wheel that cutting assembly (502) is vertically distributed including wire-mesh scaffold (503) and on wire-mesh scaffold (503)
(504) and the second cutting wheel (505), first cutting wheel (504) and the second cutting wheel (505) are generally aligned in the same plane interior, position
It is oppositely arranged in the wire-mesh scaffold of left cutting assembly (501) and right cutting assembly (502), cutting line (10) bypasses successively is located at a left side
First cutting wheel of cutting assembly (501) and right cutting assembly (502), the second cutting wheel are formed for cutting the flat of silicon single crystal rod
Line, bottom and pedestal (1) slidable connection of the wire-mesh scaffold (503).
9. two line excavation machine of a kind of silicon single crystal rod according to claim 8, which is characterized in that the winding mechanism includes receiving
Spool (506) and ureeling barrel (507), the wire winding tube (506) and ureeling barrel (507) each along horizontal direction and are parallel to gauze branch
Frame (503) is arranged, and the two is located at cutting mechanism not homonymy, and coiling is equipped at the wire winding tube (506) and ureeling barrel (507)
Drive component and winding displacement drive component.
10. according to a kind of any two line excavation machines of silicon single crystal rod of claim 1-9, which is characterized in that the pedestal (1)
Side far from support component (4) is equipped with edge fit skin component (9), and the edge fit skin component (9) includes edge fit skin conveyer and connects
Hopper, the edge fit skin conveyer include edge fit skin motor (901), belt (902), slope (903) and picking-up container, the edge fit
Skin motor (901) drives belt (902) to operate, and the parallel lines that the top face cutting line (10) of the picking-up container is formed are arranged,
Its bottom end connects with slope (903), and the slope (903) and the rack of edge fit skin conveyer are connected.
Priority Applications (1)
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|---|---|---|---|
| CN201810449866.9A CN108656375A (en) | 2018-05-11 | 2018-05-11 | A kind of two line excavation machine of silicon single crystal rod |
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|---|---|---|---|
| CN201810449866.9A CN108656375A (en) | 2018-05-11 | 2018-05-11 | A kind of two line excavation machine of silicon single crystal rod |
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| CN108656375A true CN108656375A (en) | 2018-10-16 |
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| CN201810449866.9A Pending CN108656375A (en) | 2018-05-11 | 2018-05-11 | A kind of two line excavation machine of silicon single crystal rod |
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| CN109648476A (en) * | 2019-01-31 | 2019-04-19 | 青岛高测科技股份有限公司 | A kind of clamping device clamping pole and square rod |
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| CN110154256A (en) * | 2019-07-03 | 2019-08-23 | 青岛高测科技股份有限公司 | A kind of butt cuts rib grinding and polishing all-in-one machine |
| CN110154256B (en) * | 2019-07-03 | 2024-05-31 | 青岛高测科技股份有限公司 | Cutting, edge cutting, grinding and polishing integrated machine |
| CN110154254B (en) * | 2019-07-03 | 2024-05-31 | 青岛高测科技股份有限公司 | Crystal bar squaring and feeding clamping device |
| CN110549505A (en) * | 2019-08-27 | 2019-12-10 | 大连昊霖智能装备有限公司 | double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
| CN110732732B (en) * | 2019-11-22 | 2024-05-14 | 大连连城数控机器股份有限公司 | Closed loop wire cutting machine tool |
| CN110732732A (en) * | 2019-11-22 | 2020-01-31 | 大连连城数控机器股份有限公司 | closed loop cutting machine tool |
| CN111203991A (en) * | 2020-02-26 | 2020-05-29 | 青岛高测科技股份有限公司 | Crystal silicon vertical squarer and use method thereof |
| CN111660447A (en) * | 2020-05-12 | 2020-09-15 | 浙江晶盛机电股份有限公司 | Multi-tool-bit monocrystalline silicon cutting machine |
| CN113306030A (en) * | 2021-05-21 | 2021-08-27 | 福州天瑞线锯科技有限公司 | Squaring machine |
| CN114012914A (en) * | 2021-11-01 | 2022-02-08 | 青岛高测科技股份有限公司 | Flaw-piece clamping mechanism, flaw-piece unloading device and silicon rod cutting system |
| WO2023142639A1 (en) * | 2022-01-26 | 2023-08-03 | Tcl中环新能源科技股份有限公司 | Wafer rod squaring system and method |
| CN114536573B (en) * | 2022-01-28 | 2024-04-05 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon squaring method |
| CN114536573A (en) * | 2022-01-28 | 2022-05-27 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon squaring method |
| CN115502795B (en) * | 2022-08-11 | 2024-05-03 | 青岛高测科技股份有限公司 | Feeding device, feeding control method and system of grinding machine, equipment and medium |
| CN115502795A (en) * | 2022-08-11 | 2022-12-23 | 青岛高测科技股份有限公司 | Feeding device, feeding control method and system of grinding machine, equipment and medium |
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