CN110549505A - double-rod type monocrystalline silicon rod squarer based on moving and static cutting head - Google Patents
double-rod type monocrystalline silicon rod squarer based on moving and static cutting head Download PDFInfo
- Publication number
- CN110549505A CN110549505A CN201910794276.4A CN201910794276A CN110549505A CN 110549505 A CN110549505 A CN 110549505A CN 201910794276 A CN201910794276 A CN 201910794276A CN 110549505 A CN110549505 A CN 110549505A
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- China
- Prior art keywords
- guide wheel
- fixing plate
- chuck
- fixed
- diamond wire
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- 238000005520 cutting process Methods 0.000 title claims abstract description 147
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 55
- 230000003068 static effect Effects 0.000 title abstract description 6
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 83
- 239000010432 diamond Substances 0.000 claims abstract description 83
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 17
- 239000010703 silicon Substances 0.000 claims abstract description 17
- 239000010985 leather Substances 0.000 claims description 5
- 230000009977 dual effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000007667 floating Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Abstract
the invention discloses a moving and static double-rod type monocrystalline silicon rod squarer based on a cutting head, which comprises the cutting head and a clamping device; two long cutting main rollers which are horizontally arranged up and down and three short cutting main rollers which are vertically arranged left and right are fixed on the front surface of the cutting head; the long cutting main roller and the short cutting main roller are driven to rotate by a servo motor respectively; four guide wheels are arranged on each long cutting main roller, and two guide wheels are arranged on each short cutting main roller; the diamond wire penetrates through the back surface of the fixing plate and is arranged on the guide wheel and then penetrates back to the back surface, two # -shaped cutting wire nets are finally formed on the front surface of the cutting head through multiple times of same operation, and the cutting head is respectively provided with a single crystal silicon rod through opening at the two cutting wire nets; the clamping devices are provided with two groups which are respectively used for clamping two single crystal silicon rods; there is relative movement between the cutting head and the holding device. The squaring machine can be used for efficiently processing double rods of the silicon single crystal rod.
Description
Technical Field
The invention relates to an squarer, in particular to a moving and static double-rod type monocrystalline silicon rod squarer based on a cutting head.
Background
The cutting machine is a device for cutting a cylindrical single crystal silicon rod into a quadrangular prism shape along a crystal wire, the most central equipment in the device is a cutting head, and the cutting head uses a diamond wire to wind and then cuts the single crystal silicon rod by utilizing the rapid movement of the diamond wire.
the traditional diamond wire silicon single crystal rod squaring machine can only cut a single silicon single crystal rod, and has low efficiency and slow linear speed.
Disclosure of Invention
the invention aims to provide a moving and static double-rod type monocrystalline silicon rod squaring machine based on a cutting head, so that double rods can be used for feeding and discharging simultaneously for machining, and the machining efficiency is improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
a double-rod type monocrystalline silicon rod squarer based on movement and stillness of a cutting head comprises the cutting head used for cutting a monocrystalline silicon rod and a clamping device used for clamping the monocrystalline silicon rod;
The cutting head comprises a vertical fixing plate, two long cutting main rollers which are horizontally arranged up and down are fixed on the front surface of the fixing plate, and the two long cutting main rollers are respectively an upper long cutting main roller positioned at the upper part and a lower long cutting main roller positioned at the lower part;
three left and right vertically arranged short cutting main rollers are fixed on the front surface of the fixing plate, namely a left short cutting main roller positioned on the left side, a middle short cutting main roller positioned in the middle part and a right short cutting main roller positioned on the right side;
the long cutting main roller and the short cutting main roller are driven to rotate by a cutting head servo motor respectively;
A first guide wheel, a second guide wheel, a third guide wheel and a fourth guide wheel which are all vertical to the upper long cutting main roller are sequentially arranged on the upper long cutting main roller from left to right;
a fifth guide wheel, a sixth guide wheel, a seventh guide wheel and an eighth guide wheel which are all vertical to the lower long cutting main roller are sequentially arranged on the lower long cutting main roller from left to right;
a ninth guide wheel and a tenth guide wheel which are vertical to the left short cutting main roller are sequentially arranged on the left short cutting main roller from top to bottom;
an eleventh guide wheel and a twelfth guide wheel which are vertical to the middle-short cutting main roller are sequentially arranged on the middle-short cutting main roller from top to bottom;
a thirteenth guide wheel and a fourteenth guide wheel which are vertical to the right short cutting main roller are sequentially arranged on the right short cutting main roller from top to bottom;
The distance between the first guide wheel and the second guide wheel is equal to the distance between the third guide wheel and the fourth guide wheel is equal to the distance between the fifth guide wheel and the sixth guide wheel is equal to the distance between the seventh guide wheel and the eighth guide wheel is equal to the distance between the ninth guide wheel and the tenth guide wheel is equal to the distance between the eleventh guide wheel and the twelfth guide wheel is equal to the distance between the thirteenth guide wheel and the fourteenth guide wheel;
The first guide wheel and the fifth guide wheel are positioned on the same plane; the first diamond wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the first guide wheel and the fifth guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the second guide wheel and the sixth guide wheel are positioned on the same plane; the second diamond wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the second guide wheel and the sixth guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the third guide wheel and the seventh guide wheel are positioned on the same plane; the third diamond wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the third guide wheel and the seventh guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the fourth guide wheel and the eighth guide wheel are positioned on the same plane; the fourth diamond wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the fourth guide wheel and the eighth guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel are positioned on the same plane; the fifth rigid wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel are positioned on the same plane; the sixth diamond wire penetrates through the fixing plate from the back surface of the fixing plate, is wound on the tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel, penetrates through the fixing plate again and returns to the back surface of the fixing plate;
the first diamond wire and the second diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a first # -shaped structure; a first monocrystalline silicon rod passing opening is formed in the first # -shaped area of the fixing plate;
The third diamond wire and the fourth diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a second # -shaped structure; a second monocrystalline silicon rod passing opening is formed in the second # -shaped area of the fixing plate;
The middle-short cutting main roller is positioned between the first single crystal silicon rod through port and the second single crystal silicon rod through port;
the clamping devices comprise two groups, and each group of clamping devices comprises a movable chuck device and a fixed chuck device;
The movable chuck device comprises a movable chuck body arranged on a movable chuck linear guide rail, and the bottom of the movable chuck body is connected with a movable chuck servo electric cylinder used for pushing the movable chuck body to slide on the movable chuck linear guide rail; the movable chuck linear guide rail is fixed above the base;
The movable chuck body comprises a first horizontal ring column which is parallel to the linear guide rail of the movable chuck and horizontally faces the fixed chuck device, one end of the first horizontal ring column, which faces the fixed chuck device, is a first open opening, and a first telescopic chuck body tightly attached to the inner wall of the first horizontal ring column is embedded into the first horizontal ring column from the first open opening; a movable chuck seat body is embedded in the first telescopic chuck body, a movable chuck main shaft is embedded in the movable chuck seat body, and one end, facing the fixed chuck device, of the movable chuck main shaft extends out of the first opening and is connected to the movable chuck through a movable chuck bearing; one end of the movable chuck main shaft, which is far away from the fixed chuck device, is connected to the pressure cylinder; one end of the first telescopic chuck body, which is far away from the fixed chuck device, is fixedly provided with 4 first cylinders, and the 4 first cylinders are respectively connected with 4 first side skin ejector rods which are horizontally erected in the first telescopic chuck body and extend out of the first opening; the 4 first side skin ejector rods are respectively positioned at the upper, lower, left and right sides of the movable chuck main shaft and have the same distance with the movable chuck main shaft;
the fixed chuck device comprises a fixed chuck body fixed on the base, the fixed chuck body comprises a second horizontal ring column which is parallel to the movable chuck linear guide rail and horizontally faces the movable chuck device, one end of the second horizontal ring column facing the movable chuck device is a second open opening, and a second telescopic chuck body tightly attached to the inner wall of the second horizontal ring column is embedded into the second horizontal ring column from the second open opening; a fixed chuck seat body is embedded in the second telescopic chuck body, a fixed chuck main shaft is embedded in the fixed chuck seat body, one end, facing the movable chuck device, of the fixed chuck main shaft extends out of the second opening and is connected to the fixed chuck, and one end, away from the movable chuck device, of the fixed chuck main shaft is connected to a fixed chuck servo motor; one end of the second telescopic chuck body, which is far away from the movable chuck device, is fixedly provided with 4 second cylinders, and the 4 second cylinders are respectively connected with 4 second flaw-piece ejector rods which are horizontally erected in the second telescopic chuck body and extend out of the second opening; the 4 second flaw-piece ejector rods are respectively positioned at the upper, lower, left and right sides of the fixed chuck main shaft and have the same distance with the fixed chuck main shaft;
The movable chuck and the fixed chuck are positioned on the same horizontal line and mutually indicate;
the four first side skin ejector rods and the four second side skin ejector rods are respectively positioned on the same horizontal line and mutually indicate;
the movable chuck and the fixed chuck are respectively positioned at two sides of the fixed plate;
the straight lines of the movable chucks and the fixed chucks in one group of clamping devices vertically pass through the first single crystal silicon rod through hole, and the straight lines of the movable chucks and the fixed chucks in the other group of clamping devices vertically pass through the second single crystal silicon rod through hole;
The cutting head and the clamping device have relative motion vertical to the fixed plate through a sliding rail arranged at the bottom of the cutting head or the clamping device.
Preferably, a conveyor belt is arranged on the base.
Optionally, the sliding rail is a cutting head linear guide rail arranged below the fixing plate, and the cutting head linear guide rail is perpendicular to the fixing plate; the fixed plate is connected to a ball screw, and the ball screw is perpendicular to the fixed plate and used for pushing the fixed plate to move on the cutting head linear guide rail.
optionally, the slide rail is a clamping device linear guide rail arranged below the bases of the two clamping devices, and the clamping device linear guide rail is perpendicular to the fixed plate; the clamping device is connected to the clamping ball screw, and the clamping ball screw is used for pushing the clamping device to move on the linear guide rail of the clamping device.
Preferably, the first diamond wire, the second diamond wire, the third diamond wire, the fourth diamond wire, the fifth diamond wire and the sixth diamond wire are the same total diamond wire, and the total diamond wire penetrates from the back surface of the fixing plate to the front surface of the fixing plate through the conversion of a plurality of steering wheels arranged on the back surface of the fixing plate.
preferably, one side of the first horizontal ring column, which faces away from the movable chuck, is connected with a fixed pressure cylinder flange plate, and the pressure cylinder is fixed on the fixed pressure cylinder flange plate and is positioned outside the first horizontal ring column.
preferably, a first side skin ejector rod seat body is sleeved on one side, facing the fixed chuck device, of the first side skin ejector rod; a second flaw-piece ejector rod seat body is sleeved on one side, facing the movable chuck device, of the second flaw-piece ejector rod.
the invention has the advantages that two silicon single crystal rods can be simultaneously processed, the linear speed is high, the processing efficiency is high and is 2 times of the efficiency of the traditional square cutting machine. In addition, the arrangement of the first and second edge skin ejector rods and the corresponding cylinders can clamp the processed edge skin to prevent the processed edge skin from falling off randomly; the silicon single crystal rod can be driven to rotate through the rotation of the fixed chuck, so that the edge strips rotate to the bottom one by one, and can be vertically separated from the bottom through the air release of the two air cylinders positioned at the bottom and conveyed away through the conveying belt. The invention ensures the stable recovery of the monocrystalline silicon flaw-piece, and has good effect and simple structure.
drawings
FIG. 1 is a side view of the dynamic chuck apparatus of the present invention;
FIG. 2 is a right side view of the dynamic chuck assembly of the present invention;
FIG. 3 is a side view of the fixed jaw apparatus of the present invention;
FIG. 4 is a left side view of the fixed jaw apparatus of the present invention;
FIG. 5 is a general schematic view of the present fixed jaw apparatus;
FIG. 6 is a cross-sectional view of a first horizontal ring post of the dynamic chuck assembly of the present invention;
FIG. 7 is an elevational view of the cutting head of the present invention;
FIG. 8 is a rear view of the cutting head of the present invention;
FIG. 9 is a side view of the cutting head of the present invention;
FIG. 10 is a schematic view of a wire management device for providing a total diamond wire to the cutting head of the present invention;
figure 11 is a general schematic of the squarer of the present invention.
In the figure:
1. The automatic clamping device comprises a movable clamping head body, a movable clamping head linear guide rail, a movable clamping head servo electric cylinder, a first horizontal ring column, a first side skin ejector rod, a first horizontal ring column, a second horizontal ring column, a first side skin ejector rod, a first movable clamping head, a second horizontal ring column, a first cylinder, a second horizontal ring column, a first side skin ejector rod, a second movable clamping head, a first cylinder, a second cylinder;
110. the device comprises a pressure cylinder, 111, a fixed pressure cylinder flange plate, 113, a first telescopic chuck body, 115, a movable chuck seat body, 116, a movable chuck main shaft, 117, a first side skin ejector rod seat body, 118, a movable chuck bearing, 120 and a first floating joint;
71. the silicon single crystal silicon rod cutting machine comprises a fixing plate, 72, an upper long cutting main roller, 73, a lower long cutting main roller, 74, a left short cutting main roller, 75, a middle short cutting main roller, 76, a right short cutting main roller, 77, a cutting head servo motor, 78, a first single crystal silicon rod passing port, 79, a second single crystal silicon rod passing port, 80, a steering wheel, 81, a horizontal wheel, 82, a sliding block, 83, a cutting head linear guide rail, 84, a tension arm, 85, a small passing wheel, 86, a take-up wheel, 87 and a wire releasing I-shaped wheel.
Detailed Description
the following describes embodiments of the present invention with reference to the drawings.
as shown in fig. 1 to 11, the invention relates to a moving and static double-rod type monocrystalline silicon rod squarer based on a cutting head, which comprises a cutting head for cutting a monocrystalline silicon rod and a clamping device for clamping the monocrystalline silicon rod;
The cutting head comprises a vertical fixing plate 71, two long cutting main rollers which are horizontally arranged up and down are fixed on the front surface of the fixing plate 71, and the two long cutting main rollers are an upper long cutting main roller 72 positioned at the upper part and a lower long cutting main roller 73 positioned at the lower part respectively;
Three left and right vertically arranged short cutting main rollers, namely a left short cutting main roller 74 positioned on the left side, a middle short cutting main roller 75 positioned in the middle part and a right short cutting main roller 76 positioned on the right side, are also fixed on the front surface of the fixing plate 71;
The long cutting main roller and the short cutting main roller are driven to rotate by a cutting head servo motor 77 respectively;
a first guide wheel, a second guide wheel, a third guide wheel and a fourth guide wheel which are all vertical to the upper long cutting main roller 72 are sequentially arranged on the upper long cutting main roller 72 from left to right;
A fifth guide wheel, a sixth guide wheel, a seventh guide wheel and an eighth guide wheel which are all perpendicular to the lower long cutting main roller 73 are sequentially arranged on the lower long cutting main roller 73 from left to right;
a ninth guide wheel and a tenth guide wheel which are vertical to the left short cutting main roller 74 are sequentially arranged on the left short cutting main roller 74 from top to bottom;
an eleventh guide wheel and a twelfth guide wheel which are perpendicular to the middle-short cutting main roller 75 are sequentially arranged on the middle-short cutting main roller 75 from top to bottom;
a thirteenth guide wheel and a fourteenth guide wheel which are vertical to the right short cutting main roller 76 are sequentially arranged on the right short cutting main roller 76 from top to bottom;
the distance between the first guide wheel and the second guide wheel is equal to the distance between the third guide wheel and the fourth guide wheel is equal to the distance between the fifth guide wheel and the sixth guide wheel is equal to the distance between the seventh guide wheel and the eighth guide wheel is equal to the distance between the ninth guide wheel and the tenth guide wheel is equal to the distance between the eleventh guide wheel and the twelfth guide wheel is equal to the distance between the thirteenth guide wheel and the fourteenth guide wheel;
the first guide wheel and the fifth guide wheel are positioned on the same plane; the first diamond wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound around the first guide wheel and the fifth guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
The second guide wheel and the sixth guide wheel are positioned on the same plane; the second diamond wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound around the second guide wheel and the sixth guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
The third guide wheel and the seventh guide wheel are positioned on the same plane; the third diamond wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound around the third guide wheel and the seventh guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
the fourth guide wheel and the eighth guide wheel are positioned on the same plane; the fourth diamond wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound around the fourth guide wheel and the eighth guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel are positioned on the same plane; the fifth rigid wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound on the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
the tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel are positioned on the same plane; the sixth diamond wire penetrates through the fixing plate 71 from the back surface of the fixing plate 71, is wound around the tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel, penetrates through the fixing plate 71 again and returns to the back surface of the fixing plate 71;
The first diamond wire and the second diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a first # -shaped structure; a first monocrystalline silicon rod passing opening 78 is formed in the first # -shaped region of the fixing plate 71;
The third diamond wire and the fourth diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a second # -shaped structure; a second monocrystalline silicon rod passing opening 79 is formed in the second # -shaped region of the fixing plate 71;
the middle-short cutting main roller 75 is positioned between the first single crystal silicon rod passage port 78 and the second single crystal silicon rod passage port 79;
the clamping devices comprise two groups, and each group of clamping devices comprises a movable clamping head device 16 and a fixed clamping head device 17;
The movable chuck device 16 comprises a movable chuck body 1 arranged on a movable chuck linear guide rail 2, and the bottom of the movable chuck body 1 is connected with a movable chuck servo electric cylinder for pushing the movable chuck body 1 to slide on the movable chuck linear guide rail 2; the movable chuck linear guide rail 2 is fixed above the base 18;
the movable chuck body 1 comprises a first horizontal ring column 4 which is parallel to the movable chuck linear guide rail 2 and horizontally faces the fixed chuck device 17, one end of the first horizontal ring column 4 facing the fixed chuck device 17 is a first open opening, and a first telescopic chuck body 113 tightly attached to the inner wall of the first horizontal ring column 4 is embedded into the first horizontal ring column 4 from the first open opening; a movable chuck seat body 115 is embedded in the first telescopic chuck body 113, a movable chuck main shaft 116 is embedded in the movable chuck seat body 115, and one end of the movable chuck main shaft 116, which faces the fixed chuck device 17, extends out of the first open opening and is connected to the movable chuck 6 through a movable chuck bearing 118; one end of the movable chuck main shaft 116, which is far away from the fixed chuck device 17, is connected to the pressure cylinder 110; one end of the first telescopic chuck body 113 departing from the fixed chuck device 17 is fixed with 4 first cylinders 7, and the 4 first cylinders 7 are respectively connected with 4 first side skin ejector rods 5 which are horizontally erected in the first telescopic chuck body 113 and extend out of the first open opening; the 4 first side skin mandrils 5 are respectively positioned at the upper, lower, left and right sides of the movable chuck main shaft 116 and have the same distance with the movable chuck main shaft 116;
the fixed chuck device 17 comprises a fixed chuck body 13 fixed on the base 18, the fixed chuck body 13 comprises a second horizontal ring column which is parallel to the movable chuck linear guide rail 2 and horizontally faces the movable chuck device 16, one end of the second horizontal ring column facing the movable chuck device 16 is a second open opening, and a second telescopic chuck body tightly attached to the inner wall of the second horizontal ring column is embedded into the second horizontal ring column from the second open opening; a fixed chuck seat body is embedded in the second telescopic chuck body, a fixed chuck main shaft is embedded in the fixed chuck seat body, one end, facing the movable chuck device 16, of the fixed chuck main shaft extends out of the second opening and is connected to the fixed chuck 15, and one end, facing away from the movable chuck device 16, of the fixed chuck main shaft is connected to the fixed chuck servo motor 10; one end of the second telescopic chuck body, which is far away from the movable chuck device 16, is fixedly provided with 4 second cylinders 12, and the 4 second cylinders 12 are respectively connected with 4 second flaw-piece ejector rods 14 which are horizontally erected in the second telescopic chuck body and extend out of the second opening; the 4 second flaw-piece ejector rods 14 are respectively positioned at the upper, lower, left and right sides of the fixed chuck main shaft and have the same distance with the fixed chuck main shaft;
the movable chuck 6 and the fixed chuck 15 are positioned on the same horizontal line and mutually indicate;
the four first side skin mandrils 5 and the four second side skin mandrils 14 are respectively positioned on the same horizontal line and mutually indicate.
the movable chuck 6 is a floating rotary chuck.
The pressure cylinder 110 is connected with the movable chuck main shaft 116 through a first floating joint 120.
one side of the first horizontal ring column 4, which faces away from the movable chuck 6, is connected with a fixed pressure cylinder flange 111, and the pressure cylinder 110 is fixed on the fixed pressure cylinder flange 111 and is positioned outside the first horizontal ring column 4.
a conveyor belt is arranged on the base 18.
the first leather ejector pin 5 is sleeved with a first leather ejector pin seat body 117 at one side facing the fixed chuck device 17.
the second flaw-piece ejector rod 14 is sleeved with a second flaw-piece ejector rod seat body at one side facing the movable chuck device 16.
the movable chuck 6 and the fixed chuck 15 are respectively positioned at two sides of the fixed plate 71;
The straight line where the movable chuck 6 and the fixed chuck 15 in one group of the clamping devices are located vertically passes through the first single crystal silicon rod through opening 78, and the straight line where the movable chuck 6 and the fixed chuck 15 in the other group of the clamping devices are located vertically passes through the second single crystal silicon rod through opening 79;
there is relative movement of the cutting head and the holding device perpendicular to the fixed plate 71 by means of a slide rail provided at the bottom of the cutting head or holding device.
A conveyor belt is arranged on the base 18.
Optionally: 1) the slide rail is a cutting head linear guide rail 83 arranged below the fixed plate 71, and the cutting head linear guide rail 83 is vertical to the fixed plate 71; the fixed plate 71 is connected to a ball screw which is perpendicular to the fixed plate 71 and is used for pushing the fixed plate 71 to move on the cutting head linear guide rail 83; 2) or the slide rail is a clamping device linear guide rail arranged below the bases 18 of the two clamping devices, and the clamping device linear guide rail is vertical to the fixed plate 71; the clamping device is connected to the clamping ball screw, and the clamping ball screw is used for pushing the clamping device to move on the linear guide rail of the clamping device.
The first diamond wire, the second diamond wire, the third diamond wire, the fourth diamond wire, the fifth diamond wire and the sixth diamond wire are the same total diamond wire.
The bus wire is switched at the rear surface of the fixed plate 71 by a plurality of steering wheels 80 provided on the rear surface of the fixed plate 71 from the rear surface of the fixed plate 71 to the front surface of the fixed plate 71.
one side of the first horizontal ring column 4, which faces away from the movable chuck 6, is connected with a fixed pressure cylinder flange 111, and the pressure cylinder 110 is fixed on the fixed pressure cylinder flange 111 and is positioned outside the first horizontal ring column 4.
the movable chuck 6 is a floating rotary chuck.
the pressure cylinder 110 is connected with the movable chuck main shaft 116 through a first floating joint 120.
the first leather ejector rod 5 is sleeved with a first leather ejector rod seat body 117 at one side facing the fixed chuck device 17;
the second flaw-piece ejector rod 14 is sleeved with a second flaw-piece ejector rod seat body at one side facing the movable chuck device 16.
As shown in fig. 7 and 8 (solid lines are the total diamond wires on the side, dashed lines are the total diamond wires on the other side; the left cutting main roller 74 in the front view is actually on the right side of the back view due to the symmetrical viewing angles of the front and back sides): the total diamond wire of the wire which is just fed penetrates into the front side from the back of the fixing plate 71 to become a fourth diamond wire (or penetrates through the fourth diamond wire after passing through a horizontal wheel 81 as shown in fig. 8), returns to the back of the fixing plate 71 again, is rotated to a fourteenth guide wheel below the right cutting main roller 76 through the steering wheel 80, penetrates through the fixing plate 71 to become a sixth diamond wire, then sequentially turns and penetrates to become a second diamond wire, a third diamond wire, a fifth diamond wire and a first diamond wire, and finally is wound out of the wire through the horizontal wheel 81; this is only one winding sequence, and there may be other winding sequences.
the used total diamond wire can be stored directly on the external reel and then supplied to the cutting head of the invention, as also shown in fig. 10:
The total diamond wire comes out from the wire-releasing I-shaped wheel 87, enters a horizontal wheel 81 on the cutting head through two small passing wheels 85, is wound out from another horizontal wheel 81 on the cutting head after passing through the interior of the cutting head, then returns to the small passing wheel 85 in the wire management area, and returns to a wire-rewinding wheel 86 through one small passing wheel 85. The tension arm 84 applies tension to the total diamond wire on the small pulley 85 by a rear tension arm servomotor, thereby controlling the magnitude of the total diamond wire tension.
When the feeding manipulator is used, the feeding manipulator clamps a cylindrical silicon single crystal rod and conveys the silicon single crystal rod to a position between the movable chuck 6 and the fixed chuck 15, the central axis of the silicon single crystal rod is ensured to be coincident with the central axes of the movable chuck 6 and the fixed chuck 15, and then the movable chuck 6 is driven by the servo electric cylinder of the movable chuck to move forwards and clamp the silicon single crystal rod between the fixed chuck 15 and the movable chuck 6. Then the first air cylinder 7 is ventilated to push the first edge skin ejector rod 5 to move towards the end surface of the single crystal silicon rod, meanwhile, the second air cylinder 12 is ventilated to push the second edge skin ejector rod 14 to move towards the end surface of the single crystal silicon rod, and the first air cylinder and the second air cylinder clamp the edge part of the single crystal silicon rod; after the cutting of the silicon single crystal rod is finished, the part clamped by the first edge skin ejector rod 5 and the second edge skin ejector rod 14 is cut away from the silicon single crystal rod, but is still in a clamped state; at the moment, the fixed chuck servo motor 10 drives the fixed chuck 15 to rotate to drive the silicon single crystal rod and the movable chuck 6 to rotate together, when the silicon single crystal rod rotates by 90 degrees, two cylinders positioned at the bottom exhaust gas, and the flaw-piece falls vertically; the 4 hems are dropped in turn and can be conveyed away by a conveyor belt. When two single crystal silicon rods need to be processed simultaneously, two devices of the invention can be used side by side. The pressure cylinder 110 may function to enhance clamping during this process. The invention requires simultaneous processing of two single crystal silicon rods, and therefore two clamping devices are used side by side, as shown in fig. 2 and 4.
The machining process is the cutting process mentioned above, which requires the cooperation of the cutting head: the two single crystal silicon rods are respectively vertically placed in a first single crystal silicon rod through port 78 and a second single crystal silicon rod through port 79 and are clamped well through the clamping device, then a cutting head servo motor 77 is started to enable the diamond wire to be rapidly driven, then the two single crystal silicon rods are either vertically moved (realized through the movement of the clamping device) or moved along a cutting head linear guide rail 83, and in short, the diamond wire cutting single crystal silicon rods can be cut into quadrangular columns from the cylindrical columns through relative movement; the invention can simultaneously process two silicon single crystal rods, and greatly improves the processing efficiency.
fig. 11 illustrates the situation where the cutting head is moving, and similarly where the cutting head is stationary (i.e. the clamping means is moving), simply by changing the position of the slide.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to cover the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.
Claims (8)
1. a double-rod type monocrystalline silicon rod squarer based on movement and stillness of a cutting head is characterized by comprising the cutting head used for cutting a monocrystalline silicon rod and a clamping device used for clamping the monocrystalline silicon rod;
The cutting head comprises a vertical fixing plate (71), two long cutting main rollers which are horizontally arranged up and down are fixed on the front surface of the fixing plate (71), and the two long cutting main rollers are an upper long cutting main roller (72) positioned at the upper part and a lower long cutting main roller (73) positioned at the lower part respectively;
three left and right vertically-arranged short cutting main rollers, namely a left short cutting main roller (74) positioned on the left side, a middle short cutting main roller (75) positioned in the middle part and a right short cutting main roller (76) positioned on the right side, are also fixed on the front surface of the fixing plate (71);
The long cutting main roller and the short cutting main roller are driven to rotate by a cutting head servo motor (77) respectively;
a first guide wheel, a second guide wheel, a third guide wheel and a fourth guide wheel which are all perpendicular to the upper long cutting main roller (72) are sequentially arranged on the upper long cutting main roller (72) from left to right;
A fifth guide wheel, a sixth guide wheel, a seventh guide wheel and an eighth guide wheel which are all perpendicular to the lower long cutting main roller (73) are sequentially arranged on the lower long cutting main roller (73) from left to right;
a ninth guide wheel and a tenth guide wheel which are vertical to the left short cutting main roller (74) are sequentially arranged on the left short cutting main roller (74) from top to bottom;
an eleventh guide wheel and a twelfth guide wheel which are perpendicular to the middle and short cutting main roller (75) are sequentially arranged on the middle and short cutting main roller (75) from top to bottom;
a thirteenth guide wheel and a fourteenth guide wheel which are perpendicular to the right short cutting main roller (76) are sequentially arranged on the right short cutting main roller (76) from top to bottom;
the distance between the first guide wheel and the second guide wheel is equal to the distance between the third guide wheel and the fourth guide wheel is equal to the distance between the fifth guide wheel and the sixth guide wheel is equal to the distance between the seventh guide wheel and the eighth guide wheel is equal to the distance between the ninth guide wheel and the tenth guide wheel is equal to the distance between the eleventh guide wheel and the twelfth guide wheel is equal to the distance between the thirteenth guide wheel and the fourteenth guide wheel;
The first guide wheel and the fifth guide wheel are positioned on the same plane; the first diamond wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound on the first guide wheel and the fifth guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
the second guide wheel and the sixth guide wheel are positioned on the same plane; the second diamond wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound on the second guide wheel and the sixth guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
the third guide wheel and the seventh guide wheel are positioned on the same plane; the third diamond wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound on the third guide wheel and the seventh guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
the fourth guide wheel and the eighth guide wheel are positioned on the same plane; a fourth diamond wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound on the fourth guide wheel and the eighth guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel are positioned on the same plane; the fifth rigid wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound on the ninth guide wheel, the eleventh guide wheel and the thirteenth guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
The tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel are positioned on the same plane; a sixth diamond wire penetrates through the fixing plate (71) from the back surface of the fixing plate (71), is wound around the tenth guide wheel, the twelfth guide wheel and the fourteenth guide wheel, penetrates through the fixing plate (71) again and returns to the back surface of the fixing plate (71);
the first diamond wire and the second diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a first # -shaped structure; a first monocrystalline silicon rod passing opening (78) is formed in the first # -shaped area of the fixing plate (71);
the third diamond wire and the fourth diamond wire which are parallel to each other are vertically intersected with the fifth diamond wire and the sixth diamond wire which are parallel to each other to form a second # -shaped structure; a second monocrystalline silicon rod passing opening (79) is formed in the second # -shaped area of the fixing plate (71);
the middle-short cutting main roller (75) is positioned between the first single crystal silicon rod through opening (78) and the second single crystal silicon rod through opening (79);
The clamping devices comprise two groups, and each group of clamping devices comprises a movable chuck device (16) and a fixed chuck device (17);
the movable chuck device (16) comprises a movable chuck body (1) arranged on a movable chuck linear guide rail (2), and the bottom of the movable chuck body (1) is connected with a movable chuck servo electric cylinder (3) for pushing the movable chuck body (1) to slide on the movable chuck linear guide rail (2); the movable chuck linear guide rail (2) is fixed above the base (18);
the movable chuck body (1) comprises a first horizontal ring column (4) which is parallel to the movable chuck linear guide rail (2) and horizontally faces the fixed chuck device (17), one end, facing the fixed chuck device (17), of the first horizontal ring column (4) is a first open opening, and a first telescopic chuck body (113) tightly attached to the inner wall of the first horizontal ring column (4) is embedded into the first horizontal ring column (4) from the first open opening; a movable chuck base body (115) is embedded in the first telescopic chuck body (113), a movable chuck main shaft (116) is embedded in the movable chuck base body (115), and one end, facing the fixed chuck device (17), of the movable chuck main shaft (116) extends out of the first opening and is connected to the movable chuck (6) through a movable chuck bearing (118); one end of the movable chuck main shaft (116) departing from the fixed chuck device (17) is connected with a pressure cylinder (110); one end of the first telescopic chuck body (113) departing from the fixed chuck device (17) is fixedly provided with 4 first cylinders (7), and the 4 first cylinders (7) are respectively connected with 4 first side leather ejector rods (5) which are horizontally erected in the first telescopic chuck body (113) and extend out of the first opening; the 4 first side skin push rods (5) are respectively positioned at the upper, lower, left and right sides of the movable chuck main shaft (116) and have the same distance with the movable chuck main shaft (116);
The fixed chuck device (17) comprises a fixed chuck body (13) fixed on a base (18), the fixed chuck body (13) comprises a second horizontal ring column which is parallel to the movable chuck linear guide rail (2) and horizontally faces the movable chuck device (16), one end of the second horizontal ring column facing the movable chuck device (16) is a second open opening, and a second telescopic chuck body tightly attached to the inner wall of the second horizontal ring column is embedded into the second horizontal ring column from the second open opening; a fixed chuck seat body is embedded in the second telescopic chuck body, a fixed chuck main shaft is embedded in the fixed chuck seat body, one end, facing the movable chuck device (16), of the fixed chuck main shaft extends out of the second opening and is connected to a fixed chuck (15), and one end, facing away from the movable chuck device (16), of the fixed chuck main shaft is connected to a fixed chuck servo motor (10); one end of the second telescopic chuck body, which is far away from the movable chuck device (16), is fixedly provided with 4 second air cylinders (12), and the 4 second air cylinders (12) are respectively connected with 4 second flaw-piece ejector rods (14) which are horizontally erected in the second telescopic chuck body and extend out of the second opening; the 4 second flaw-piece ejector rods (14) are respectively positioned at the upper, lower, left and right sides of the fixed chuck main shaft and have the same distance with the fixed chuck main shaft;
the movable chuck (6) and the fixed chuck (15) are positioned on the same horizontal line and mutually indicate;
The four first side skin ejector rods (5) and the four second side skin ejector rods (14) are respectively positioned on the same horizontal line and mutually indicate;
the movable chuck (6) and the fixed chuck (15) are respectively positioned at two sides of the fixed plate (71);
the straight lines of the movable chuck (6) and the fixed chuck (15) in one group of the clamping devices vertically penetrate through the first single crystal silicon rod through opening (78), and the straight lines of the movable chuck (6) and the fixed chuck (15) in the other group of the clamping devices vertically penetrate through the second single crystal silicon rod through opening (79);
The cutting head and the clamping device have relative motion perpendicular to the fixing plate (71) through a sliding rail arranged at the bottom of the cutting head or the clamping device.
2. the cutting head-based moving and stationary single crystal silicon rod squarer according to claim 1, characterized in that a conveyor belt is provided on the base (18).
3. the cutting head-based moving and stationary double rod type single crystal silicon rod squarer according to claim 1, characterized in that the slide rail is a cutting head linear guide (83) disposed below the fixed plate (71), the cutting head linear guide (83) is perpendicular to the fixed plate (71); the fixed plate (71) is connected to a ball screw, which is perpendicular to the fixed plate (71) and is used for pushing the fixed plate (71) to move on the cutting head linear guide (83).
4. The cutting head-based moving and stationary dual-rod single crystal silicon rod squarer according to claim 1, characterized in that the slide rail is a clamping device linear guide disposed below the bases (18) of the two clamping devices, the clamping device linear guide being perpendicular to the fixed plate (71); the clamping device is connected to a clamping ball screw, and the clamping ball screw is used for pushing the clamping device to move on the linear guide rail of the clamping device.
5. the cutting head-based moving, stationary dual rod single crystal silicon rod squarer of claim 1 wherein the first diamond wire, the second diamond wire, the third diamond wire, the fourth diamond wire, the fifth diamond wire, and the sixth diamond wire are all the same total diamond wire.
6. The cutting head for double rod processing in a single crystal silicon rod squarer according to claim 5, wherein the total diamond wire is switched at a penetrating position from a back surface of the fixing plate (71) to a front surface of the fixing plate (71) at a back surface of the fixing plate (71) by a plurality of turning wheels (80) provided at the back surface of the fixing plate (71).
7. The telescopic clamping device for the silicon single crystal rod as claimed in claim 1, wherein a fixed pressure cylinder flange plate (111) is connected to one side of the first horizontal ring column (4) back to the movable clamping head (6), and the pressure cylinder (110) is fixed to the fixed pressure cylinder flange plate (111) and is located outside the first horizontal ring column (4).
8. the telescopic clamping device for the silicon single crystal rod as claimed in claim 1, wherein the first edge skin ejector rod (5) is sleeved with a first edge skin ejector rod seat body (117) at one side facing the fixed chuck device (17); and a second flaw-piece ejector rod seat body is sleeved on one side of the second flaw-piece ejector rod (14) facing the movable chuck device (16).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910794276.4A CN110549505A (en) | 2019-08-27 | 2019-08-27 | double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910794276.4A CN110549505A (en) | 2019-08-27 | 2019-08-27 | double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
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| CN110549505A true CN110549505A (en) | 2019-12-10 |
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| CN201910794276.4A Pending CN110549505A (en) | 2019-08-27 | 2019-08-27 | double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
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| US4170912A (en) * | 1977-08-18 | 1979-10-16 | Bliss George N | Band saw machine |
| CN206048549U (en) * | 2016-08-30 | 2017-03-29 | 浙江晶盛机电股份有限公司 | A kind of cutting chamber of diamond wire silicon ingot excavation machine |
| CN207267301U (en) * | 2017-09-21 | 2018-04-24 | 浙江晶盛机电股份有限公司 | A kind of feed arrangement for full-automatic crystal bar single line shear |
| CN108656375A (en) * | 2018-05-11 | 2018-10-16 | 青岛高测科技股份有限公司 | A kind of two line excavation machine of silicon single crystal rod |
| CN211709730U (en) * | 2019-08-27 | 2020-10-20 | 大连昊霖智能装备有限公司 | Double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
-
2019
- 2019-08-27 CN CN201910794276.4A patent/CN110549505A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4170912A (en) * | 1977-08-18 | 1979-10-16 | Bliss George N | Band saw machine |
| CN206048549U (en) * | 2016-08-30 | 2017-03-29 | 浙江晶盛机电股份有限公司 | A kind of cutting chamber of diamond wire silicon ingot excavation machine |
| CN207267301U (en) * | 2017-09-21 | 2018-04-24 | 浙江晶盛机电股份有限公司 | A kind of feed arrangement for full-automatic crystal bar single line shear |
| CN108656375A (en) * | 2018-05-11 | 2018-10-16 | 青岛高测科技股份有限公司 | A kind of two line excavation machine of silicon single crystal rod |
| CN211709730U (en) * | 2019-08-27 | 2020-10-20 | 大连昊霖智能装备有限公司 | Double-rod type monocrystalline silicon rod squarer based on moving and static cutting head |
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