CN206048549U - A kind of cutting chamber of diamond wire silicon ingot excavation machine - Google Patents

A kind of cutting chamber of diamond wire silicon ingot excavation machine Download PDF

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Publication number
CN206048549U
CN206048549U CN201620990215.7U CN201620990215U CN206048549U CN 206048549 U CN206048549 U CN 206048549U CN 201620990215 U CN201620990215 U CN 201620990215U CN 206048549 U CN206048549 U CN 206048549U
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China
Prior art keywords
guide wheel
cutting
diamond wire
installing rack
gathering sill
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CN201620990215.7U
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Inventor
沈文杰
傅林坚
卢嘉彬
杨思炜
邱文杰
何守龙
张正良
罗世铭
邵浩明
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Abstract

This utility model is related to polysilicon lines cutting processing auxiliary equipment, it is desirable to provide a kind of cutting chamber of diamond wire silicon ingot excavation machine.The cutting chamber of this kind of diamond wire silicon ingot excavation machine includes cutting tension adjustment wheel apparatus, commutation guide wheel device, portal frame, top guide wheel dragging motor, synchronous belt device, external tension device, the inclined detection means of line, take-up and pay-off device, cutting tension motor, drag shaft coupling, screw mandrel, motor mount, guide rail, feeding shaft coupling, reductor, feeding motor, cutting guide wheel device, top cutting guide wheel sliding panel, upper sliding plate gathering sill, cutting guide wheel installing rack, cut guide wheel sliding panel in bottom, bottom guide wheel installing rack, feed screw nut's seat, slide block, lower slider plate gathering sill, Buddha's warrior attendant wire cutting silicon ingot can be utilized.This utility model is cut to crystal ingot using vertical gauze, polysilicon block is obtained through cutting twice when polycrystal silicon ingot cutting is carried out.

Description

A kind of cutting chamber of diamond wire silicon ingot excavation machine
Technical field
This utility model is that, with regard to polysilicon lines cutting processing auxiliary equipment field, more particularly to a kind of diamond wire silicon ingot is opened The cutting chamber of square machine.
Background technology
Buddha's warrior attendant line cutting technology is quasiconductor hard brittle material evolution technology more advanced in the world at present, and its principle is profit Friction cuttings are carried out to machined part with diamond abrasive grain fixed on diamond wire, with the side's of cutting out ingot.Diamond wire is via guide roller Guiding, turns to required form, is moved back and forth by diamond wire and realizes cutting, is generally used cooling water and cooled down.Diamond wire Cutting technique has the advantages that efficiency high, environmental protection, high precision compared with conventional knives saw blade, mortar line, inner circle cutting etc..
After polycrystalline silicon ingot casting molding, need to through evolution, block, flour milling chamfering, the silicon materials processing technique such as section, it is final to make Into solar battery sheet.Polysilicon evolution is the first procedure of polycrystal silicon ingot processing.Huge square silicon ingot is cut into many Block small cuboid type.
Silicon ingot is cut into polylith many using the square net of cross gauze composition by common multi-thread evolution equipment from top to bottom Silico briquette.Although this kind of cutting mode can an excision forming, the winding mode of complexity and slower feed velocity, greatly The winding mode that have impact on the cutting efficiency and complexity of equipment also greatly consumes the service life of conduction line wheel and diamond wire.One There is broken string in denier, wiring difficulty is big again for equipment, and non-cutting time is long.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, there is provided a kind of coiling is simple, structure is tight Gather, diamond wire is lost a kind of cutting chamber of little and high in machining efficiency diamond wire silicon ingot excavation machine.To solve above-mentioned technical problem, Solution of the present utility model is:
A kind of cutting chamber of diamond wire silicon ingot excavation machine is provided, Buddha's warrior attendant wire cutting silicon ingot, the diamond wire silicon ingot can be utilized The cutting chamber of excavation machine includes cutting tension adjustment wheel apparatus, commutation guide wheel device, portal frame, top guide wheel dragging motor, same Step belting, external tension device, the inclined detection means of line, take-up and pay-off device, cutting tension motor, drag shaft coupling, screw mandrel, lead Rail, feeding shaft coupling, reductor, feeding motor, cutting guide wheel device, top cutting guide wheel sliding panel, upper sliding plate gathering sill, Cutting guide wheel installing rack, bottom cutting guide wheel sliding panel, bottom guide wheel installing rack, feed screw nut's seat, slide block, lower slider plate are oriented to Groove;
The take-up and pay-off device is provided with two, is symmetrically arranged;Take-up and pay-off device is to carry out diamond wire winding and put The device of line, can store diamond wire, and can control diamond wire release, the speed for reclaiming and position;
The portal frame is arranged on the centre of two take-up and pay-off devices;The upper sliding plate gathering sill is provided with breach guiding Groove, upper sliding plate gathering sill are horizontally mounted, and the transverse horizontal bar right angle setting with portal frame;The top cutting guide wheel slides Plate is arranged on upper sliding plate gathering sill, and can be horizontally slipped along the breach gathering sill on upper sliding plate gathering sill;
The guide rail is provided with two, is horizontally arranged at immediately below portal frame respectively;Two slide blocks are disposed with every guide rail, Slide block can reciprocatingly slide along rail length direction;The bottom of the bottom guide wheel installing rack is fixedly connected with a slide block, bottom guide wheel Installing rack can be slided on guide rail using slide block;The lower slider plate gathering sill be arranged on bottom guide wheel installing rack on, and with it is upper Sliding panel gathering sill is symmetrical arranged, and lower slider plate gathering sill is provided with breach gathering sill;The bottom cutting guide wheel sliding panel peace It is mounted on lower slider plate gathering sill, and can horizontally slips along the breach gathering sill on lower slider plate gathering sill;
Feed screw nut's seat is fixedly connected with bottom guide wheel installing rack, and the screw mandrel passes through feed screw nut's seat and guide rail Parallel installation, screw mandrel energy drive screw nut seat move along a straight line along screw mandrel length direction;The feeding motor (is pacified using motor Dress seat is arranged on equipment rack) reductor is connected with, and be connected with screw mandrel by feeding shaft coupling, for drive screw nut Seat is moved along screw mandrel, and then drives bottom guide wheel installing rack to move along the rail;
The cutting tension adjustment wheel apparatus are provided with two, are symmetrical set the both sides on portal frame, and cut Tension adjustment wheel apparatus drag shaft coupling driving by tension motor connection is cut;Cutting tension adjustment wheel apparatus are provided with groove, should It is used for arranging diamond wire in groove;Cutting tension adjustment wheel apparatus are the devices for controlling Buddha's warrior attendant wire cutting tension force, can be adjusted Buddha's warrior attendant line tension under cut state, makes the diamond wire two ends tension force difference through cutting tension adjustment wheel apparatus;
The commutation guide wheel device is provided with 15, wherein 6 commutation guide wheel devices are arranged on the front of portal frame, wherein 4 Individual commutation guide wheel device is arranged on bottom guide wheel installing rack, and remaining 5 commutations guide wheel device is arranged on the top surface of portal frame, and this 5 commutation guide wheel devices are driven by synchronous belt device by top guide wheel dragging motor;Commutation guide wheel device arranges fluted, should It is used for arranging diamond wire in groove;Commutation guide wheel device is reversing arrangement of the diamond wire under uncut state, and commutate guide wheel Device can be rotated along vertical mounting surface direction, for break-in is carried out to diamond wire (through the diamond wire two ends of commutation guide wheel device Work piece cut is not directly participated in, cut state need to be entered back into through cutting guide wheel device);
The synchronous belt device is synchronization belt transmission system, for transmitting top guide wheel dragging motor rotating speed and moment of torsion, from And drive 5 commutation guide wheel devices for being arranged at gantry top of support to rotate along identical steering;
The cutting guide wheel device is provided with 16, is utilized respectively cutting guide wheel installing rack and is arranged on top cutting guide wheel cunning On dynamic plate, bottom cutting guide wheel sliding panel, i.e., 8 are respectively provided with top cutting guide wheel sliding panel, bottom cutting guide wheel sliding panel It is individual, and guide wheel device is cut for right angle setting symmetrical above and below so that coiling corresponds to the diamond wire of cutting groove straight down thereon; Cutting guide wheel device is provided with multiple tracks cutting groove (arranging multiple tracks cutting groove, to increase guide wheel service life), is used in cutting groove Arrangement diamond wire;Cutting guide wheel device is the device that directly conduction is in cutting position diamond wire two ends, cuts guide wheel device energy Rotate along vertical mounting surface direction, for conducting diamond wire and control cut lengths;
Diamond wire is around in cutting tension adjustment wheel apparatus, the groove of commutation guide wheel device, and the cutting of cutting guide wheel device In groove, Buddha's warrior attendant gauze can be formed, and diamond wire two ends are stored respectively in take-up and pay-off device, and can be moved back and forth;It is described Buddha's warrior attendant gauze cutting position in vertical state, i.e. cutting position multiple tracks diamond wire and horizontal plane, and in cut state When, when bottom, guide wheel installing rack is slided along rail length direction using slide block so that be installed on the commutation of bottom guide wheel installing rack Guide wheel device is moved along rail length direction, can make the Buddha's warrior attendant gauze of cutting position with the horizontal certain angle;
The external tension device is provided with two, is symmetrical set the both sides on portal frame;External tension device Be proximate to folding and unfolding line wheel side setting tenslator, for control diamond wire around enter take-up and pay-off device when Tensity size (Tensity size of take-up and pay-off device diamond wire is involved in by reducing, can effectively reduce diamond wire around entering in take-up and pay-off device The attrition of generation);
The inclined detection means of the line is provided with two, be symmetrical set respectively on portal frame take-up and pay-off device it is oblique on Side;The inclined detection means of line can to from take-up and pay-off device around entering the diamond wire of guide wheel device that commutates, if skew is detected (to protect Diamond wire is demonstrate,proved with correct position around entering in the groove for commutating guide wheel, so as to avoid diamond wire from deviating from).
Used as further improvement, the cutting guide wheel installing rack is divided in cutting guide wheel both sides installing rack and cutting guide wheel Between installing rack, cutting guide wheel both sides installing rack referred to installed in top cutting guide wheel sliding panel, bottom cutting guide wheel sliding panel two The cutting guide wheel installing rack of side, in the middle of cutting guide wheel, installing rack is referred to and is led installed in top cutting guide wheel sliding panel, bottom cutting Cutting guide wheel installing rack on slipping plate, in the middle of the installing rack of cutting guide wheel both sides;Cutting guide wheel both sides installing rack is entering Than cutting in the middle of guide wheel, length of the installing rack on direction of feed is long (to mean cutting position herein to length on knife direction Diamond wire first can touch workpiece and enter machining state, namely during cutting silicon ingot when middle silicon ingot is not fully disconnected, first Silicon ingot both sides rough flaw-piece is removed).
Used as further improvement, two guide rails are line slideway.
Used as further improvement, the top guide wheel dragging motor, feeding motor all adopt servomotor.
Used as further improvement, the cutting chamber of the diamond wire silicon ingot excavation machine also includes diamond wire, cuts for being around in Tension adjustment wheel apparatus, the groove of commutation guide wheel device are cut, and is cut in the cutting groove of guide wheel device, form Buddha's warrior attendant gauze, and The two ends of diamond wire are stored respectively in take-up and pay-off device, and can be moved back and forth.
In this utility model, top cutting guide wheel sliding panel can be along portal frame width side with bottom cutting guide wheel sliding panel To moving horizontally, due to cutting guide wheel device with cutting guide wheel sliding panel and bottom cutting guide wheel sliding panel to be fixedly connected pass System, so as to drive, cutting guide wheel device is overall to be moved along the direction;Due to need to be from commutation guide wheel device during diamond wire coiling Groove further around being formed on the cutting groove of cutting guide wheel device, now, need to ensure diamond wire two ends respectively with commutation guide wheel device The cutting groove of groove and cutting guide wheel device is tangent, and the lower diamond wire that otherwise runs up will be deviate from;When cutting guide wheel device by When current cutting groove need to be changed, guide wheel sliding panel can be cut by top and guide wheel sliding panel be cut along portal frame width with bottom Direction moves horizontally and changes other cutting grooves having not been used;Now, because cutting guide wheel possesses multiple tracks cutting groove, only need to move Dynamic cutting groove.If only one of which cutting groove, need to change guide wheel, so as to save the non-cutting time of apparatus processing.
Compared with prior art, the beneficial effects of the utility model are:
1st, this utility model is cut to crystal ingot using vertical gauze, through twice when polycrystal silicon ingot cutting is carried out Cutting is obtained polysilicon block.
2nd, this utility model can be adjusted to cutting gauze tension force and cutting angle, effectively can be carried in cutting High diamond wire cutting speed;And cutting tension adjustment wheel apparatus and external tension device can control tension force when cutting and folding and unfolding The tension force of line is different, can greatly reduce loss of the diamond wire under non-cutting state.
3rd, this utility model is in diamond wire squaring equipment use, can effective use diamond wire, effectively lift cutting efficiency.
Description of the drawings
Fig. 1 is this utility model front view.
Fig. 2 is this utility model left view.
Fig. 3 is this utility model top view.
Fig. 4 is A direction views in Fig. 2.
Fig. 5 is this utility model front isometric side view.
Fig. 6 is this utility model back side isometric side view.
Fig. 7 is this utility model first time feed schematic elevation view.
Fig. 8 is this utility model first time feed schematic top plan view.
Fig. 9 is second feed schematic elevation view of this utility model.
Figure 10 is second feed schematic top plan view of this utility model.
Figure 11 is that this utility model cuts guide wheel partial schematic diagram.
Reference in figure is:1 diamond wire;2 cutting tension adjustment wheel apparatus;3 commutation guide wheel devices;4 portal frames;5 Top guide wheel dragging motor;6 synchronous belt devices;7 external tension devices;The inclined detection means of 8 lines;9 take-up and pay-off devices;10 cuttings Force motor;11 drag shaft coupling;12 screw mandrels;13 motor mounts;14 guide rails;15 feeding shaft couplings;16 reductors;17 feeding electricity Machine;18 cutting guide wheel devices;Installing rack in the middle of 19 cutting guide wheels;Guide wheel sliding panel is cut at the top of 20;21 upper sliding plate gathering sills; 22 cutting guide wheel both sides installing racks;Cut guide wheel sliding panel in 23 bottoms;24 bottom guide wheel installing racks;25 feed screw nut's seats;26 slide Block;27 lower slider plate gathering sills.
Specific embodiment
This utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings:
A kind of cutting chamber of diamond wire silicon ingot excavation machine as shown in Figures 1 to 6 include cutting tension adjustment wheel apparatus 2, Commutation guide wheel device 3, portal frame 4, top guide wheel dragging motor 5, synchronous belt device 6, external tension device 7, line detect dress partially Put 8, take-up and pay-off device 9, cutting tension motor 10, drag shaft coupling 11, screw mandrel 12, motor mount 13, guide rail 14, feeding connection Axle device 15, reductor 16, feeding motor 17, cutting guide wheel device 18, top cutting guide wheel sliding panel 20, upper sliding plate gathering sill 21st, cut guide wheel installing rack, bottom cutting guide wheel sliding panel 23, bottom guide wheel installing rack 24, feed screw nut's seat 25, slide block 26, Lower slider plate gathering sill 27 and diamond wire 1, can cut silicon ingot using diamond wire 1.
The take-up and pay-off device 9 specifically refers to diamond wire winding and actinobacillus device, for storing diamond wire 1, and can be with Diamond wire 1 is made with appropriate speed and position release and is reclaimed.Take-up and pay-off device 9 is provided with two, is symmetrically arranged.
The portal frame 4 is arranged on the centre of two take-up and pay-off devices 9.The upper sliding plate gathering sill 21 is provided with breach Gathering sill, upper sliding plate gathering sill 21 are horizontally mounted, and the transverse horizontal bar right angle setting with portal frame 4.The top cutting Guide wheel sliding panel 20 is arranged on upper sliding plate gathering sill 21, and can be left along the breach gathering sill on upper sliding plate gathering sill 21 Right slip.
The guide rail 14 is provided with two, using line slideway, how to arrange respectively:The guide rail 14 is horizontally arranged at gantry Immediately below frame 4.Two slide blocks 26 are disposed with every guide rail 14, slide block 26 can reciprocatingly slide along 14 length direction of guide rail.It is described The bottom of bottom guide wheel installing rack 24 is fixedly connected with slide block 26, can be slided on guide rail 14 using slide block 26.The lower slider Plate gathering sill 27 and upper sliding plate gathering sill 21 are symmetrically mounted on bottom guide wheel installing rack 24, are set on lower slider plate gathering sill 27 Jagged gathering sill.The bottom cutting guide wheel sliding panel 23 is arranged on lower slider plate gathering sill 27, and can be along lower slider Breach gathering sill on plate gathering sill 27 horizontally slips.
Feed screw nut's seat 25 is fixedly connected with bottom guide wheel installing rack 24, and the screw mandrel 12 passes through feed screw nut's seat 25 With 14 parallel installation of guide rail, can drive screw nut seat 25 move along a straight line along 12 length direction of screw mandrel.The feeding motor 17 It is arranged on equipment rack using motor mount 13;Feeding motor 17 is connected with reductor 16, and by feeding shaft coupling 15 Be connected with screw mandrel 12, move along screw mandrel 12 for drive screw nut seat 25, and then bottom guide wheel installing rack 24 is driven along guide rail 14 motions.
The cutting tension adjustment wheel apparatus 2 specifically refer to control the device that diamond wire 1 cuts tension force, are located at for adjustment The device of 1 tension force of diamond wire under cut state, this device arrange fluted, and diamond wire 1 is arranged in groove, can be made through the dress The 1 two ends tension force of diamond wire put is different.Cutting tension adjustment wheel apparatus 2 are provided with two, are symmetrical set on portal frame 4 Both sides, and cut tension adjustment wheel apparatus 2 dragging shaft coupling 11 connected by cutting tension motor 10 and drive.
The commutation guide wheel device 3 specifically refers to reversing arrangement of the diamond wire 1 under uncut state, is used only as Buddha's warrior attendant 1 break-in of line, does not directly participate in work piece cut through 1 two ends of diamond wire of the guide wheel device 3 that commutates, need to be through cutting guide wheel device 18 Cut state is entered back into, commutation guide wheel device 3 arranges fluted, and diamond wire 1 is arranged in groove, and commutation guide wheel device 3 can edge Vertical mounting surface direction rotates.Commutation guide wheel device 3 is provided with 15, wherein 6 commutation guide wheel devices 3 are arranged on portal frame 4 Front, wherein 4 commutation guide wheel devices 3 are arranged on bottom guide wheel installing rack 24, remaining 5 commutations guide wheel devices 3 are arranged on dragon The top surface of door frame 4, and this 5 commutation guide wheel devices 3 are driven by synchronous belt device 6 by top guide wheel dragging motor 5, top is led Wheel dragging motor 5 adopts servomotor.The synchronous belt device 6 specifically refers to a kind of synchronization belt transmission system, for transmitting top 5 rotating speed of portion guide wheel dragging motor and moment of torsion, so as to drive 5 commutation guide wheel devices 3 for being arranged at 4 top surface of portal frame along identical Turn to and rotate.
The cutting guide wheel device 18 specifically refers to directly device of the conduction in 1 two ends of cutting position diamond wire, is used for Conduction diamond wire 1 and control cut lengths, cutting guide wheel device 18 can be rotated along vertical mounting surface direction, cut guide wheel device 18 Multiple tracks cutting groove is provided with, to increase guide wheel service life.Cutting guide wheel device 18 is provided with 16, is utilized respectively cutting guide wheel Installing rack is arranged on top cutting guide wheel sliding panel 20, bottom and cuts on guide wheel sliding panel 23, and cutting guide wheel device 18 is upper and lower Symmetrical vertical is installed so that coiling corresponds to the diamond wire 1 of cutting groove straight down thereon, top cutting guide wheel sliding panel 20, Cut and 8 are respectively provided with guide wheel sliding panel 23 in bottom.
Cutting guide wheel installing rack is divided into installing rack 19 in the middle of cutting guide wheel both sides installing rack 22 and cutting guide wheel, cuts guide wheel Both sides installing rack 22 to be referred to and cut the cutting guide wheel of 23 both sides of guide wheel sliding panel 20, bottom cutting guide wheel sliding panel installed in top Installing rack, in the middle of cutting guide wheel, installing rack 19 is referred to installed in top cutting guide wheel sliding panel 20, bottom cutting guide wheel sliding panel Cutting guide wheel installing rack on 23, in the middle of cutting guide wheel both sides installing rack 22;Cutting guide wheel both sides installing rack 22 is in feed Length on direction is longer than cutting length of the installing rack 19 on direction of feed in the middle of guide wheel.
Diamond wire 1 is around in cutting tension adjustment wheel apparatus 2, commutation guide wheel device 3, the groove of cutting guide wheel device 18, And two ends are stored respectively in take-up and pay-off device 9, and can move back and forth.Buddha's warrior attendant gauze:The diamond wire 1 is through above-mentioned dress I.e. formation Buddha's warrior attendant gauze is put, during installation, Buddha's warrior attendant gauze is in vertical state, now, cutting position multiple tracks in cutting position Diamond wire 1 is and horizontal plane;When equipment is in cut state, bottom guide wheel installing rack 24 can be by slide block 26 along guide rail 14 The slip of length direction, so that the commutation guide wheel device 3 of bottom guide wheel installing rack 24 is installed on along 14 length direction of guide rail, Obviously, now the Buddha's warrior attendant gauze of cutting position with the horizontal certain angle.
The external tension device 7 specifically refers to a kind of tenslator near folding and unfolding line wheel side, for controlling gold Just line 1 is involved in the Tensity size of take-up and pay-off device 9 diamond wire 1, energy by reduction around the Tensity size entered in take-up and pay-off device 9 Diamond wire 1 is effectively reduced enough around entering the attrition that produces in take-up and pay-off device 9;External tension device 7 is provided with two, left The right side is symmetricly set on the both sides on portal frame 4.
The inclined detection means of the line 8 specifically refers to detect the device whether diamond wire 1 offsets, for diamond wire 1 from folding and unfolding Detection means of the line apparatus 9 around the guide wheel device 3 that enters to commutate, it is ensured that diamond wire 1 with correct position around entering in the groove for commutating guide wheel, So as to avoid diamond wire 1 from deviating from;The inclined detection means of line 8 is provided with two, is symmetrical set the retractable cable on portal frame 4 respectively The oblique upper of device 9.
The top cutting guide wheel sliding panel 20 cuts guide wheel sliding panel 23 with bottom can be along 4 width level of portal frame It is mobile, due to cutting guide wheel device 18 with cutting guide wheel sliding panel and bottom cutting guide wheel sliding panel 23 to be fixedly connected relation, So as to drive, cutting guide wheel device 18 is overall to be moved along the direction;Due to need to be from commutation guide wheel device 3 during 1 coiling of diamond wire Groove further around be formed on cutting guide wheel device 18 cutting groove on, now, need to ensure 1 two ends of diamond wire respectively with commutation guide wheel device 3 groove and the cutting groove of cutting guide wheel device 18 are tangent, and the lower diamond wire 1 that otherwise runs up will be deviate from;When cutting guide wheel Device 18 is due to, when current cutting groove need to be changed, cutting guide wheel sliding panel 20 by top and cut guide wheel sliding panel 23 with bottom Move horizontally along 4 width of portal frame and change other cutting grooves having not been used;Now, because cutting guide wheel possesses multiple tracks Cutting groove, only need to move cutting groove.If only one of which cutting groove, need to change guide wheel, so as to save apparatus processing Non-cutting time.
During use, diamond wire 1 is initial by side take-up and pay-off device 9, via commutation guide wheel device 3, external tension device 7, The device wraparound opposite side take-up and pay-off devices 9 such as cutting guide wheel device 18, cutting tension adjustment wheel apparatus 2 formed as shown in Figure 1 around Line mode.As shown in fig. 7, during first time feed, polycrystal silicon ingot is by the right side of being moved horizontally on the left of Fig. 7.Now, as cutting is led 22 length of wheel both sides installing rack is longer than installing rack 19 in the middle of cutting guide wheel, is capable of achieving mid portion polysilicon block incomplete cut-off, And cut by both sides flaw-piece.Afterwards, silicon ingot is returned by former direction of feed, and now, silicon ingot form is as shown in Figure 7.Afterwards, will be such as figure Crystal ingot shown in 8 rotates 90 ° clockwise or counterclockwise, then as shown in Figure 9 along left side side shifting to the right, until cutting completely It is disconnected.Now, evolution is polylith small cuboid type to crystal ingot.During cutting, as bottom guide wheel installing rack 24 can be grown along guide rail 14 Degree direction moves reciprocatingly, therefore diamond wire 1 can be made to form favourable cutting angle with crystal ingot facet when cutting, so as to effective Promote cutting efficiency.In addition, cutting guide wheel device 18 has multiple tracks cutting groove as shown in Figure 10, when cutting groove is damaged, due to Cutting guide wheel device 18 cuts guide wheel sliding panel 20 with top and bottom is cut 23 one-tenth of guide wheel sliding panel and is fixedly linked, as long as mobile Guide wheel sliding panel 20 is cut at top and bottom is cut guide wheel sliding panel 23 and is capable of achieving to change cutting 18 cutting groove of guide wheel device, from And greatly save the time for changing cutting guide wheel device 18.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new Type is not limited to above example, can also have many variations.One of ordinary skill in the art can be from disclosed in this utility model The all deformations directly derived in content or associate, are considered as protection domain of the present utility model.

Claims (5)

1. a kind of cutting chamber of diamond wire silicon ingot excavation machine, can utilize Buddha's warrior attendant wire cutting silicon ingot, it is characterised in that the diamond wire The cutting chamber of silicon ingot excavation machine includes that cutting tension adjustment wheel apparatus, commutation guide wheel device, portal frame, top guide wheel drags electricity Machine, synchronous belt device, external tension device, the inclined detection means of line, take-up and pay-off device, cutting tension motor, dragging shaft coupling, silk Bar, guide rail, feeding shaft coupling, reductor, feeding motor, cutting guide wheel device, top cutting guide wheel sliding panel, upper sliding plate are led To groove, cutting guide wheel installing rack, bottom cutting guide wheel sliding panel, bottom guide wheel installing rack, feed screw nut's seat, slide block, lower slider Plate gathering sill;
The take-up and pay-off device is provided with two, is symmetrically arranged;Take-up and pay-off device carries out diamond wire winding and unwrapping wire Device, can store diamond wire, and can control diamond wire release, the speed for reclaiming and position;
The portal frame is arranged on the centre of two take-up and pay-off devices;The upper sliding plate gathering sill is provided with breach gathering sill, Upper sliding plate gathering sill is horizontally mounted, and the transverse horizontal bar right angle setting with portal frame;Cut guide wheel sliding panel in the top On upper sliding plate gathering sill, and can horizontally slip along the breach gathering sill on upper sliding plate gathering sill;
The guide rail is provided with two, is horizontally arranged at immediately below portal frame respectively;Two slide blocks, slide block are disposed with every guide rail Can reciprocatingly slide along rail length direction;The bottom of the bottom guide wheel installing rack is fixedly connected with a slide block, and bottom guide wheel is installed Frame can be slided on guide rail using slide block;The lower slider plate gathering sill be arranged on bottom guide wheel installing rack on, and with upper slip Plate gathering sill is symmetrical arranged, and lower slider plate gathering sill is provided with breach gathering sill;The bottom cutting guide wheel sliding panel is arranged on On lower slider plate gathering sill, and can horizontally slip along the breach gathering sill on lower slider plate gathering sill;
Feed screw nut's seat is fixedly connected with bottom guide wheel installing rack, and the screw mandrel passes through feed screw nut's seat and guide rail parallel Install, screw mandrel energy drive screw nut seat moves along a straight line along screw mandrel length direction;The feeding motor connection has reductor, and It is connected with screw mandrel by feeding shaft coupling, is moved along screw mandrel for drive screw nut seat, and then drives bottom guide wheel installing rack Move along the rail;
The cutting tension adjustment wheel apparatus are provided with two, are symmetrical set the both sides on portal frame, and cut tension force Adjustment wheel apparatus drag shaft coupling driving by tension motor connection is cut;Cutting tension adjustment wheel apparatus are provided with groove, the groove It is interior for arranging diamond wire;Cutting tension adjustment wheel apparatus are the devices for controlling Buddha's warrior attendant wire cutting tension force, can adjust and be located at Buddha's warrior attendant line tension under cut state, makes the diamond wire two ends tension force difference through cutting tension adjustment wheel apparatus;
The commutation guide wheel device is provided with 15, wherein 6 commutation guide wheel devices are arranged on the front of portal frame, wherein 4 are changed Bottom guide wheel installing rack is arranged on to guide wheel device, remaining 5 commutations guide wheel device is arranged on the top surface of portal frame, and this 5 Commutation guide wheel device is driven by synchronous belt device by top guide wheel dragging motor;Commutation guide wheel device arranges fluted, and this is recessed It is used for arranging diamond wire in groove;Commutation guide wheel device is reversing arrangement of the diamond wire under uncut state, and commutate guide wheel dress Put and can rotate along vertical mounting surface direction, for break-in being carried out to diamond wire;
The synchronous belt device is synchronization belt transmission system, for transmitting top guide wheel dragging motor rotating speed and moment of torsion, so as to band Move 5 commutation guide wheel devices for being arranged at gantry top of support to rotate along identical steering;
The cutting guide wheel device is provided with 16, is utilized respectively cutting guide wheel installing rack and is arranged on top cutting guide wheel slip On plate, bottom cutting guide wheel sliding panel, i.e., 8 are respectively provided with top cutting guide wheel sliding panel, bottom cutting guide wheel sliding panel, And guide wheel device is cut for right angle setting symmetrical above and below so that coiling corresponds to the diamond wire of cutting groove straight down thereon;Cut Cut guide wheel device to be provided with multiple tracks cutting groove, cutting groove for arranging diamond wire;Cutting guide wheel device is that directly conduction is in The device at cutting position diamond wire two ends, cutting guide wheel device can rotate along vertical mounting surface direction, for conduct diamond wire and Control cut lengths;
Diamond wire is around in cutting tension adjustment wheel apparatus, the groove of commutation guide wheel device, and cuts in the cutting groove of guide wheel device, Buddha's warrior attendant gauze can be formed, and diamond wire two ends are stored respectively in take-up and pay-off device, and can be moved back and forth;The diamond wire Net cutting position in vertical state, i.e. cutting position multiple tracks diamond wire and horizontal plane, and in cut state, work as bottom Portion's guide wheel installing rack is slided along rail length direction using slide block so that be installed on the commutation guide wheel device of bottom guide wheel installing rack Move along rail length direction, the Buddha's warrior attendant gauze of cutting position can be made with the horizontal certain angle;
The external tension device is provided with two, is symmetrical set the both sides on portal frame;External tension device is to lean on The tenslator that nearly folding and unfolding line wheel side is arranged, for control diamond wire around enter take-up and pay-off device when Tensity size;
The inclined detection means of the line is provided with two, is symmetrical set the oblique upper of the take-up and pay-off device on portal frame respectively; The inclined detection means of line can to from take-up and pay-off device around entering the diamond wire of guide wheel device that commutates, if skew is detected.
2. a kind of cutting chamber of diamond wire silicon ingot excavation machine according to claim 1, it is characterised in that the cutting guide wheel Installing rack is divided into installing rack in the middle of cutting guide wheel both sides installing rack and cutting guide wheel, and cutting guide wheel both sides installing rack is referred to and is arranged on Top cutting guide wheel sliding panel, the cutting guide wheel installing rack of bottom cutting guide wheel sliding panel both sides, installing rack in the middle of cutting guide wheel Refer on top cutting guide wheel sliding panel, bottom cutting guide wheel sliding panel, in the middle of the installing rack of cutting guide wheel both sides Cutting guide wheel installing rack;Length of the cutting guide wheel both sides installing rack on direction of feed is being entered than installing rack in the middle of cutting guide wheel Length on knife direction is long.
3. a kind of cutting chamber of diamond wire silicon ingot excavation machine according to claim 1, it is characterised in that two guide rails It is line slideway.
4. a kind of cutting chamber of diamond wire silicon ingot excavation machine according to claim 1, it is characterised in that the top guide wheel Dragging motor, feeding motor all adopt servomotor.
5. the cutting chamber of a kind of diamond wire silicon ingot excavation machine according to Claims 1-4 any one, it is characterised in that The cutting chamber of the diamond wire silicon ingot excavation machine also includes diamond wire, for being around in cutting tension adjustment wheel apparatus, commutation guide wheel In the groove of device, and the cutting groove of cutting guide wheel device, Buddha's warrior attendant gauze is formed, and the two ends of diamond wire are stored respectively in folding and unfolding In line apparatus, and can move back and forth.
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108214956A (en) * 2018-01-23 2018-06-29 晶科能源有限公司 A kind of silicon ingot evolution method and device
CN108501233A (en) * 2018-06-21 2018-09-07 高本龙 A kind of Buddha's warrior attendant wire cutting machine
CN108581790A (en) * 2018-04-30 2018-09-28 宁波钜德精工机械有限公司 Buddha's warrior attendant wire cutting machine
CN110549505A (en) * 2019-08-27 2019-12-10 大连昊霖智能装备有限公司 double-rod type monocrystalline silicon rod squarer based on moving and static cutting head
CN111159791A (en) * 2019-12-27 2020-05-15 东华大学 Data information theftproof electronic information processor
CN112297245A (en) * 2020-10-30 2021-02-02 重庆邮电大学 Continuous cutting intelligent manufacturing equipment
CN113618937A (en) * 2021-08-19 2021-11-09 青岛高测科技股份有限公司 Silicon rod cutting device
CN113878472A (en) * 2021-10-31 2022-01-04 九江市庐山新华电子有限公司 Multi-wire cutting machine of diamond wire for electronic component production

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108214956A (en) * 2018-01-23 2018-06-29 晶科能源有限公司 A kind of silicon ingot evolution method and device
CN108581790A (en) * 2018-04-30 2018-09-28 宁波钜德精工机械有限公司 Buddha's warrior attendant wire cutting machine
CN108581790B (en) * 2018-04-30 2019-11-12 宁波钜德精工机械有限公司 Buddha's warrior attendant wire cutting machine
CN108501233A (en) * 2018-06-21 2018-09-07 高本龙 A kind of Buddha's warrior attendant wire cutting machine
CN110549505A (en) * 2019-08-27 2019-12-10 大连昊霖智能装备有限公司 double-rod type monocrystalline silicon rod squarer based on moving and static cutting head
CN111159791A (en) * 2019-12-27 2020-05-15 东华大学 Data information theftproof electronic information processor
CN111159791B (en) * 2019-12-27 2022-04-08 东华大学 Data information theftproof electronic information processor
CN112297245A (en) * 2020-10-30 2021-02-02 重庆邮电大学 Continuous cutting intelligent manufacturing equipment
CN112297245B (en) * 2020-10-30 2022-04-12 重庆邮电大学 Continuous cutting intelligent manufacturing equipment
CN113618937A (en) * 2021-08-19 2021-11-09 青岛高测科技股份有限公司 Silicon rod cutting device
CN113878472A (en) * 2021-10-31 2022-01-04 九江市庐山新华电子有限公司 Multi-wire cutting machine of diamond wire for electronic component production

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