CN111619026A - Double-silicon-rod diamond wire squarer - Google Patents
Double-silicon-rod diamond wire squarer Download PDFInfo
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- CN111619026A CN111619026A CN202010537854.9A CN202010537854A CN111619026A CN 111619026 A CN111619026 A CN 111619026A CN 202010537854 A CN202010537854 A CN 202010537854A CN 111619026 A CN111619026 A CN 111619026A
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- manipulator
- silicon rod
- sliding table
- fixed
- clamping
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 47
- 239000010432 diamond Substances 0.000 title claims abstract description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 113
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 113
- 239000010703 silicon Substances 0.000 claims abstract description 113
- 238000005520 cutting process Methods 0.000 claims abstract description 85
- 239000013078 crystal Substances 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 238000007599 discharging Methods 0.000 claims abstract description 5
- 238000011084 recovery Methods 0.000 claims description 79
- 238000004064 recycling Methods 0.000 claims description 31
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 239000010985 leather Substances 0.000 claims description 2
- 230000009471 action Effects 0.000 description 7
- 239000003638 chemical reducing agent Substances 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Feeding Of Workpieces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a double-silicon-rod diamond wire squarer which comprises a lathe bed extending leftwards and rightwards, wherein single silicon rod cutting systems are symmetrically arranged on the left side and the right side of the lathe bed, and a feeding system and a discharging system are arranged on the front side of the middle part of the lathe bed; a crystal wire detection system for detecting a crystal wire of the silicon rod is arranged on the rear side of the middle part of the lathe bed; the silicon rod grabbing mechanical arm system comprises a lathe bed, and is characterized in that a cross sliding table system is arranged in the middle of the lathe bed and comprises a lower sliding table system extending from front to back and an upper sliding table system extending from left to right, and a silicon rod grabbing mechanical arm system used for grabbing a silicon rod is installed on the upper sliding table system. The silicon rod grabbing manipulator system comprises a crystal line detection device, a silicon rod grabbing manipulator system and a silicon rod grabbing manipulator system.
Description
Technical Field
The invention relates to the technical field of silicon rod processing, in particular to a double-silicon-rod diamond wire squaring machine.
Background
Most of the existing silicon rod squarers are horizontal single squarers, cooling water is not easy to flow into a cutting position, cutting accuracy is not good enough, and the wire breaking rate of diamond wire cutting is high, because a traditional cutting wire net is parallel to or perpendicular to the axis of a machine tool, a cutting wheel or a cutting roller close to one side of a lifting upright post is not easy to maintain. And the flaw-piece grabbing of the traditional squaring machine is unstable. The existing double-rod squaring machine is also provided with two single-rod squaring machines, and each single-rod squaring machine is provided with a crystal wire detection device, a silicon rod grabbing manipulator system and other devices, so that the internal utilization rate is low and the cost is high. And current vertical double stick squaring machine adopts a cutting head to cut two silicon rods simultaneously, and one set of take-up and pay-off device, once having a gauze broken string like this, can cause another gauze also can not work.
Disclosure of Invention
According to the technical problem, the two squarers share one crystal line detection device and one silicon rod grabbing manipulator system, and cutting nets of the two squarers do not influence each other.
The technical means adopted by the invention are as follows:
the double-silicon-rod diamond wire squaring machine comprises a bed body extending leftwards and rightwards, wherein single-silicon-rod cutting systems are symmetrically arranged on the left side and the right side of the bed body, and comprise a rotary table system close to the middle of the bed body, a diamond wire cutting system arranged above the rotary table system and used for cutting a silicon rod, a feeding system arranged in the middle of the end part of the bed body and used for driving the diamond wire cutting system to move up and down, a wire releasing system arranged on the front side of the end part of the bed body and used for releasing a diamond wire to the diamond wire cutting system, a wire collecting system arranged on the rear side of the end part of the bed body and used for collecting a diamond wire in the diamond wire cutting system, a flaw-piece clamping manipulator arranged above the diamond wire cutting system and used for clamping residual flaw-pieces after cutting of the silicon rod, a flaw-piece collecting system arranged on the front side of the diamond wire cutting system and used for collecting the flaw-pieces, and a flaw-piece collecting system arranged on The conveying system is arranged between the flaw-piece recovery systems, and the rotary table system is provided with a crystal support for vertically fixing the silicon rod;
a feeding system and a discharging system are arranged on the front side of the middle part of the lathe bed; a crystal wire detection system for detecting a crystal wire of the silicon rod is arranged on the rear side of the middle part of the lathe bed; the silicon rod grabbing device is characterized in that a cross sliding table system is arranged in the middle of the lathe bed and comprises a lower sliding table system extending front and back and an upper sliding table system extending left and right, and a silicon rod grabbing manipulator system used for grabbing a silicon rod is mounted on the upper sliding table system.
Further, the feeding system and the discharging system both comprise a fixed frame, a silicon rod placing table which is arranged at the top of the fixed frame, is horizontally arranged and extends forwards and backwards, and a feeding cylinder which is vertically arranged in the fixed frame and is used for driving the silicon rod placing table to change from a horizontal state to a vertical state or from a vertical state to a horizontal state; the silicon rod placing table is hinged to the fixing frame at one end close to the lathe bed, the feeding air cylinder is arranged on one side, close to the lathe bed, of the fixing frame, the output end of the feeding air cylinder is hinged to the silicon rod placing table, and the top of the mounting end of the feeding air cylinder is hinged to the side wall of the fixing frame through a hinge seat.
Further, the diamond wire cutting system comprises a cutting head connected with the feeding system, a plurality of intermediate wheels arranged at the top of the cutting head and a plurality of cutting wheels arranged at the bottom of the cutting head, diamond wires are paid out from the paying-off system and pass through the intermediate wheels and the cutting wheels to form a cutting net, and then the cutting net returns to the take-up system, the orthographic projection of the cutting net on the lathe bed is square, and the included angle between the side of the square and the axis of the lathe bed is 45 degrees.
Furthermore, the lower sliding table system comprises two lower sliding rails which are horizontally arranged and extend forwards and backwards, a lower sliding table screw rod which extends forwards and backwards and a lower sliding table screw rod driving motor which drives the lower sliding table screw rod to move are arranged between the two lower sliding rails, the upper sliding table system comprises an upper sliding table which is connected with the lower sliding rails in a sliding way, the upper sliding table extends leftwards and rightwards, the output end of the lead screw of the lower sliding table is fixedly connected with the bottom of the upper sliding table, two upper sliding rails which are horizontally arranged and extend leftwards and rightwards are arranged on the upper sliding table, wherein one of the upper slide rails is provided with an upper slide rail rack, the bottom of the silicon rod grabbing manipulator system is connected with the upper slide rail in a sliding way, and a manipulator moving motor is installed at the bottom of the silicon rod grabbing manipulator system, and an upper sliding rail gear matched with the upper sliding rail rack is installed at the output end of the manipulator moving motor. The silicon rod grabbing mechanical arm system moves left and right under the action of the upper slide rail gear and the upper slide rail rack.
Further, the silicon rod grabbing manipulator system comprises a manipulator frame body, wherein clamping units are respectively arranged on the left side and the right side of the manipulator frame body;
the clamping unit comprises two vertical guide rails vertically fixed on the manipulator frame body, manipulator mounting frames which are in sliding connection with the vertical guide rails are respectively mounted on the upper portion and the lower portion of each vertical guide rail, the bottom end of a connecting rod sequentially penetrates through the top end of the manipulator frame body and the manipulator mounting frame positioned on the upper portion and then is fixedly connected with the manipulator mounting frame positioned on the lower portion, the connecting rod is connected with the manipulator mounting frame positioned on the upper portion through a clamp, the manipulator mounting frame positioned on the upper portion is fixedly connected with the output end of a manipulator driving lead screw vertically fixed in the manipulator frame body, and the input end of the manipulator driving lead screw is connected with a manipulator driving motor fixed on the top of the manipulator frame body through a speed reducer; after the positions of the upper manipulator mounting frame and the lower manipulator mounting frame are adjusted, the two manipulator mounting frames are locked by the clamp, so that the two manipulator mounting frames are combined into an integrated synchronous structure, and then the whole up-and-down motion is realized under the action of the manipulator driving motor and the manipulator driving lead screw.
The manipulator mounting frame is provided with two horizontally arranged manipulator rails extending forwards and backwards, and the front side and the rear side of each manipulator rail are respectively provided with a manipulator; the manipulator comprises a mounting end and a silicon rod clamping jaw fixedly connected with the mounting end; a clamping motor is fixed in the middle of the manipulator mounting frame, and a clamping gear is mounted at the output end of the clamping motor; one of them installation end on the manipulator mounting bracket is in the top of pressing from both sides tight gear be equipped with press from both sides tight gear cooperation and the front and back upper portion rack that extends, another on the manipulator mounting bracket the installation end is in press from both sides tight gear's below be equipped with press from both sides tight gear cooperation and the front and back lower part rack that extends. The manipulator can move towards the middle and both sides simultaneously under the action of the upper rack, the clamping gear and the lower rack.
Further, the middle part of the silicon rod clamping jaw is provided with a notch used for clamping a cylindrical silicon rod, the orthographic projection of the notch on the lathe bed is in an isosceles trapezoid shape, the lower bottom of the isosceles trapezoid shape is provided with an opening of the notch, and the end part of one end, far away from the manipulator mounting frame, of the silicon rod clamping jaw is provided with a right-angle clamping groove used for clamping a cuboid silicon rod.
Further, the silicon rod grabbing manipulator system further comprises a rotating device arranged at the bottom of the manipulator support body, the rotating device comprises a rotating column, the rotating column is connected with the upper sliding table system, the top of the rotating column is connected with a rotating disc rotatably connected with the rotating column, an annular rotating rack is fixed on the outer edge of the top of the rotating column, one end of the rotating disc is fixed with a rotating motor, a rotating gear matched with the rotating rack is installed on an output shaft of the rotating motor, and the bottom of the manipulator support body is fixedly connected with the rotating disc.
Furthermore, the flaw-piece clamping manipulator comprises a flaw-piece cylinder which is fixed on the conveying device and is vertically arranged, the output end of the flaw-piece cylinder is fixedly connected with a clamping jaw fixing frame which penetrates through the conveying device, the clamping jaw fixing frame is of a double-layer structure and comprises an upper layer and a lower layer, a clamping jaw cylinder is fixed in the upper layer, the output end of the clamping jaw cylinder penetrates through the upper layer and is fixedly connected with a limiting clamping groove which is arranged in the lower layer, a clamping head is fixed at the bottom end of the limiting clamping groove, the lower layer is provided with four side walls, the four side walls are enclosed to form a square, and the included angle between the side of the square and the axis of the lathe body is 45 degrees; a side skin clamping jaw is fixed in the side wall, a clamping head is arranged between the side skin clamping jaw and the limiting clamping groove, the clamping head comprises a horizontal section and a vertical section, the horizontal section is fixedly connected with the vertical section, the joint of the horizontal section and the vertical section is hinged with the clamping head, and one end, close to the limiting clamping groove, of the horizontal section is clamped in the limiting clamping groove; the clamping jaw air cylinder is lifted upwards, so that the horizontal section rotates around the joint, the vertical section is changed into an inclined state, the vertical section and the flaw-piece clamping jaw clamp the flaw-piece together, and then the flaw-piece is driven by the flaw-piece air cylinder to move up and down.
And a lifting device for driving the edge skin to lift upwards is arranged on the crystal support. And a lifting device for driving the edge skin to lift upwards is arranged on the crystal support. The lifting device can be a circular ring, and the bottom of the circular ring is provided with a plurality of driving cylinders. Because the top end of the edge skin and the top end of the silicon side are in the same plane in the silicon rod cutting process, a lifting device is needed to lift the edge skin upwards to enable the edge skin clamping jaw and the clamping head to clamp the edge skin.
Further, conveyor is including fixing carriage on the lathe bed, the top of carriage is provided with the delivery track, on the delivery track install with delivery track sliding connection's transport slip table, just the carriage is in one side of delivery track is fixed with the transport rack, be fixed with the conveyor motor on the lateral wall of transport slip table, just install on the output of conveyor motor with transport rack matched with carries the gear, install on the transport slip table the manipulator is got to the flaw-piece clamp. The movement of the mechanical arm is clamped by the side leather clamp driven by the rotation of the conveying gear.
Further, the flaw-piece recovery system comprises a recovery platform and a recovery device fixed between the recovery platform and the bed body;
the recycling device comprises a recycling support, a displacement mechanism is fixed at the top end of the recycling support, the displacement mechanism comprises a lower recycling sliding table and an upper recycling sliding table which is arranged on the lower recycling sliding table and used for conveying the flaw-pieces, the lower recycling sliding table is connected with the recycling support in a sliding mode through a lower recycling guide rail fixed at the top end of the recycling support, and a recycling cylinder for driving the lower recycling sliding table to move along the lower recycling guide rail is fixed at the top end of the recycling support;
a lower recovery rack is fixed in the middle of the side wall of the lower recovery sliding table; a movable cylinder is fixed in the middle of the side wall of the lower recovery sliding table, a rotating gear matched with the lower recovery rack is installed at the output end of the movable cylinder, and the rotating gear is arranged above the lower recovery rack;
the upper recovery sliding table is arranged on the top of the lower recovery sliding table and is connected with the upper recovery sliding table in a sliding mode, the upper recovery sliding table is parallel to the lower recovery sliding table, an upper recovery rack matched with the rotating gear is arranged on the side wall of the upper recovery sliding table, and the upper recovery rack is arranged above the rotating gear. The stroke distance of the upper recovery sliding table can be increased under the action of the upper recovery sliding table, the lower recovery sliding table, the upper recovery rack, the recovery gear and the lower recovery rack, so that the occupied area is small.
Further, the rotary table system comprises a rotary table which is rotatably connected with the machine body and a rotary table driving motor which drives the rotary table to rotate.
Further, the feeding system comprises a stand column fixedly connected with the lathe bed, a cutting head mounting frame is mounted on one side, close to the rotary table system, of the stand column, the cutting head is fixedly connected with the cutting head mounting frame, the cutting head mounting frame is fixedly connected with an output end of a feed screw fixed on the stand column, and an input end of the feed screw is connected with a feed motor fixed at the top of the stand column through a feed reducer.
In the use state: a silicon rod is horizontally placed on a feeding system, then the feeding cylinder works to drive the silicon rod placing table to be changed from a horizontal state to a vertical state, a silicon rod grabbing mechanical hand grabs the silicon rod under the driving of a cross sliding table, the processed silicon rod is placed in a blanking system on the other side of the cross sliding table, then the silicon rod is placed on a crystal wire detection system to detect a crystal wire of the silicon rod, after the silicon rod detection is finished, a rotary device at the bottom of the silicon rod grabbing mechanical hand rotates by 90 degrees to enable the silicon rod to be over against the rotary table system, the silicon rod grabbing mechanical hand places the silicon rod on a crystal support on the rotary table system to be fixed, then the rotary table system rotates by 180 degrees to drive a working position, the silicon rod is cut under the action of a diamond wire cutting system and a feeding system, the silicon rod with a round cross section is cut into a silicon square, and the diamond wire stops working after the cutting is, the leftover flaw-piece is cut and lifts up one section distance through lifting up the device with the flaw-piece, and then the clamping jaw cylinder in the manipulator is got to the flaw-piece clamp upwards lifts up, and the dop takes place to rotate under the effect of spacing draw-in groove this moment, and its vertical section supports on the inner wall of flaw-piece, and the outer wall of flaw-piece supports on the flaw-piece clamping jaw, and then the manipulator is got to the flaw-piece clamp all to clip four flaw-pieces, and later the ascending lifting of flaw-piece cylinder is grabbed the flaw-piece in the flaw-piece recovery system is retrieved to the flaw-piece under conveying system's effect. The recycling device in the flaw-piece recycling system conveys the flaw-pieces to a recycling table. Then the rotary table system rotates 180 degrees, the cut silicon is rotated to the position right opposite to the silicon rod grabbing mechanical hand, the silicon rod grabbing mechanical hand conveys the silicon to the blanking system under the action of the cross sliding table system, and then the blanking system falls down to be in a horizontal state, so that the action cycle is completed.
Compared with the prior art, the invention has the following advantages:
1. the invention realizes the vertical squaring of the silicon rod, the cooling water is easy to flow into the cutting position, the cutting precision is good, and the wire breakage rate is low.
2. The included angle between the cutting wire net and the axis of the lathe body is 45 degrees, so that the cutting head is easy to maintain and convenient to change wires.
3. The flaw-piece is more stable to grab and transport.
4. The working efficiency is equal to two single silicon rod squarers, but the cost is eighty percent of two.
5. The silicon rod snatchs the manipulator system and can realize carrying out the unloading when the material loading, has increased work efficiency.
For the reasons, the invention can be widely popularized in the fields of silicon rod cutting and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to these drawings without creative efforts.
FIG. 1 is a main view of a double silicon rod diamond wire squarer according to an embodiment of the present invention.
Fig. 2 is an enlarged view of a portion a in fig. 1.
Fig. 3 is an enlarged view of a portion B in fig. 1.
Fig. 4 is an enlarged view of the portion C in fig. 1.
Fig. 5 is a top view of a dual silicon rod diamond wire squarer in accordance with an embodiment of the present invention.
Fig. 6 is a schematic structural view of a cross slide system in the embodiment of the present invention.
FIG. 7 is a structural schematic diagram of a silicon rod grabbing manipulator system in the embodiment of the invention.
FIG. 8 is a top view of a silicon rod grasping robot system according to an embodiment of the present invention.
FIG. 9 is a side view of a silicon rod grasping robot system according to an embodiment of the present invention.
Fig. 10 is a schematic structural view of a feeding device in the embodiment of the present invention.
FIG. 11 is a side view of a flaw-piece recovery apparatus according to an embodiment of the present invention.
Fig. 12 is an enlarged view of a portion D in fig. 11.
Fig. 13 is an orthographic view of the cutting net on the bed.
In the figure:
1. a bed body;
2. a feeding system; 201. a fixed mount; 202. a silicon rod placing table; 203. a feeding cylinder;
3. a blanking system;
4. a wafer line detection system;
5. a turntable system; 501. crystal support; 502. a lifting device; 503. a turntable; 504. a turntable drive motor;
6. a cross slide system; 601. a lower slide rail; 602. a lower sliding table screw; 603. a lower sliding table lead screw driving motor; 604. an upper sliding table; 605. an upper slide rail; 606. an upper slide rail rack; 607. a manipulator moving motor; 608. an upper slide rail gear;
7. a silicon rod grabbing manipulator system; 701. a manipulator frame body; 702. a vertical guide rail; 703. a manipulator mounting frame; 704. a connecting rod; 705. a clamp; 706. the mechanical arm drives a lead screw; 707. a speed reducer; 708. a manipulator drive motor; 709. a manipulator track; 710. an installation end; 711. silicon rod clamping jaws; 712. clamping the motor; 713. clamping the gear; 714. an upper rack; 715. a lower rack; 716. A notch; 717. a right-angle clamp groove; 718. a rotary column; 719. a rotary disk; 720. a rotating rack; 721. A rotary motor; 722. a rotary gear;
8. a diamond wire cutting system; 801. a cutting head; 802. passing a wheel; 803. a cutting wheel; 804. a diamond wire; 805. cutting the net;
9. a feed system; 901. a column; 902. a cutting head mounting bracket; 903. a feed screw; 904. a feed motor; 905. a feed decelerator;
10. a pay-off system;
11. a take-up system;
12. a flaw-piece clamping manipulator; 121. a flaw-piece cylinder; 122. a clamping jaw fixing frame; 123. a jaw cylinder; 124. a limiting clamping groove; 125 a clamping head; 126. a flaw-piece clamping jaw; 127. clamping a head;
13. a flaw-piece recovery system; 1301. a recovery stage; 1302. recovering the bracket; 1303. a lower recovery sliding table; 1304. a recovery sliding table is arranged; 1305. a lower recovery guide rail; 1306. a recovery cylinder; 1307. a lower recovery rack; 1308. a moving cylinder; 1309. a rotating gear; 1310. an upper recovery guide rail; 1311. an upper recovery rack;
14. a delivery system; 141. a carriage; 142. a conveying track; 143. a conveying sliding table; 144. a conveyor rack; 145. a conveying motor; 146. a conveying gear.
Detailed Description
It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the invention. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and further it is to be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of the stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of parts and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Also, it should be understood that the dimensions of the various features shown in the drawings are not drawn to scale in practice for ease of illustration. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion of it is not necessary in subsequent figures.
In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the directions or positional relationships shown in the drawings for the convenience of description and simplicity of description, and that the directional terms do not indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation without being described to the contrary, and therefore, should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in fig. 1 to 13, a double silicon rod diamond wire squarer comprises a bed body 1 extending left and right, single silicon rod cutting systems are symmetrically arranged on left and right sides of the bed body 1, each single silicon rod cutting system comprises a rotary table system 5 close to the middle of the bed body 1, a diamond wire cutting system 8 arranged above the rotary table system 5 and used for cutting a silicon rod, a feeding system 9 arranged in the middle of the end of the bed body 1 and used for driving the diamond wire cutting system 8 to move up and down, a pay-off system 10 arranged on the front side of the end of the bed body 1 and used for paying off a diamond wire to the diamond wire cutting system 8, a take-up system 11 arranged on the rear side of the end of the bed body 1 and used for taking back the diamond wire in the diamond wire cutting system 8, and a flaw-piece clamping manipulator 12 arranged above the diamond wire cutting system 8 and used for clamping a flaw-piece left after silicon rod cutting, A flaw-piece recovery system 13 arranged at the front side of the diamond wire cutting system 8 and used for recovering the flaw-piece, and a conveying system 14 arranged between the flaw-piece clamping manipulator 12 and the flaw-piece recovery system 13, wherein a crystal support 501 for vertically fixing a silicon rod is arranged on the rotary table system 5; a feeding system 2 and a discharging system 3 are arranged on the front side of the middle part of the lathe bed 1; a crystal wire detection system 4 for detecting a crystal wire of the silicon rod is arranged on the rear side of the middle part of the lathe bed 1; the middle part of lathe bed 1 is equipped with cross slip table system 6, cross slip table system 6 is including the last slip table system that extends around with the lower slip table system that extends about, it snatchs manipulator system 7 to install the silicon rod that is used for snatching the silicon rod on the slip table system to go up.
The feeding system 2 and the blanking system 3 both comprise a fixed frame 201, a silicon rod placing table 202 which is arranged on the top of the fixed frame 201, is horizontally arranged and extends forwards and backwards, and a feeding cylinder 203 which is vertically arranged in the fixed frame 201 and is used for driving the silicon rod placing table 202 to change from a horizontal state to a vertical state or from a vertical state to a horizontal state; one end, close to the bed body 1, of the silicon rod placing table 202 is hinged to the fixing frame 201, the feeding cylinder 203 is arranged on one side, close to the bed body 1, of the fixing frame 201, the output end of the feeding cylinder 203 is hinged to the silicon rod placing table 202, and the top of the mounting end of the feeding cylinder 203 is hinged to the side wall of the fixing frame 201 through a hinge seat;
the diamond wire cutting system 8 comprises a cutting head 801 connected with the feeding system 9, a plurality of intermediate wheels 802 arranged at the top of the cutting head 801, and a plurality of cutting wheels 803 arranged at the bottom of the cutting head 801, wherein a diamond wire 804 is paid out from the paying-off system 10, passes through the plurality of intermediate wheels 802 and the plurality of cutting wheels 803 to form a cutting net 805, and then returns to the take-up system 11, the orthographic projection of the cutting net 805 on the bed 1 is square, and the side of the square forms an angle of 45 degrees with the axis of the bed 1.
Further, conveyor 14 is including fixing carriage 141 on the lathe bed, carriage 141's top is provided with delivery track 142, install on delivery track 142 with delivery track 142 sliding connection's transport slip table 143, carriage 141's top is in one side of delivery track 142 is fixed with conveying rack 144, conveying slip table 143's lateral wall is fixed with conveying motor 145, just install on conveying motor 145's the output with conveying gear 146 that conveying rack 144 matches and cooperate, install on the delivery slip table 143 manipulator 12 is got to the flaw-piece clamp.
The flaw-piece clamping manipulator 12 comprises a flaw-piece cylinder 121 which is fixed on the conveying sliding table 143 and is vertically arranged, the output end of the flaw-piece cylinder 121 is fixedly connected with a clamping jaw fixing frame 122 which penetrates through the conveying sliding table 143, the clamping jaw fixing frame 122 is of a double-layer structure and comprises an upper layer and a lower layer, a clamping jaw cylinder 123 is fixed in the upper layer, the output end of the clamping jaw cylinder 123 penetrates through the upper layer and is fixedly connected with a limiting clamping groove 124 arranged in the lower layer, a clamping head 125 is fixed at the bottom end of the limiting clamping groove 124, the lower layer is provided with four side walls, the four side walls enclose a square, and the included angle between the side of the square and the axis of the lathe bed 1 is 45 degrees; a side clamping jaw 126 is fixed in the side wall, a clamping head 127 is arranged between the side clamping jaw 126 and the limiting clamping groove 124, the clamping head 127 comprises a horizontal section and a vertical section, the horizontal section is fixedly connected with the vertical section, the joint of the horizontal section and the vertical section is hinged with the clamping head 125, and one end of the horizontal section, which is close to the limiting clamping groove 124, is clamped in the limiting clamping groove 124; through the upwards lifting up of clamping jaw cylinder 123, make the horizontal segment around the junction rotate, and then make vertical section become the tilt state, make vertical section and flaw-piece clamping jaw 126 clip the flaw-piece together, later make the flaw-piece reciprocate under the drive of flaw-piece cylinder 121.
The crystal support 501 is provided with a lifting device 502 for driving the edge skin to lift upwards. The lifting device 502 may be a circular ring, and the bottom of the circular ring is provided with a plurality of driving cylinders. Since the tip of the edge skin is in the same plane as the tip of the silicon during the cutting of the silicon rod, a lifting device 502 is required to lift the edge skin upward to allow the edge skin clamping jaws 126 and the chucks 127 to clamp the edge skin.
Further, lower slip table system includes two level settings and the lower slide rail 601 that extends around, and two be equipped with down sliding table lead screw 602 and the drive that extends around between the lower slide rail 601 lower slip table lead screw 602 of motion 603, go up the slip table system include with slide rail 601 sliding connection's last slide rail 604 down, just go up extension about the slip table 604, down the output of slip table lead screw 602 with the bottom fixed connection of last slide table 604, it sets up and controls the last slide rail 605 of extension to be equipped with two levels on the last slide table 604, one of them last slide rail 605 is last to be installed with last slide rail rack 606, the silicon rod snatchs the bottom of manipulator system 7 with go up slide rail 605 sliding connection, just manipulator moving motor 607 is installed to the bottom that manipulator system 7 was snatched to the silicon rod, install on the output of manipulator moving motor 607 with go up slide rail rack 606 matched with last slide rail A rail gear 608.
Further, the silicon rod grabbing manipulator system 7 comprises a manipulator frame body 701, and clamping units are respectively mounted on the left side and the right side of the manipulator frame body 701;
the gripping unit includes two vertical guide rails 702 vertically fixed to the robot frame 701, the upper part and the lower part of the vertical guide rail 702 are respectively provided with a manipulator mounting rack 703 connected with the vertical guide rail 702 in a sliding way, the bottom end of the connecting rod 704 is fixedly connected with the manipulator mounting rack 703 at the lower part after sequentially penetrating through the top end of the manipulator frame body 701 and the manipulator mounting rack 703 at the upper part, the connecting rod 704 is connected with the manipulator mounting rack 703 at the upper part through a clamp 705, the manipulator mounting rack 703 at the upper part is fixedly connected with the output end of a manipulator driving screw 706 vertically fixed in the manipulator mounting rack 701, and the input end of the manipulator driving screw 706 is connected with a manipulator driving motor 708 fixed on the top of the manipulator frame body 701 through a speed reducer 707.
Two horizontally arranged manipulator rails 709 extending forwards and backwards are arranged on the manipulator mounting rack 703, and manipulators are respectively mounted on the front side and the rear side of the manipulator rails 709; the manipulator comprises a mounting end 710 and a silicon rod clamping jaw 711 fixedly connected with the mounting end 710;
a clamping motor 712 is fixed in the middle of the manipulator mounting rack 703, and a clamping gear 713 is mounted at the output end of the clamping motor 712;
one of the mounting ends 710 of the robot mounting bracket 703 is provided with an upper rack 714 which is engaged with the clamping gear 713 and extends forward and backward above the clamping gear 713, and the other mounting end 710 of the robot mounting bracket 703 is provided with a lower rack 715 which is engaged with the clamping gear 713 and extends forward and backward below the clamping gear 713.
Further, the middle part of the silicon rod clamping jaw 711 is provided with a notch 716 for clamping a cylindrical silicon rod, the orthographic projection of the notch 716 on the lathe bed is in an isosceles trapezoid shape, the lower bottom of the isosceles trapezoid shape is an opening of the notch 716, and a right-angle clamping groove 717 for clamping a cuboid silicon rod is processed at the end part of one end, away from the manipulator mounting rack 703, of the silicon rod clamping jaw 711.
Further, a rotating device is installed at the bottom of the manipulator frame body 703, the rotating device includes a rotating column 718, the rotating column 718 is connected with the upper sliding table system, a rotating disc 719 rotatably connected with the rotating column 718 is connected to the top of the rotating column 718, an annular rotating rack 720 is fixed to the outer edge of the top of the rotating column 718, a rotating motor 721 is fixed to one end of the rotating disc 719, a rotating gear 722 matched with the rotating rack 720 is installed on an output shaft of the rotating motor 721, and the bottom of the manipulator frame body 701 is fixedly connected with the rotating disc 719.
Further, the turntable system 5 includes a turntable 503 rotatably connected to the bed 1 and a turntable driving motor 504 for driving the turntable 503 to rotate.
Further, the feeding system 9 includes a column 901 fixedly connected to the bed 1, a cutting head mounting rack 902 is installed on one side of the column 901 close to the turntable system 5, the cutting head 801 is fixedly connected to the cutting head mounting rack 902, the cutting head mounting rack 902 is fixedly connected to an output end of a feed screw 903 fixed to the column 901, and an input end of the feed screw 903 is connected to a feed motor 904 fixed to the top of the column 901 through a feed reducer 905.
Further, the flaw-piece recovery system 13 comprises a recovery platform 1301 and a recovery device fixed between the recovery platform 1301 and the lathe bed 1;
the recovery device comprises a recovery support 1302, a displacement mechanism is fixed at the top end of the recovery support 1302, the displacement mechanism comprises a lower recovery sliding table 1303 and an upper recovery sliding table 1304 arranged on the lower recovery sliding table 1303 and used for conveying the flaw-pieces, the lower recovery sliding table 1303 is slidably connected with the recovery support 1302 through a lower recovery guide 1305 fixed at the top end of the recovery support 1302, and a recovery air cylinder 1306 for driving the lower recovery sliding table 1303 to move along the lower recovery guide 1305 is fixed at the top end of the recovery support 1302;
a lower recovery rack 1307 is fixed in the middle of the side wall of the lower recovery sliding table 1303; a movable air cylinder 1308 is fixed in the middle of the side wall of the lower recovery sliding table 1303, a rotating gear 1309 matched with the lower recovery rack 1307 is mounted at the output end of the movable air cylinder 1308, and the rotating gear 1309 is arranged above the lower recovery rack 1307;
the upper recovery sliding table 1304 is slidably connected with the lower recovery sliding table 1303 through an upper recovery guide 1310 which is arranged on the top of the lower recovery sliding table 1303 and is parallel to the lower recovery guide 1305, an upper recovery rack 1311 which is matched with the rotating gear 1309 is installed on the side wall of the upper recovery sliding table 1304, and the upper recovery rack 1311 is arranged above the rotating gear 1309.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides a two silicon rod buddha's warrior attendant line squaring machines, includes the lathe bed of controlling extension, just the left and right sides symmetry of lathe bed is provided with single silicon rod cutting system, single silicon rod cutting system is including being close to revolving platform system at lathe bed middle part, setting are in revolving platform system top is used for cutting the buddha's warrior attendant line cutting system of silicon rod, setting are in be used for driving in the middle of the lathe bed tip diamond wire cutting system up-and-down motion's feed system, setting are in lathe bed tip front side is used for to give off the unwrapping wire to buddha's attendant line cutting system, setting are in lathe bed tip rear side is used for with the take-up system of retrieving the diamond wire in the diamond wire cutting system, setting are in diamond wire cutting system top is used for pressing from both sides the flaw-piece clamp of getting the remaining flaw-piece after the silicon rod cutting and presss from both sides the manipulator, sets up and is used for retrieving the flaw-piece recovery system Conveying system between the system, install the brilliant support of vertical fixed silicon rod on the revolving platform system, its characterized in that:
a feeding system and a discharging system are arranged on the front side of the middle part of the lathe bed; a crystal wire detection system for detecting a crystal wire of the silicon rod is arranged on the rear side of the middle part of the lathe bed; the silicon rod grabbing mechanical arm system comprises a lathe bed, and is characterized in that a cross sliding table system is arranged in the middle of the lathe bed and comprises a lower sliding table system extending from front to back and an upper sliding table system extending from left to right, and a silicon rod grabbing mechanical arm system used for grabbing a silicon rod is installed on the upper sliding table system.
2. The double-silicon-rod diamond wire squarer according to claim 1, wherein the feeding system and the blanking system each comprise a fixed frame, a silicon rod placing table arranged on top of the fixed frame and horizontally arranged and extending back and forth, and a feeding cylinder vertically arranged in the fixed frame and used for driving the silicon rod placing table to change from a horizontal state to a vertical state or from a vertical state to a horizontal state; the silicon rod placing table is hinged to the fixing frame at one end close to the lathe bed, the feeding air cylinder is arranged on one side, close to the lathe bed, of the fixing frame, the output end of the feeding air cylinder is hinged to the silicon rod placing table, and the top of the mounting end of the feeding air cylinder is hinged to the side wall of the fixing frame through a hinge seat.
3. The diamond wire squarer of claim 1, wherein the diamond wire cutting system comprises a cutting head connected with the feeding system, a plurality of through wheels arranged at the top of the cutting head and a plurality of cutting wheels arranged at the bottom of the cutting head, the diamond wire is discharged from the wire releasing system and passes through the plurality of through wheels and the plurality of cutting wheels to form a cutting net, and then returns to the wire collecting system, the orthographic projection of the cutting net on the lathe bed is square, and the side of the square forms an angle of 45 degrees with the axis of the lathe bed.
4. The double-silicon-rod diamond wire squarer according to claim 1, characterized in that the lower sliding table system comprises two lower sliding rails which are horizontally arranged and extend front and back, and two lower sliding table lead screws which extend front and back and drive are arranged between the lower sliding rails, a lower sliding table lead screw driving motor which moves the lower sliding table lead screws, the upper sliding table system comprises an upper sliding table which is connected with the lower sliding rail in a sliding manner, the upper sliding table extends left and right, the output end of the lower sliding table lead screw is fixedly connected with the bottom of the upper sliding table, the upper sliding table is provided with two upper sliding rails which are horizontally arranged and extend left and right, one of the upper sliding rails is provided with an upper sliding rail rack, the silicon rod grabs the bottom of the mechanical arm system and is connected with the upper sliding rail in a sliding manner, the bottom of the silicon rod grabbing the mechanical arm system is provided with a mechanical arm moving motor, and the upper sliding rail gear which is matched with the upper.
5. The double-silicon-rod diamond wire squarer according to claim 1, wherein the silicon rod grabbing manipulator system comprises a manipulator frame body, and clamping units are respectively mounted on the left side and the right side of the manipulator frame body;
the clamping unit comprises two vertical guide rails vertically fixed on the manipulator frame body, manipulator mounting frames which are in sliding connection with the vertical guide rails are respectively installed on the upper portion and the lower portion of each vertical guide rail, the bottom end of each connecting rod sequentially penetrates through the top end of the manipulator frame body and the manipulator mounting frame positioned on the upper portion and then is fixedly connected with the manipulator mounting frame positioned on the lower portion, the connecting rods are connected with the manipulator mounting frame positioned on the upper portion through clamping devices, the manipulator mounting frame positioned on the upper portion is fixedly connected with the output end of a manipulator driving lead screw vertically fixed in the manipulator frame body, and the input end of the manipulator driving lead screw is connected with a manipulator driving motor fixed on the top of the manipulator frame body through a speed; the manipulator mounting frame is provided with two horizontally arranged manipulator rails extending forwards and backwards, and the front side and the rear side of each manipulator rail are respectively provided with a manipulator; the manipulator comprises a mounting end and a silicon rod clamping jaw fixedly connected with the mounting end; a clamping motor is fixed in the middle of the manipulator mounting frame, and a clamping gear is mounted at the output end of the clamping motor; one of them installation end on the manipulator mounting bracket is in the top of pressing from both sides tight gear be equipped with press from both sides tight gear cooperation and the front and back upper portion rack that extends, another on the manipulator mounting bracket the installation end is in press from both sides the below of tight gear be equipped with press from both sides tight gear cooperation and the front and back lower part rack that extends.
6. The machine of claim 5, wherein the middle part of the silicon rod clamping jaw is provided with a notch for clamping a cylindrical silicon rod, the orthographic projection of the notch on the machine body is isosceles trapezoid, the lower bottom of the isosceles trapezoid is an opening of the notch, and the end part of one end of the silicon rod clamping jaw, which is far away from the manipulator mounting frame, is provided with a right-angle clamping groove for clamping a cuboid silicon rod.
7. The double-silicon-rod diamond wire squaring machine according to claim 5 or 6, characterized in that the silicon rod grabbing manipulator system further comprises a rotating device arranged at the bottom of the manipulator frame body, the rotating device comprises a rotating column, the rotating column is connected with the upper sliding table system, a rotating disc rotatably connected with the rotating column is connected to the top of the rotating column, an annular rotating rack is fixed to the outer edge of the top of the rotating column, a rotating motor is fixed to one end of the rotating disc, a rotating gear matched with the rotating rack is installed on an output shaft of the rotating motor, and the bottom of the manipulator frame body is fixedly connected with the rotating disc.
8. The double-silicon-rod diamond wire squarer according to claim 1, wherein the flaw-piece clamping manipulator comprises a flaw-piece cylinder which is fixed on the conveying device and is vertically arranged, the output end of the flaw-piece cylinder is fixedly connected with a clamping jaw fixing frame which penetrates through the conveying device, the clamping jaw fixing frame has a double-layer structure and comprises an upper layer and a lower layer, a clamping jaw cylinder is fixed in the upper layer, the output end of the clamping jaw cylinder penetrates through the upper layer and is fixedly connected with a limiting clamping groove which is arranged in the lower layer, a clamping head is fixed at the bottom end of the limiting clamping groove, the lower layer is provided with four side walls, the four side walls enclose a square, and the included angle between the side of the square and the axis of the lathe bed is 45 degrees; a flaw-piece clamping jaw is fixed in the side wall, a clamping head is arranged between the flaw-piece clamping jaw and the limiting clamping groove, the clamping head comprises a horizontal section and a vertical section, the horizontal section is fixedly connected with the vertical section, the joint of the horizontal section and the vertical section is hinged with the clamping head, and one end, close to the limiting clamping groove, of the horizontal section is clamped in the limiting clamping groove;
and a lifting device for driving the edge skin to lift upwards is arranged on the crystal support.
9. The double-silicon-rod diamond wire squarer according to claim 1, wherein the conveying device comprises a conveying frame fixed on the lathe bed, a conveying rail is arranged at the top end of the conveying frame, a conveying sliding table connected with the conveying rail in a sliding mode is installed on the conveying rail, a conveying rack is fixed on one side of the conveying rail, a conveying motor is fixed on the side wall of the conveying sliding table, a conveying gear matched with the conveying rack is installed at the output end of the conveying motor, and a mechanical arm is installed on the conveying sliding table and clamped by the edge leather.
10. The double-silicon-rod diamond wire squarer according to claim 1, wherein the flaw-piece recovery system comprises a recovery table and a recovery device fixed between the recovery table and the lathe bed;
the recycling device comprises a recycling support, a displacement mechanism is fixed at the top end of the recycling support, the displacement mechanism comprises a lower recycling sliding table and an upper recycling sliding table which is arranged on the lower recycling sliding table and used for conveying the flaw-pieces, the lower recycling sliding table is connected with the recycling support in a sliding mode through a lower recycling guide rail fixed at the top end of the recycling support, and a recycling cylinder for driving the lower recycling sliding table to move along the lower recycling guide rail is fixed at the top end of the recycling support;
a lower recovery rack is fixed in the middle of the side wall of the lower recovery sliding table; a movable cylinder is fixed in the middle of the side wall of the lower recovery sliding table, a rotating gear matched with the lower recovery rack is installed at the output end of the movable cylinder, and the rotating gear is arranged above the lower recovery rack;
go up retrieve the slip table through setting up retrieve the slip table top down and with retrieve the parallel last recovery guide rail of guide rail down with retrieve slip table sliding connection down, on retrieve the lateral wall of slip table install with rotating gear matched with last retrieve the rack, just go up retrieve the rack setting and be in rotating gear's top.
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