JPH07128869A - Exposure device and method for exposing work - Google Patents

Abstract

PURPOSE:To provide an exposure device and a method for exposing a work in which a space for setting the exposure device can be made small, an upper printing frame can be easily exchanged in the case of deterioration, a lower printing frame can adequately perform the suction and separation of the work, the power consumption can be reduced, and the constitution of the vacuum frame and the positioning of the work can be efficiently and accurately performed and having many advantages other than the above. CONSTITUTION:This exposure device is provided with a first alignment stage B for the work, a first exposing stage C, an inversion stage D, a second alignment stage E and a second exposing stage F; the first alignment stage B, the inversion stage D and the second alignment stage E are disposed in a line the first and second exposing stages C and F are respectively disposed in a direction orthogonally crossed with the line for first and second alignment stages B and E; and an ultraviolet ray irradiating stage H is provided between the first and the second exposing stages C and F.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for exposing a work such as a printed wiring board by irradiating it with ultraviolet rays and a method for exposing the work.

[0002]

2. Description of the Related Art In general, various exposure apparatuses have been proposed as an exposure apparatus for printing a predetermined pattern on a work with ultraviolet rays. In these exposure apparatuses, when a work is sandwiched by a baking frame, the work and the mask film are checked with a CCD camera so that the work and the mask film have an appropriate positional relationship, and then the work is exposed by irradiating ultraviolet rays. This work and mask film confirmation work is performed in the exposure section, the so-called "internal alignment method".
Therefore, there is a drawback that the productivity of the work is not increased because the alignment and the exposure are operated in a serial sequence. Therefore, in the past, the applicant of the present application has filed a highly productive exposure apparatus that takes advantage of the so-called "outside alignment method" of aligning a work in a portion other than the exposure section, and that enables accurate alignment of the work and the mask film. (JP-A-4-350857).

As shown in FIG. 26, this exposure apparatus 100
Is an upstream machine 105 including a carry-in stage 101, an alignment stage 102, an exposure stage 103 and a carry-out stage 104 on a straight line, and a work W reversal stage 106 installed behind the carry-out stage 104 of the upstream machine 105. Behind the inversion stage 106, the carry-in stage 107, the alignment stage 108,
It is composed of an exposure stage 109 and a downstream machine 111 having the carry-out stage 110 installed.

Further, the transfer device 112 of the upstream machine 105 for transferring the work W to each stage has one baking frame 113 installed at the center and handlers 114, 115 installed on both sides of this one baking frame 113. I have it. The transport device 120 of the downstream machine 111 includes one baking frame 121 installed in the center thereof and handlers 122 and 123 installed on both sides of the baking frame 121.

Then, each alignment stage 10
2, 108 and between the exposure stages 103 and 109,
Moving tables 117 and 124 for holding and moving the other baking frames 116 and 124, respectively, are provided. Further, the reversing stage 106 is provided with a reversing device (not shown) for reversing the work W upside down, and the work W reversed by the reversing device is disposed at a carry-in stage (not shown) of the downstream machine 111. ) Has been delivered.

Further, as shown in FIG. 28, a suction mechanism for vacuum-sucking the work and the other baking frame (lower baking frame) 116 (124) on the one baking frame (upper baking frame) 113 (121). 130 is provided, and this suction mechanism 130
Are suction support parts 133 attached to the four corners of the translucent plate 131.
a to 133d, a frame-shaped seal rubber 134 attached to the work contact side of the translucent plate 131, and the suction support portion 1
The suction hose 135 is supported by 33a to 133d. The translucent plate 131 is sandwiched between openable and closable frames 132 for vacuum suction.
1 has through holes (not shown) formed at respective positions of the supporting portions 133a to 133b.

Further, as shown in FIG. 27, the lower baking frame 116.
(124) is a transparent plate 1 provided with a plurality of through holes 116a
16b and a frame body 1 that supports the translucent plate 116b
16c and a mounting portion 116d of the suction hose 116e provided on the frame body 116c.
Further, when the through holes 116a of the transparent plate 116b are vacuum-sucked, the through holes 116a communicate with each other through the vacuum grooves 116f so that vacuum can be sucked from the through holes 116a.

When the work is turned upside down,
The sheet is conveyed to a reversing stage by a conveying unit (not shown) and is reversed by a reversing machine. The structure of this reversing machine is
The structure shown in No. 46445 is used. This reversing device is composed of a moving table for receiving a work and moving it to a predetermined position, and a suction reversing machine for vacuum-sucking the work from the moving table.

The upstream machine 105 and the downstream machine 111 are
Although not shown, a control device for controlling the operation of the device and an ultraviolet irradiation device are respectively provided. In the ultraviolet irradiation device, a lamp having an ultraviolet lamp of about 5 KW is used, and the re-lighting of the ultraviolet lamp is performed by the lamp. Since it is not possible due to the configuration of, the UV lamp should always be turned on during work,
The shutter mechanism is used, and when the ultraviolet ray is not needed, the shutter mechanism is closed to cut off the irradiation of the ultraviolet ray.

Therefore, the exposure apparatus 100 configured as described above carries, conveys, positions, exposes and reverses the work as follows. First, the work W is
From the loading stage 101 of the upstream machine 105 to the transfer device 112
Is transferred to the alignment stage 102 by the handler 115 of the
It is aligned while being sandwiched by 3,116. Then, the upper baking frame 113 of the transfer device 112 attracts the aligned work W and the lower baking frame 116, and the exposure stage 1
And carry out exposure. Workpiece W with one surface exposed
Is transferred to the unloading stage 104 by the handler 114 of the transfer device 112, and the work is turned upside down on the reversing stage 106. Further, the work is carried to the downstream machine 111 side by a carrying device (not shown), and the work performed by the upstream machine 105 is repeatedly performed to expose the other surface of the work W and carry the work out. Therefore, the work can be accurately aligned and the productivity can be improved.

[0011]

However, the structure of the above-mentioned exposure apparatus leaves room for the following improvement. When exposing the front and back of a work, the exposure apparatus occupies a large work position in the clean room where the exposure work is performed, because the configuration of the transfer device, the work transfer direction, and the arrangement of the devices are linear.

Due to the structure of the exposure apparatus, the upstream and downstream apparatuses are provided with the ultraviolet irradiation apparatus, and the control apparatus is also installed in each apparatus. Therefore, the apparatus configuration is large and power consumption is large. When the translucent plate deteriorates due to the exposure work, it is necessary to replace the translucent plate with a mask or the mask translucent plate.The upper baking frame that holds the work is a suction hose and a suction Since a suction mechanism such as a pad is attached to a predetermined position of the translucent plate, it is troublesome to attach and detach the suction mechanism. Also, due to the work of replacing the translucent plate, the work of the whole process must be suspended for several hours.

The lower baking frame that sucks and conveys the work is
When the work and the light-transmitting plate of the lower baking frame are in close contact with each other due to vacuum suction, the work cannot be removed from the light-transmitting plate, and the work is interrupted. In addition, a suction hose is connected to the lower baking frame, but since the upper and lower baking frames that will be vacuum frames are becoming multiple (two or more) in the future, a structure that can accommodate the multiple is desired. It is rare.

The work is carried by the lower baking frame, or is conveyed and exposed while being held by the upper and lower baking frames, but the positional deviation of the work positioned in the lower baking frame is minimal. It was desired to convey it to the reversing machine side so that it would be limited. In order to install the reversing stage for reversing the work, it is necessary to provide the carry-out stage of the upstream machine, the reversing stage, and the carry-in stage of the downstream machine, which also causes a large work space.

In the vacuum frame for holding the work, the upper and lower baking frames are separated and united to sandwich the work for performing alignment work and exposure work. However, since the handler and the upper baking frame are integrated, the size is large, operation control is difficult, and maintenance work is also difficult. Also,
The work efficiency could not be improved because the lower baking frame or the upper baking frame cannot be moved independently. It has been desired to improve the alignment of the vacuum frame and the work so that the work can be more efficiently exposed regardless of the alignment position of the exposure apparatus and the installation position of the exposure work position.

The position of the work placed on the lower baking frame of the exposure apparatus may shift when it is moved to each stage, and there is a demand for a configuration in which the work does not shift at the next process position. The present invention has been devised to solve the above-mentioned problems, and can reduce the installation space of the exposure apparatus, the upper baking frame facilitates replacement when it deteriorates, and the lower baking frame absorbs and releases the work. Suitable, work reversing device can reverse and pre-position the work without taking space, easy operation control and maintenance, low power consumption, vacuum frame configuration and work positioning efficient and accurate It is an object of the present invention to provide an exposure apparatus and a method of exposing a work which can be performed.

[0017]

In order to solve the above problems, the present invention provides an "alignment alignment table for moving and positioning a work held on a lower baking frame to an appropriate position, and
A first alignment stage equipped with an imaging camera for confirming an appropriate position, a first exposure stage for exposing a positioned work, a reversing stage for reversing the front and back of the exposed work, and a bottom baking frame reversing the front and back by the reversing stage. A second alignment stage including an alignment alignment table for moving and positioning the workpiece to a proper position and an imaging camera for confirming the proper position, and a second exposure stage for exposing the positioned workpiece, the first alignment stage, An inversion stage and a second alignment stage are arranged in a linear direction, and each of the first and second alignment stages has a first direction in a direction orthogonal to the linear direction.
And a second exposure stage, and the first exposure stage is provided.
And an ultraviolet irradiation stage is provided between the second exposure stage, and a plurality of handlers for transporting the work are provided at a linear position from the first alignment stage to the second alignment stage. Between the both alignment stages and the exposure stage, An exposure apparatus equipped with a transporting means for transporting the upper and lower baking frames of the vacuum frame for holding, positioning, transporting and exposing the work. Configured as.

In addition, "a first step of pre-positioning one surface of a work exposed on both sides by a pre-positioning mechanism,
The second step of holding the pre-positioned work on the lower baking frame and performing positioning with the first alignment alignment table and the imaging camera, and holding the positioned work together with the lower baking frame on the upper baking frame and confirming the positioning, then the exposure position And the third step of carrying out the exposure and carrying the exposed work together with the lower baking frame to the fourth step of carrying it onto the first alignment alignment table by the carrying means, and reversing the work on the first alignment alignment table by the handler. The fifth step of handing over to the machine, the reversing machine that received the work reverses the front and back of the work, and the seventh step of pre-positioning by the pre-positioning mechanism, and holding the pre-positioned work on the lower baking frame, 2 Alignment The eighth step of positioning with the alignment table and the imaging camera, and the positioning of the positioned workpieces was held on the upper baking frame together with the lower baking frame to confirm the positioning. Ninth step of transporting to the exposure position for exposure, tenth step of transporting the exposed work on the second alignment alignment table by the receiving and transporting device while holding it on the lower baking frame, and double-sided exposure on the alignment alignment table An exposure method for a work, which comprises an eleventh step of unloading the completed work. Configured as.

Furthermore, "The vacuum frame is composed of upper and lower baking frames which can be separated and combined, and is composed of two lower baking frames and one upper baking frame. Equipped with means to confirm the positioning of the work, and
During the exposure work, the upper and lower baking frames sandwich the work by any of the vacuum suction means and unite to form a vacuum frame.For the work of positioning the work and carrying the exposed work, the vacuum frame is separated, A vacuum frame device that holds the work in the lower baking frame. Configured as.

Further, "the vacuum frame is composed of upper and lower baking frames which can be separated and combined, and is composed of one upper baking frame and two lower baking frames. The lower baking frames, which are respectively removably installed at the work positions and are installed at the alignment work position and the next work position, are lifted after the work is completed at the alignment work position and are conveyed to the next work position side by the conveying means. At the next work position, the vacuum frame device is moved down from the position where it has been carried by the carrying means and is carried to the alignment work position by the carrying means. "

Then, "the first step of holding the lower baking frame of the vacuum frame on the alignment matching table by a holding means on the alignment matching table side, and holding the work on the lower baking frame side on the lower baking frame. A second step of holding the work by the means, recognizing the work by the imaging control means, comparing it with the position information of the mask film stored in advance, and activating the alignment matching table at an appropriate position to position the work; and the second step. After the above, the lower baking frame on the alignment matching table is united with the upper baking frame by the rise of the alignment matching table to become a vacuum frame, and the lower baking frame is separated from the alignment matching table side by the imaging control means again. The third step of confirming the positional deviation between the mask film and the work, and in the third step, the imaging control means recognizes the proper or improper position of the work, and if it is proper, the next step Was constructed as a 4 comprising the step work positioning method. "To perform operations from the second step is reverted if improper.

Further, "the lower baking frame is provided with a hose connection portion of the vacuum suction means at a supply port communicating with a suction port for vacuum suction of a work provided on the front surface side and opened on the back surface, The hose connecting portion includes a connecting portion main body and a ball valve that floats inside the connecting portion main body, and the connecting portion main body has a diameter smaller than the diameter of the ball valve at a position where the connecting portion main body comes into contact with the supply port of the lower baking frame. The hose connection part structure of the air pump, which includes the formed one side opening and the other side opening formed on the other side of the one side opening smaller than the diameter of the ball valve. "

Further, "the lower baking frame is provided with a connecting portion formed at least at two places communicating with the work suction holes of the work contact surface, and the alignment alignment is installed at one moving end of the lower baking frame. The table is provided with a joining portion at a position where the connecting portion of the lower baking frame comes, and a holding means for adsorbing and holding the lower surface of the lower baking frame, and a lifting unit installed at the other moving end of the lower baking frame. The holding table is provided with a joining portion at a position where the connecting portion of the lower baking frame arrives, and is joined to a position where the connecting portion of the lower baking frame comes to a moving means that conveys the lower baking frame to both moving ends. And each of the joints is connected to an air pump for sucking and discharging air, and the connecting portion of the lower baking frame is each joint at each position of the lifting and holding base, the moving means, and the alignment alignment base. Holds and separates the workpiece that enables suction and discharge of the pump It was configured as a structure. ".

Then, "said alignment alignment table is provided with a work suction-holding means on the work contact surface and a joint portion which matches the work connection portion of the lower baking frame, and said alignment alignment table holds the work. Each of the X, Y, and θ tables for moving the lower baking frame in each direction is provided so that the X table and the Y table are movably provided on one side and the other side that are orthogonal to each other in a plane, and the θ table has a vertical line. An alignment alignment table which is provided so as to be rotatable in the direction of rotation around the center and includes an elevating mechanism for vertically moving the work contact surface of the alignment alignment table. "

Further, "the upper baking frame is composed of a frame-shaped frame and a transparent plate having a through hole for vacuum suction and a frame-shaped seal rubber held by the frame. An upper baking frame structure in which a connecting pad for vacuum suction connected to the position of the through hole is provided in the frame. "

Further, "the reversing stage is a lifting table for mounting and lifting a work, and a reversing device for reversing the front and back of the work by receiving and holding the work from the lifting table, and reversing on the lifting table. Inverting stage structure composed of a pre-alignment mechanism that pre-positions the completed work. "

Then, "the reversing device is such that the suction support arm for supporting the work by suction, the rotation support portion for supporting and rotating one end of the suction support arm, and the moving mechanism for reciprocating the rotation support portion. Inversion device consisting of and. "

Furthermore, "the exposed work is received and held, the other end of the held work is raised in the vertical direction with reference to the one end of the held work, and the one end serving as the reference is moved in the horizontal direction. The work reversing method in which the work is reversed by lowering the other end to a horizontal position. "

The "ultraviolet irradiation stage includes a light source device including an ultraviolet irradiation lamp and an elliptical reflecting mirror, a flat reflecting mirror for reflecting the ultraviolet light from the light source device in a predetermined direction, and an optical path of the ultraviolet light from the light source device. A fly's eye lens installed in the first place for adjusting the illuminance distribution of ultraviolet rays;
And a switching mirror for selectively irradiating the second exposure stage with ultraviolet rays. The direction of the optical axis of the ultraviolet rays emitted from the light source device is advanced along a vertical plane up to the switching mirror, and the switching mirror is operated. An ultraviolet irradiation device for advancing an optical axis in a direction having a predetermined angle from the vertical plane. Configured as.

Then, "the handler is provided with a planar contact portion formed on the workpiece contact side and a suction pad formed by being punched in the contact portion, and the lower end of the suction pad is
A suction and holding device for a workpiece, which is provided flush with the contact portion or inside the contact surface. Configured as.

[0031]

Since the present invention is constructed as described above, it has the following operations. (1) The work exposed by the exposure apparatus is moved by the handler in the linear direction between the first alignment stage, the reversal stage and the second alignment stage, and is moved between the first alignment stage and the first exposure stage and the second alignment stage.
Between the alignment stage and the second exposure stage, the alignment stage and the second exposure stage are held and moved by one or both of the upper and lower baking frames of the vacuum frame in the direction orthogonal to the linear direction.

(2) The vacuum frame composed of the upper and lower baking frames is composed of two lower baking frames and one upper baking frame. During the exposure operation, the other lower baking frames are performing the alignment operation on the alignment alignment table. Then, after the exposure work is completed, the upper and lower baking frames are separated, the upper baking frame is moved, and the upper baking frame is combined with another lower baking frame on the alignment alignment table, and the proper position is confirmed. On the other hand, in the lower baking frame separated at the exposure position, the exposed work is placed and is conveyed to the next process side by the conveying means.

(3) The lower baking frame of the vacuum frame is installed at the alignment matching table and the next work position. Both lower baking frames circulate between the alignment matching table and the next work position, and at the same time as the upper baking frame. The unit is united to form a vacuum frame, which is used for positioning confirmation and exposure work.

(4) The work is pre-positioned by the pre-positioning mechanism, then carried by the handler onto the alignment alignment table, and held on one lower baking frame on the first alignment alignment table. Then, when the position is confirmed by the image pickup of the image pickup camera and there is a position shift, the first alignment alignment table is operated to position the work at an appropriate position.
The position of the work held on the lower baking frame and positioned is reconfirmed by the imaging camera in a state of being combined with the upper baking frame conveyed from the exposure position due to the rise of the alignment matching table. . Then, if it is at the proper position, it is conveyed to the exposure position in the state of the vacuum frame, and the work is exposed by the operation of the ultraviolet irradiation stage. At this time, the other lower baking frame, which has been installed at the exposure position, is installed on the first alignment alignment table by the moving means, and the next work positioning work is performed on the alignment alignment table.
The transport means returns to the exposure stage side immediately after transporting the lower baking frame.

On the other hand, the work on the lower baking frame whose one surface is exposed is held by the carrying means and carried again to the first alignment alignment table. At this time, after the position of the next work held in the lower baking frame on the alignment alignment table is confirmed, it is held in the upper baking frame and conveyed to the exposure stage. The exposed work that has reached the first alignment stage is conveyed to the reversing stage by the handler, and the work is turned upside down. With this, preliminary positioning is performed. Further, the handler again transports it to the second alignment stage. Then, the operations performed on the first alignment stage and the exposure stage are repeated to expose the other surface of the work.

(5) The lower baking frame of the exposure apparatus is provided with a connecting portion that abuts and coincides with the hose joint portion of the air pump provided with the ball valve for vacuum suction of the transparent plate. Therefore, when a vacuum suction operation is performed to hold the work in the lower baking frame, the ball valve in the connection body is located near the other opening of the connection body and interferes with the suction operation of the connection body. Never be. In addition, since the work is separated from the lower baking frame, the ball valve is located on the side of the other opening and does not block one opening when the air is discharged. Then, when the upper and lower baking frames match and the vacuum suction operation of the upper baking frame is performed, the ball valve closes one opening of the connection body of the lower baking frame, and the upper and lower baking frames are sandwiched. Put the frame in a vacuum-tight condition.

(6) In the work placed on the lower baking frame, the connecting portion communicating with the suction hole of the work contacting surface of the lower baking frame has the joining portions of the lifting and holding base, the conveying means, and the alignment alignment base. By enabling the suction and exhaust operation of the air pump in conformity with the above, it is held in the lower baking frame. Then, when the lower baking frame is transferred from the elevating and holding table to the transfer means and when the lower baking frame is transferred from the transfer means to the alignment alignment table, a joint that matches one connection side of the lower baking frame After the air is sucked from the portion to hold the work in the lower baking frame, the suction of the air at the joint portion that matches the other connecting portion side of the lower baking frame is stopped. Further, the lower baking frame arriving on the alignment matching table is held by the holding means of the alignment matching table, and at this time, the joining part of the lower baking frame and the joining part of the alignment matching table are aligned with each other. The work can be removed from the lower baking frame by discharging the air.

(7) The alignment alignment table holds the lower baking frame on which the work is placed by the holding means and operates each X, Y, θ table to perform the work alignment work. Then, the elevating mechanism raises the work together with the lower baking frame toward the upper baking frame to bring them into contact with each other. When the exposed work together with the lower baking frame is received from the moving means, after the moving means holding the lower baking frame arrives on the alignment alignment table, the work contact surface is raised by the elevating mechanism to move the work. The lower baking frame that is being held is held by the holding means. At the same time, the joint is aligned with the connecting portion of the lower baking frame, and the work is separated from the lower baking frame by the air discharge of the air pump.

(8) Since the upper baking frame of the exposure apparatus is provided with the suction pad for vacuum suction on the frame supporting the transparent plate, the frame and the vacuum suction pad for separating this frame from the transparent plate are easy. Can be removed from the translucent plate. (9) In the reversing stage, the lifting table raises and receives the work from the handler, and also the work descends and transfers it to the reversing device. Then, the received work is pre-positioned by the pre-alignment mechanism in a state where the front and back sides are reversed by the reversing device.

(10) The reversing device rotates the rotary support part to vertically raise the suction support arm that holds the workpiece, and at the same time, moves the rotary support part from one end to the other end side by a moving mechanism. Move horizontally. Then, the rotation support section that has reached the other end of the movement further rotates the rotation support section, and places the work on the elevating table in a state where the work is turned upside down.

(11) The optical axis of the ultraviolet light emitted from the light source device of the ultraviolet irradiation stage advances to the switching mirror via the plane reflecting mirror and the fly's eye lens. Therefore, the optical axis travels from the light source device to the switching mirror. The direction will be along a vertical plane. Then, the optical axis that has traveled along the vertical surface is actuated by a switching mirror, and is reflected in a direction having a predetermined angle from the vertical surface to guide the optical axis in a three-dimensional direction. It properly guides ultraviolet rays to both exposure stages.

(12) In the handler, since the suction surface of the work is formed so that the flat abutting portion is in contact, the work can be suction-held without deformation regardless of the thickness of the work. (13) One bottom baking frame is arranged on the alignment alignment table, and another one is arranged at the next work position (the exposure position or the carry-out position depending on the configuration of the exposure device). The lower baking frame on the alignment matching table is held on the alignment matching table while holding the work. Then, after the alignment work is performed, the alignment firing table moves up along with the rise of the alignment stand, and the lower baking frame is detached from the alignment stand while holding the work, and is transported to the next work position by the transport means. On the other hand, the lower baking frame at the next work position is conveyed to the alignment alignment table side by the moving means. Therefore, the two bottom baking frames circulate between the alignment alignment table and the next work position.

[0043]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a principle diagram showing the overall configuration. 2 is a plan view showing the entire exposure apparatus, FIG. 3 is a front view showing the entire exposure apparatus, and FIG. 4 is a side view of the exposure apparatus. As shown in FIGS. 1 and 2, the positions of the respective stages of the exposure apparatus 1 are as follows: the carry-in stage A, the first alignment stage B,
The inversion stage D, the second alignment stage E, and the carry-out stage G are linearly arranged. Then, the first exposure stage C is arranged adjacent to the first alignment stage in a direction orthogonal to the linear arrangement from the carry-in stage A to the carry-out stage G, and the second exposure stage F is arranged.
Are disposed adjacent to the second alignment stage E. The ultraviolet irradiation stage H is arranged adjacent to the first exposure stage C and the second exposure stage F.

As shown in FIGS. 1 to 3, the carry-in stage A is provided with a pre-alignment mechanism 3 for pre-positioning the work and a mounting roller 2. The alignment alignment table 10 (60) and one lower baking frame 24 (44) are installed on the first alignment stage B (second alignment stage E). Further, the exposure stage C includes a large reflecting mirror 20a (70a).
And the upper baking frame 23 (43) and the other lower baking frame 24 (44)
A moving means 26 (46) on which the other lower baking frame 24 (24) is placed, and an elevating and lowering stand 21 (21) are arranged. Further, the reversing stage D includes a reversing device 5
0, a lifting table 51, and a pre-alignment mechanism 63 for performing preliminary positioning. The ultraviolet irradiation stage includes a light source device 33 and an optical system that guides the ultraviolet light in a predetermined direction.

Further, as shown in FIG. 1, a plurality of means (4 in the drawing) for moving the work W to each stage are provided along a carry-out stage G linearly provided from the carry-in stage A.
Location) handlers 15, 25, 65, 75, and two pre-baking frames 2 installed between the first and second alignment stages B and E and the first and second exposure stages C and F, respectively.
4, 24, 44, 44 and upper baking frames 23, 46, and a conveying means 28 (48) and a moving means 27 (47) for conveying the upper and lower baking frames.

Next, the details of each component will be described in order. Figure 1
As shown in FIG. 2, in the structure of the handler 15, ..., the supporting arm 17 holds an elevating guide bar 15j so that the elevating guide bar 15j can move up and down.
Holding part 15k and horizontal guide bar 15m at the lower end of 5j
Through the suction portions 15a, 15a (25a, 25a, 65
a, 65a, 75a, 75a) are provided. As shown in FIGS. 3 and 4, the handlers 15 are moved along the conveyance grooves 4 and 5 provided along the linear direction from the carry-in stage A to the carry-out stage G.

As shown in FIGS. 13 and 14, each of the suction portions 15a, 15a (25a ...) Of the handler has a box-shaped main body portion 15h and a lower surface side mounting hole of the main body portion 15h. A plurality of suction pads 15b having open openings 15b ', an air passage 15c having one end communicating with the openings 15b' of the suction pads, and a mounting portion 15d for a suction hose 15e provided at the other end of the air passage 15c. Consists of. A suction pad 15b is provided on the workpiece connection surface side of the suction pad 15a so as to be flush with the lower surface of the main body 15h.
It is made of an elastic material such as rubber or synthetic rubber.
The lower surface of the main body portion 15h constitutes a contact portion 15f of the work W formed in a flat shape.

Therefore, the suction portions 15a, 1 having the above-mentioned structure
When the work W vacuum-adsorbed by 5a is thin, even if each suction pad 15b is vacuum-adsorbed, the flat surface of the abutting portion 15f of the main body portion 15h abuts on the work W, and the inner surface or the lower surface of the abutting portion 15f is contacted. Since the suction pad 15b has the opening lower end portion on the same surface, the work W is not deformed by the strength of suction. In addition, the suction portion 15a is the suction pad 1
Even if 5b is not provided, by shortening the height dimension of the mounting hole of the main body portion 15h provided with the suction pad 15b,
It may be configured such that the work can be adsorbed without being deformed. Further, since the horizontal guide bar 15m is provided on the holding portion 15k so as to be extendable and contractible, the attachment interval between the suction portions 15a, 15a can be adjusted by extending and contracting the horizontal guide bar 15m.

Next, as shown in FIG. 2, the placement roller 2 is constructed such that a plurality of feed rollers 2a, a support portion 2b for supporting the feed rollers 2a, and the feed rollers 2a are rotated by a motor. And a transmission unit (not shown) for driving. Therefore, in order to set the work W sent from the carry-in stocker (not shown) at a predetermined position on the placement roller 2, the placement roller 2 is operated by the motor and the work W is fed by the feed roller 2a. The operation of the motor is stopped by the detection of the sensor, and the work W is always stopped at a predetermined position. A pre-alignment mechanism 3 for pre-positioning (pre-alignment) the work W is installed at a predetermined position of the placing roller 2. The pre-alignment mechanism 3 has the same structure as that installed in the reversing stage D and will be described later.

As shown in FIG. 3, the first alignment stage B and the second alignment stage E both have a CCD camera as an image pickup means (image pickup camera) for confirming the positions of the alignment alignment table 10 (60) and the work W. 22 (82).

As shown in FIGS. 3 and 5, the alignment alignment table 10 (60) is constructed so that the X table 11 is moved in one direction orthogonal to the plane and the X table 11 is moved in the other direction orthogonal to the plane. It is composed of a Y table 12, a θ table 13 that rotates around a vertical line, and a Z-axis portion 14 as an elevating mechanism that can move vertically in the vertical direction. Then, as shown in FIG. 6, the X-table 11 has a lower baking frame 24.
So as to be held on the X table, it has a holding means 9 for vacuum suction and a joint portion 9a that matches one connection portion 45 (see FIG. 9) of the lower baking frame 24. The alignment alignment table 10 is configured so that the contact surface position of the work W when the Z-axis portion 14 is not operated is lower than the work contact surface position of the moving table 26 described later.

As shown in FIG. 6, the holding means 9 comprises a suction groove 7 provided on the upper side of the table, and a seal rubber 8 provided in a frame shape at a position surrounding the suction groove 7.
Then, the suction groove 11 is connected to an air pump (not shown) for sucking and discharging air through a connection hose (not shown).
Is in communication with. The suction groove 7 of the holding means 9 may be a plurality of opening holes instead.

Further, as shown in FIG. 6, the joint portion 9a is
Is provided on the side surface of the X table at a position slightly lower than the upper surface level of the X table so that the lower baking frame 24 can come and hold the lower baking frame on the X table 11.
The joint portion 9a has an annular rubber pad on the upper surface, and is connected to an air pump (not shown) for performing air suction / exhaust operations with a hose or the like.

Light emitting tables 6 are installed on the left and right of the X table 11. This light emitting table 6,
Reference numeral 6 denotes the state of alignment holes (not shown) provided in the work and the positioning marks of the mask film, and the CCD camera 2
2 (62) emits light for illumination when the image is picked up so that it can be confirmed more reliably.

CCD for confirming the proper position of the work W
The camera 22 (82), as shown in FIGS. 3 and 4,
The support bar 22 is provided above the alignment table 10 (60).
a (82a). And even if the size of the work W changes, this CCD camera 22 (82)
The distance between each CCD camera 22 can be adjusted by changing the installation position on the support bar 22a according to the size of the work W. Although the CCD cameras 22 are installed side by side in the drawing, two support bars are installed in parallel, and the CCD cameras are installed at the opposite ends of each support bar and installed on a diagonal line. It may be configured.

The alignment state between the work W and the mask film M photographed by the CCD camera 22 is photographed by the monitor 84 shown in FIG. Then, as shown in FIG. 5, the determination of the proper position of the positioning mark (through hole) of the work W is
The storage data that is input in advance to the control unit 86 and the CCD
This is performed by comparing the positional deviation of the positioning mark of the work W captured by the camera 22. Further, if there is a positional deviation, the X, Y, θ tables 11, 12, 13 are operated by a signal from the operation control section 87 to correct the positional deviation.

After completion of the alignment work, while the work W is held by the upper and lower baking frames 23 and 24, the positions of the mask film M and the work W are confirmed again by the CCD camera 22.
The configuration is performed by. Therefore, the work W is exposed in the vacuum frame without any positional deviation.

As shown in FIGS. 3 and 4, the ultraviolet irradiation stage H has a light source device 33 including an ultraviolet lamp 31 and an elliptical reflecting mirror 32, and a flat surface for reflecting the ultraviolet light from the light source device 33 in a predetermined direction. The reflecting mirror 34, the fly-eye lens 35 that adjusts the illuminance of the ultraviolet rays reflected by the flat reflecting mirror 34, and the ultraviolet rays from the fly-eye lens 35 are used as the large reflecting mirrors 20a and 70a of the exposure stages C and F.
And a switching mirror 36 that reflects the light.

Then, as shown in FIG. 5, in the direction of the optical axis irradiated from the light source device 33 of the ultraviolet irradiation stage H (indicated by an arrow), the inclination angle α ₁ of the plane reflecting mirror 34 is set to 25 degrees. , The angle α _{2 at} which the direction of the optical axis from the light source device 33 rises from the flat reflecting mirror 34 to the switching mirror 36 is 50.
It is set so that it becomes a degree. Therefore, as shown in FIG. 15, the light reflected from the large reflecting mirror 20a of the exposure stage C falls in the vertical direction to expose the work W. In addition,
If a reflecting mirror that reflects light is constituted by a cold mirror that reflects only desired ultraviolet rays, unnecessary infrared rays emitted from an ultraviolet lamp can be removed.

Next, as shown in FIGS. 2 to 3, each of the first exposure stage C and the second exposure stage G is provided with a large reflecting mirror 20a (70a) at the upper position. Then, as shown in FIG. 6, an upper baking frame 23 (43) is arranged directly below the large reflecting mirror so as to be movable toward the alignment stage B side. Further, one of the two lower baking frames 24 is a moving table 26 (46) as a moving means.
It is placed in. Further, an elevating and holding table 21 (21) for delivering the exposed work W to the moving table 26 is installed immediately below the moving table. Then, as shown in FIGS. 1 and 7, the moving table 26 moves between the alignment stage B (E) and the exposure stage C (F).
It is movably installed by a moving mechanism 27.

As shown in FIGS. 6 and 7, the moving table 26 has a U-shaped mounting table 26a, a supporting table 26c for supporting the mounting table 26a, and the mounting table 2 described above.
6a, and a joint portion 26e that is provided at an inner position of the bottom portion 6a and matches the connecting portion 45 of the lower baking frame 24. Then, the joint 2
6e is provided with an annular rubber pad on the upper surface side, and is connected to an air pump (not shown) for sucking and discharging air by a hose or the like.

The moving table 26 is moved between the stages C and B by an air cylinder 27a and a linear guide 27b provided between the exposure stage B and the alignment stage C, and a moving mechanism 27 such as wheels of a support 26c. It is configured to move back and forth. It should be noted that as the moving table 26 moves,
Since it is installed at a position lower than the support table 26c in the lowered state, it does not hinder the movement of the moving table 26.

Further, as shown in FIGS. 15 and 6, the construction of the elevating and holding base 21 is such that the baking frame placing table 21a is provided.
And a cylinder device 21b for driving the baking frame mounting table 21a up and down, and a joint 21d laterally protruding from one notch 21c formed at the central position of the baking frame mounting table 21a. There is. Then, the joint portion 21
The d has an annular rubber pad on its upper surface, and is connected to an air pump (not shown) for sucking and discharging air by a hose or the like. Further, the installation position of the coupling part 21d is installed at the same position as the position separated from the position of the bonding part 9a of the X table 11. Therefore, the lower baking frame 2 described later
4 moves, the connecting portion 45 of the lower baking frame 24 and each joint 9
It is configured such that a and 21d can be brought into contact with each other. The installation height of each joint 9a is determined by the protruding size of the contact portion of the lower baking frame.

As shown in FIGS. 9 to 11, the structure of the lower baking frame 24 has a plurality of through holes 24 in which the work W is placed.
The transparent plate 24a includes a transparent plate 24a and a transparent plate 24e having a feeding / injecting hole 24d attached to the transparent plate 24a. Each of the through holes 24 is formed in the translucent plate 24a.
A groove 24c is formed so that air can flow in and out from b. Also, the feeding / injecting hole 24d of the translucent plate 24e
At the position of, there are a plurality of the connecting portions 45 (two in the drawing,
(See FIG. 7). This connecting portion 45, 45
Comes into contact with and abuts each time the joining frames 9a, 21d, 26e at the above-mentioned positions and the lower baking frame move.

As shown in FIGS. 9 to 11, the connecting portion 45 of the lower baking frame 24 has a connecting portion main body 45a having a space in which the ball valve 45b can freely move, and a lower portion of the connecting portion main body 45a. And a plurality of opening holes 45c formed with a diameter smaller than the diameter of the ball valve 45b provided on the side. A recess 45d for accommodating the ball valve 45b is formed in the lower portion of the connecting portion main body 26a.

On the other hand, the upper baking frame 23, as shown in FIG.
Air cylinders 28a and linear guides 28b are provided at the left and right positions of the upper baking frame 23 via mounting portions 23n and 23n.
Are provided so as to move between the alignment stage B and the exposure stage C.

As shown in FIG. 8, the upper baking frame 23 is composed of a transparent plate 23a and upper and lower frames 23b and 23c which sandwich the transparent plate 23a. Further, through holes 23e, 23e for vacuum-sucking the work W are formed on the edge side of the translucent plate 23a, and a seal rubber 23d attached in a frame shape is provided on the work contact surface. There is.
In addition, the suction groove 2 for vacuum-sucking the mask film M
A suction mechanism such as 3f (see FIG. 9) is provided on the light-transmitting plate 23a side and the frame body 23b side of the work contact surface (when the glass dry plate is used, the suction mechanism for the mask film M is not required).

As shown in FIGS. 8 and 9, the frame 23b has connection pads 40, 40 for vacuum suction.
Are mounted via the mounting arm 40a. The connecting pads 40, 40 are formed by the frame 23b and the translucent plate 23a.
When sandwiched between the through holes 23e, 23 of the translucent plate 23a.
It is installed at the position where it comes to e. Then, the hoses 41, 41 connected to the connection pads 40, 40 are attached to the frame body 23b side via attachments (see FIG. 8). Also, as shown in FIG.
The spring 40c is attached to the contact portion formed of an elastic member such as rubber that contacts the light transmitting plate 23a and the portion that supports the contact portion 40b. The upper and lower frames 23b and 23c are fixed by a hand-turning bolt or the like provided at the end opposite to the hinge (not shown). Further, the hoses 41, 41 may be housed in the upper frame 23b.

Therefore, when the translucent plate 23a is replaced, the upper frame 23b can be lifted up with the hinge as a fulcrum and opened by removing the hand-turning bolt. The plate 23a can be replaced, and can be easily replaced. The mask film M
In the above, the suction groove 23f of the translucent plate 23a adsorbs the adsorbent groove 23f, but the translucent plate 23a may be secured by a tape or the like.

As described above, the upper and lower baking frames 23, 24
Due to the configuration of the connecting portion 45 of the vacuum suction means,
As described below, the work W can be moved between the stages with a minimum positional deviation and can be held by the upper and lower baking frames 23 or 24, or can be forcibly removed.

As shown in FIGS. 6 and 9, when the suction operation from the joint portion 9a on the side of the alignment alignment table 10 is stopped almost at the same time, vacuum suction is performed through the connection pad 40 of the upper baking frame 23, as indicated by an arrow. As described above, the air in the space surrounded by the transparent plate 23a and the seal rubber 23d and the lower baking frame 24 is sucked. At this time, the ball valve 45b of the connecting portion 45 of the lower baking frame 24 is sucked up to the side of the through hole 24d of the translucent plate 24e, and by closing the through hole 24d, suction of the space can be achieved, and the work W is lifted up. It can be sandwiched between the baking frame 23 and the lower baking frame 24 (when moving from the alignment stage B to the exposure stage C).

Then, when the work is transferred from the exposure stage C to the moving table, the following procedure is performed. As shown in FIG. 5 and FIG. 10, the elevating and holding table 21 is moved upward, and the joining portion 26e thereof is brought into contact with one of the connecting portions of the lower baking frame 24, and then the vacuum suction operation of the upper baking frame 23 is stopped. To do. At the same time, when the joining portion 21d side starts suction, as shown in FIG.
As indicated by 0, the ball valve 45b of the connecting portion 45 is released from the through hole 24d of the translucent plate 24d and descends, and as indicated by an arrow, air is sucked through the opening hole 45c of the connecting portion main body 45a. . Further, the ball valve 45d does not interfere with the suction operation by fitting into the recess 45d of the connecting portion main body 45a. Therefore, the work W is sucked and held by the transparent plate 23 of the lower baking frame 24 by the suction operation indicated by the arrow.

In addition, the lifting table 21 to the moving table 2
When the lower baking frame 24 is transferred to 6, the joining is performed at the moment when the elevating holding table 21 is lowered and the joining portion 26e of the moving table 26 is brought into contact with the other joining portion (not shown) of the lower baking frame 24 and is brought into contact therewith. This is performed by sucking air from the side of the portion 26e and stopping the suction of air at the joining portion 21d of the elevating holding table 21, which has been sucking air until now.

After the moving table is moved, the lower baking frame 2 is moved.
4 is transferred to the alignment matching table 10 again, and when the work W is removed from the lower baking frame 24, as shown in FIG. 6, the moving table is held at the position of the alignment matching table 10 while holding the lower baking frame 24. To come. Then, the Z-axis portion 14 of the alignment matching table 10 is raised. Then, when the lower surface side of the work comes into contact with the holding means 9 of the X table 11 and one connecting portion of the lower baking frame 24 comes into contact with the joining portion 9a, the joining portion 26 on the moving table 26 side is formed.
Almost at the same time when the suction operation of e is stopped, the suction operation of the holding means 9 is performed, and further the air is blown from the joint portion 9e.

Therefore, as indicated by the arrow in FIG.
The sent air is transmitted through the opening 45c to the transparent plate 24e.
Through the through holes 24d of each of the through holes 24b of the transparent plate 24a.
It is possible to forcibly separate the work W from the transparent plate 24e by ejecting from the transparent plate 24e. The air suction / blowing operation of the air pump and the switching operation at each position are performed by the operation of a solenoid valve (not shown). Further, since the structures for moving, positioning and exposing the work W between the stages B and C and between the stages E and F are the same, the description between the stages E and F is omitted.

Further, since the exposure work is carried out in a clean room, it is always in a dehumidified state, and if it is excessively dried, the upper surface of the mask film M is deformed and damaged, and static electricity is easily generated. In addition, it may cause a problem when transferring the work.
Therefore, although not shown, each exposure stage C, F
The nozzle of the humidifier is projected so as to maintain an appropriate humidity. At the exposure position, since the upper baking frame side has heat due to ultraviolet rays or other rays (infrared rays, etc.) from the light source device, the mask film is easily deformed. Therefore, in order to cool the upper baking frame side, cold air is blown. Furthermore, in order to remove the harmful effects of static electricity, an antistatic means is provided.

As the antistatic means, ionized air is blown. That is, by installing a nozzle (not shown) toward the exposure stage side and blowing positive and negative ionized air from this nozzle, static electricity due to the close contact between the mask film M and the work is charged. Things can be neutralized.

Next, the structure and operation of the inversion stage D will be described. Alignment stage B to reversal stage D
The work W conveyed by the handler 25 is reversed by the reversing device 50. As shown in FIGS. 16 and 17, the configuration of the reversing device 50 of the reversing stage D is such that a support arm 52 having a suction pad 52a that suction-supports a work and a base end of the support arm 52 via a mounting plate 53. A rotation support part 54 that supports the rotation support part 54, a drive motor 55 that rotates the rotation support part 54, and a support base 56 on which the rotation support part 54 and the drive motor 55 are mounted.
And a rack 58 as a moving mechanism for moving the support 56 and the like in a predetermined direction, a pinion and its drive motor 57, and a guide 59.

As shown in FIG. 16, lifting tables 51, 51 are arranged on both sides of the reversing device 50. The elevating table 51 includes a placing table 51d for the work W and a drive device 51c for raising and lowering the placing table 51d. The placing table 51d has grooves 51a and 51b formed at predetermined positions so that the pre-alignment mechanism 63 can pre-position the workpiece W when the workpiece W is placed on the placing table 51d. The groove portions 51a and 51b are formed by the pushing protrusions 61a and 62 of the pushing devices 61 and 62 of the pre-alignment mechanism 63.
It is formed corresponding to the number of a. It should be noted that the mounting table 51d is not limited to any shape as long as the preliminary positioning and the mounting of the work can be performed.

The pre-alignment mechanism 63 is shown in FIG.
As shown in FIG. 6, FIG. 19 and FIG. 20, there are provided pushing devices 61 and 62 for pushing the work W from the four directions toward the work center. The pushing device 61, as shown in FIG.
It is composed of a pushing portion for pushing the workpiece corresponding to the thickness of the workpiece W, and a moving mechanism portion for moving the pushing portion. The pushing portion is provided symmetrically on the base 61e and pushes against the workpiece W to push, and a support plate 61 for supporting the pushing projection 61a.
b, a support pin 61c for rotatably fastening the support plate 61b, and a spring 61d provided on the rear side of the support plate 61b.

Further, the moving mechanism portion includes a pedestal 61n having both legs for supporting the base 61e, and the pedestal 61n.
A wheel portion 61p provided on one leg portion and a drive connecting portion 61q provided on the other leg portion are provided. The drive connecting portion 61q slidably holds the guide rod 61f. Further, the guide rod 61 is the guide rod 6
It is supported by support portions 61g and 61h provided upright at both ends of the 1. The tip of the other leg of the pedestal 61n is connected to the timing belt 61k. The timing belt 61k is suspended between one pulley equipped with the drive motor 61j and the other pulley 61m.

Therefore, when the drive motor 61j drives to rotate the pulley to drive the timing belt 61k, the pushing portion moves to the work W side according to the drive of the timing belt 61k, and the drive motor 61j.
Since the timing belt 61j is inverted by the inversion driving, the pushing portion of the pushing device 61 moves in the direction away from the work W.

A supporting plate 61c supporting the pushing protrusion 61a is rotatably attached.
A spring is biased in the extension direction on the rear side. Therefore, even when the work W is thin, the pushing protrusion 61
When “a” pushes the work, the work W is not deformed by pushing with a force more than necessary.

Incidentally, 61r shown in FIG.
This is a cylinder device for moving the base 61e up and down when the protrusion level of 1a is an obstacle other than the preliminary positioning operation of the work W.

As shown in FIG. 20, the pushing device 62 is different from the pushing device 61 except that the supporting plate 62b of the base 62e, the spring 62d and the pushing projection 62a are only one. Since the configuration is the same as, the description will be omitted. It should be noted that the alphabetical symbols of the pushing device 62 correspond to the alphabetical symbols of the pushing device 61.

The above-mentioned pre-alignment mechanism 63 has the same structure as that installed at a predetermined position of the carry-in stage A. Then, as shown in FIG.
The pre-alignment mechanism 3 has a pusher device 3a, 3b.
And the pushing devices 3c and 3d are the pushing devices 61 and 6 described above.
It is formed in the same structure as 1, 62, 62. In addition, depending on the installation position, the pushers 61, 3a ... Have a configuration in which the drive sources of the facing pushers 61, 3a, ... Are shared, and are mounted on a timing belt that is wound around each pulley of the facing pushers 61. It may be configured such that one end of each is attached.

The start and end of the operation of each stage, the start and end of the movement of the workpiece W, the installation position, etc. are performed by various sensors not shown, and the control unit for controlling the operation of each device is previously set. A program of the entire apparatus and a program of machining data that have been input are input from the keyboard shown in FIG. 2 and stored in the storage unit.

When the front and back surfaces of the work W are exposed using the above-described exposure apparatus 1, the following procedure is performed. First,
As shown in FIGS. 1 and 2, the relationship between the flow of the work W and the work position will be described (the work W ₁ to the work W ₆ indicate the loading order of the work W.
Only as shown). The work W ₁ is in the carry-in stage A
After the preliminary positioning by (1), the handler 15 conveys it to the first alignment stage B (indicated by an arrow (a)). Then, during the alignment work on the first alignment stage B, the next work W ₂ is placed on the carry-in stage A.

The work W ₁ for which alignment has been completed is conveyed to the exposure stage C (arrow (b)). Then, the work W _{2 on the} carry-in stage is carried to the first alignment stage B by the handler 15 (arrow (A)), and the alignment work is performed.

At this time, the work W ₃ is placed and preliminarily positioned on the carry-in stage. Then, the exposure stage B
The work W ₁ exposed by is transferred to the first alignment stage B by the moving table 26, and the aligned work W ₂ positioned on the first alignment stage B is transferred to the exposure stage C (arrow). (Yes)).

The exposed work W ₁ returned to the first alignment stage is conveyed to the reversing stage D by the handler 25 (arrow (d)). And the next work W
_The handler ₃ is transferred to the first alignment stage by the handler 15 and the alignment work is performed. At this time, the first
At the exposure stage C, the work W ₂ is exposed and then placed on the moving table 26.

On the other hand, the work W conveyed to the reversing stage
_The front and back of ₁ are reversed (arrow (e)), pre-positioned, and then transported to the second alignment stage E by the handler 65 (arrow (f)). In addition, carry-in stage A
A work W ₄ is arranged in the.

Then, the exposed work W ₂ is carried to the first alignment stage B (arrow (U)), and the aligned work W ₃ is carried to the first exposure stage C. Furthermore, the first alignment stage B
The work W ₂ of No. 1 is transferred to the reversing stage D by the handler 25 (arrow (e)), and the work W _{4 of the} carry-in stage is transferred to the first alignment stage B by the handler 15.
Is transported by.

After the alignment work, the work W ₁ is conveyed to the second exposure stage (arrow (g)). Then, the work W ₂ is turned upside down (arrow (o)), and after being preliminarily positioned, it is placed on the second alignment stage E.
It is conveyed by the handler 65 (arrow (or)). At this time, the work W ₅ is placed on the carry-in stage A. After the exposure, the work W ₃ is transferred to the first alignment stage B by the moving table 26, and the aligned work W 3
₄ is transported to the first exposure stage C.

Work W₁After the exposure, the second alignment
Transported to stage E (arrow (h)), aligned
Mi Work W₂Are transported to the second exposure stage E (arrow
Mark. Then, the work located in the first alignment
Ku W₃Is transferred to the inversion stage D by the handler 25.
And the work W located on the carry-in stage A _Five
Is carried by the handler 15 to the first alignment stage.
Will be sent.

Further, the work W ₁ positioned on the second alignment stage is carried to the carry-out stage G by the handler 75 (arrow (re)), and the work W on the reversing stage.
₃ is transported to the second alignment stage E. At this time, the work W ₆ is placed on the carry-in stage A.
In this way, the front and back of the work are exposed while the work W is sequentially positioned, transported, and exposed on each stage. It should be noted that, when the work at each position of the work W is not performed accurately, the indicator light denoted by reference numeral 89 in FIGS. 3 and 4 blinks or an alarm is given to notify the abnormality.

As described above, the work is always operated in each stage, and the productivity can be improved. Next, the operation of each device of each stage will be described. As shown in FIG. 2, with respect to the work W on the carry-in stage A, the mounting roller 2 is driven by the drive motor to rotate and the work W is set at a predetermined position. Then, when the work W arrives at a predetermined position, the pushing devices 3c, 3d, 3a, 3 of the pre-alignment mechanism 3 installed between the respective mounting rollers of the carry-in stage A.
b pushes from four sides of the work W toward the center point of the work W. Therefore, the work W is preliminarily positioned on the center point side. When the preliminary positioning of the work is completed,
If necessary, the pushing protrusions of the pushing devices are lowered by driving the cylinder devices 61r ... (See FIGS. 19 and 20).

When the preliminary positioning of the work is completed, the handler 15 adsorbs the work W to the adsorbing portion 15a which descends and ascends, and conveys the work W to the alignment stage B. Then, the handler 15 descends and the suction portion 15a
However, the work W is placed on one lower baking frame 24 on the alignment matching table 10.

The work W placed on the lower baking frame 24 is vacuum-sucked and held by the lower baking frame 24 (see FIG. 10).
As shown in, the CCD camera 22 images the positioning mark (through hole, not shown) of the work W. At this time, the light emitting tables 6 and 6 installed on the alignment alignment table 10 emit yellow light, The positioning mark of the work W is confirmed accurately and easily (see FIG. 6). As shown in FIG. 5, the positioning mark of the work imaged by the CCD camera 22 is confirmed by the control unit 86.

When there is no positional deviation, the upper baking frame 23 positioned on the exposure stage C is conveyed to the position of the alignment alignment table 10 by the moving mechanism 28. When the upper baking frame 23 arrives on the alignment matching table 10, as shown in FIG.
As indicated by a phantom line, the lower baking frame 24 is raised to bring the upper baking frame 23 and the work W into contact with each other, and the vacuum suction on the lower baking frame 24 side is released. Then, the lower baking frame 24 and the work W are vacuum-sucked by the vacuum suction operation of the upper baking frame 23 (state of FIG. 9).

The CCD camera 22 confirms the positional deviation again while the work W is fixed by the upper and lower baking frames 23 and 24, and if it is appropriate, moves it to the exposure stage C by the moving mechanism 28 of the upper baking frame 23. The work W and the lower baking frame 24 are conveyed together.

If the work W is held by the upper and lower baking frames 23 and 24, and if a positional deviation occurs, the Z-axis portion 14 moves up to hold the lower baking frame 24 (and holds the work). Then, the vacuum adsorption of the upper baking frame 23 is released, the Z-axis portion 14 of the alignment alignment table 10 is lowered, the upper baking frame 23 is moved to the exposure stage C by the moving means, and the alignment work is performed again by the CCD camera 22. Done through.

On the other hand, as shown in FIG. 5, the moving table 26 arranged on the exposure stage has the lower baking frame 24 mounted on the mounting table 26, and the moving mechanism 27 causes the first alignment stage B to move. On the alignment alignment table 10 side of
The other lower baking frame 24 is conveyed. Then, the moving table 26 is again transported to the exposure stage C side by the moving mechanism 27.

When the lower baking frame 24 is transferred from the moving table 26 to the alignment aligning table 10, the level of the work placing surface position of the alignment aligning table 10 from the lower surface position of the work placed on the moving table 26. The work W placed on the moving table 10 is installed at a low position.
However, after being moved right above the alignment matching table 10, the alignment matching table 10 raises the Z-axis portion 14 slightly and holds the work by suction by the holding means 9 of the X table or the like. Then, while the alignment alignment table 10 is slightly elevated, the moving table 26 is again conveyed to the exposure stage C side. When the moving table 26 moves, the alignment alignment table 10 lowers the Z-axis portion 14 and waits for the next work W to arrive.

Next, the work is the alignment stage B.
When moving from the exposure stage C to the exposure stage C, ultraviolet rays are emitted from the light source device 33 of the ultraviolet irradiation stage H. Then, as shown in FIGS. 4 and 15, the ultraviolet rays are reflected by the reflecting mirror 34,
It is guided to the large reflecting mirror 20a via the fly-eye lens 35 and the switching mirror 36. Further, vertical light is radiated from the large reflecting mirror 20a to the work W sandwiched between the upper and lower baking frames 23, 24, and the exposure work is performed. Therefore, the direction of the optical axis emitted from the light source device is changed by the switching mirror 36.
Up to the vertical plane, and from the switching mirror 36, it travels at an angle from the vertical plane. Therefore, even if the light source device 33 to the work W are accommodated in a narrow range, projection exposure is possible.

As shown in FIG. 5, when one surface of the work W is exposed, the baking frame mounting table 21a of the elevating holding table 21 located on the exposure stage C is raised by the operation of the cylinder device 21b. It contacts the lower surface side of the lower baking frame 24. Then, the vacuum suction of the upper baking frame is released, and the work W is vacuum sucked by the lower baking frame 24 (states of FIG. 9 to FIG. 10) and the baking frame placing table 21a is operated by the cylinder device 21b. It descends and is transferred to the mounting table 26a of the moving table 26. Furthermore, the moving table 26 has a lower baking frame 2
In the state where 4 is mounted, it is moved to the alignment stage B again by the moving mechanism 27. The lower baking frame 24 holding the work W conveyed by the moving table 26 is moved by the moving mechanism 2
7, the sheet is always conveyed to a predetermined position on the X table 11 of the alignment alignment table 10.

The lower baking frame 24 arriving on the X table 11
Holds the lower baking frame 24 by the holding means 9 of the X table 11. Then, the work W vacuum-sucked to the lower baking frame 24 is blown out with air from the side of the joint 9a that is in contact with the connecting portion 45 of the lower baking frame 24 (see FIG. 1).
1) Remove the lower baking frame 24 from the transparent plate 24a. Then, the work W is conveyed to the reversing stage by the handler 25. The details of the work W transferred between the stages in the vacuum suctioned state without displacement are omitted because they have been described above.

Next, as shown in FIGS. 18 (a), 18 (b) and 18 (c), the work W arriving at the inversion stage D is lifted up and down by the handler 25 holding the work. It is delivered to the placement table 51d of the table 51.
Then, the elevating table 51 on which the work W is placed descends, and the suction pad 52a of the support arm 52 of the reversing device 50.
The work W is adsorbed and transferred to the wafer (Fig. 18 (a)).
State).

Then, the rotation support portion 54 for supporting the support arm 52 is rotated by the drive of the drive motor 55, so that the support arm 52 is erected while holding the work.
Drive motor 57 along guide 59 and rack 58
The pinion 57 is rotated by the drive of (1) to move the entire rack 58 from one end to the other end (solid line state in FIGS. 18B to 18C).

Further, the drive motor 5 is continuously connected at the moving end.
4 is driven to rotate the support arm holding the work W in the direction of the arrow to set the mounting table 51d of the lifting table 51.
The work W which has been turned upside down is placed on and the vacuum suction of the suction pad 52a of the support arm 52 is released (FIG. 18C).
State of the virtual line). Therefore, the front and back of the work W are reversed.

In addition, the reversing device 5 in which the work W is reversed upside down.
0 operates the support arm in the upright state as shown by the solid line in FIG. 18 (c). Then, the pre-alignment mechanism 63 performs the preliminary positioning work of the work W.
In this preliminary positioning work, as shown in FIG. 16, each of the pushing devices 61 and 62 moves from the solid line to the position of the imaginary line to push the work W from the four sides of the work W toward the center of the work W. Position. As shown in FIGS. 19 and 20, this work is performed by the drive motor 61j of each pushing device 61, 62,
By driving 62j and rotating the timing belt 61, the pushing devices 61 and 62 are moved to the work W side.

The work W for which the preliminary positioning has been completed is sucked by the suction portion 65a of the handler 65 by the raising of the elevating table 51 and the lowering of the handler 65, and the handler 65 is raised and conveyed to the second alignment stage E. It will be. In the alignment work and the exposure work, the operation described for the first alignment stage B and the first exposure stage C is repeated to expose the back surface of the work W. Then, the work W whose both surfaces are exposed is carried out from the second alignment stage E to the carry-out stage G by the handler 75. Therefore, the front and back of the work W are exposed, and a series of exposure operations is completed.

The present invention is not limited to the above-described embodiment. For example, in the configuration of two lower baking frames and one lower baking frame, the exposure stage and the alignment stage have the same exposure. It can also be used in a device. As shown in FIG. 22, the exposure apparatus 140 includes the carry-in stage 1
41, an exposure alignment stage 142, and a carry-out stage 143.
4a and the lower baking frame 144b are installed separately from each other, and are combined by the rise of the alignment matching table 145 to form a vacuum frame. And the lower baking frames 144b, 14
4b is arranged on the alignment alignment table 145 and on the carry-out side (next work position).

Therefore, the work W that has arrived at the carry-in stage by the feed roller 146 is adsorbed by the handler 147 and placed on the lower baking frame 144b. Then, the positioning mark is confirmed by the imaging camera 148, and the positioning is performed. Further, when the alignment matching table 145 is lifted, the upper and lower baking frames 144a and 144b are confirmed by the imaging camera 148 again,
If appropriate, the exposure operation is performed.

On the other hand, the lowered alignment alignment table 145
Allows another lower baking frame 144b installed on the transport side to be placed. Therefore, another lower baking frame 144b located at the carry-out position by the conveying means (the driving of the feed roller 149 is shown in the drawing, but other structures such as a conveying handler that holds and conveys both sides of the lower baking frame may be used). Are transported and placed. Then, the handler 147 places the next work on the lower baking frame 144b.

The exposed work is the upper baking frame 144a.
Is moved to the unloading side by the transporting means (not shown) and the work W is held by the lower baking frame 144b.
The work and the lower baking frame are transferred onto the upper side via an elevating means (not shown) or the like (when the upper baking frame does not move, the transfer means such as the transfer handler transfers the work and the lower baking frame). Then, the handler 150 that has moved to the carry-out / outlet side arrives, sucks the work, and conveys the work to the carry-out side. Therefore, the structure of the upper baking frame and the two lower baking frames can improve the work efficiency of exposing the work.

The large reflecting mirror may be a flat reflecting mirror, a parabolic mirror that reflects vertical light, a pseudo spherical mirror or a pseudo parabolic mirror, depending on the exposure accuracy required by the work W. Absent. Further, the light source device 33 may have a structure in which an opening / closing door is formed on the adjacent exposure stages C and F, and can be moved to the respective exposure stages C and F by a slide rail, a moving mechanism, or the like. Therefore, it is possible to expose the work by moving it to the exposure stages C and F side as necessary and irradiating ultraviolet rays at that position. Therefore, even if the work to the light source are installed in a narrow range, projection exposure is possible.

Further, the connecting portion of the lower baking frame has an opening hole 45c.
However, since it is sufficient that the ball valve does not close the opening hole 45c during the air feeding and suction operations,
For example, a configuration may be employed in which a protrusion is provided near the opening hole 45c and the protrusion cannot block the opening hole with a ball valve.

Further, as shown in FIG. 23, the connecting portion 45 '
In the configuration of, the opening 45 is provided on the side of the lower baking frame that comes into contact with the transparent plate.
provided a mounting plate 45e provided with a f in the connecting body 45 ', showing the other opening hole 45 c ₁ and be configured to provided on the side surface side as shown by the solid line, the other opening hole 45 c ₂ in phantom It may be inclined and provided on the side surface side.
At this time, the joint portion at each position is formed such that the vertical cross-sectional shape is U-shaped, and an opening is formed in the opening hole 45c ₁ of the connection portion so that air suction / delivery operations can be performed.

Further, as shown in FIG. 24, the connecting portion may be embedded in the thickness of the transparent plate 24e 'of the lower baking frame, and each connecting portion has the ball valve 45 as described above.
b ', the connecting portion body 45a', and the plurality of opening holes 45c '
And an opening having an inclined surface 24d '.

As shown in FIG. 21, the upper baking frame may be composed of an upper frame 23b ', a light transmitting plate 23a' and a lower frame 23c '. The upper frame 23b 'has a connection pad 40 for vacuum suction,
40 is provided so as to penetrate the upper frame 23b '. The lower frame 23c 'has an upper frame 2
A fitting pin 23g for fitting with 3b 'is provided. Then, the upper and lower frames 23c 'and 23b' are attached to the translucent plate 23 by the fastening portion provided at the opposite end of the pin 23g.
It is fixed integrally with a '. The connection pad 40 and other components are the same as those of the upper baking frame described above.

Therefore, by moving the frame in the vertical direction, the transparent plate of the upper baking frame can be easily removed, and the structure is optimal when the transparent plate is replaced by an automatic device. The translucent plate can be held only by the upper frame. For example, an edge frame is attached around the side surface of the translucent plate, and the edge frame is detachably held by the claws provided on the upper frame. But good. Therefore,
The upper baking frame can be composed of only the upper frame and the transparent plate.

Further, the elevating and holding table provided on the exposure stage is constructed so as to be integrally provided between the mounting table and the supporting table of the moving table, and the moving table is an obstacle when moving to the alignment alignment table side. It may be configured as a shape that does not become, for example, a U-shape (a shape smaller than the mounting table).

Then, as shown in FIGS. 25 (a) and 25 (b), when the upper baking frame 23 sucks and holds the work after the alignment and the lower baking frame and conveys them to the exposure stage, the upper baking frame 23 side Although the work and the lower baking frame are held by the vacuum suction means, the vacuum suction state may be released and the lower baking frame may not be dropped together with the work due to an unexpected cause (for example, power failure or failure). Therefore, the holding assist means 1
9 and 19 are provided on the upper baking frame 23 side.

The holding assisting means 19 is composed of a main body portion 19a provided on the upper baking frame 23 side, a support portion 19b provided so as to be retractable in the horizontal direction from the main body portion 19a, and the like. Therefore, when the lower baking frame 24 is sucked and held together with the work W by the suction means such as the connecting pad 40 of the upper baking frame 23, the supporting portions 19b. 19b projects toward the center of the lower baking frame 24, and abuts and supports the lower surface side of the lower baking frame 24. Therefore, even if the suction means of the upper baking frame 23 is stopped midway, the lower baking frame 24 and the work W are not dropped by the holding assisting means. The upper baking frame 23 appropriately conveys the lower baking frame 24 and the work, and after the exposure is completed,
The supporting portion 19b of the holding assisting means 19 is immersed and released so that the lower baking frame 24 and the upper baking frame 23 can be separated from each other.

Further, a plurality of the above-mentioned holding assisting means may be attached and replaced as the work and the lower baking frame holding means of the upper baking frame (in this case, the structure of the lower baking frame requires a ball valve at the connecting portion). It is needless to say that various modifications can be made without departing from the scope of the present invention, such as the constitution which is not required).

[0127]

As described above, the present invention exhibits the following excellent effects. (1) In the exposure apparatus, since the arrangement of each stage and the apparatus have a predetermined configuration, the working position of the clean room where the exposure work is performed can be reduced by 40% or more as compared with the conventional exposure apparatus. (2) Since the exposure apparatus exposes both sides of the work with one light source device, the device configuration can be small and the power consumption can be halved. (3) The upper baking frame that holds the work is attached to the frame of the translucent plate with a suction hose and a suction pad for vacuum adsorbing the work, so when the translucent plate deteriorates due to exposure work. , The translucent plate can be easily replaced.

(4) The lower baking frame that sucks and conveys the work is
Since it is provided with the connecting portion, it can be sucked and held by the work and the translucent plate of the lower baking frame, and can be forcibly separated from the work, thereby improving workability. In addition, even when a plurality of (two or more) lower baking frames are used due to the structure of the exposure apparatus, it is possible to deal with this. (5) One upper baking frame and two lower baking frames are separated and united at each position repeatedly, and even if work such as positioning, transporting, and exposing the work is performed, the connecting part of the lower baking frame and each Since the joint part installed at the position makes this joint body and enables suction / blowing work of the air pump, the work on the lower baking frame will not be displaced. (6) Since the reversing stage for reversing the work is equipped with the pre-alignment mechanism and the work reversing device, the front and back of the work can be reversed without taking up a work space.

(7) In the reversing device used in the reversing stage, the work is supported by the suction support arm, and while the rotation supporting part is rotated, the rotation supporting part is moved to the moving end by the moving mechanism to move the work. Since the front and back are reversed, the reversing work is accurate, and no work space is required. (8) The UV irradiation stage irradiates the UV light from the light source device to each exposure stage through a plane mirror and a fly-eye lens, and through a switching mirror that switches the direction of the UV light to the left and right, so the optical axis is tertiary. The light travels in the original direction and the distance of the ultraviolet rays from the light source to the work is shortened, so that it is possible to reduce the size of the apparatus and accelerate the work of exposing the work.

(9) Since the handler installs the lower end of the suction pad inside the work contact surface of the contact portion, even if the work is thin, the work can be held without being deformed by the suction force. Can be transported. (10) The vacuum frame consisting of the upper and lower baking frames clamps the work during the positioning confirmation work and the exposure work of the work, and works in the state of the vacuum frame. Since the work is performed while being placed on the lower baking frame of the base, the work positioning and the exposure work can be efficiently performed. Further, since a vacuum frame composed of two lower baking frames and one upper baking frame moves back and forth between the exposure position and the alignment position in sequence, the two vacuum baking frames of the exposure apparatus include an exposure stage and an alignment stage. Work efficiency can be improved regardless of the position. (11) Alignment The alignment table allows the lower baking frame to be held separately, and has a joint that matches the connection part that communicates from the work contact surface of the lower baking frame. It is possible to easily separate the work from the lower baking frame that holds the exposed work.

[Brief description of drawings]

FIG. 1 is a principle diagram showing an operation sequence of an entire exposure apparatus and a work of the present invention.

FIG. 2 is a plan view showing the entire exposure apparatus of the present invention.

FIG. 3 is a front view showing the entire exposure apparatus of the present invention.

FIG. 4 is a side view of the exposure apparatus of the present invention.

FIG. 5 is a principle view showing a state of an alignment stage and an exposure stage of the present invention.

FIG. 6 is a plan view showing a lower baking frame that moves between the alignment stage and the exposure stage of the present invention.

FIG. 7 shows upper and lower baking frames at the exposure stage position of the present invention,
FIG. 3 is a partial cross-sectional view showing a moving table and respective conveying means.

FIG. 8 is a perspective view showing a structure of a baking frame of the present invention.

FIG. 9 is a partial cross-sectional view showing a suction state of upper and lower baking frames of the present invention.

FIG. 10 is a partial cross-sectional view of a lower baking frame of the present invention.

FIG. 11 is a partial cross-sectional view of a lower baking frame of the present invention.

FIG. 12 is a perspective view showing the entire handler of the present invention.

FIG. 13 is a perspective view showing a suction portion of the handler of the present invention.

FIG. 14 is a sectional view of a suction portion of the handler of the present invention.

FIG. 15 is a perspective view showing a configuration of an ultraviolet irradiation stage of the present invention.

FIG. 16 is a perspective view showing the arrangement of the inversion stage of the present invention.

FIG. 17 is a perspective view showing the entire reversing device of the present invention.

18 (a), (b) and (c) are side views showing the reversing operation of the reversing stage of the present invention.

FIG. 19 is a perspective view showing a pushing device of the pre-alignment mechanism of the present invention.

FIG. 20 is a perspective view showing a pushing device of the pre-alignment mechanism of the present invention.

FIG. 21 is an exploded perspective view showing an application example of the baking frame of the present invention.

FIG. 22 is a principle view showing an application example of upper and lower baking frames of the present invention.

FIG. 23 is a partial cross-sectional view showing an application example of the connection portion of the lower baking frame of the present invention.

FIG. 24 is a partial cross-sectional view showing an application example of the connection portion of the lower baking frame of the present invention.

25 (a) and (b) are a plan view and a side view showing a connected state of the upper and lower baking frames of the present invention.

FIG. 26 is a principle view showing an entire conventional exposure apparatus.

FIG. 27 is a perspective view showing a part of a conventional lower baking frame.

FIG. 28 is a perspective view showing an entire conventional baking frame.

[Explanation of symbols]

1 exposure apparatus A carry-in stage B first alignment stage C second exposure stage D reversal stage E second alignment stage F second exposure stage G carry-out stage H ultraviolet irradiation stage 3, 63 pre-alignment mechanism 3a, 3b, 3c, 3d, 61,62 Pushing device 9 Holding means 9a Joining part 19 Holding assisting means 10,60 Alignment alignment table 15, 25, 65, 75 Handler 15b Adsorption pad 15f Abutting part 21 Elevating holding table 21d Joining part 23 Upper baking frame 23a Transparent Light plate 23b, 23c Upper and lower frames of upper baking frame 24 Lower baking frame 26 Moving table 26e Joining portion 27, 47 Moving mechanism (conveying means) of lower baking frame 28, 48 Moving mechanism (conveying means) of upper baking frame 33 Light source Device 34 Planar reflector 35 Fly-eye lens 36 Switching mirror 40 Connection pattern DOO 45 connecting section 45a connecting section body 45b ball valve 45f one side of the opening hole 45c, 45c _1, 45c ₂ the other side of the opening hole 50 inverting device 51 the lifting table 52 suction support arm 54 pivotal support 57 the pinion and the drive motor 58 Rack 59 guide

Claims (14)

[Claims] 1. A first alignment stage having an alignment alignment table for moving and positioning a work held on a lower baking frame to an appropriate position, and a first alignment stage having an imaging camera for confirming the proper position, and a first exposure for exposing a positioned work. A stage, a reversing stage that reverses the exposed work surface, an alignment alignment table that moves and positions the work on the lower baking frame that has been turned upside down by the reversing stage, and an imaging camera that confirms the proper position. A second alignment stage having a second alignment stage and a second exposure stage for exposing the positioned work, the first alignment stage, the reversing stage, and the second alignment stage are arranged in a linear direction, and the first and second alignment stages are provided. Each of the first and second exposure stages is arranged in a direction orthogonal to the linear direction. Each of which is provided, and an ultraviolet irradiation stage is provided between the first and second exposure stages, and a plurality of handlers for conveying a work are provided at a linear position from the first alignment stage to the second alignment stage, An exposure apparatus characterized in that, between the alignment stage and the exposure stage, the baking frames above and below the vacuum frame for holding, positioning, carrying and exposing the work are equipped with carrying means for carrying the respective works. 2. A first step of preliminarily positioning one surface of a work to be exposed on both sides by a prepositioning mechanism, and holding the prepositioned work on a lower baking frame, and performing positioning by a first alignment alignment table and an imaging camera. The second step to perform and the positioning work is held on the upper baking frame together with the lower baking frame, the positioning is confirmed, and then the workpiece is conveyed to the exposure position and exposed.
A fourth step of receiving the exposed work together with the lower baking frame on the first alignment alignment table by the transfer means, and a fifth step of delivering the work on the first alignment alignment table to the reversing machine by the handler. The reversing machine that received the work reverses the front and back of the work, and the seventh step of pre-positioning by the pre-positioning mechanism and the pre-positioned work is held on the lower baking frame and positioned by the second alignment alignment table and the imaging camera. And the ninth step of holding the positioned work together with the lower baking frame in the upper baking frame, confirming the positioning, and then conveying to the exposure position for exposure.
The exposed work is held on the lower baking frame and is transferred onto the second alignment alignment table by the receiving transfer means.
A method for exposing a work, which comprises a step and an eleventh step of carrying out a work which has been exposed on both sides on an alignment alignment table. 3. The vacuum frame is composed of upper and lower baking frames that can be separated and combined, and is composed of two lower baking frames and one upper baking frame. During work positioning confirmation work and exposure work, the upper and lower baking frames sandwich the work by one of the vacuum suction means and unite to form a vacuum frame. Work positioning work and exposure completed The vacuum frame device is characterized in that the work is conveyed by separating the vacuum frame and holding the work in the lower baking frame. 4. The vacuum frame is composed of upper and lower baking frames that can be separated and combined, and includes one upper baking frame and two lower baking frames, and the lower baking frame is an alignment work position and a next work. In the position, each is removably installed, the bottom baking frame installed in the alignment work position and the next work position rises after the work in the alignment work position, and is conveyed to the next work position side by the conveying means, At the next work position, the vacuum frame device is lowered from the position where it has been carried by the carrying means and is carried to the alignment work position by the carrying means. 5. A first step of holding the lower baking frame of the vacuum frame on an alignment matching table by a holding means on the alignment matching table side, and a holding means for holding the work on the lower baking frame side on the lower baking frame side. The second step of holding the work by recognizing the work by the imaging control means, comparing the position information of the mask film stored in advance and activating the alignment matching table to position the work, and the second step. After the completion, the lower baking frame on the alignment matching table is united with the upper baking frame by the rise of the alignment matching table to form a vacuum frame, and the lower baking frame is separated from the alignment matching table side and masked again by the imaging control means. A third step of confirming the positional deviation between the film and the work, and in the third step, the imaging control means recognizes the proper or improper position of the work, and if appropriate, it is inappropriate for the next step. Work method of positioning a fourth step of performing the work from the second step is reverted if. 6. The hose connection portion of the vacuum suction means is provided at a supply port, which communicates with a suction port for vacuum suction of a work provided on the front surface side of the lower baking frame and is opened on the back surface, The hose connecting portion includes a connecting portion main body and a ball valve that floats inside the connecting portion main body, and the connecting portion main body is formed in a position smaller than the diameter of the ball valve at a position where the connecting portion main body contacts the supply port of the lower baking frame. A hose connection structure for an air pump, comprising: the one side opening; and the other side opening formed on the other side of the one side opening and having a diameter smaller than that of the ball valve. 7. An alignment alignment table installed at one moving end of the lower baking frame, wherein the lower baking frame has connection portions formed at least at two positions communicating with the work suction holes of the work contact surface. And a holding means for adsorbing and holding the joint portion at the position where the connecting portion of the lower baking frame arrives and adsorbing and holding it on the lower surface side of the lower baking frame, and ascending / descending holding installed at the other moving end of the lower baking frame. On the table,
A joint portion is provided at a position where the connecting portion of the lower baking frame comes, and a moving portion that conveys the lower baking frame to both moving end portions is provided with a joint portion at a position where the connecting portion of the lower baking frame comes. Each of the joints is connected to an air pump for sucking / discharging air, and the connecting portion of the lower baking frame is aligned with each joint at each position of the elevating and holding table, the moving means, and the alignment alignment table. A work holding / releasing structure that enables suction / discharge operation of the pump. 8. The alignment alignment table includes a workpiece suction holding means on a work contact surface and a joint portion that matches a work connection portion of a lower baking frame, and the alignment alignment table retains the work. Each of the X, Y, and θ tables that moves the lower baking frame in each direction is provided, and the X table and the Y table are movably provided in one and the other orthogonal to each other in a plane, and the θ table is centered on a vertical line. An alignment alignment table, which is rotatably provided in a direction in which the alignment alignment table is rotated in a vertical direction and is configured to move up and down a work contact surface of the alignment alignment table. 9. The upper baking frame is composed of a frame-shaped frame and a light-transmitting plate having a through hole for vacuum suction and a frame-like sealing rubber held by the frame, and the through-hole of the light-transmitting plate. An upper baking frame structure characterized in that a connecting pad for vacuum suction for connecting to a hole position is provided on the frame. 10. The reversing stage includes an elevating table on which a work is placed and is driven to elevate and lower, a reversing device that receives and holds the work from the elevating table and reverses the front and back of the work, and a reversing table on the elevating table A reversing stage structure comprising a pre-alignment mechanism for pre-positioning a work. 11. The reversing device includes a suction support arm for suction-supporting a work, a rotation support part for supporting and rotating one end of the suction support arm, and a moving mechanism for reciprocating the rotation support part. A reversing device comprising: 12. An exposed work is received and held, and the other end of the held work is raised in the vertical direction with one end of the held work as a reference, and one end serving as a reference is moved in the horizontal direction to move the other work. A work reversal method that reverses the work by lowering the end side to a horizontal position. 13. The ultraviolet irradiation stage comprises a light source device comprising an ultraviolet irradiation lamp and an elliptical reflecting mirror, and a flat reflecting mirror for reflecting the ultraviolet light from the light source device in a predetermined direction.
The fly-eye lens that adjusts the illuminance distribution of ultraviolet rays installed in the optical path of the ultraviolet rays from the light source device, and a switching mirror that switches and irradiates the ultraviolet rays to the first and second exposure stages are provided. The direction of the optical axis of the ultraviolet rays is advanced along a vertical plane up to the switching mirror, and the traveling direction of the optical axis is advanced to a direction having a predetermined angle from the vertical plane by the operation of the switching mirror. UV irradiation device. 14. The handler includes a planar contact portion formed on the workpiece contact side and a suction pad formed by punching in the contact portion, and the lower end of the suction pad is the contact portion. The workpiece suction holding device is provided on the same side as or inside the workpiece contact surface.