JP2009545862A - 2面冷却集積化トランジスタモジュール及びその製造方法 - Google Patents

2面冷却集積化トランジスタモジュール及びその製造方法 Download PDF

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JP2009545862A
JP2009545862A JP2009511260A JP2009511260A JP2009545862A JP 2009545862 A JP2009545862 A JP 2009545862A JP 2009511260 A JP2009511260 A JP 2009511260A JP 2009511260 A JP2009511260 A JP 2009511260A JP 2009545862 A JP2009545862 A JP 2009545862A
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module
transistor
drain
pad
clip
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JP2009545862A5 (ko
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ジョナサン エー. ノキル
ルーベン ピー. マドリッド
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フェアチャイルド・セミコンダクター・コーポレーション
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Priority claimed from US11/740,475 external-priority patent/US7777315B2/en
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Publication of JP2009545862A5 publication Critical patent/JP2009545862A5/ja
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Geometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Dc-Dc Converters (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
JP2009511260A 2006-05-19 2007-05-21 2面冷却集積化トランジスタモジュール及びその製造方法 Pending JP2009545862A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US80218106P 2006-05-19 2006-05-19
US11/740,475 US7777315B2 (en) 2006-05-19 2007-04-26 Dual side cooling integrated power device module and methods of manufacture
US91699407P 2007-05-09 2007-05-09
PCT/US2007/069362 WO2007137221A2 (en) 2006-05-19 2007-05-21 Dual side cooling integrated transistor module and methods of manufacture

Publications (2)

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JP2009545862A true JP2009545862A (ja) 2009-12-24
JP2009545862A5 JP2009545862A5 (ko) 2011-10-06

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JP (1) JP2009545862A (ko)
KR (1) KR101157305B1 (ko)
CN (1) CN101473423B (ko)
DE (1) DE112007001240T5 (ko)
TW (1) TWI452662B (ko)
WO (1) WO2007137221A2 (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012146765A (ja) * 2011-01-11 2012-08-02 Rohm Co Ltd 半導体装置および半導体装置の製造方法
WO2013157172A1 (ja) * 2012-04-20 2013-10-24 パナソニック株式会社 半導体パッケージ及びその製造方法、半導体モジュール、並びに半導体装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102832190B (zh) * 2011-06-14 2015-02-04 万国半导体股份有限公司 一种倒装芯片的半导体器件及制造方法
US9355942B2 (en) * 2014-05-15 2016-05-31 Texas Instruments Incorporated Gang clips having distributed-function tie bars
US10438900B1 (en) * 2018-03-29 2019-10-08 Alpha And Omega Semiconductor (Cayman) Ltd. HV converter with reduced EMI
US20210082790A1 (en) * 2019-09-18 2021-03-18 Alpha And Omega Semiconductor (Cayman) Ltd. Power semiconductor package having integrated inductor and method of making the same
US11309233B2 (en) * 2019-09-18 2022-04-19 Alpha And Omega Semiconductor (Cayman), Ltd. Power semiconductor package having integrated inductor, resistor and capacitor
CN113410185B (zh) * 2021-06-04 2021-12-14 深圳真茂佳半导体有限公司 功率半导体器件封装结构及其制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004266096A (ja) * 2003-02-28 2004-09-24 Renesas Technology Corp 半導体装置及びその製造方法、並びに電子装置
JP2005217072A (ja) * 2004-01-28 2005-08-11 Renesas Technology Corp 半導体装置
WO2007067998A2 (en) * 2005-12-09 2007-06-14 Fairchild Semiconductor Corporation Device and method for assembling a top and bottom exposed packaged semiconductor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5877555A (en) * 1996-12-20 1999-03-02 Ericsson, Inc. Direct contact die attach
TWI265611B (en) * 2003-03-11 2006-11-01 Siliconware Precision Industries Co Ltd Semiconductor package with heatsink
WO2005122249A2 (en) * 2004-06-03 2005-12-22 International Rectifier Corporation Semiconductor device module with flip chip devices on a common lead frame
JP2006073655A (ja) * 2004-08-31 2006-03-16 Toshiba Corp 半導体モジュール
US7476976B2 (en) * 2005-02-23 2009-01-13 Texas Instruments Incorporated Flip chip package with advanced electrical and thermal properties for high current designs
US7504733B2 (en) * 2005-08-17 2009-03-17 Ciclon Semiconductor Device Corp. Semiconductor die package

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004266096A (ja) * 2003-02-28 2004-09-24 Renesas Technology Corp 半導体装置及びその製造方法、並びに電子装置
JP2005217072A (ja) * 2004-01-28 2005-08-11 Renesas Technology Corp 半導体装置
WO2007067998A2 (en) * 2005-12-09 2007-06-14 Fairchild Semiconductor Corporation Device and method for assembling a top and bottom exposed packaged semiconductor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012146765A (ja) * 2011-01-11 2012-08-02 Rohm Co Ltd 半導体装置および半導体装置の製造方法
WO2013157172A1 (ja) * 2012-04-20 2013-10-24 パナソニック株式会社 半導体パッケージ及びその製造方法、半導体モジュール、並びに半導体装置

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CN101473423A (zh) 2009-07-01
WO2007137221A2 (en) 2007-11-29
DE112007001240T5 (de) 2009-04-23
CN101473423B (zh) 2011-04-13
TW200810069A (en) 2008-02-16
KR20090009882A (ko) 2009-01-23
KR101157305B1 (ko) 2012-06-15
TWI452662B (zh) 2014-09-11
WO2007137221A3 (en) 2008-10-02

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