JP2009545162A - Soiデバイスおよびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000003990 capacitor Substances 0.000 claims abstract description 83
- 239000004065 semiconductor Substances 0.000 claims abstract description 68
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 47
- 239000012212 insulator Substances 0.000 claims abstract description 43
- 239000013078 crystal Substances 0.000 claims abstract description 22
- 239000012535 impurity Substances 0.000 claims abstract description 14
- 239000007772 electrode material Substances 0.000 claims abstract description 6
- 238000002955 isolation Methods 0.000 claims description 19
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 5
- 238000010168 coupling process Methods 0.000 claims 5
- 238000005859 coupling reaction Methods 0.000 claims 5
- 229920005591 polysilicon Polymers 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 16
- 229910052710 silicon Inorganic materials 0.000 abstract description 16
- 239000010703 silicon Substances 0.000 abstract description 16
- 238000007599 discharging Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 106
- 229910052751 metal Inorganic materials 0.000 description 36
- 239000002184 metal Substances 0.000 description 36
- 229910021332 silicide Inorganic materials 0.000 description 14
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 239000003989 dielectric material Substances 0.000 description 12
- 238000005468 ion implantation Methods 0.000 description 11
- 239000011229 interlayer Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 238000001465 metallisation Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000637 aluminium metallisation Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
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Abstract
Description
Claims (10)
- 半導体基板[34]、前記半導体基板の上を覆う埋込み絶縁体層[32]、および前記埋込み絶縁体層の上を覆う単結晶半導体層[30]を有する半導体オンインシュレータ(SOI)デバイス[53]の製造方法であって、
第1の電圧バス[100]と第2の電圧バス[102]の間に結合されたMOSコンデンサ[52]を形成するステップであって、前記MOSコンデンサは、前記MOSコンデンサの第1のプレート[64]を形成し、前記第1の電圧バス[100]に結合されたゲート電極材料と、前記ゲート電極材料の下部に、前記MOSコンデンサの第2のプレートを形成し、前記第2のバス[102]に結合された前記単結晶半導体層内の不純物ドープ領域[60]と、を有するステップと、
前記MOSコンデンサ[52]の前記第1のプレート[64]を、前記半導体基板[34]内に形成されたダイオード[177]に結合する放電経路[86,98,180,178]を形成するステップと含む方法。 - 放電経路を形成する前記ステップは、
前記単結晶半導体層[30]を貫通して前記埋込み絶縁体層[32]まで延びる誘電分離領域[57]を形成するステップと、
前記半導体基板の一部[98]を露出させるために、前記誘電分離領域および前記埋込み絶縁層を貫通する開口[74]をエッチングによって形成するステップと、
前記半導体基板内にPN接合ダイオード[177]を形成するために、前記開口を通って第1の導電性決定不純物をイオン注入するステップと、
前記半導体基板内の前記PN接合ダイオード[177]に前記第1の電圧バス[100]を接続するステップとを含む請求項1に記載の方法。 - 前記MOSコンデンサ[52]の前記第2のプレート[60]を、前記半導体基板[34]に結合する第2の放電経路[82,94,96,84]を形成するステップを更に含む請求項1に記載の方法。
- P型半導体基板[34]、前記P型半導体基板の上を覆う埋込み絶縁体層[32]、および前記埋込み絶縁体層の上を覆う単結晶半導体層[30]を有する半導体オンインシュレータ(SOI)デバイス[53]の製造方法であって、
前記単結晶半導体層を貫通して延びる絶縁分離領域[56,57,58]を形成するステップと、
前記P型半導体基板の一部[98]を露出させるために、前記誘電分離領域および前記埋込み絶縁体層[32]の1つ[57]を貫通して延びる開口[74]をエッチングするステップと、
前記P型半導体基板と共にPN接合ダイオード[177]を形成するN型領域[176]を形成するために、前記開口を貫通して露出された前記P型半導体基板の前記一部にN型不純物をドープするステップと、
コンデンサ[52]の第1のプレートを形成するために、前記単結晶半導体層[30]の一部[60]にN型不純物ドーパントをドープするステップと、
前記単結晶半導体層の前記一部の上を覆う絶縁体層[62]を形成するステップと、
前記コンデンサの第2のプレートを形成するために、前記絶縁体層[62]の上を覆う導電性電極[64]を形成するステップと、
前記コンデンサの前記第2のプレート[64]と前記N型領域[176]とに第1のバス[100]を結合するステップと、
前記コンデンサの前記第1のプレート[60]に第2のバス[102]を結合するステップとを含む方法。 - 前記P型半導体基板[34]の第2の一部[99]を露出させるために、前記誘電分離領域および前記埋込み絶縁体層[32]の1つ[57]を貫通して延びる第2の開口[75]をエッチングするステップと、
前記P型半導体基板へのコンタクト[78]を形成するために、前記P型半導体基板の前記第2の一部[99]にP型不純物をドープするステップと、
前記コンデンサの前記第1のプレート[60]と、前記P型半導体基板への前記コンタクト[78]とに前記第2のバス[102]を結合するステップとを更に含む請求項4に記載の方法。 - 導電性電極[64]を形成する前記ステップは、
前記絶縁体層の上を覆う多結晶シリコンの層を堆積するステップと、
導電性電極[64]、NMOSトランジスタ[300]のゲート電極[302]およびPMOSトランジスタ[200]のゲート電極[202]を形成するために前記多結晶シリコンの層をパターニングするステップとを含む請求項4に記載の方法。 - 半導体オンインシュレータ(SOI)デバイス[53]であって、
半導体基板[34]と、
前記半導体基板の上を覆う埋込み絶縁体層[32]と、
前記埋込み絶縁体層の上を覆う単結晶半導体層[30]と、
MOSコンデンサ[52]と、を有し、前記MOSコンデンサ[52]は、
前記MOSコンデンサ[52]の第1のプレートを形成する前記単結晶半導体層内の不純物ドープ領域[60]と、
前記不純物ドープ領域[60]の上を覆う誘電層[62]と、
前記誘電層の上を覆い、前記MOSコンデンサの第2のプレートを形成する導電材料[64]とを有し、
前記半導体基板内に形成されたPN接合ダイオード[177]と、
前記第1のプレート[60]に結合された第1の電圧バス[102]と、
前記第2のプレート[64]と前記PN接合ダイオード[177]とに接続された第2の電圧バス[100]とを有する半導体オンインシュレータ(SOI)デバイス。 - 前記半導体基板への電気的コンタクト[78]と、
前記電気的コンタクトを前記第1の電圧バスに結合する相互接続[84,96,94,82]とを更に有する請求項7に記載の半導体オンインシュレータ(SOI)デバイス。 - 前記単結晶半導体層[30]の第1の電気的に分離された部分[61]内に形成されたPMOSトランジスタ[200]と、
前記単結晶半導体層[30]の第2の電気的に分離された部分[63]内に形成されたNMOSトランジスタ[300]とを更に有し、
前記MOSコンデンサ[52]は、前記単結晶半導体層の第3の電気的に分離された部分[60]内に形成されている請求項8に記載の半導体オンインシュレータ(SOI)デバイス。 - 前記PMOSトランジスタ[200]のドレイン[206]は前記第1の電圧バス[102]に接続されており、前記NMOSトランジスタ[300]のドレイン[304]は前記第2の電圧バス[100]に接続されている請求項9に記載の半導体オンインシュレータ(SOI)デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US11/459,316 US7718503B2 (en) | 2006-07-21 | 2006-07-21 | SOI device and method for its fabrication |
PCT/US2007/016453 WO2008011144A1 (en) | 2006-07-21 | 2007-07-20 | Soi device and method for its fabrication |
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JP2009545162A true JP2009545162A (ja) | 2009-12-17 |
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JP2009521776A Pending JP2009545162A (ja) | 2006-07-21 | 2007-07-20 | Soiデバイスおよびその製造方法 |
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US (2) | US7718503B2 (ja) |
JP (1) | JP2009545162A (ja) |
KR (1) | KR20090042252A (ja) |
CN (1) | CN101512764B (ja) |
DE (1) | DE112007001725B4 (ja) |
GB (1) | GB2453487B (ja) |
TW (1) | TWI433305B (ja) |
WO (1) | WO2008011144A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014154818A (ja) * | 2013-02-13 | 2014-08-25 | Lapis Semiconductor Co Ltd | 半導体装置、半導体装置の製造方法および半導体装置を搭載したシステム |
JP2016164942A (ja) * | 2015-03-06 | 2016-09-08 | ラピスセミコンダクタ株式会社 | 半導体装置の製造方法および半導体積層構造物 |
JP2017183402A (ja) * | 2016-03-29 | 2017-10-05 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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- 2007-07-20 JP JP2009521776A patent/JP2009545162A/ja active Pending
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- 2007-07-20 CN CN2007800308720A patent/CN101512764B/zh not_active Expired - Fee Related
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US7718503B2 (en) | 2010-05-18 |
DE112007001725B4 (de) | 2013-10-17 |
KR20090042252A (ko) | 2009-04-29 |
CN101512764A (zh) | 2009-08-19 |
GB0901334D0 (en) | 2009-03-11 |
CN101512764B (zh) | 2013-01-09 |
US20080017906A1 (en) | 2008-01-24 |
TW200822347A (en) | 2008-05-16 |
TWI433305B (zh) | 2014-04-01 |
WO2008011144A1 (en) | 2008-01-24 |
US7915658B2 (en) | 2011-03-29 |
GB2453487B (en) | 2009-12-30 |
US20100187586A1 (en) | 2010-07-29 |
DE112007001725T5 (de) | 2009-06-10 |
GB2453487A (en) | 2009-04-08 |
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