JP2009543678A5 - - Google Patents

Download PDF

Info

Publication number
JP2009543678A5
JP2009543678A5 JP2009519546A JP2009519546A JP2009543678A5 JP 2009543678 A5 JP2009543678 A5 JP 2009543678A5 JP 2009519546 A JP2009519546 A JP 2009519546A JP 2009519546 A JP2009519546 A JP 2009519546A JP 2009543678 A5 JP2009543678 A5 JP 2009543678A5
Authority
JP
Japan
Prior art keywords
tool
filter layer
semiconductor processing
gas stream
processing tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009519546A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009543678A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2007/016011 external-priority patent/WO2008008497A1/en
Publication of JP2009543678A publication Critical patent/JP2009543678A/ja
Publication of JP2009543678A5 publication Critical patent/JP2009543678A5/ja
Pending legal-status Critical Current

Links

JP2009519546A 2006-07-13 2007-07-13 半導体処理ツールのためのフィルタリングシステム Pending JP2009543678A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83073706P 2006-07-13 2006-07-13
PCT/US2007/016011 WO2008008497A1 (en) 2006-07-13 2007-07-13 Filtering system for a semiconductor processing tool

Publications (2)

Publication Number Publication Date
JP2009543678A JP2009543678A (ja) 2009-12-10
JP2009543678A5 true JP2009543678A5 (enExample) 2010-09-02

Family

ID=38704806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009519546A Pending JP2009543678A (ja) 2006-07-13 2007-07-13 半導体処理ツールのためのフィルタリングシステム

Country Status (7)

Country Link
US (1) US7922791B2 (enExample)
EP (1) EP2040820B1 (enExample)
JP (1) JP2009543678A (enExample)
KR (1) KR101249093B1 (enExample)
CN (2) CN101489649B (enExample)
TW (1) TWI417130B (enExample)
WO (1) WO2008008497A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2269710A1 (en) 2000-05-05 2011-01-05 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
EP3119498B1 (en) 2014-03-19 2023-05-31 Entegris, Inc. Filter stack and method for replacing filters in a filter stack
TWI695017B (zh) * 2018-11-12 2020-06-01 濾能股份有限公司 羧酸聚合物作為氣態醇類去除材料的用途以及用於去除氣態醇類的濾網結構
US20250269354A1 (en) * 2019-09-13 2025-08-28 ChemDAQ Inc. Ethylene oxide scrubbing sheet
CN115485361A (zh) 2020-05-12 2022-12-16 Pbs生物技术公司 材料转移装置和相关的系统和方法
KR102840943B1 (ko) * 2020-12-29 2025-08-01 세메스 주식회사 기판 처리 장치
WO2023192620A1 (en) * 2022-03-31 2023-10-05 Entegris, Inc. Photocatalytic airborne molecular contamination removal system enhanced with passive adsorption
JP2023177972A (ja) * 2022-06-03 2023-12-14 富士フイルムビジネスイノベーション株式会社 微粒子の捕集装置と画像形成装置

Family Cites Families (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3019127A (en) 1957-10-07 1962-01-30 American Air Filter Co Filtering medium and method of making the same
US4224415A (en) 1958-07-18 1980-09-23 Rohm And Haas Company Polymerization processes and products therefrom
US3409691A (en) 1966-02-01 1968-11-05 Dow Chemical Co Porous cation exchange resins as selective sorbents in organic systems
US3607706A (en) 1967-08-04 1971-09-21 Ionics Method of making stable laminated cation-exchange membranes
USRE29410E (en) 1970-05-23 1977-09-20 C. Weinberger & Co., Ltd. Process for manufacturing of deodorizing air filters
GB1373388A (en) 1970-12-24 1974-11-13 Teijin Ltd Thermoplastic polymer fibres
JPS568901Y2 (enExample) 1975-07-23 1981-02-26
US4135896A (en) 1975-12-11 1979-01-23 Cvi Corporation Gas purifier having rechargeable adsorber filter with removeable rechargeable sample canister
US4055075A (en) 1976-04-08 1977-10-25 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
JPS5414478A (en) 1977-07-04 1979-02-02 Kurashiki Boseki Kk Method of uniformly pushing powdery substance to porous material
US4313832A (en) 1980-06-12 1982-02-02 Rohm And Haas Company Method for treatment of aqueous solutions with ion exchange fibers
US4322230A (en) 1980-09-08 1982-03-30 Donaldson Company, Inc. Unitized gas-particulate filter and housing
IT1179369B (it) 1984-05-15 1987-09-16 Ital Idee Srl Gruppo filtrante multiplo, particolarmente per impianti di aerazione e condizionamento per autoveicoli e ambienti chiusi, munito di mezzi di controllo dell'efficienza
US5133864A (en) 1985-09-16 1992-07-28 The Dow Chemical Company Filters employing particulate porous polymers
JPS63119233A (ja) 1986-11-07 1988-05-23 Hitachi Ltd Ｘ線転写装置
AU598606B2 (en) 1986-11-27 1990-06-28 Unitika Ltd. Adsorptive fiber sheet
US4760423A (en) 1987-03-12 1988-07-26 Savin Corporation Apparatus and method for reducing hydrocarbon emissions from a liquid-based electrophotographic copying machine
US5143552A (en) 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
EP0335034A1 (en) 1988-03-30 1989-10-04 Uop An integrated process for the removal of sulfur compounds from fluid streams
DE3813563C2 (de) 1988-04-22 2002-01-17 Mhb Filtration Gmbh & Co Kg Adsorptionsfilter mit hoher Luftdurchlässigkeit
US5023654A (en) 1988-10-31 1991-06-11 Brother Kogyo Kabushiki Kaisha Thermal fixing device for image recording apparatus
JP2736662B2 (ja) 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
US5582865A (en) 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
IT1229757B (it) 1989-05-18 1991-09-10 Fabrizio Mariani Filtro per la bonifica dell'aria, particolarmente studiato per uffici, abitazioni e ambienti industriali.
JP2954236B2 (ja) 1989-07-05 1999-09-27 保夫 横井 エアーフィルターの製造方法
US4946480A (en) 1989-09-27 1990-08-07 Hauville Francois P Filter apparatus with improved filtration and saturation level detector
US5130743A (en) 1989-10-23 1992-07-14 Brother Kogyo Kabushiki Kaisha Image forming apparatus having means for indicating timing of heat-fixing filter
US5204055A (en) 1989-12-08 1993-04-20 Massachusetts Institute Of Technology Three-dimensional printing techniques
US5387380A (en) 1989-12-08 1995-02-07 Massachusetts Institute Of Technology Three-dimensional printing techniques
US5181819A (en) 1990-10-09 1993-01-26 Tokyo Electron Sagami Limited Apparatus for processing semiconductors
US5219464A (en) 1990-10-09 1993-06-15 Tokyo Electron Limited Clean air apparatus
US5328758A (en) 1991-10-11 1994-07-12 Minnesota Mining And Manufacturing Company Particle-loaded nonwoven fibrous article for separations and purifications
US5166530A (en) 1991-12-20 1992-11-24 General Signal Corporation Illuminator for microlithographic integrated circuit manufacture
US5200554A (en) 1992-01-21 1993-04-06 Nasman Jan Anders H Bisphosphonic acid derivatives and their use
US5430303A (en) 1992-07-01 1995-07-04 Nikon Corporation Exposure apparatus
US5306321A (en) 1992-07-07 1994-04-26 Donaldson Company, Inc. Layered air filter medium having improved efficiency and pleatability
JPH0763578B2 (ja) 1992-08-04 1995-07-12 インターナショナル・ビジネス・マシーンズ・コーポレイション 環状アルキレンカーボネートの洗気による削減方法
JPH0663333A (ja) 1992-08-21 1994-03-08 Sumitomo Chem Co Ltd 空気浄化システム
JP3238495B2 (ja) 1992-11-02 2001-12-17 日本原子力研究所 クリーンルーム内の微量汚染空気の浄化方法
JPH06198123A (ja) 1992-11-05 1994-07-19 Toshiba Eng & Constr Co Ltd 気体の清浄化方法および気体ろ過用フィルタ
EP0825286A3 (en) 1992-11-18 2000-11-02 AQF Technologies LLC Fibrous structure containing immobilized particulate matter and process therefor
US5399377A (en) 1992-12-31 1995-03-21 The Board Of Trustees Of The University Of Illinois Borazine oligomers and composite materials including boron nitride and methods of making the same
US5290345A (en) 1993-01-13 1994-03-01 Donaldson Company, Inc. Refillable gas adsorption bed assembly and counterflow adsorber module
WO1994016802A1 (fr) 1993-01-25 1994-08-04 Daikin Industries, Ltd. Film poreux de polytetrafluorethylene et procede de fabrication
JP3334929B2 (ja) 1993-02-04 2002-10-15 東京エレクトロン株式会社 熱処理装置
US5514196A (en) 1993-02-04 1996-05-07 Tokyo Electron Limited Air cleaning apparatus
KR100242530B1 (ko) 1993-05-18 2000-02-01 히가시 데쓰로 필터장치
US5647356A (en) 1993-07-28 1997-07-15 Donaldson Company, Inc. Respirator cartridge with sealing fit test structure and method of use
JP3448670B2 (ja) 1993-09-02 2003-09-22 株式会社ニコン 露光装置及び素子製造方法
US5772738A (en) 1993-11-30 1998-06-30 Purex Co., Ltd. Multifunctional air filter and air-circulating clean unit with the same incorporated therein
US5607647A (en) 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5462485A (en) 1993-12-03 1995-10-31 Extraction Systems, Inc. Controlling air quality
DE4407149B4 (de) 1994-03-04 2006-06-29 Mhb Filtration Gmbh & Co. Kg Verfahren zur Herstellung einer mehrlagigen Adsorptionsfilterschicht
SE515506C2 (sv) 1994-06-17 2001-08-20 Mhb Filtration Gmbh & Co Kg Luktfilter för ventilationsutloppshuvar
SE509743C2 (sv) 1994-06-17 1999-03-01 Bluecher Hasso Von Adsorptionsfilterskikt
JPH0824534A (ja) 1994-07-18 1996-01-30 Ebara Corp 再生可能な空気清浄用イオン交換フィルタユニット及びそれを用いる空気清浄方法
US5685895A (en) 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
US5675752A (en) 1994-09-15 1997-10-07 Sony Corporation Interactive applications generator for an interactive presentation environment
TW288051B (enExample) 1994-11-22 1996-10-11 Ebara Corp
JPH08168628A (ja) 1994-11-29 1996-07-02 Piyuaretsukusu:Kk 多機能エアフィルター及び該フィルターが組込まれた空気循環式クリーンユニット
US5856198A (en) 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
SE9501369D0 (sv) 1995-04-12 1995-04-12 Curt Lindhe Konsult & Foervalt Multiple filter unit
JP3346680B2 (ja) 1995-05-11 2002-11-18 株式会社西部技研 湿気交換用吸着体
US5833726A (en) 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
US5834114A (en) 1995-05-31 1998-11-10 The Board Of Trustees Of The University Of Illinois Coated absorbent fibers
KR100197335B1 (ko) * 1995-12-22 1999-06-15 윤종용 반도체 장치의 가스 세정기 및 이를 이용한 필터링법
KR100197900B1 (ko) 1996-07-24 1999-06-15 윤종용 반도체 청정실용의 공기조화시스템
US5743927A (en) 1996-07-31 1998-04-28 Donaldson Company, Inc. Air filter element; assembly; and, method
JPH10165730A (ja) 1996-12-16 1998-06-23 Takasago Thermal Eng Co Ltd ガス状不純物吸着フィルタ
US6096267A (en) 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
US5928792A (en) 1997-05-01 1999-07-27 Millipore Corporation Process for making surface modified porous membrane with perfluorocarbon copolymer
US6033573A (en) 1997-05-29 2000-03-07 The United States Of America As Represented By The Secretary Of Agriculture Activated nutshell carbons from agricultural waste
US5964927A (en) 1997-07-11 1999-10-12 Donaldson Company, Inc. Adsorption apparatus
US6056805A (en) 1997-08-15 2000-05-02 Guardian Environmental Technologies, Inc. Method and apparatus for the absorption of non-polar organic molecules on hydrocarbon block copolymers
US6068685A (en) 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6013821A (en) * 1998-06-25 2000-01-11 Abbott Laboratories Removal of silylated compounds from solvent and gas waste streams
EP1022043A4 (en) 1998-08-05 2001-11-14 Toray Industries CHEMICAL FILTER UNIT AND GAS CLEANING DEVICE
WO2000010687A1 (en) 1998-08-20 2000-03-02 Extraction Systems, Inc. Filters employing porous strongly acidic polymers
DE19844167A1 (de) 1998-09-25 2000-04-06 Ticona Gmbh Aktivkohlefilter
WO2000025896A1 (en) 1998-11-03 2000-05-11 Donaldson Company, Inc. Gas chemical filter having compression mechanism; and methods
DE19859788C1 (de) 1998-12-23 2000-03-23 Draeger Sicherheitstech Gmbh Vorrichtung und Verfahren zur Anzeige der Erschöpfung eines Gasfilters
US6207460B1 (en) 1999-01-14 2001-03-27 Extraction Systems, Inc. Detection of base contaminants in gas samples
US7540901B2 (en) 2000-05-05 2009-06-02 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
EP2269710A1 (en) 2000-05-05 2011-01-05 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
JP2001317000A (ja) * 2000-05-08 2001-11-16 Osaka Gas Co Ltd 活性炭含有紙およびエアフィルター
CA2413592A1 (en) 2000-06-23 2002-01-03 Nigel P. Hacker Method to restore hydrophobicity in dielectric films and materials
US6533847B2 (en) * 2001-02-13 2003-03-18 Donaldson Company, Inc. Adsorption apparatus
US7264648B1 (en) * 2003-06-19 2007-09-04 Applied Filter Technology, Inc. Removing siloxanes from a gas using a segmented filtration system customized to the gas composition
US7132011B2 (en) * 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter
KR200446239Y1 (ko) 2009-02-24 2009-10-09 (주)에스티에스테크놀로지 반도체 산업용 가스 여과필터

Similar Documents

Publication Publication Date Title
JP2009543678A5 (enExample)
CN106268355B (zh) 一种不对称超亲/疏水双性聚合物膜及其制备方法
CN101506087A (zh) 用于净化光罩存储器的系统
JP2011507683A5 (enExample)
CN110665377B (zh) 一种高通量抗污染反渗透膜及其制备方法
WO2007123679A3 (en) Layered filter for treatment of contaminated fluids
TWI674141B (zh) 流體化顆粒狀吸收床過濾器
KR101249093B1 (ko) 반도체 공정 툴용 필터링 시스템
CN204352704U (zh) 一种喷淋式空气净化除尘装置
JP2025090603A (ja) アミンから金属種を除去するための膜
CN103619454A (zh) 纳米筛复合物膜
CN106422662A (zh) 一种有机废气净化装置
WO2020203142A1 (ja) 微粒子除去装置及び微粒子除去方法
Shen et al. A mini review on contamination control in ultrapure liquids for semiconductor manufacturing–From the perspective of liquid-solid interfaces
WO2012056668A1 (ja) 水処理用逆浸透膜構造体及び逆浸透膜モジュール
CN102778010B (zh) 空气净化装置的自控系统
CN204478302U (zh) 一种空气净化装置
CN111670071B (zh) 射流流体净化装置和相关的净化方法
CN206304536U (zh) 一种有机废气净化装置
CN206762320U (zh) 一种树脂塔的反冲洗系统
CN205627669U (zh) 一种抗污染高通量复合膜及其膜组件
JP2019509893A (ja) ノズルフィルタ
TW202233299A (zh) 微粒子除去裝置、純水或超純水製造裝置、及液體中的微粒子除去方法
CN107807001B (zh) 过滤性能测试系统及方法
CN215742719U (zh) 一种废气吸附装置