JP2009540604A5 - - Google Patents

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Publication number
JP2009540604A5
JP2009540604A5 JP2009515420A JP2009515420A JP2009540604A5 JP 2009540604 A5 JP2009540604 A5 JP 2009540604A5 JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009540604 A5 JP2009540604 A5 JP 2009540604A5
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JP
Japan
Prior art keywords
laser
frequency
resonator
output
phase
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Application number
JP2009515420A
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English (en)
Japanese (ja)
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JP5118694B2 (ja
JP2009540604A (ja
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Priority claimed from US11/810,090 external-priority patent/US7545838B2/en
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Publication of JP2009540604A publication Critical patent/JP2009540604A/ja
Publication of JP2009540604A5 publication Critical patent/JP2009540604A5/ja
Application granted granted Critical
Publication of JP5118694B2 publication Critical patent/JP5118694B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009515420A 2006-06-12 2007-06-05 レーザビームの非干渉合成 Expired - Fee Related JP5118694B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US81287706P 2006-06-12 2006-06-12
US60/812,877 2006-06-12
US11/810,090 US7545838B2 (en) 2006-06-12 2007-06-04 Incoherent combination of laser beams
US11/810,090 2007-06-04
PCT/US2007/013218 WO2007145933A2 (en) 2006-06-12 2007-06-05 Incoherent combination of laser beams

Publications (3)

Publication Number Publication Date
JP2009540604A JP2009540604A (ja) 2009-11-19
JP2009540604A5 true JP2009540604A5 (https=) 2010-05-27
JP5118694B2 JP5118694B2 (ja) 2013-01-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009515420A Expired - Fee Related JP5118694B2 (ja) 2006-06-12 2007-06-05 レーザビームの非干渉合成

Country Status (3)

Country Link
US (1) US7545838B2 (https=)
JP (1) JP5118694B2 (https=)
WO (1) WO2007145933A2 (https=)

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DK2565996T3 (da) 2011-09-05 2014-01-13 Alltec Angewandte Laserlicht Technologie Gmbh Laserindretning med en laserenhed og en fluidbeholder til en køleindretning af laserenheden
EP2564976B1 (en) 2011-09-05 2015-06-10 ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung Marking apparatus with at least one gas laser and heat dissipator
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JP2015531895A (ja) * 2012-09-24 2015-11-05 リモ パテントフェルヴァルトゥング ゲーエムベーハー ウント コー.カーゲーLIMO Patentverwaltung GmbH & Co.KG 作業面におけるレーザビームの線形強度分布を発生させるための装置
US9151940B2 (en) 2012-12-05 2015-10-06 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
DE102013103422B4 (de) * 2013-04-05 2022-01-05 Focuslight Technologies Inc. Vorrichtung zur Erzeugung von Laserstrahlung mit einer linienförmigen Intensitätsverteilung
US9525265B2 (en) * 2014-06-20 2016-12-20 Kla-Tencor Corporation Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KR101718207B1 (ko) * 2015-05-04 2017-04-05 한국과학기술원 전자 주파수로 태깅되는 단일 검출기를 사용한 광 간섭의 연쇄적 록킹 방법 및 시스템
WO2017110121A1 (ja) * 2015-12-25 2017-06-29 鴻海精密工業股▲ふん▼有限公司 ラインビーム光源およびラインビーム照射装置ならびにレーザリフトオフ方法
WO2021138026A1 (en) * 2019-12-31 2021-07-08 Cymer, Llc Dual pulsed power system with independent voltage and timing control and reduced power consumption
CN113219477B (zh) * 2020-01-21 2025-04-11 深圳引望智能技术有限公司 激光探测装置及其制造方法
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