JP2009540604A5 - - Google Patents
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- Publication number
- JP2009540604A5 JP2009540604A5 JP2009515420A JP2009515420A JP2009540604A5 JP 2009540604 A5 JP2009540604 A5 JP 2009540604A5 JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009540604 A5 JP2009540604 A5 JP 2009540604A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- frequency
- resonator
- output
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 claims 3
- 238000003786 synthesis reaction Methods 0.000 claims 3
- 239000002131 composite material Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000003595 spectral effect Effects 0.000 claims 2
- 230000002194 synthesizing effect Effects 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81287706P | 2006-06-12 | 2006-06-12 | |
| US60/812,877 | 2006-06-12 | ||
| US11/810,090 US7545838B2 (en) | 2006-06-12 | 2007-06-04 | Incoherent combination of laser beams |
| US11/810,090 | 2007-06-04 | ||
| PCT/US2007/013218 WO2007145933A2 (en) | 2006-06-12 | 2007-06-05 | Incoherent combination of laser beams |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009540604A JP2009540604A (ja) | 2009-11-19 |
| JP2009540604A5 true JP2009540604A5 (https=) | 2010-05-27 |
| JP5118694B2 JP5118694B2 (ja) | 2013-01-16 |
Family
ID=38832325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009515420A Expired - Fee Related JP5118694B2 (ja) | 2006-06-12 | 2007-06-05 | レーザビームの非干渉合成 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7545838B2 (https=) |
| JP (1) | JP5118694B2 (https=) |
| WO (1) | WO2007145933A2 (https=) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7514305B1 (en) * | 2006-06-28 | 2009-04-07 | Ultratech, Inc. | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate |
| US9086375B2 (en) * | 2008-04-29 | 2015-07-21 | Daylight Solutions, Inc. | Laser source with a large spectral range |
| DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
| DE102008027229B4 (de) * | 2008-06-06 | 2016-06-30 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
| JP5866118B2 (ja) * | 2009-07-30 | 2016-02-17 | ネイサン ポール モンティー, | 中範囲のガス圧を用いる歯科用レーザシステム |
| US8596823B2 (en) | 2010-09-07 | 2013-12-03 | Coherent, Inc. | Line-projection apparatus for arrays of diode-laser bar stacks |
| US8602592B2 (en) | 2011-04-07 | 2013-12-10 | Coherent, Inc. | Diode-laser illuminator with interchangeable modules for changing irradiance and beam dimensions |
| US9793673B2 (en) | 2011-06-13 | 2017-10-17 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
| ES2530070T3 (es) * | 2011-09-05 | 2015-02-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Aparato de marcado con una pluralidad de láseres y conjuntos ajustables individualmente de medios de desviación |
| DK2565994T3 (en) | 2011-09-05 | 2014-03-10 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device and method for marking an object |
| DK2564973T3 (en) * | 2011-09-05 | 2015-01-12 | Alltec Angewandte Laserlicht Technologie Ges Mit Beschränkter Haftung | Marking apparatus having a plurality of lasers and a kombineringsafbøjningsindretning |
| ES2544269T3 (es) * | 2011-09-05 | 2015-08-28 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Aparato de marcado con una pluralidad de láseres de gas con tubos de resonancia y medios de deflexión ajustables individualmente |
| EP2564972B1 (en) * | 2011-09-05 | 2015-08-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with a plurality of lasers, deflection means and telescopic means for each laser beam |
| DK2565996T3 (da) | 2011-09-05 | 2014-01-13 | Alltec Angewandte Laserlicht Technologie Gmbh | Laserindretning med en laserenhed og en fluidbeholder til en køleindretning af laserenheden |
| EP2564976B1 (en) | 2011-09-05 | 2015-06-10 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with at least one gas laser and heat dissipator |
| ES2438751T3 (es) | 2011-09-05 | 2014-01-20 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Dispositivo y procedimiento para marcar un objeto por medio de un rayo láser |
| KR101865222B1 (ko) | 2011-10-18 | 2018-06-08 | 삼성디스플레이 주식회사 | 레이저 결정화 장치 및 레이저 결정화 방법 |
| WO2014024196A2 (en) * | 2012-08-09 | 2014-02-13 | Israel Aerospace Industries Ltd. | Friend or foe identification system and method |
| JP2015531895A (ja) * | 2012-09-24 | 2015-11-05 | リモ パテントフェルヴァルトゥング ゲーエムベーハー ウント コー.カーゲーLIMO Patentverwaltung GmbH & Co.KG | 作業面におけるレーザビームの線形強度分布を発生させるための装置 |
| US9151940B2 (en) | 2012-12-05 | 2015-10-06 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
| DE102013103422B4 (de) * | 2013-04-05 | 2022-01-05 | Focuslight Technologies Inc. | Vorrichtung zur Erzeugung von Laserstrahlung mit einer linienförmigen Intensitätsverteilung |
| US9525265B2 (en) * | 2014-06-20 | 2016-12-20 | Kla-Tencor Corporation | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms |
| KR101718207B1 (ko) * | 2015-05-04 | 2017-04-05 | 한국과학기술원 | 전자 주파수로 태깅되는 단일 검출기를 사용한 광 간섭의 연쇄적 록킹 방법 및 시스템 |
| WO2017110121A1 (ja) * | 2015-12-25 | 2017-06-29 | 鴻海精密工業股▲ふん▼有限公司 | ラインビーム光源およびラインビーム照射装置ならびにレーザリフトオフ方法 |
| WO2021138026A1 (en) * | 2019-12-31 | 2021-07-08 | Cymer, Llc | Dual pulsed power system with independent voltage and timing control and reduced power consumption |
| CN113219477B (zh) * | 2020-01-21 | 2025-04-11 | 深圳引望智能技术有限公司 | 激光探测装置及其制造方法 |
| US11317668B1 (en) | 2020-11-04 | 2022-05-03 | Invisastrands LLC | Device and method for integrating hair extensions |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3476463A (en) * | 1965-05-11 | 1969-11-04 | Perkin Elmer Corp | Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface |
| US3793595A (en) * | 1971-12-27 | 1974-02-19 | Perkin Elmer Corp | Single frequency stabilized laser |
| US4025875A (en) * | 1976-01-05 | 1977-05-24 | Nasa | Length controlled stabilized mode-lock Nd:YAG laser |
| JPS5790987A (en) | 1980-11-26 | 1982-06-05 | Fujitsu Ltd | Controlling device of laser frequency |
| JPS62142095A (ja) * | 1985-12-12 | 1987-06-25 | Mitsubishi Electric Corp | レ−ザ加工装置 |
| DE3750693T3 (de) * | 1986-11-28 | 1999-12-23 | Fuji Photo Film Co., Ltd. | Optisches System für Laser. |
| JPH01287979A (ja) | 1988-05-13 | 1989-11-20 | Brother Ind Ltd | 安定化レーザ光源装置 |
| US5311196A (en) * | 1993-07-16 | 1994-05-10 | The United States Of America As Represented By The Secretary Of The Air Force | Optical system for microwave beamforming using intensity summing |
| US5397327A (en) * | 1993-07-27 | 1995-03-14 | Coherent, Inc. | Surgical laser handpiece for slit incisions |
| US5778016A (en) * | 1994-04-01 | 1998-07-07 | Imra America, Inc. | Scanning temporal ultrafast delay methods and apparatuses therefor |
| US5674414A (en) * | 1994-11-11 | 1997-10-07 | Carl-Zeiss Stiftung | Method and apparatus of irradiating a surface of a workpiece with a plurality of beams |
| JP3141715B2 (ja) * | 1994-12-22 | 2001-03-05 | 松下電器産業株式会社 | レーザ加工方法 |
| IL140386A0 (en) | 2000-12-18 | 2002-02-10 | Rayteq Laser Ind Ltd | Optical device for unifying light beams emitted by several light sources |
| DE19915000C2 (de) * | 1999-04-01 | 2002-05-08 | Microlas Lasersystem Gmbh | Vorrichtung und Verfahren zum Steuern der Intensitätsverteilung eines Laserstrahls |
| US6838638B2 (en) * | 2000-07-31 | 2005-01-04 | Toyota Jidosha Kabushiki Kaisha | Laser beam machining method |
| JP2002141301A (ja) * | 2000-11-02 | 2002-05-17 | Mitsubishi Electric Corp | レーザアニーリング用光学系とこれを用いたレーザアニーリング装置 |
| WO2002075935A2 (en) * | 2001-03-15 | 2002-09-26 | Iolon, Inc. | Apparatus for frequency tuning and locking and method for operating same |
| WO2002090037A1 (en) * | 2001-05-09 | 2002-11-14 | Electro Scientific Industries, Inc. | Micromachining with high-energy, intra-cavity q-switched co2 laser pulses |
| US6660699B2 (en) * | 2001-09-28 | 2003-12-09 | Unilever Home & Personal Care Usa | Toilet bar having a latent acidifier |
| DE10148167A1 (de) | 2001-09-28 | 2003-04-17 | Zeiss Carl Jena Gmbh | Beleuchtungsanordnung |
| US6750423B2 (en) * | 2001-10-25 | 2004-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device |
| TWI289896B (en) * | 2001-11-09 | 2007-11-11 | Semiconductor Energy Lab | Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device |
| US7113527B2 (en) * | 2001-12-21 | 2006-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Method and apparatus for laser irradiation and manufacturing method of semiconductor device |
| US7199330B2 (en) * | 2004-01-20 | 2007-04-03 | Coherent, Inc. | Systems and methods for forming a laser beam having a flat top |
-
2007
- 2007-06-04 US US11/810,090 patent/US7545838B2/en not_active Expired - Fee Related
- 2007-06-05 WO PCT/US2007/013218 patent/WO2007145933A2/en not_active Ceased
- 2007-06-05 JP JP2009515420A patent/JP5118694B2/ja not_active Expired - Fee Related
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