JP2009540604A - レーザビームの非干渉合成 - Google Patents
レーザビームの非干渉合成 Download PDFInfo
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- JP2009540604A JP2009540604A JP2009515420A JP2009515420A JP2009540604A JP 2009540604 A JP2009540604 A JP 2009540604A JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009515420 A JP2009515420 A JP 2009515420A JP 2009540604 A JP2009540604 A JP 2009540604A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
- H01S5/0651—Mode control
- H01S5/0652—Coherence lowering or collapse, e.g. multimode emission by additional input or modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
【選択図】図3A
Description
曲線の両方で2つのレーザ間の周波数分離が10kHz以下となる確率は0.25%(0.0025)のオーダーである。この値は、レーザアニーリングシステムで十分に許容される値である。相対正弦波振幅(すなわち、図2のx軸)を値2.0に維持することは、2つの隣接レーザ間で他に多く生じうる周波数分離条件と同程度に許容できるシステムを生み出すことができる。このことは、2MHzの最大振幅周波数スイープ駆動電圧をレーザのPZTに直角位相で作用することによりなされる。
Claims (6)
- 複数のレーザ共振器からビームを合成する方法であって:
レーザ共振器のそれぞれの出力ビームをレーザ共振器の自由スペクトル領域と略等しいかあるいは少ない周波数変動域で周波数変調する工程であって、レーザ共振器の少なくとも1つの周波数変調は他のレーザ共振器のいずれかの周波数変調と位相がずれている、工程と;
周波数変調した出力ビームを離間した平行な経路に導く工程であって、該径路の間隔は前記周波数変調した出力ビームが経路に沿った所定の距離における経路を横断する面で少なくとも部分的に重なるようになされた、工程とを備える;
方法。 - 前記複数のレーザ共振器には7つのレーザ共振器があり、該レーザ共振器のうち4つは互いに同位相で周波数変調され、該レーザ共振器のうち3つは他の4つのレーザ共振器と直角位相で周波数変調される;
請求項1の方法。 - 前記出力ビームのそれぞれはほぼガウス強度分布を有し、前記出力ビームのピーク強度と幅は、前記面で重なるビームがフラットトップ強度分布を有する合成ビームを提供するようになされる;
請求項1の方法。 - それぞれが出力ビームを生ずる複数のレーザ共振器と;
レーザ共振器のそれぞれの出力ビームをレーザ共振器の自由スペクトル領域と略等しいかあるいは少ない周波数変動域で周波数変調する変調機構であって、レーザ共振器の少なくとも1つの周波数変調は他のレーザ共振器のいずれかの周波数変調と位相がずれている、変調機構と;
周波数変調した出力ビームを離間した平行な経路に導くビーム配置機構であって、該径路の間隔は前記周波数変調した出力ビームが経路に沿った所定の距離における経路を横断する面で少なくとも部分的に重なるようになされた、ビーム配置機構とを備える;
レーザビーム合成システム。 - 前記複数のレーザ共振器には7つのレーザ共振器があり、該レーザ共振器のうち4つは互いに同位相で周波数変調され、該レーザ共振器のうち3つは他の4つのレーザ共振器と直角位相で周波数変調される;
請求項4のレーザビーム合成システム。 - 前記出力ビームのそれぞれはほぼガウス強度分布を有し、前記出力ビームのピーク強度と幅は、前記面で重なるビームがフラットトップ強度分布を有する合成ビームを提供するようになされる;
請求項4のレーザビーム合成システム。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US81287706P | 2006-06-12 | 2006-06-12 | |
US60/812,877 | 2006-06-12 | ||
US11/810,090 | 2007-06-04 | ||
US11/810,090 US7545838B2 (en) | 2006-06-12 | 2007-06-04 | Incoherent combination of laser beams |
PCT/US2007/013218 WO2007145933A2 (en) | 2006-06-12 | 2007-06-05 | Incoherent combination of laser beams |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009540604A true JP2009540604A (ja) | 2009-11-19 |
JP2009540604A5 JP2009540604A5 (ja) | 2010-05-27 |
JP5118694B2 JP5118694B2 (ja) | 2013-01-16 |
Family
ID=38832325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009515420A Expired - Fee Related JP5118694B2 (ja) | 2006-06-12 | 2007-06-05 | レーザビームの非干渉合成 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7545838B2 (ja) |
JP (1) | JP5118694B2 (ja) |
WO (1) | WO2007145933A2 (ja) |
Cited By (1)
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KR20160130922A (ko) * | 2015-05-04 | 2016-11-15 | 한국과학기술원 | 전자 주파수로 태깅되는 단일 검출기를 사용한 광 간섭의 연쇄적 록킹 방법 및 시스템 |
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DE102008027229B4 (de) * | 2008-06-06 | 2016-06-30 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
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WO2011014802A2 (en) * | 2009-07-30 | 2011-02-03 | Nathan Paul Monty | Dental laser system using midrange gas pressure |
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US8602592B2 (en) | 2011-04-07 | 2013-12-10 | Coherent, Inc. | Diode-laser illuminator with interchangeable modules for changing irradiance and beam dimensions |
US9793673B2 (en) | 2011-06-13 | 2017-10-17 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
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ES2544269T3 (es) * | 2011-09-05 | 2015-08-28 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Aparato de marcado con una pluralidad de láseres de gas con tubos de resonancia y medios de deflexión ajustables individualmente |
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KR101865222B1 (ko) | 2011-10-18 | 2018-06-08 | 삼성디스플레이 주식회사 | 레이저 결정화 장치 및 레이저 결정화 방법 |
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CN104769479B (zh) * | 2012-09-24 | 2017-08-01 | Limo专利管理有限及两合公司 | 用于在工作平面内产生激光辐射的线性强度分布的设备 |
US9151940B2 (en) | 2012-12-05 | 2015-10-06 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
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2007
- 2007-06-04 US US11/810,090 patent/US7545838B2/en not_active Expired - Fee Related
- 2007-06-05 JP JP2009515420A patent/JP5118694B2/ja not_active Expired - Fee Related
- 2007-06-05 WO PCT/US2007/013218 patent/WO2007145933A2/en active Application Filing
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KR101718207B1 (ko) | 2015-05-04 | 2017-04-05 | 한국과학기술원 | 전자 주파수로 태깅되는 단일 검출기를 사용한 광 간섭의 연쇄적 록킹 방법 및 시스템 |
Also Published As
Publication number | Publication date |
---|---|
WO2007145933A3 (en) | 2008-03-13 |
US20070295974A1 (en) | 2007-12-27 |
US7545838B2 (en) | 2009-06-09 |
JP5118694B2 (ja) | 2013-01-16 |
WO2007145933A2 (en) | 2007-12-21 |
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