JP2009532894A - ホール検査装置及び前記装置を用いるホール検査方法 - Google Patents

ホール検査装置及び前記装置を用いるホール検査方法 Download PDF

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Publication number
JP2009532894A
JP2009532894A JP2009504120A JP2009504120A JP2009532894A JP 2009532894 A JP2009532894 A JP 2009532894A JP 2009504120 A JP2009504120 A JP 2009504120A JP 2009504120 A JP2009504120 A JP 2009504120A JP 2009532894 A JP2009532894 A JP 2009532894A
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Japan
Prior art keywords
hole
electron beam
electron
holes
conductive layer
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Pending
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JP2009504120A
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English (en)
Japanese (ja)
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JP2009532894A5 (enExample
Inventor
キム・ホセオブ
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CEBT Co Ltd
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CEBT Co Ltd
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Publication of JP2009532894A publication Critical patent/JP2009532894A/ja
Publication of JP2009532894A5 publication Critical patent/JP2009532894A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/307—Contactless testing using electron beams of integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission
    • H01J2237/0635—Multiple source, e.g. comb or array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
    • H01J2237/281—Bottom of trenches or holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2009504120A 2006-04-03 2007-04-03 ホール検査装置及び前記装置を用いるホール検査方法 Pending JP2009532894A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20060030129 2006-04-03
PCT/KR2007/001634 WO2007114642A1 (en) 2006-04-03 2007-04-03 Hole inspection apparatus and hole inspection method using the same

Publications (2)

Publication Number Publication Date
JP2009532894A true JP2009532894A (ja) 2009-09-10
JP2009532894A5 JP2009532894A5 (enExample) 2012-10-25

Family

ID=38563867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009504120A Pending JP2009532894A (ja) 2006-04-03 2007-04-03 ホール検査装置及び前記装置を用いるホール検査方法

Country Status (7)

Country Link
US (1) US7968844B2 (enExample)
EP (1) EP2002473A4 (enExample)
JP (1) JP2009532894A (enExample)
KR (4) KR20110131301A (enExample)
CN (1) CN101416295A (enExample)
TW (1) TWI334933B (enExample)
WO (1) WO2007114642A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102053106B (zh) * 2009-11-09 2013-03-27 中芯国际集成电路制造(上海)有限公司 一种缺陷检测方法
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus
WO2011151116A1 (en) * 2010-06-03 2011-12-08 Carl Zeiss Sms Gmbh A method for determining the performance of a photolithographic mask
US8399264B2 (en) * 2010-11-30 2013-03-19 Intel Corporation Alignment inspection
KR101339227B1 (ko) 2011-12-08 2013-12-11 기아자동차주식회사 자동변속기의 댐퍼 클러치 제어방법
US9304160B1 (en) 2012-05-08 2016-04-05 Kla-Tencor Corporation Defect inspection apparatus, system, and method
JP6069723B2 (ja) * 2012-06-06 2017-02-01 澁谷工業株式会社 微小ボール搭載ワークのリペア装置
US9932664B2 (en) 2012-11-06 2018-04-03 Purdue Research Foundation Methods for directed irradiation synthesis with ion and thermal beams
JP5965851B2 (ja) * 2013-02-15 2016-08-10 株式会社日立ハイテクノロジーズ 試料観察装置
KR102086362B1 (ko) 2013-03-08 2020-03-09 삼성전자주식회사 편광화된 빛을 이용하여 공정을 모니터링하는 반도체 제조 설비 및 모니터링 방법
WO2014189465A1 (en) * 2013-05-23 2014-11-27 Tao Luo Multi-column electron beam inspection that uses custom printing methods
JP2015141985A (ja) * 2014-01-28 2015-08-03 株式会社東芝 検査装置、及び検査方法
KR20170031806A (ko) * 2015-08-13 2017-03-22 한국기계연구원 전자빔을 이용한 인쇄회로기판의 검사장치 및 방법
KR101720697B1 (ko) * 2016-07-06 2017-04-03 씨이비티 주식회사 대면적 전계방출원 장치에의 전자 방출원의 균일 방출 검사 방법
CN108615666B (zh) * 2016-12-09 2024-04-19 上海凯世通半导体股份有限公司 束流检测装置
US10649026B2 (en) * 2017-03-30 2020-05-12 Globalfoundries Inc. Apparatus for and method of net trace prior level subtraction
WO2020084729A1 (ja) * 2018-10-25 2020-04-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置のオートフォーカス処理方法、及び検出器
WO2020141094A1 (en) * 2018-12-31 2020-07-09 Asml Netherlands B.V. A charged particle beam system for scanning a sample

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582607A (ja) 1991-09-20 1993-04-02 Fujitsu Ltd パターン検査装置
JP2000100369A (ja) * 1998-09-28 2000-04-07 Jeol Ltd 荷電粒子ビーム装置
JP2000174077A (ja) * 1998-12-08 2000-06-23 Nec Corp 半導体ウエハーの検査方法
JP2002083849A (ja) 1999-11-05 2002-03-22 Nec Corp 半導体デバイス検査装置
JP2004235464A (ja) 2003-01-30 2004-08-19 Fab Solution Kk 半導体デバイス解析装置および解析方法
JP2006505114A (ja) 2002-02-04 2006-02-09 アプライド マテリアルズ イスラエル リミテッド コンタクトホール製造の監視

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5384463A (en) * 1991-06-10 1995-01-24 Fujisu Limited Pattern inspection apparatus and electron beam apparatus
JP3732738B2 (ja) * 2000-12-08 2006-01-11 ファブソリューション株式会社 半導体デバイス検査装置
JP2002231780A (ja) * 2001-01-30 2002-08-16 Jeol Ltd 荷電粒子ビームを用いたホールの検査方法
US7038224B2 (en) * 2002-07-30 2006-05-02 Applied Materials, Israel, Ltd. Contact opening metrology
JP2004071954A (ja) * 2002-08-08 2004-03-04 Jeol Ltd ホールの検査方法
KR101110224B1 (ko) * 2003-01-27 2012-02-15 가부시끼가이샤 도시바 샘플에서 반사된 전자들을 이용하여 샘플을 검사하는 맵핑 투영식 전자빔 장치
KR100562701B1 (ko) * 2004-01-07 2006-03-23 삼성전자주식회사 전자 소스 및 이를 이용한 구멍의 오픈 불량 검사 장치와방법
JP2005233757A (ja) * 2004-02-19 2005-09-02 Oki Electric Ind Co Ltd ホールパターン検査方法及びホールパターン検査装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582607A (ja) 1991-09-20 1993-04-02 Fujitsu Ltd パターン検査装置
JP2000100369A (ja) * 1998-09-28 2000-04-07 Jeol Ltd 荷電粒子ビーム装置
JP2000174077A (ja) * 1998-12-08 2000-06-23 Nec Corp 半導体ウエハーの検査方法
JP2002083849A (ja) 1999-11-05 2002-03-22 Nec Corp 半導体デバイス検査装置
JP2006505114A (ja) 2002-02-04 2006-02-09 アプライド マテリアルズ イスラエル リミテッド コンタクトホール製造の監視
JP2004235464A (ja) 2003-01-30 2004-08-19 Fab Solution Kk 半導体デバイス解析装置および解析方法

Also Published As

Publication number Publication date
US20090152461A1 (en) 2009-06-18
TW200739110A (en) 2007-10-16
EP2002473A1 (en) 2008-12-17
KR20140100477A (ko) 2014-08-14
US7968844B2 (en) 2011-06-28
KR101484454B1 (ko) 2015-01-22
KR20130100191A (ko) 2013-09-09
WO2007114642A1 (en) 2007-10-11
KR20110131301A (ko) 2011-12-06
EP2002473A4 (en) 2011-08-03
TWI334933B (en) 2010-12-21
KR20080102232A (ko) 2008-11-24
CN101416295A (zh) 2009-04-22

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