JP2009518784A5 - - Google Patents
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- JP2009518784A5 JP2009518784A5 JP2008543639A JP2008543639A JP2009518784A5 JP 2009518784 A5 JP2009518784 A5 JP 2009518784A5 JP 2008543639 A JP2008543639 A JP 2008543639A JP 2008543639 A JP2008543639 A JP 2008543639A JP 2009518784 A5 JP2009518784 A5 JP 2009518784A5
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- JP
- Japan
- Prior art keywords
- correction
- field
- quadrupole
- correction device
- octupole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000004075 alteration Effects 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 32
- 230000005405 multipole Effects 0.000 claims description 21
- 238000003384 imaging method Methods 0.000 claims description 12
- 206010010071 Coma Diseases 0.000 description 9
- 201000009310 astigmatism Diseases 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000012634 optical imaging Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/DE2005/002210 WO2007065382A1 (de) | 2005-12-06 | 2005-12-06 | Korrektiv zur beseitigung des öffnungsfehlers 3. ordnung und des axialen farbfehlers 1. ordnung 1. grades |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009518784A JP2009518784A (ja) | 2009-05-07 |
| JP2009518784A5 true JP2009518784A5 (enExample) | 2011-06-30 |
| JP4848017B2 JP4848017B2 (ja) | 2011-12-28 |
Family
ID=36729287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008543639A Expired - Lifetime JP4848017B2 (ja) | 2005-12-06 | 2005-12-06 | ３次の開口収差及び１次１グレード（Ｇｒａｄｅ）の軸上色収差を除去するための補正装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7989776B2 (enExample) |
| EP (1) | EP1958231B1 (enExample) |
| JP (1) | JP4848017B2 (enExample) |
| DE (1) | DE112005003818A5 (enExample) |
| WO (1) | WO2007065382A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4851268B2 (ja) * | 2006-08-31 | 2012-01-11 | 日本電子株式会社 | 収差補正方法および電子線装置 |
| DE102007007923A1 (de) * | 2007-02-14 | 2008-08-21 | Carl Zeiss Nts Gmbh | Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element |
| DE102007045874A1 (de) | 2007-09-25 | 2009-04-02 | Ceos Corrected Electron Optical Systems Gmbh | Multipolspulen |
| DE102007049816B3 (de) | 2007-10-20 | 2009-04-16 | Ceos Corrected Electron Optical Systems Gmbh | Korrektor |
| DE102007058443B4 (de) * | 2007-12-05 | 2010-05-06 | Ceos Corrected Electron Optical Systems Gmbh | Korrektor für axialen und außeraxialen Strahlengang und TEM damit |
| DE102009010774A1 (de) * | 2009-02-26 | 2010-11-11 | Ceos Corrected Electron Optical Systems Gmbh | Verfahren und Vorrichtung zur Bildkontrasterzeugung durch Phasenschiebung |
| US8373136B2 (en) * | 2009-10-15 | 2013-02-12 | Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh | Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator |
| DE102010054541A1 (de) * | 2010-12-15 | 2012-06-21 | Ceos Corrected Electron Optical Systems Gmbh | Korrektor |
| DE102011009954A1 (de) * | 2011-02-01 | 2012-08-02 | Ceos Corrected Electron Optical Systems Gmbh | Korrektor |
| US8536538B2 (en) * | 2011-02-16 | 2013-09-17 | Kla-Tencor Corporation | Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments |
| JP2013030374A (ja) * | 2011-07-29 | 2013-02-07 | Jeol Ltd | 電子顕微鏡 |
| JP5934517B2 (ja) * | 2012-02-24 | 2016-06-15 | 日本電子株式会社 | 色収差補正装置及び色収差補正装置の制御方法 |
| US9275817B2 (en) | 2012-04-09 | 2016-03-01 | Frederick Wight Martin | Particle-beam column corrected for both chromatic and spherical aberration |
| US8541755B1 (en) * | 2012-05-09 | 2013-09-24 | Jeol Ltd. | Electron microscope |
| US10103004B2 (en) * | 2015-07-02 | 2018-10-16 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics |
| JP6647854B2 (ja) * | 2015-12-22 | 2020-02-14 | 日本電子株式会社 | 収差補正方法および荷電粒子線装置 |
| JP7425897B2 (ja) * | 2021-01-12 | 2024-01-31 | 株式会社日立ハイテク | 収差補正装置及び電子顕微鏡 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10001277A1 (de) * | 2000-01-14 | 2001-07-19 | Harald Rose | Elektronenoptischer Korrektor zur Beseitigung der Bildfehler dritter Ordnung |
| DE10159454B4 (de) * | 2001-12-04 | 2012-08-02 | Carl Zeiss Nts Gmbh | Korrektor zur Korrektion von Farbfehlern erster Ordnung, ersten Grades |
| DE10159308A1 (de) * | 2001-12-04 | 2003-06-12 | Ceos Gmbh | Teilchenoptischer Korrektor |
| JP4204902B2 (ja) * | 2002-06-28 | 2009-01-07 | 日本電子株式会社 | 収差補正装置を備えた荷電粒子ビーム装置 |
| US6770887B2 (en) | 2002-07-08 | 2004-08-03 | Ondrej L. Krivanek | Aberration-corrected charged-particle optical apparatus |
-
2005
- 2005-12-06 EP EP05816963.2A patent/EP1958231B1/de not_active Expired - Lifetime
- 2005-12-06 WO PCT/DE2005/002210 patent/WO2007065382A1/de not_active Ceased
- 2005-12-06 US US12/096,579 patent/US7989776B2/en active Active
- 2005-12-06 DE DE112005003818T patent/DE112005003818A5/de not_active Withdrawn
- 2005-12-06 JP JP2008543639A patent/JP4848017B2/ja not_active Expired - Lifetime
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