JP2009512778A - プラズマホウ化方法 - Google Patents
プラズマホウ化方法 Download PDFInfo
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- JP2009512778A JP2009512778A JP2008532375A JP2008532375A JP2009512778A JP 2009512778 A JP2009512778 A JP 2009512778A JP 2008532375 A JP2008532375 A JP 2008532375A JP 2008532375 A JP2008532375 A JP 2008532375A JP 2009512778 A JP2009512778 A JP 2009512778A
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- metal surface
- kbx
- plasma
- boron
- metal
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 46
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 44
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 7
- 125000005843 halogen group Chemical group 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 150000001638 boron Chemical class 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 2
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 125000001153 fluoro group Chemical group F* 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910015900 BF3 Inorganic materials 0.000 claims 1
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims 1
- 229910052794 bromium Inorganic materials 0.000 claims 1
- 125000001246 bromo group Chemical group Br* 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 abstract description 19
- 238000005299 abrasion Methods 0.000 abstract description 2
- -1 boron halide Chemical class 0.000 abstract 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 18
- 239000007789 gas Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000005885 boration reaction Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001104 4140 steel Inorganic materials 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 239000010891 toxic waste Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/60—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
- C23C8/62—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
- C23C8/68—Boronising
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/60—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
- C23C8/62—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
- C23C8/68—Boronising
- C23C8/70—Boronising of ferrous surfaces
Abstract
Description
本発明は、耐磨耗性金属表面を調製する方法に関する。
ホウ化は、金属表面の耐磨耗性を増加させることが公知である。金属表面をホウ素化するための種々の方法が、公知である。このような方法は、金属表面上にホウ素層を生成する。代表的に、これらの方法は、反応性ホウ素種を利用し、これらのホウ素種は、金属表面に拡散する。このような反応性ホウ素種としては、気体のジボランおよび三ハロゲン化ホウ素(BCl3およびBF3が挙げられる)が挙げられる。
本発明は、金属表面をホウ化するための方法を提供する。本発明の方法によれば、KBX4(ここでXはハロゲンである)がホウ素供給源として提供される。KBX4の使用は、これが容易に入手可能であり取り扱いが容易である固体物質である点で有利である。特定の実施形態において、KBX4は、ホウ化されるべき金属表面の存在下で、固体の形態で提供される。KBX4がBX3ガスを放出するように熱が適用され、このBX3ガスに、プラズマ電荷が印加される。いずれの特定の理論にも束縛されることを望まないが、プラズマ電荷は、1つ以上の活性ホウ素種の形成を生じ、この活性ホウ素種が金属表面に拡散すると考えられる。本明細書中で使用される場合、用語「活性化ホウ素種」とは、KBX4を加熱することにより生じる気体にプラズマ電荷を印加することによって作製される、ホウ素種の任意の1つ以上をいう。特定の実施形態において、この1つ以上の活性化ホウ素種としては、B+、BX+、BX2 +、およびBX3 +が挙げられるが、これらに限定されない。
(a)KBX4を提供する工程であって、各Xはハロゲンである、工程;
(b)BX3を放出するために充分な温度でKBX4を加熱する工程;および
(c)BX3にプラズマ電荷を印加して、金属表面に拡散するための1つ以上の活性化ホウ素種を作製する工程、
を包含する。
(a)金属表面の存在下でKBX4を提供する工程であって、各Xはハロゲンである、工程;
(b)BX3を放出するために充分な温度でKBX4を加熱する工程;および
(c)BX3にプラズマ電荷を印加して、金属表面に拡散するための1つ以上の活性化ホウ素種を作製する工程、
を包含する。
Claims (16)
- 金属表面をホウ化するための方法であって、
(a)KBX4を提供する工程であって、各Xはハロゲンである、工程;
(b)BX3を放出するために充分な温度で該KBX4を加熱する工程;および
(c)該BX3にプラズマ電荷を印加して、該金属表面に拡散するための1つ以上の活性化ホウ素種を作製する工程、
を包含する、方法。 - 前記KBX4が前記金属表面の存在下で提供される、請求項1に記載の方法。
- 前記1つ以上の活性化ホウ素が、B+、BX+、BX2 +、またはBX3 +から選択される、請求項1に記載の方法。
- 前記プラズマ電荷がグロープラズマである、請求項3に記載の方法。
- 前記金属表面が鉄含有金属表面である、請求項1に記載の方法。
- 前記金属表面が、鋼、高鉄クロム、またはチタン合金を含有する、請求項5に記載の方法。
- 前記金属表面が、チタンまたはチタン含有金属である、請求項1に記載の方法。
- 前記KBX4が、700℃〜900℃の温度で加熱される、請求項1に記載の方法。
- 水素ガスを導入する工程をさらに包含する、請求項1に記載の方法。
- 前記水素ガスがアルゴンストリーム中で導入される、請求項9に記載の方法。
- プラズマホウ化の方法であって、
(a)KBX4を提供する工程であって、Xがハロゲンである、工程;
(b)該KBX4を熱分解してKXとBX3とを生成する工程;
(c)該BX3を不活性ガスによって形成されたプラズマ内へと方向付ける工程であって、組成およびプラズマ形成条件が、該BX3がBX2 +とX−とに分解するように選択される、工程;および
(d)該BX2 +を金属と反応させる工程、
を包含する、方法。 - Xがフッ素である、請求項11に記載の方法。
- Xが塩素である、請求項11に記載の方法。
- Xが臭素である、請求項11に記載の方法。
- 水素ガスを導入する工程をさらに包含する、請求項11に記載の方法。
- 前記水素ガスがアルゴンストリーム中で導入される、請求項15に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US72025105P | 2005-09-22 | 2005-09-22 | |
PCT/US2006/036791 WO2007038192A2 (en) | 2005-09-22 | 2006-09-21 | Plasma boriding method |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009512778A true JP2009512778A (ja) | 2009-03-26 |
Family
ID=37900279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008532375A Pending JP2009512778A (ja) | 2005-09-22 | 2006-09-21 | プラズマホウ化方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7767274B2 (ja) |
EP (1) | EP1938672A4 (ja) |
JP (1) | JP2009512778A (ja) |
AU (1) | AU2006294993B2 (ja) |
CA (1) | CA2623650A1 (ja) |
RU (1) | RU2415965C2 (ja) |
WO (1) | WO2007038192A2 (ja) |
Families Citing this family (4)
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---|---|---|---|---|
AU2006301847B2 (en) | 2005-10-14 | 2011-11-17 | Vive Nano Inc. | Composite nanoparticles, nanoparticles and methods for producing same |
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WO2008116159A2 (en) * | 2007-03-22 | 2008-09-25 | Skaff Corporation Of America, Inc. | Mechanical parts having increased wear-resistance |
US8894770B2 (en) * | 2012-03-14 | 2014-11-25 | Andritz Iggesund Tools Inc. | Process and apparatus to treat metal surfaces |
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WO2008116159A2 (en) * | 2007-03-22 | 2008-09-25 | Skaff Corporation Of America, Inc. | Mechanical parts having increased wear-resistance |
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2006
- 2006-09-21 CA CA002623650A patent/CA2623650A1/en not_active Abandoned
- 2006-09-21 WO PCT/US2006/036791 patent/WO2007038192A2/en active Application Filing
- 2006-09-21 AU AU2006294993A patent/AU2006294993B2/en not_active Ceased
- 2006-09-21 EP EP06815087A patent/EP1938672A4/en not_active Withdrawn
- 2006-09-21 US US11/534,086 patent/US7767274B2/en not_active Expired - Fee Related
- 2006-09-21 RU RU2008115510/02A patent/RU2415965C2/ru not_active IP Right Cessation
- 2006-09-21 JP JP2008532375A patent/JP2009512778A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS53149133A (en) * | 1977-06-01 | 1978-12-26 | Toho Kinzoku Kk | Immersing borating agent for metal |
JPH0480351A (ja) * | 1990-07-19 | 1992-03-13 | Satake Eng Co Ltd | グロー放電を用いた窒化と硼化の同時処理方法 |
JP2002508448A (ja) * | 1997-12-15 | 2002-03-19 | フオルクスワーゲン・アクチエンゲゼルシヤフト | プラズマ硼化処理 |
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US20070098917A1 (en) | 2007-05-03 |
EP1938672A4 (en) | 2010-05-19 |
RU2008115510A (ru) | 2009-10-27 |
EP1938672A2 (en) | 2008-07-02 |
CA2623650A1 (en) | 2007-04-05 |
AU2006294993A1 (en) | 2007-04-05 |
RU2415965C2 (ru) | 2011-04-10 |
WO2007038192A2 (en) | 2007-04-05 |
US7767274B2 (en) | 2010-08-03 |
WO2007038192A3 (en) | 2009-04-16 |
AU2006294993B2 (en) | 2011-12-01 |
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