RU2008115510A - Способ плазменного борирования - Google Patents

Способ плазменного борирования Download PDF

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RU2008115510A
RU2008115510A RU2008115510/02A RU2008115510A RU2008115510A RU 2008115510 A RU2008115510 A RU 2008115510A RU 2008115510/02 A RU2008115510/02 A RU 2008115510/02A RU 2008115510 A RU2008115510 A RU 2008115510A RU 2008115510 A RU2008115510 A RU 2008115510A
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metal surface
plasma
titanium
metal
cvx
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RU2008115510/02A
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RU2415965C2 (ru
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Хабиб СКЭФФ (US)
Хабиб СКЭФФ
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Скэффко Инджиниринг Энд Мэньюфэкчуринг, Инк. (Us)
Скэффко Инджиниринг Энд Мэньюфэкчуринг, Инк.
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38Treatment of ferrous surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/60Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
    • C23C8/62Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
    • C23C8/68Boronising
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/60Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
    • C23C8/62Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
    • C23C8/68Boronising
    • C23C8/70Boronising of ferrous surfaces

Abstract

1. Способ борирования металлической поверхности, включающий стадии: ! (а) внесение КВХ4, в котором каждый Х представляет собой галоген; ! (b) нагревание КВХ4 при температуре, достаточной для высвобождения ВХ3; и ! (с) приложение плазменного заряда к ВХ3 для создания одной или более активированных борсодержащих частиц для диффундирования в металлическую поверхность. ! 2. Способ по п.1, в котором КВХ4 вносится в присутствии металлической поверхности. ! 3. Способ по п.1, в котором одна или более активированных борсодержащих частиц избираются из В+, ВХ+, ВХ2 + или ВХ3 +. ! 4. Способ по п.3, в котором плазменный заряд представляет собой плазму тлеющего разряда. ! 5. Способ по п.1, в котором металлическая поверхность представляет собой железосодержащую металлическую поверхность. ! 6. Способ по п.5, в котором металлическая поверхность включает сталь, феррохром с высоким содержанием хрома или титановый сплав. ! 7. Способ по п.1, в котором металлическая поверхность представляет собой титан или титансодержащий металл. ! 8. Способ по п.1, в котором КВХ4 нагревается при температуре от 700 до 900°С. ! 9. Способ по п.1, далее включающий стадию введения газообразного водорода. ! 10. Способ по п.9, в котором газообразный водород вводится в потоке аргона. ! 11. Способ плазменного борирования, включающий стадии: ! (а) внесение КВХ4, в котором Х представляет собой галоген; ! (b) термическое разложение названного КВХ4 с образованием КХ и ВХ3; ! (с) направление названного ВХ3 в плазму, сформированную инертным газом, в котором состав и условия формирования плазмы подбираются так, что ВХ3 разлагается на ВХ2 + и Х-; и ! (d) обеспечение возможности названному ВХ2 + реагировать с металлом.

Claims (16)

1. Способ борирования металлической поверхности, включающий стадии:
(а) внесение КВХ4, в котором каждый Х представляет собой галоген;
(b) нагревание КВХ4 при температуре, достаточной для высвобождения ВХ3; и
(с) приложение плазменного заряда к ВХ3 для создания одной или более активированных борсодержащих частиц для диффундирования в металлическую поверхность.
2. Способ по п.1, в котором КВХ4 вносится в присутствии металлической поверхности.
3. Способ по п.1, в котором одна или более активированных борсодержащих частиц избираются из В+, ВХ+, ВХ2+ или ВХ3+.
4. Способ по п.3, в котором плазменный заряд представляет собой плазму тлеющего разряда.
5. Способ по п.1, в котором металлическая поверхность представляет собой железосодержащую металлическую поверхность.
6. Способ по п.5, в котором металлическая поверхность включает сталь, феррохром с высоким содержанием хрома или титановый сплав.
7. Способ по п.1, в котором металлическая поверхность представляет собой титан или титансодержащий металл.
8. Способ по п.1, в котором КВХ4 нагревается при температуре от 700 до 900°С.
9. Способ по п.1, далее включающий стадию введения газообразного водорода.
10. Способ по п.9, в котором газообразный водород вводится в потоке аргона.
11. Способ плазменного борирования, включающий стадии:
(а) внесение КВХ4, в котором Х представляет собой галоген;
(b) термическое разложение названного КВХ4 с образованием КХ и ВХ3;
(с) направление названного ВХ3 в плазму, сформированную инертным газом, в котором состав и условия формирования плазмы подбираются так, что ВХ3 разлагается на ВХ2+ и Х-; и
(d) обеспечение возможности названному ВХ2+ реагировать с металлом.
12. Способ по п.11, в котором Х представляет собой фтор.
13. Способ по п.11, в котором Х представляет собой хлор.
14. Способ по п.11, в котором Х представляет собой бром.
15. Способ по п.11, далее включающий стадию введения газообразного водорода.
16. Способ по п.15, в котором газообразный водород вводится в потоке аргона.
RU2008115510/02A 2005-09-22 2006-09-21 Способ плазменного борирования RU2415965C2 (ru)

Applications Claiming Priority (2)

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US72025105P 2005-09-22 2005-09-22
US60/720,251 2005-09-22

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RU2415965C2 RU2415965C2 (ru) 2011-04-10

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US (1) US7767274B2 (ru)
EP (1) EP1938672A4 (ru)
JP (1) JP2009512778A (ru)
AU (1) AU2006294993B2 (ru)
CA (1) CA2623650A1 (ru)
RU (1) RU2415965C2 (ru)
WO (1) WO2007038192A2 (ru)

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Publication number Publication date
EP1938672A2 (en) 2008-07-02
US7767274B2 (en) 2010-08-03
US20070098917A1 (en) 2007-05-03
WO2007038192A2 (en) 2007-04-05
RU2415965C2 (ru) 2011-04-10
AU2006294993A1 (en) 2007-04-05
JP2009512778A (ja) 2009-03-26
WO2007038192A3 (en) 2009-04-16
CA2623650A1 (en) 2007-04-05
AU2006294993B2 (en) 2011-12-01
EP1938672A4 (en) 2010-05-19

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