JP2009509474A5 - - Google Patents
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- JP2009509474A5 JP2009509474A5 JP2008532376A JP2008532376A JP2009509474A5 JP 2009509474 A5 JP2009509474 A5 JP 2009509474A5 JP 2008532376 A JP2008532376 A JP 2008532376A JP 2008532376 A JP2008532376 A JP 2008532376A JP 2009509474 A5 JP2009509474 A5 JP 2009509474A5
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- 238000000034 method Methods 0.000 description 35
- 230000005670 electromagnetic radiation Effects 0.000 description 34
- 230000004044 response Effects 0.000 description 31
- 238000005259 measurement Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 19
- 239000007787 solid Substances 0.000 description 18
- 238000003384 imaging method Methods 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 13
- 230000008901 benefit Effects 0.000 description 9
- 238000005375 photometry Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000004590 computer program Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 3
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- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 235000019580 granularity Nutrition 0.000 description 2
- 238000001454 recorded image Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US71930605P | 2005-09-21 | 2005-09-21 | |
| US71930405P | 2005-09-21 | 2005-09-21 | |
| US71930505P | 2005-09-21 | 2005-09-21 | |
| US60/719,305 | 2005-09-21 | ||
| US60/719,306 | 2005-09-21 | ||
| US60/719,304 | 2005-09-21 | ||
| US72789705P | 2005-10-18 | 2005-10-18 | |
| US60/727,897 | 2005-10-18 | ||
| PCT/US2006/036793 WO2007035860A2 (en) | 2005-09-21 | 2006-09-21 | System and method for image sensor element or array with photometric and realtime reporting capabilities |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009509474A JP2009509474A (ja) | 2009-03-05 |
| JP2009509474A5 true JP2009509474A5 (enExample) | 2010-10-28 |
| JP4699524B2 JP4699524B2 (ja) | 2011-06-15 |
Family
ID=37889530
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008532377A Expired - Fee Related JP5059767B2 (ja) | 2005-09-21 | 2006-09-21 | 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法 |
| JP2008532372A Active JP5242399B2 (ja) | 2005-09-21 | 2006-09-21 | ゲインを制御した高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法 |
| JP2008532373A Expired - Fee Related JP4537483B2 (ja) | 2005-09-21 | 2006-09-21 | 高分解能および広ダイナミックレンジ積分器 |
| JP2008532376A Expired - Fee Related JP4699524B2 (ja) | 2005-09-21 | 2006-09-21 | 測光およびリアルタイムのレポート能力を有する画像センサ素子またはアレイのためのシステムおよび方法 |
Family Applications Before (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008532377A Expired - Fee Related JP5059767B2 (ja) | 2005-09-21 | 2006-09-21 | 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法 |
| JP2008532372A Active JP5242399B2 (ja) | 2005-09-21 | 2006-09-21 | ゲインを制御した高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法 |
| JP2008532373A Expired - Fee Related JP4537483B2 (ja) | 2005-09-21 | 2006-09-21 | 高分解能および広ダイナミックレンジ積分器 |
Country Status (5)
| Country | Link |
|---|---|
| US (5) | US7800669B2 (enExample) |
| EP (4) | EP1938584A4 (enExample) |
| JP (4) | JP5059767B2 (enExample) |
| KR (4) | KR101152859B1 (enExample) |
| WO (4) | WO2007035860A2 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5059767B2 (ja) * | 2005-09-21 | 2012-10-31 | アール・ジェイ・エス・テクノロジー・インコーポレイテッド | 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法 |
| DE102007036973A1 (de) * | 2007-02-24 | 2008-09-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Pixelzelle, Verfahren zum Betreiben einer Pixelzelle, Verfahren zum Bestimmen einer Position eines Maximums einer Hüllkurve eines analogen amplituden-modulierten Signals, Vorrichtung zum Bestimmen einer Ladungsmenge, Vorrichtung und Verfahren zum Bestimmen einer Ladungsmenge auf einem kapazitiven Element, Vorrichtung und Verfahren und Setzen eines Schaltungsknotens auf eine vorbestimmte Spannung, Vorrichtung und Verfahren zum ladungsbasierten analog-/digital-Wandeln und Vorrichtung und Verfahren zur ladungsbasierten Signalverarbeitung |
| WO2010016449A1 (en) * | 2008-08-08 | 2010-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
| WO2011086829A1 (en) | 2010-01-15 | 2011-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
| WO2012093387A2 (en) * | 2011-01-09 | 2012-07-12 | Emza Visual Sense Ltd. | Pixel design with temporal analysis capabilities for scene interpretation |
| US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
| WO2013123133A1 (en) * | 2012-02-14 | 2013-08-22 | Gentex Corporation | High dynamic range imager system |
| JP6041500B2 (ja) * | 2012-03-01 | 2016-12-07 | キヤノン株式会社 | 撮像装置、撮像システム、撮像装置の駆動方法、撮像システムの駆動方法 |
| US9210304B2 (en) | 2012-03-16 | 2015-12-08 | Empire Technology Development Llc | Low light adaptive imaging device |
| KR101895415B1 (ko) | 2012-03-27 | 2018-09-06 | 삼성전자주식회사 | 아날로그-디지털 변환 회로와 이를 포함하는 적산 회로 |
| US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
| US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
| US9426400B2 (en) | 2012-12-10 | 2016-08-23 | Kla-Tencor Corporation | Method and apparatus for high speed acquisition of moving images using pulsed illumination |
| US9478402B2 (en) | 2013-04-01 | 2016-10-25 | Kla-Tencor Corporation | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
| US9347890B2 (en) | 2013-12-19 | 2016-05-24 | Kla-Tencor Corporation | Low-noise sensor and an inspection system using a low-noise sensor |
| US9748294B2 (en) | 2014-01-10 | 2017-08-29 | Hamamatsu Photonics K.K. | Anti-reflection layer for back-illuminated sensor |
| US9410901B2 (en) | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
| US9767986B2 (en) | 2014-08-29 | 2017-09-19 | Kla-Tencor Corporation | Scanning electron microscope and methods of inspecting and reviewing samples |
| US9860466B2 (en) | 2015-05-14 | 2018-01-02 | Kla-Tencor Corporation | Sensor with electrically controllable aperture for inspection and metrology systems |
| US10748730B2 (en) | 2015-05-21 | 2020-08-18 | Kla-Tencor Corporation | Photocathode including field emitter array on a silicon substrate with boron layer |
| US10462391B2 (en) | 2015-08-14 | 2019-10-29 | Kla-Tencor Corporation | Dark-field inspection using a low-noise sensor |
| US10778925B2 (en) | 2016-04-06 | 2020-09-15 | Kla-Tencor Corporation | Multiple column per channel CCD sensor architecture for inspection and metrology |
| US10313622B2 (en) | 2016-04-06 | 2019-06-04 | Kla-Tencor Corporation | Dual-column-parallel CCD sensor and inspection systems using a sensor |
| TWI611282B (zh) * | 2017-01-03 | 2018-01-11 | 友達光電股份有限公司 | 電源供應電路及電源供應方法 |
| US11114489B2 (en) | 2018-06-18 | 2021-09-07 | Kla-Tencor Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
| US10943760B2 (en) | 2018-10-12 | 2021-03-09 | Kla Corporation | Electron gun and electron microscope |
| US11114491B2 (en) | 2018-12-12 | 2021-09-07 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
| US11848350B2 (en) | 2020-04-08 | 2023-12-19 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer |
| TWI840098B (zh) * | 2022-04-11 | 2024-04-21 | 義明科技股份有限公司 | 高感度的光感測器及其感測方法 |
| CN117490838B (zh) * | 2024-01-03 | 2024-03-19 | 成都善思微科技有限公司 | 一种高可靠性的平板探测器数据采集方法、系统及计算机 |
| CN120445398B (zh) * | 2025-07-02 | 2025-09-26 | 南京大学 | 基于复合介质栅双晶体管光敏探测器的感算一体方法 |
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-
2006
- 2006-09-21 JP JP2008532377A patent/JP5059767B2/ja not_active Expired - Fee Related
- 2006-09-21 JP JP2008532372A patent/JP5242399B2/ja active Active
- 2006-09-21 EP EP06836131A patent/EP1938584A4/en not_active Ceased
- 2006-09-21 WO PCT/US2006/036793 patent/WO2007035860A2/en not_active Ceased
- 2006-09-21 EP EP20060815089 patent/EP1938060A4/en not_active Ceased
- 2006-09-21 US US11/533,851 patent/US7800669B2/en not_active Expired - Fee Related
- 2006-09-21 US US11/533,866 patent/US7786422B2/en not_active Expired - Fee Related
- 2006-09-21 KR KR1020087009556A patent/KR101152859B1/ko not_active Expired - Fee Related
- 2006-09-21 WO PCT/US2006/036785 patent/WO2007035858A2/en not_active Ceased
- 2006-09-21 EP EP06815082.0A patent/EP1935018B1/en not_active Not-in-force
- 2006-09-21 US US11/533,870 patent/US7782369B2/en not_active Expired - Fee Related
- 2006-09-21 JP JP2008532373A patent/JP4537483B2/ja not_active Expired - Fee Related
- 2006-09-21 KR KR1020087009532A patent/KR100970599B1/ko not_active Expired - Fee Related
- 2006-09-21 KR KR1020087009542A patent/KR101003054B1/ko not_active Expired - Fee Related
- 2006-09-21 EP EP06815090A patent/EP1938059A4/en not_active Ceased
- 2006-09-21 US US11/533,859 patent/US7532145B2/en not_active Expired - Fee Related
- 2006-09-21 WO PCT/US2006/036794 patent/WO2007035861A2/en not_active Ceased
- 2006-09-21 WO PCT/US2006/036786 patent/WO2007044191A2/en not_active Ceased
- 2006-09-21 JP JP2008532376A patent/JP4699524B2/ja not_active Expired - Fee Related
- 2006-09-21 KR KR1020087009554A patent/KR100972551B1/ko not_active Expired - Fee Related
-
2010
- 2010-08-07 US US12/852,459 patent/US8735793B2/en not_active Expired - Fee Related
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