JP2009508170A5 - - Google Patents
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- Publication number
- JP2009508170A5 JP2009508170A5 JP2008530521A JP2008530521A JP2009508170A5 JP 2009508170 A5 JP2009508170 A5 JP 2009508170A5 JP 2008530521 A JP2008530521 A JP 2008530521A JP 2008530521 A JP2008530521 A JP 2008530521A JP 2009508170 A5 JP2009508170 A5 JP 2009508170A5
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical system
- axis
- birefringent
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 312
- 239000013078 crystal Substances 0.000 claims description 103
- 230000010287 polarization Effects 0.000 claims description 34
- 239000000463 material Substances 0.000 claims description 28
- 210000001747 pupil Anatomy 0.000 claims description 26
- 238000001393 microlithography Methods 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 10
- 239000011029 spinel Substances 0.000 claims description 6
- 229910052596 spinel Inorganic materials 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002223 garnet Substances 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 229910020068 MgAl Inorganic materials 0.000 claims 1
- 230000000694 effects Effects 0.000 description 23
- 230000008859 change Effects 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000012937 correction Methods 0.000 description 11
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 10
- 239000010453 quartz Substances 0.000 description 8
- 238000013461 design Methods 0.000 description 7
- 238000007654 immersion Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- NNBZCPXTIHJBJL-UHFFFAOYSA-N decalin Chemical compound C1CCCC2CCCCC21 NNBZCPXTIHJBJL-UHFFFAOYSA-N 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- 229910017768 LaF 3 Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000011149 active material Substances 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 2
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229940050561 matrix product Drugs 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US71757605P | 2005-09-14 | 2005-09-14 | |
| PCT/EP2006/066332 WO2007031544A1 (en) | 2005-09-14 | 2006-09-13 | Optical system of a microlithographic exposure system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009508170A JP2009508170A (ja) | 2009-02-26 |
| JP2009508170A5 true JP2009508170A5 (enExample) | 2009-11-05 |
Family
ID=37499493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008530521A Pending JP2009508170A (ja) | 2005-09-14 | 2006-09-13 | マイクロリソグラフィ露光システムの光学システム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8031326B2 (enExample) |
| EP (2) | EP2085824A1 (enExample) |
| JP (1) | JP2009508170A (enExample) |
| KR (1) | KR20080043835A (enExample) |
| CN (2) | CN101263432B (enExample) |
| TW (1) | TW200717046A (enExample) |
| WO (1) | WO2007031544A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US20080151364A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| KR101213831B1 (ko) | 2004-05-17 | 2012-12-24 | 칼 짜이스 에스엠티 게엠베하 | 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈 |
| DE102006038454A1 (de) | 2005-12-23 | 2007-07-05 | Carl Zeiss Smt Ag | Projektionsobjektiv einer mikrolithographischen Projektionsbelichtungsanlage |
| WO2008104192A1 (en) | 2007-02-28 | 2008-09-04 | Carl Zeiss Smt Ag | Catadioptric projection objective with pupil correction |
| WO2008110501A1 (de) * | 2007-03-13 | 2008-09-18 | Carl Zeiss Smt Ag | Projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage |
| KR101450362B1 (ko) | 2007-04-03 | 2014-10-14 | 칼 짜이스 에스엠티 게엠베하 | 광학계, 특히 마이크로리소그래픽 투영 노광장치의 조명 장치 또는 투영 대물렌즈 |
| DE102007019831B4 (de) | 2007-04-25 | 2012-03-01 | Carl Zeiss Smt Gmbh | Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage |
| US20090091728A1 (en) * | 2007-09-28 | 2009-04-09 | Carl Zeiss Smt Ag | Compact High Aperture Folded Catadioptric Projection Objective |
| DE102007055567A1 (de) * | 2007-11-20 | 2009-05-28 | Carl Zeiss Smt Ag | Optisches System |
| DE102008043321A1 (de) | 2008-01-17 | 2009-07-23 | Carl Zeiss Smt Ag | Optisches System einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102009011329A1 (de) | 2009-03-05 | 2010-09-09 | Carl Zeiss Smt Ag | Kompaktes katadioptrisches Projektionsobjektiv für die Immersionslithographie sowie Projektionsbelichtungsverfahren |
| DE102013204453B4 (de) * | 2013-03-14 | 2019-11-21 | Carl Zeiss Smt Gmbh | Optisches System für eine mikrolithographische Projektionsbelichtungsanlage, mikrolithographische Projektionsbelichtungsanlage und Verfahren zur mikrolithographischen Herstellung mikrostrukturierter Bauelemente |
| US8922753B2 (en) | 2013-03-14 | 2014-12-30 | Carl Zeiss Smt Gmbh | Optical system for a microlithographic projection exposure apparatus |
| WO2015027200A1 (en) * | 2013-08-23 | 2015-02-26 | Kla-Tencor Corporation | Broadband and wide field angle compensator |
| DE102015223982A1 (de) | 2015-12-02 | 2017-06-08 | Carl Zeiss Smt Gmbh | Optisches System einer mikrolithographischen Projektionsbelichtungsanlage oder einer Waferinspektionsanlage |
| CN111830616B (zh) * | 2019-04-16 | 2021-11-09 | 致晶科技（北京）有限公司 | 利用晶体制成的消色差相位延迟器和制作方法 |
| DE102022118146B3 (de) * | 2022-07-20 | 2023-12-07 | Carl Zeiss Jena Gmbh | Verfahren zum Herstellen eines optischen Elements für eine Lithographieanlage |
| DE102023119826A1 (de) * | 2023-07-26 | 2025-01-30 | TRUMPF Lasersystems for Semiconductor Manufacturing SE | Depolarisations-Kompensator und optisches System |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3014811B2 (ja) * | 1991-08-08 | 2000-02-28 | 富士通株式会社 | 偏光子及び該偏光子を備えた変調器 |
| DE19535392A1 (de) | 1995-09-23 | 1997-03-27 | Zeiss Carl Fa | Radial polarisationsdrehende optische Anordnung und Mikrolithographie-Projektionsbelichtungsanlage damit |
| US6829041B2 (en) * | 1997-07-29 | 2004-12-07 | Canon Kabushiki Kaisha | Projection optical system and projection exposure apparatus having the same |
| DE19807120A1 (de) | 1998-02-20 | 1999-08-26 | Zeiss Carl Fa | Optisches System mit Polarisationskompensator |
| US6630117B2 (en) * | 1999-06-04 | 2003-10-07 | Corning Incorporated | Making a dispersion managing crystal |
| JP3857236B2 (ja) * | 2001-03-02 | 2006-12-13 | コーニング インコーポレイテッド | 高繰返しレートｕｖエキシマーレーザ |
| JP2004526331A (ja) | 2001-05-15 | 2004-08-26 | カール・ツアイス・エスエムテイ・アーゲー | フッ化物結晶レンズを含む対物レンズ |
| DE10133841A1 (de) * | 2001-07-18 | 2003-02-06 | Zeiss Carl | Objektiv mit Kristall-Linsen |
| US7453641B2 (en) | 2001-10-30 | 2008-11-18 | Asml Netherlands B.V. | Structures and methods for reducing aberration in optical systems |
| US6970232B2 (en) * | 2001-10-30 | 2005-11-29 | Asml Netherlands B.V. | Structures and methods for reducing aberration in integrated circuit fabrication systems |
| JP4350341B2 (ja) * | 2002-03-26 | 2009-10-21 | キヤノン株式会社 | 光学系及び露光装置 |
| US6950243B2 (en) * | 2002-04-19 | 2005-09-27 | Lockheed Martin Corporation | Refractive multispectral objective lens system and methods of selecting optical materials therefor |
| US7154669B2 (en) * | 2002-08-05 | 2006-12-26 | Asml Holding N.V. | Method and system for correction of intrinsic birefringence in UV microlithography |
| AU2003299695A1 (en) * | 2002-12-20 | 2004-07-22 | Hinds Instruments, Inc | Out-of-plane birefringence measurement |
| DE10328938A1 (de) | 2003-06-27 | 2005-01-20 | Carl Zeiss Smt Ag | Korrektureinrichtung zur Kompensation von Störungen der Polarisationsverteilung sowie Projektionsobjektiv für die Mikrolithografie |
| TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
| DE10355725A1 (de) | 2003-11-28 | 2005-06-30 | Carl Zeiss Smt Ag | Optisches System sowie Verfahren zur mikrolithographischen Herstellung mikrostrukturierter Bauteile |
| WO2005059645A2 (en) | 2003-12-19 | 2005-06-30 | Carl Zeiss Smt Ag | Microlithography projection objective with crystal elements |
| US7301707B2 (en) | 2004-09-03 | 2007-11-27 | Carl Zeiss Smt Ag | Projection optical system and method |
-
2006
- 2006-09-13 EP EP09160251A patent/EP2085824A1/en not_active Withdrawn
- 2006-09-13 EP EP06793489A patent/EP1924890A1/en not_active Withdrawn
- 2006-09-13 CN CN2006800339207A patent/CN101263432B/zh active Active
- 2006-09-13 KR KR1020087006172A patent/KR20080043835A/ko not_active Ceased
- 2006-09-13 JP JP2008530521A patent/JP2009508170A/ja active Pending
- 2006-09-13 CN CN201110147181.7A patent/CN102207691B/zh not_active Expired - Fee Related
- 2006-09-13 WO PCT/EP2006/066332 patent/WO2007031544A1/en not_active Ceased
- 2006-09-14 TW TW095134115A patent/TW200717046A/zh unknown
-
2008
- 2008-03-05 US US12/042,621 patent/US8031326B2/en active Active
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