JP2009289858A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2009289858A JP2009289858A JP2008139027A JP2008139027A JP2009289858A JP 2009289858 A JP2009289858 A JP 2009289858A JP 2008139027 A JP2008139027 A JP 2008139027A JP 2008139027 A JP2008139027 A JP 2008139027A JP 2009289858 A JP2009289858 A JP 2009289858A
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- pad
- signal
- semiconductor device
- power supply
- semiconductor element
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Abstract
【解決手段】半導体装置は、上面に第1の接地用パッド17、第1の電源用パッド7、第1の信号用パッド6および第2の信号用パッド11が形成された基板1と、基板1上に形成され、第1の信号用パッド6に接続された第3の信号用パッド20と、第1の回路とが上面に形成された第1の基板2と、第1の回路に接続された突起電極4と第2の回路とが裏面に形成され、第2の信号用パッド11に接続された第4の信号用パッド13が上面に形成され、第2の回路および第4の信号用パッド13に接続された信号用貫通ビア12が埋め込まれた第2の基板を有する半導体素子3とを備えている。
【選択図】 図1
Description
図1は、本発明の第1の実施形態に係る半導体装置を模式的に示す断面図であり、図2は、第1の実施形態に係る半導体装置を上方から見た平面図である。図2においては構成が理解しやすいようにモールド樹脂を表示していない。
図3は、本発明の第2の実施形態に係る半導体装置を上方から見た平面図である。図1、図2と同一の部材は同一の符号を付してその説明は省略する。
2 第1の半導体素子
3 第2の半導体素子
4 金属突起
5 第1のワイヤ
6、11、13、20 信号用パッド
7、21 電源用パッド
8 電源用貫通ビア
9 電源用導体層
10 第2のワイヤ
12 信号用貫通ビア
14 第3のワイヤ
15 モールド樹脂
16 金属ボール
17、22 GND用パッド
18 GND貫通ビア
19 GND導体層
23 第4のワイヤ
24、25 差動信号用パッド
26 差動信号用貫通ビア
28、30 信号用インナーリード
29 電源用インナーリード
31 GND用インナーリード
Claims (11)
- 上面に第1の接地用パッド、第1の電源用パッド、第1の信号用パッドおよび第2の信号用パッドが形成された担体と、
前記担体上に形成され、前記第1の信号用パッドに接続された第3の信号用パッドと、第1の回路とが上面に形成された第1の基板と、
前記第1の回路に接続された突起電極と第2の回路とが裏面に形成され、前記第2の信号用パッドに接続された第4の信号用パッドが上面に形成され、前記第2の回路および前記第4の信号用パッドに接続された信号用貫通ビアが埋め込まれた第2の基板を有する半導体素子とを備えている半導体装置。 - 前記半導体素子は、
上面に形成され、前記第1の接地用パッドに接続された第2の接地用パッドと、
上面に形成され、前記第1の電源用パッドに接続された第2の電源用パッドと、
前記第2の基板を貫通し、前記第2の接地用パッドに接続された接地用貫通ビアと、
前記第2の基板を貫通し、前記第2の電源用パッドに接続された電源用貫通ビアとをさらに有していることを特徴とする請求項1に記載の半導体装置。 - 前記第4の信号用パッドは、前記第2の接地用パッドまたは前記第2の電源用パッドに挟まれるように配置されており、
前記第2の信号用パッドは前記第1の接地用パッドまたは前記第1の電源用パッドに挟まれるように配置されていることを特徴とする請求項2に記載の半導体装置。 - 前記第4の信号用パッドは、DDR、DDR2、またはDDR3インターフェース用の電極パッドであることを特徴とする請求項1〜3のうちいずれか1つに記載の半導体装置。
- 前記第2の信号用パッドと前記第4の信号用パッドとは複数個形成されており、
前記第2の信号用パッドの各々からこれに対応する前記第4の信号用パッドへはそれぞれ同相の信号が伝送されることを特徴とする請求項3または4に記載の半導体装置。 - 前記第2の信号用パッドと前記第4の信号用パッドとは複数個形成されており、
2つの前記第2の信号用パッドと、前記2つの第2の信号用パッドに接続される2つの前記第4の信号用パッドとはそれぞれ位相の異なる差動ペア信号を伝送し、互いに隣接して配置された差動ペア信号用線路を構成しており、
前記2つの第2の信号用パッドは前記第1の接地用パッドまたは前記第1の電源用パッドに挟まれるように配置され、
前記2つの第4の信号用パッドは前記第2の接地用パッドまたは前記第2の電源用パッドに挟まれるように配置されることを特徴とする請求項1または2に記載の半導体装置。 - 前記第4の信号用パッドは、LVDSインターフェース用の電極パッドであることを特徴とする請求項1〜3のうちいずれか1つに記載の半導体装置。
- 前記担体は、裏面にボール電極を有する基板であることを特徴とする請求項1〜7のうちいずれか1つに記載の半導体装置。
- 前記担体はリードフレームであり、前記第1の電源用パッド、前記第1の信号用パッド、および前記第2の信号用パッドはインナーリードで構成されていることを特徴とする請求項1〜7のうちいずれか1つに記載の半導体装置。
- 前記第1の基板は上面に回路が形成された半導体素子であることを特徴とする請求項1〜9のうちいずれか1つに記載の半導体装置。
- 前記第1の基板はシリコンインターポーザーであることを特徴とする請求項1〜9のうちいずれか1つに記載の半導体装置。
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US12/368,763 US20090294960A1 (en) | 2008-05-28 | 2009-02-10 | Semiconductor device |
US13/196,425 US20110298118A1 (en) | 2008-05-28 | 2011-08-02 | Semiconductor device |
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JP2014120593A (ja) * | 2012-12-17 | 2014-06-30 | Renesas Electronics Corp | 半導体集積回路装置 |
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US9721872B1 (en) | 2011-02-18 | 2017-08-01 | Amkor Technology, Inc. | Methods and structures for increasing the allowable die size in TMV packages |
KR102247916B1 (ko) * | 2014-01-16 | 2021-05-04 | 삼성전자주식회사 | 계단식 적층 구조를 갖는 반도체 패키지 |
EP3226293B1 (en) * | 2014-11-27 | 2022-05-11 | Mitsubishi Electric Corporation | Semiconductor module and semiconductor driving device |
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WO2005093834A1 (ja) * | 2004-03-25 | 2005-10-06 | Nec Corporation | チップ積層型半導体装置 |
JP2007059430A (ja) * | 2005-08-22 | 2007-03-08 | Toshiba Corp | 半導体装置 |
JP2008101759A (ja) * | 2006-10-20 | 2008-05-01 | Tokai Rubber Ind Ltd | フレキシブルホース |
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US6809421B1 (en) * | 1996-12-02 | 2004-10-26 | Kabushiki Kaisha Toshiba | Multichip semiconductor device, chip therefor and method of formation thereof |
US20050184368A1 (en) * | 2003-01-21 | 2005-08-25 | Huang Chien P. | Semiconductor package free of substrate and fabrication method thereof |
JP4753725B2 (ja) * | 2006-01-20 | 2011-08-24 | エルピーダメモリ株式会社 | 積層型半導体装置 |
KR100809696B1 (ko) * | 2006-08-08 | 2008-03-06 | 삼성전자주식회사 | 사이즈가 상이한 복수의 반도체 칩이 적층된 멀티 칩패키지 및 그 제조방법 |
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JP2002118198A (ja) * | 2000-10-10 | 2002-04-19 | Toshiba Corp | 半導体装置 |
WO2005093834A1 (ja) * | 2004-03-25 | 2005-10-06 | Nec Corporation | チップ積層型半導体装置 |
JP2007059430A (ja) * | 2005-08-22 | 2007-03-08 | Toshiba Corp | 半導体装置 |
JP2008101759A (ja) * | 2006-10-20 | 2008-05-01 | Tokai Rubber Ind Ltd | フレキシブルホース |
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