JP2009274743A - Container and method for manufacturing it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a container which can accurately recognize an identification code and can inhibit the occurrence of a reading error, and to provide a method for manufacturing it. <P>SOLUTION: This container is equipped with a transparent storing container 1 where a plurality of semiconductor wafers are aligned and stored, an anti-glare area 10 partially formed on a container body 2 and a cover body 5 forming the container 1 for attenuating light transmittance and a two-dimensional identification code 20 which is provided in the area 10, displays at least the information of either the container 1 or the semiconductor wafer and is read by a reader. An anti-glare effect is exhibited by forming the area 10 partially in each of the body 2 and the cover body 5 and, therefore, even if the body 2 and the cover body 5 are transparent, there is no chance of the shadow of the code 20 to be read by the reader with the code 20. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a container in which various articles made of a substrate such as a semiconductor wafer and a glass wafer are stored, stored and transported, and a method for manufacturing the same.

  Although not shown, a conventional container for storing semiconductor wafers, that is, a substrate storage container, includes, for example, a front open box type container main body for aligning and storing a plurality of large-sized semiconductor wafers having a diameter of 300 mm, and an open front portion of the container main body. A detachable lid that opens and closes, and a locking mechanism that locks the lid fitted to the front portion of the container body by an operation from the outside of the lid, and is configured to manufacture semiconductor wafers and semiconductors Used in the process.

  The container main body and the lid are each injection-molded with a molding material containing a transparent resin made of high-rigidity polycarbonate or the like to ensure the visibility of the semiconductor wafer. These container bodies or lids are provided with a two-dimensional identification code, and various information indicating the manufacturing lot number of the substrate storage container, product specifications, and the like are input to the two-dimensional identification code. (See Patent Documents 1 and 2).

The identification code is formed, for example, directly on the container main body or the lid with a semiconductor laser marker or by attaching a labeled barcode. Such an identification code is read by a reader provided in a semiconductor wafer manufacturing process or the like, and is used for process management, shipment management of a substrate storage container, confirmation of a manufacturing history, or the like.
Japanese Patent Laid-Open No. 11-233606 JP 2000-21966 A

  The conventional substrate storage container is configured as described above, and a two-dimensional identification code is read by a reader and used for ID confirmation in the manufacturing process. Therefore, an identification code is provided depending on the angle between the identification code and the reader. There is a possibility that the shadow portion of the identification code reflected from the inner surface of the container main body or the lid body may be read by the reader together with the identification code. As a result, there is a problem that the identification code is not correctly recognized or causes a reading error.

  The present invention has been made in view of the above, and an object of the present invention is to provide a container capable of accurately recognizing an identification code and suppressing reading errors and a method for manufacturing the same.

In the present invention, in order to solve the above problem, the article is stored in a transparent storage container,
An anti-glare region that is partially formed on the storage container and reduces the light transmittance of the light beam, and information provided on the anti-glare region and at least one of the storage container and the article is displayed and read by the reading device. And an identification code.

The storage container includes a transparent container main body that stores the substrate and a lid that opens and closes the opening of the container main body, and forms an antiglare region in at least one of the container main body and the lid, An identification code can be provided in this antiglare area.
Further, the antiglare region can be a grained surface formed in the storage container, and the maximum height (Ry) of the grained surface can be made shallower than the depth at which the identification code is provided.

In addition, the antiglare region can be either a transparent antiglare film integrally formed on the storage container or a transparent antiglare film attached to the storage container, and fine irregularities can be formed on the antiglare film. .
Further, the identification code can be a two-dimensional bar code, and this bar code can be formed in the antiglare region by laser marking.
Further, the identification code can be provided inside the surface of the storage container.

Moreover, in order to solve the said subject in this invention, it is a manufacturing method of the container which fills a molding material with a metal mold | die, and shape | molds the container in any one of Claim 1 thru | or 6,
An antiglare region is formed when a mold is filled with a molding material to form a transparent container, and then an identification code is formed in the antiglare region.

Note that a transfer part for the antiglare region is formed on the product surface of the mold, and the antiglare region can be formed together with the transfer part when the storage container is formed.
Further, when the storage container is taken out from the mold and cooled, an identification code can be marked on the antiglare region of the storage container.

  Here, the transparent storage container in the claims includes a front open box type (FOUP, FOSB, etc.), a top open box type, a bottom open box type, a cassette type, which stores, positions, stores, conveys, and transports articles. Any of the tray types may be used, regardless of the presence or absence of a lid. The storage container may be entirely transparent, or a part (for example, only the container body of the container body and the lid) may be transparent, or may be a container for storing articles in a sealed state, or not. good.

  Articles include at least one or more semiconductor wafers (for example, φ200 mm, φ300 mm, φ450 mm), glass wafers, compound semiconductors, solar cell wafers, glass substrates, photomasks, aluminum disks, substrates made of recording media, clothing, dust, Includes miscellaneous goods, foodstuffs, books, kitchenware, etc. This article may be stored directly in the storage container, or may be stored indirectly via a cassette or the like.

  The antiglare region can be formed in a circle, an ellipse, a triangle, a rectangle, a polygon, and the like. The reading device includes at least a reader and a CCD. The identification code includes at least a character code composed of numerals and characters, a bar-shaped barcode, and a two-dimensional barcode composed of PDF, QR, DATA, MATRIX, and the like. Furthermore, a transfer part for the antiglare area can be formed on the mold, but the transfer part for the antiglare area can be formed by applying a fine satin finish or wrinkle processing to the mold. it can.

According to the present invention, an antiglare region that is partially formed in the storage container and reduces the light transmittance of light, and information on at least one of the storage container and the article provided in the antiglare region is displayed. And the identification code that is read by the reading device, the reading accuracy of the reading device is improved, and the identification code can be recognized accurately and reading errors can be prevented.
In addition, if the antiglare area is a wrinkled surface formed on the storage container and the maximum height of the wrinkled surface is shallower than the depth at which the identification code is provided, the surface opposite to the surface on which the identification code is provided It is possible to suppress the reflection of the shadow of the identification code reflected from the light.

  In addition, if the antiglare area is either a transparent antiglare film that is integrally formed with the storage container or a transparent antiglare film that is attached to the storage container, and if fine irregularities are formed on the antiglare film, The efficiency, productivity, and precision can be improved and the manufacturing method can be diversified, so that it is possible to respond quickly to the user's specifications and to reduce costs by omitting printing tools and the like. Further, since the antiglare film can be provided after the identification code is formed, it is possible to protect the identification code and effectively prevent damage.

In addition, if the identification code is a two-dimensional barcode and this barcode is formed in the antiglare area by laser marking, it is not necessary to process the mold or the block, so the productivity and work efficiency of the manufacturing work can be reduced. It is possible to improve and reduce costs. In addition, a complicated identification code can be easily formed by laser processing.
If the identification code is provided on the inner side of the surface of the storage container, the identification code can be recognized accurately and reading errors can be prevented while diversifying the configuration of the identification code.

  Furthermore, if an antiglare area is formed when a mold is filled with a molding material to form a transparent storage container, the antiglare area can be formed together in a series of molding processes of the storage container. The improvement of performance and applicability can be expected.

  Hereinafter, a preferred embodiment of a container according to the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 3, a container in the present embodiment is a transparent storage container 1 for storing a plurality of semiconductor wafers. An antiglare region 10 which is partially formed in the transparent storage container 1 and attenuates the light transmittance of light irradiated from a reader which is a reading device by 5% or more, preferably 10% or more, and the antiglare Information on at least one of the transparent storage container 1 and the semiconductor wafer provided in the region 10 is displayed, and a two-dimensional identification code 20 read by a reader is provided.

  Although not shown, the semiconductor wafer is made of, for example, a thin and round silicon type of φ300 mm, the surface on which the circuit pattern is formed is formed in a mirror surface, and a notch for alignment and identification is selectively formed in the peripheral portion. It is stored horizontally in the storage container 1 by a dedicated robot or taken out from the storage container 1 horizontally.

  The transparent storage container 1 is a front open box type that stores a plurality of semiconductor wafers, a transparent container body 2, a partially transparent lid body 5 that opens and closes an open front portion of the container body 2, and the lid body 5. And a locking mechanism that locks / unlocks the lid 5 fitted to the front portion of the container body 2 by an operation from the outside, and is used in a semiconductor wafer manufacturing factory or a semiconductor manufacturing process.

  The container body 2 and the lid 5 are each injection-molded by a molding material containing a transparent resin made of high rigidity, impact resistance, heat-resistant polycarbonate, etc., so that the semiconductor wafer can be confirmed without removing the lid 5. Molded. Carbon, carbon fiber, metal fiber, carbon nanotube, conductive polymer, antistatic agent, flame retardant and the like are selectively added to the molding material.

  As shown in FIG. 1, the container main body 2 is injection-molded into a front open box that arranges and stores 25 semiconductor wafers in an up-and-down manner, and a lid 5 of the same shape is detachably attached to the opened front portion via an endless gasket. And is positioned and mounted on a semiconductor processing device or a gas replacement device (not shown).

  A pair of left and right teeth that horizontally support both sides of the peripheral portion of the semiconductor wafer are provided on opposite sides of the container body 2 facing each other, and a plurality of pairs of teeth are arranged at intervals in the vertical direction of the container body 2. Is done. A rear retainer that partitions the rear end of the peripheral edge of the semiconductor wafer protrudes from the inner back surface of the container body 2, and a plurality of rear retainers are arranged at intervals in the vertical direction of the container body 2.

  A substantially trapezoidal bottom plate is integrally attached to the bottom of the container body 2 via a fixture, and a plurality of attachment holes are perforated in the bottom plate, and an identification pad that is detachably attached to the plurality of attachment holes. Is selectively inserted, the type of the substrate storage container is detected by the detection sensor of the semiconductor processing apparatus or the gas replacement apparatus. In addition, a clamp hole for fixing the container body 2 on the semiconductor processing apparatus or the gas replacement apparatus is drilled in the center portion of the bottom plate, and the semiconductor processing apparatus or the like is provided at both the front side and the rear center of the bottom plate. A plurality of positioning tools for positioning the container main body 2 are respectively disposed on the positioning pins of the gas replacement device.

  As shown in the figure, a detachable robotic handle 3 is attached to the center of the ceiling of the container body 2, and the robotic handle 3 is held by an automatic transporter called OHT (overhead hoist transfer). As a result, the substrate storage container is supplied to the inside and outside of the process. In addition, the peripheral edge of the front portion of the container body 2 is formed to bulge outward to form a rim portion 4 for fitting the lid body 5, and the lid body 5 is provided on both upper and lower sides of the inner peripheral surface of the rim portion 4. Each of the locking grooves for locking is recessed.

  As shown in FIG. 1, the lid 5 is detachably fitted into the front portion of the container body 2, in other words, the rim portion 4, and has a housing containing a locking mechanism and an opening of the housing. A transparent surface plate 6 that is attached to and coats the front surface portion (surface portion) and is attached to and detached from the container body 2 by a lid opening / closing device of a semiconductor processing apparatus.

  The casing is formed in a substantially rectangular shape in front view with rounded chamfered corners, and a front retainer that elastically holds the front ends of the peripheral edges of the plurality of semiconductor wafers is attached to the center of the back surface. A frame-shaped fitting groove is cut out at the peripheral edge of the rear surface of the housing, and an elastic gasket interposed between the rim portion 4 of the container body 2 is fitted into the fitting groove. This gasket is elastically deformable using, for example, silicone rubber, fluorine rubber, various thermoplastic elastomers (for example, olefin, polyester, polystyrene, etc.) with excellent heat resistance, flame resistance, cold resistance, and compression properties as molding materials. It is molded into a simple frame shape.

  Although not shown, the locking mechanism is supported by a pair of rotating plates that are rotatably supported at the center of both sides of the surface of the housing and operated from the outside, and is connected to each rotating plate and slides in the vertical and internal directions of the housing. A pair of possible slide plates and a swingable shaft that is pivotally supported in a retractable hole in the peripheral wall of the housing and is connected to and supported by the distal end of the slide plate, and is fitted into the locking groove of the container body 2 to interfere with it. It is provided with a pair of locking claws and is configured in accordance with SEMI standard E62. This locking mechanism is molded from a molding material containing polycarbonate, polyetheretherketone, polyetherimide, cyclic olefin resin, or the like.

  As shown in FIGS. 1 to 3, the antiglare region 10 is arranged in a substantially rectangular shape on one side below the container body 2 and on the surface plate 6 of the lid 5. The antiglare region 10 is composed of a textured surface formed integrally with a surface (outer surface) below one side of the container body 2 and a lower surface (outer surface) of the surface plate 6. The surface roughness, in other words, the maximum height (Ry (the height from the lowest valley bottom to the highest mountain peak for each reference length)) is made shallower than the depth (10 to 50 μm) at which the identification code 20 is provided.

  The maximum height (Ry) of the textured surface is only required to be shallower than the processing depth of the identification code 20, and is usually preferably in the range of 0.5 to 50 μm. This is because when the thickness is 0.5 μm or more, the show-through of the identification code 20 can be sufficiently reduced, and accurate recognition of the identification code 20 can be expected. On the other hand, when the thickness is 50 μm or less, it is possible to prevent problems when removing from the mold and damage when removing from the mold, and further, particles are more likely to adhere, and drying after cleaning. This is because the processing can be prevented from taking a long time.

  By providing the antiglare region 10 as described above, when the identification code 20 is read by a reader (not shown), generation of a phantom due to the show-through of the identification code 20 on the inner surface located on the side opposite to the detection side by the reader. Can be prevented, and reliable reading of the identification code 20 can be expected.

As shown in FIGS. 1 to 3, the identification code 20 is made of, for example, a two-dimensional bar code, and is directly laser marked on the projection unit 11 of the antiglare region 10 by a laser irradiation device. This identification code 20 is machined deeper than the maximum height (Ry) of the grained surface of the antiglare region 10 during laser marking. Due to the deep processing of the identification code 20, the reflection of the shadow of the identification code 20 reflected from the surface opposite to the surface on which the identification code 20 is laser-marked is prevented. Examples of the laser irradiation apparatus include apparatuses that irradiate laser light such as a CO ₂ laser, a YAG laser, and a YVO ₄ laser.

  In the above configuration, when the container body 2 is manufactured, first, a dedicated mold for molding the container body 2 is clamped, the molding material is injected and filled, the pressure is maintained, and the transparent storage container 1 is injection molded. To do. On the product surface of the mold, a transfer portion for the anti-glare region 10 is formed in advance with a fine concavity, and when the container main body 2 is injection-molded by this transfer portion, the transfer main body 2 is placed below one side portion of the container main body 2. The antiglare region 10 for the antiglare effect is integrally molded together.

  The antiglare region 10 can be formed on any of the inner and outer surfaces below one side of the container body 2, but at least the outer surface (surface) below one side of the container body 2 on the side where the identification code 20 is read. It is preferable to mold it. More preferably, the anti-glare effect is increased by molding on any of the inner and outer surfaces below one side of the container body 2.

  When the container body 2 and the antiglare region 10 are molded together, the container body 2 is removed from the mold and cooled. At this time, the projection storage 11 of the cooled antiglare region 10 is placed on the substrate storage container. The container body 2 is manufactured by positioning and laser marking a two-dimensional identification code 20 having ID information such as a production lot number and product specifications, and then opening the mold and removing the container body 2. can do.

  Further, when the surface plate 6 of the lid 5 is formed, first, a dedicated mold for forming the surface plate 6 is clamped to inject and fill the molding material, and pressure is maintained to form the transparent surface plate 6. Injection molding. On the product surface of the mold, a transfer portion for the antiglare region 10 is formed in advance with fine embossed areas, and the antiglare region 10 is integrally formed by this transfer portion when the surface plate 6 is injection molded. .

  The antiglare region 10 can be formed on either the inner or outer surface of the surface plate 6, but is preferably formed on at least the outer surface (surface) of the surface plate 6 on the reading side of the identification code 20. More preferably, the antiglare effect may be increased by molding on the inner and outer surfaces of the surface plate 6.

  When the antiglare region 10 is molded together with the surface plate 6, the mold and the surface plate 6 are cooled. At this time, the projection lot 11 of the substrate storage container and the product lot number and the product are cooled on the cooled antiglare region 10. The surface plate 6 can be manufactured by positioning and laser marking the two-dimensional identification code 20 having ID information such as the above specifications, and then removing the surface plate 6 by opening the mold. When the surface plate 6 is manufactured in this way, the lid body 5 can be manufactured by combining the surface plate 6 with a housing or a locking mechanism.

  According to the above configuration, the anti-glare region 10 is partially formed on the container body 2 and the lid 5 of the storage container 1 to exhibit the anti-glare effect, so that the brightness and darkness of the identification code 20 becomes clear, for example Even if a part of the container body 2 or the lid 5 is transparent, the shadow portion of the identification code 20 is not read by the reader together with the identification code 20. Therefore, the identification code 20 is accurately recognized regardless of whether or not the semiconductor wafer is stored, and no reading error is caused.

  Further, in order to accurately recognize the identification code 20, it is not necessary to mold most of the container body 2 and the lid body 5 in an opaque manner. It is possible to effectively suppress and prevent a functional failure of a detection sensor in another factory that detects the above. Furthermore, since the antiglare region 10 is formed together with the mold surface of the mold when the container body 2 and the surface plate 6 are formed, the antiglare region is separate from the molding process of the container body 2 and the surface plate 6. 10 is not necessary, and significant improvement in productivity, quality stability, and applicability can be expected.

  Next, FIG. 4 shows a second embodiment of the present invention. In this case, when the container body 2 and the surface plate 6 are injection-molded by the transfer portion of the mold, both the antiglare region 10 are provided. The two-dimensional identification code 20 is laser-marked on the projection portion 11 of the antiglare region 10 and the identification code 20 is formed on the inner side of the surface of the container body 2 and the surface plate 6.

  In this case, the antiglare region 10 of the container body 2 is formed on the inner surface below one side of the container body 2, and the identification code 20 of the container body 2 is an intermediate portion between the inner and outer surfaces below one side of the container body 2. Formed. Further, the antiglare region 10 of the surface plate 6 is formed on the inner surface of the surface plate 6, and the identification code 20 of the surface plate 6 is formed in an intermediate portion between the inner and outer surfaces of the surface plate 6. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the identification code 20 can be recognized and read accurately and stably while diversifying the configurations of the antiglare region 10 and the identification code 20. Clearly, errors can be prevented.

  Next, FIG. 5 shows a third embodiment of the present invention. In this case, the antiglare region 10 is formed integrally with the container body 2 and the lid 5 of the storage container 1 to prevent reflection. The transparent antiglare film 12 that exhibits the function and the transparent antiglare film 12 that is adhered to the container body 2 and the lid body 5 to exhibit the antireflection function are used.

  The antiglare film 12 is made of, for example, a transparent film having transparency to visible light, has fine irregularities formed on the surface, and has a haze value of 1 to 20%. The antiglare film 12 is made of, for example, a bar coating method or a gravure coating method on a transparent film with an ink in which particles of an inorganic compound or an organic compound such as silica, melamine, and acrylic are dispersed in an acrylic resin or a urethane-based resin. It is formed by coating and curing by the above method. In addition to this, it is formed by chemical treatment.

  The haze value of the antiglare film 12 is in the range of 1 to 20%. When the haze value is 1% or more, an antiglare effect can be obtained. Conversely, when the haze value is 20% or less, the light transmittance is low. It is because it can prevent becoming small. The upper limit management of the haze value is important when the identification code 20 is formed at an intermediate portion between the inner and outer surfaces of the container body 2 and the surface plate 6.

  In the above configuration, when the transparent antiglare film 12 is formed on the storage container 1 to form the antiglare region 10, the transparent antiglare film 12 is attached to a dedicated mold for forming the container body 2 and the surface plate 6. When the mold is inserted and clamped, and a molding material is injected, filled, and pressure-holded, a transparent antiglare film 12 can be formed in the storage container 1 to form the antiglare region 10. When the antiglare region 10 is obtained in this way, the identification code 20 may be positioned on the projection unit 11 of the antiglare region 10 and laser marking may be performed.

  In addition, when the transparent antiglare film 12 is attached to the storage container 1 instead of being molded to form the antiglare region 10, the transparent antiglare film 12 is attached to the molded container body 2 and the lid 5. The anti-glare region 10 can be obtained by bonding by a method such as adhesion, heat welding, ultrasonic welding or the like. When the antiglare region 10 is obtained in this way, the identification code 20 may be positioned on the projection unit 11 of the antiglare region 10 and laser marking may be performed.

  In addition to the above, the anti-glare region 10 may be obtained by laser-marking the identification code 20 on the molded container body 2 and the lid 5 and sticking the anti-glare film 12 on the identification code 20. it can. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and since the antiglare film 12 is used, work efficiency, productivity, precision can be improved and manufacturing methods can be diversified. It is clear that the cost can be reduced by quickly responding to the user's specifications or omitting the printing block. Moreover, since the antiglare film 12 can be stuck after the laser marking of the identification code 20, damage to the identification code 20 can be effectively prevented.

  In the above embodiment, the container body 2 and the lid body 5 are each injection-molded with a molding material containing a transparent resin made of polycarbonate or the like, but is not limited to this. For example, the injection molding may be performed using a molding material containing a cycloolefin polymer or polyetherimide having excellent optical properties and transparency. Further, the locking mechanism of the lid 5 may be omitted.

  Further, the antiglare region 10 is provided on the condition that the light beam of the reader that detects the identification code 20 is reflected from the surface opposite to the irradiation side and the outline is blurred to scatter and shield and appropriately suppress and prevent it. 1 may be formed on the upper part, the lower part, the front part, the rear part, and the like. For example, the antiglare region 10 may be disposed on the bottom and ceiling of the container body 2 and the surface plate 6 of the lid 5, or the antiglare region 10 may be disposed on the bottom and ceiling of the container body 2. You may do it.

  Further, the antiglare region 10 may be formed by using a transfer portion of a mold, but after the container body 2 and the surface plate 6 are formed, the antiglare region 10 is formed by sandblasting or laser processing. You can also. Further, the antiglare region 10 may be a fine uneven surface, a light scattering surface, or a light impervious surface by etching, heat transfer, or the like, instead of using a textured surface.

It is a perspective explanatory view showing typically an embodiment of a container concerning the present invention, and its manufacturing method. It is principal part expansion explanatory drawing which shows typically the embodiment of the container which concerns on this invention, and its manufacturing method. It is explanatory drawing which shows the thickness direction of FIG. 2 typically. It is explanatory drawing which shows typically 2nd Embodiment of the container which concerns on this invention, and its manufacturing method. It is explanatory drawing which shows typically 3rd Embodiment of the container which concerns on this invention, and its manufacturing method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Storage container 2 Container body 5 Lid 10 Anti-glare area 11 Projection part 12 Anti-glare film 20 Identification code

Claims (7)

  A container for storing an article in a transparent storage container, wherein the antiglare region is partially formed in the storage container to reduce the light transmittance of the light beam, and is provided in the antiglare region. An identification code that displays any one of the information and is read by the reading device.   The storage container includes a transparent container main body for storing the substrate and a lid body for opening and closing the opening of the container main body, and an antiglare region is formed in at least one of the container main body and the lid body. The container according to claim 1, wherein an identification code is provided in the phantom region.   The container according to claim 1 or 2, wherein the antiglare region is a surface processed with a grain formed in the storage container, and the maximum height of the surface processed with the grain is shallower than the depth at which the identification code is provided.   The antiglare region is one of a transparent antiglare film integrally formed on the storage container and a transparent antiglare film attached to the storage container, and fine irregularities are formed on the surface of the antiglare film. Or the container of 2.   The container according to any one of claims 1 to 4, wherein the identification code is a two-dimensional barcode, and the barcode is formed in the antiglare region by laser marking.   The container according to any one of claims 1 to 5, wherein the identification code is provided inside the surface of the storage container. A method for manufacturing a container for forming a container according to any one of claims 1 to 6 by filling a mold with a molding material,
A method for producing a container, comprising forming an antiglare region when a mold is filled with a molding material to form a transparent storage container, and then forming an identification code in the antiglare region.

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