JP2009263522A - ポリオルガノシロキサン化合物、これを含む樹脂組成物及びこれらのパターン形成方法 - Google Patents
ポリオルガノシロキサン化合物、これを含む樹脂組成物及びこれらのパターン形成方法 Download PDFInfo
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- JP2009263522A JP2009263522A JP2008115514A JP2008115514A JP2009263522A JP 2009263522 A JP2009263522 A JP 2009263522A JP 2008115514 A JP2008115514 A JP 2008115514A JP 2008115514 A JP2008115514 A JP 2008115514A JP 2009263522 A JP2009263522 A JP 2009263522A
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- 239000011342 resin composition Substances 0.000 title claims abstract description 35
- 150000001875 compounds Chemical class 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000000059 patterning Methods 0.000 title abstract description 5
- 239000002253 acid Substances 0.000 claims abstract description 31
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000004132 cross linking Methods 0.000 claims abstract description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 44
- 239000000203 mixture Substances 0.000 claims description 27
- 229920001187 thermosetting polymer Polymers 0.000 claims description 27
- 230000015572 biosynthetic process Effects 0.000 claims description 26
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 11
- 239000007864 aqueous solution Substances 0.000 claims description 10
- 238000005227 gel permeation chromatography Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 238000011161 development Methods 0.000 claims description 8
- 239000004793 Polystyrene Substances 0.000 claims description 7
- 125000002947 alkylene group Chemical group 0.000 claims description 7
- 125000000962 organic group Chemical group 0.000 claims description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 7
- 229920002223 polystyrene Polymers 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 125000003118 aryl group Chemical group 0.000 claims description 5
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 4
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 239000002904 solvent Substances 0.000 abstract description 17
- 239000011229 interlayer Substances 0.000 abstract description 3
- -1 poly (2-hydroxycarbonylethyl Chemical group 0.000 description 113
- 229920001296 polysiloxane Polymers 0.000 description 52
- 239000010408 film Substances 0.000 description 51
- 239000000243 solution Substances 0.000 description 43
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 39
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 24
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 21
- 238000003786 synthesis reaction Methods 0.000 description 20
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 19
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 16
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 15
- 125000005372 silanol group Chemical group 0.000 description 15
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 13
- 239000002243 precursor Substances 0.000 description 12
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
- 238000011156 evaluation Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 10
- 238000006460 hydrolysis reaction Methods 0.000 description 10
- 239000003054 catalyst Substances 0.000 description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 9
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229910000077 silane Inorganic materials 0.000 description 8
- 238000003756 stirring Methods 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 230000005494 condensation Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 7
- 230000018109 developmental process Effects 0.000 description 7
- 230000007062 hydrolysis Effects 0.000 description 7
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 238000009833 condensation Methods 0.000 description 6
- 150000002430 hydrocarbons Chemical group 0.000 description 6
- 229940098779 methanesulfonic acid Drugs 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- 238000006482 condensation reaction Methods 0.000 description 5
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 150000003377 silicon compounds Chemical class 0.000 description 5
- 238000006467 substitution reaction Methods 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 4
- 238000005481 NMR spectroscopy Methods 0.000 description 4
- 235000002597 Solanum melongena Nutrition 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 4
- 150000001241 acetals Chemical group 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000012044 organic layer Substances 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000032683 aging Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 3
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- JFNLZVQOOSMTJK-UHFFFAOYSA-N norbornene Chemical compound C1C2CCC1C=C2 JFNLZVQOOSMTJK-UHFFFAOYSA-N 0.000 description 3
- 125000002868 norbornyl group Chemical group C12(CCC(CC1)C2)* 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- LJHFIVQEAFAURQ-ZPUQHVIOSA-N (NE)-N-[(2E)-2-hydroxyiminoethylidene]hydroxylamine Chemical compound O\N=C\C=N\O LJHFIVQEAFAURQ-ZPUQHVIOSA-N 0.000 description 2
- XGQJGMGAMHFMAO-UHFFFAOYSA-N 1,3,4,6-tetrakis(methoxymethyl)-3a,6a-dihydroimidazo[4,5-d]imidazole-2,5-dione Chemical compound COCN1C(=O)N(COC)C2C1N(COC)C(=O)N2COC XGQJGMGAMHFMAO-UHFFFAOYSA-N 0.000 description 2
- OZCMOJQQLBXBKI-UHFFFAOYSA-N 1-ethenoxy-2-methylpropane Chemical compound CC(C)COC=C OZCMOJQQLBXBKI-UHFFFAOYSA-N 0.000 description 2
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- BUDQDWGNQVEFAC-UHFFFAOYSA-N Dihydropyran Chemical compound C1COC=CC1 BUDQDWGNQVEFAC-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910008051 Si-OH Inorganic materials 0.000 description 2
- 229910006358 Si—OH Inorganic materials 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- 238000007259 addition reaction Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 239000012787 coverlay film Substances 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 230000003301 hydrolyzing effect Effects 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 239000004843 novolac epoxy resin Substances 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 2
- 125000001412 tetrahydropyranyl group Chemical group 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 150000003672 ureas Chemical class 0.000 description 2
- GCIYMCNGLUNWNR-UHFFFAOYSA-N (2,4-dinitrophenyl)methyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O GCIYMCNGLUNWNR-UHFFFAOYSA-N 0.000 description 1
- MCJPJAJHPRCILL-UHFFFAOYSA-N (2,6-dinitrophenyl)methyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=C([N+]([O-])=O)C=CC=C1[N+]([O-])=O MCJPJAJHPRCILL-UHFFFAOYSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- LTQBNYCMVZQRSD-UHFFFAOYSA-N (4-ethenylphenyl)-trimethoxysilane Chemical compound CO[Si](OC)(OC)C1=CC=C(C=C)C=C1 LTQBNYCMVZQRSD-UHFFFAOYSA-N 0.000 description 1
- XSECQSHQSVXMMN-UHFFFAOYSA-N (4-ethenylphenyl)methyl-trimethoxysilane Chemical compound CO[Si](OC)(OC)CC1=CC=C(C=C)C=C1 XSECQSHQSVXMMN-UHFFFAOYSA-N 0.000 description 1
- QHMVQKOXILNZQR-ONEGZZNKSA-N (e)-1-methoxyprop-1-ene Chemical compound CO\C=C\C QHMVQKOXILNZQR-ONEGZZNKSA-N 0.000 description 1
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- SKYXLDSRLNRAPS-UHFFFAOYSA-N 1,2,4-trifluoro-5-methoxybenzene Chemical compound COC1=CC(F)=C(F)C=C1F SKYXLDSRLNRAPS-UHFFFAOYSA-N 0.000 description 1
- CYIGRWUIQAVBFG-UHFFFAOYSA-N 1,2-bis(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOCCOC=C CYIGRWUIQAVBFG-UHFFFAOYSA-N 0.000 description 1
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- LEEANUDEDHYDTG-UHFFFAOYSA-N 1,2-dimethoxypropane Chemical compound COCC(C)OC LEEANUDEDHYDTG-UHFFFAOYSA-N 0.000 description 1
- AITKNDQVEUUYHE-UHFFFAOYSA-N 1,3-bis(ethenoxy)-2,2-dimethylpropane Chemical compound C=COCC(C)(C)COC=C AITKNDQVEUUYHE-UHFFFAOYSA-N 0.000 description 1
- QVOHHWQAOFEPOQ-UHFFFAOYSA-N 1,3-bis(ethenoxy)butane Chemical compound C=COC(C)CCOC=C QVOHHWQAOFEPOQ-UHFFFAOYSA-N 0.000 description 1
- QOYBXUIKQOIDQO-UHFFFAOYSA-N 1,3-bis(ethenoxy)propane Chemical compound C=COCCCOC=C QOYBXUIKQOIDQO-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- MWZJGRDWJVHRDV-UHFFFAOYSA-N 1,4-bis(ethenoxy)butane Chemical compound C=COCCCCOC=C MWZJGRDWJVHRDV-UHFFFAOYSA-N 0.000 description 1
- CGHMMUAOPPRRMX-UHFFFAOYSA-N 1,4-bis(ethenoxy)cyclohexane Chemical compound C=COC1CCC(OC=C)CC1 CGHMMUAOPPRRMX-UHFFFAOYSA-N 0.000 description 1
- JEIHSRORUWXJGF-UHFFFAOYSA-N 1-[(2-methylpropan-2-yl)oxy]propan-2-yl acetate Chemical compound CC(=O)OC(C)COC(C)(C)C JEIHSRORUWXJGF-UHFFFAOYSA-N 0.000 description 1
- WNQSKPOIYILBMI-UHFFFAOYSA-N 1-[butylsulfonyl(diazo)methyl]sulfonylbutane Chemical compound CCCCS(=O)(=O)C(=[N+]=[N-])S(=O)(=O)CCCC WNQSKPOIYILBMI-UHFFFAOYSA-N 0.000 description 1
- GLYOFBNLYMTEPS-UHFFFAOYSA-N 1-[diazo(2-methylpropylsulfonyl)methyl]sulfonyl-2-methylpropane Chemical compound CC(C)CS(=O)(=O)C(=[N+]=[N-])S(=O)(=O)CC(C)C GLYOFBNLYMTEPS-UHFFFAOYSA-N 0.000 description 1
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- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
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- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
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- HLWCOIUDOLYBGD-UHFFFAOYSA-N trichloro(decyl)silane Chemical compound CCCCCCCCCC[Si](Cl)(Cl)Cl HLWCOIUDOLYBGD-UHFFFAOYSA-N 0.000 description 1
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- LFXJGGDONSCPOF-UHFFFAOYSA-N trichloro(hexyl)silane Chemical compound CCCCCC[Si](Cl)(Cl)Cl LFXJGGDONSCPOF-UHFFFAOYSA-N 0.000 description 1
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
- DOEHJNBEOVLHGL-UHFFFAOYSA-N trichloro(propyl)silane Chemical compound CCC[Si](Cl)(Cl)Cl DOEHJNBEOVLHGL-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
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- UDUKMRHNZZLJRB-UHFFFAOYSA-N triethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OCC)(OCC)OCC)CCC2OC21 UDUKMRHNZZLJRB-UHFFFAOYSA-N 0.000 description 1
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- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 229960000834 vinyl ether Drugs 0.000 description 1
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- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/312—Organic layers, e.g. photoresist
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Abstract
Description
しかし、これらの材料は熱硬化時に、含有されているキノンジアジド化合物の分解により着色し、硬化膜の透明性が低下する可能性があった。
請求項1:
下記平均組成式(1)で示されるポリオルガノシロキサンに含まれる、ケイ素原子と直接結合している水酸基の一部の水素原子が下記一般式(2)で示される酸不安定基で置換及び/又は下記一般式(3)で示されるC−O−C基を有する架橋基により分子内又は分子間で架橋されており、且つゲルパーミッションクロマトグラフィー(GPC)により測定したポリスチレン標準で換算した重量平均分子量が300〜200,000であることを特徴とするポリオルガノシロキサン化合物。
R1 aSi(OR2)b(OH)cO(4-a-b-c)/2 (1)
(式中、R1は水素原子又は炭素数1〜18の有機基から選択される1種又は2種以上の基、R2は炭素数1〜6の直鎖状又は分岐状のアルキル基から選択される1種又は2種以上の基であり、0.3≦a≦1.6、0≦b≦0.3、0.001≦c≦2の範囲である。)
請求項2:
(A)請求項1に記載のポリオルガノシロキサン化合物、
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤
を含有することを特徴とする感光性樹脂組成物。
請求項3:
(A)請求項1に記載のポリオルガノシロキサン化合物、
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤、
(C)熱硬化剤
を含有することを特徴とする熱硬化性樹脂組成物。
請求項4:
(i)請求項2に記載の感光性樹脂組成物のレジスト膜を基板上に形成する工程、
(ii)該レジスト膜をフォトマスクを介して波長150〜450nmの波長の光源を含む光で露光する工程、
(iii)露光後のレジスト膜をアルカリ水溶液現像液にて現像する工程
を含むパターン形成方法。
請求項5:
(i)請求項3に記載の熱硬化性樹脂組成物のレジスト膜を基板上に形成する工程、
(ii)該レジスト膜をフォトマスクを介して波長150〜450nmの波長の光源を含む光で露光する工程、
(iii)露光後のレジスト膜をアルカリ水溶液現像液にて現像する工程、
(iv)現像によりパターン化されたレジストパターン膜を100〜250℃の範囲の温度で硬化する工程
を含むパターン形成方法。
R1 aSi(OR2)b(OH)cO(4-a-b-c)/2 (1)
(式中、R1は水素原子又は炭素数1〜18の有機基から選択される1種又は2種以上の基、R2は炭素数1〜6の直鎖状又は分岐状のアルキル基から選択される1種又は2種以上の基であり、0.3≦a≦1.6、0≦b≦0.3、0.001≦c≦2、特に0.01≦c≦2の範囲である。)
で表される化合物を前駆体とし、その後、ポリオルガノシロキサンに含有されるシラノール基の一部を酸不安定基に置換することにより合成されるものである。以下、酸不安定基で置換する前のポリオルガノシロキサンを前駆体ポリシロキサンと呼ぶこととする。
加水分解性ケイ素化合物は1種単独で又は2種以上を使用してもよい。
感光性樹脂組成物の必須成分
(A)上記ポリオルガノシロキサン化合物
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤
(D)溶剤
熱硬化性樹脂組成物の必須成分
(A)上記ポリオルガノシロキサン化合物
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤
(C)熱硬化剤
(D)溶剤
ビス(ベンゼンスルホニル)ジアゾメタン、ビス(p−トルエンスルホニル)ジアゾメタン、ビス(キシレンスルホニル)ジアゾメタン、ビス(シクロへキシルスルホニル)ジアゾメタン、ビス(シクロペンチルスルホニル)ジアゾメタン、ビス(n−ブチルスルホニル)ジアゾメタン、ビス(イソブチルスルホニル)ジアゾメタン、ビス(sec−ブチルスルホニル)ジアゾメタン、ビス(n−プロピルスルホニル)ジアゾメタン、ビス(イソプロピルスルホニル)ジアゾメタン、ビス(tert−ブチルスルホニル)ジアゾメタン、ビス(n−アミルスルホニル)ジアゾメタン、ビス(イソアミルスルホニル)ジアゾメタン、ビス(sec−アミルスルホニル)ジアゾメタン、ビス(tert−アミルスルホニル)ジアゾメタン、1−シクロへキシルスルホニル−1−(tert−ブチルスルホニル)ジアゾメタン、1−シクロヘキシルスルホニル−1−(tert−アミルスルホニル)ジアゾメタン、1−tert−アミルスルホニル−1−(tert−ブチルスルホニル)ジアゾメタン等のジアゾメタン誘導体;
ビス−o−(p−トルエンスルホニル)−α−ジメチルグリオキシム、ビス−o−(p−トルエンスルホニル)−α−ジフェニルグリオキシム、ビス−o−(p−トルエンスルホニル)−α−ジシクロへキシルグリオキシム、ビス−o−(p−トルエンスルホニル)−2,3−ペンタンジオングリオキシム、ビス−(p−トルエンスルホニル)−2−メチル−3,4−ペンタンジオングリオキシム、ビス−o−(n−ブタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(n−ブタンスルホニル)−α−ジフェニルグリオキシム、ビス−o−(n−ブタンスルホニル)−α−ジシクロへキシルグリオキシム、ビス−o−(n−ブタンスルホニル)−2,3−ペンタンジオングリオキシム、ビス−o−(n−ブタンスルホニル)−2−メチル−3,4−ペンタンジオングリオキシム、ビス−o−(メタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(トリフルオロメタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(1,1,1−トリフルオロエタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(tert−ブタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(パーフルオロオクタンスルホニル)−α−ジメチルグリオキシム、ビス−o−(シクロヘキサンスルホニル)−α−ジメチルグリオキシム、ビス−o−(ベンゼンスルホニル)−α−ジメチルグリオキシム、ビス−o−(p−フルオロベンゼンスルホニル)−α−ジメチルグリオキシム、ビス−o−(p−tert−ブチルベンゼンスルホニル)−α−ジメチルグリオキシム、ビス−o−(キシレンスルホニル)−α−ジメチルグリオキシム、ビス−o−(カンファースルホニル)−α−ジメチルグリオキシム等のグリオキシム誘導体;
α−(ベンゼンスルホニウムオキシイミノ)−4−メチルフェニルアセトニトリル等のオキシムスルホネート誘導体;
2−シクロヘキシルカルボニル−2−(p−トルエンスルホニル)プロパン、2−イソプロピルカルボニル−2−(p−トルエンスルホニル)プロパン等のβ−ケトスルホン誘導体;
ジフェニルジスルホン、ジシクロへキシルジスルホン等のジスルホン誘導体;
p−トルエンスルホン酸2,6−ジニトロベンジル、p−トルエンスルホン酸2,4−ジニトロベンジル等のニトロベンジルスルホネート誘導体;
1,2,3−トリス(メタンスルホニルオキシ)ベンゼン、1,2,3−トリス(トリフルオロメタンスルホニルオキシ)ベンゼン、1,2,3−トリス(p−トルエンスルホニルオキシ)ベンゼン等のスルホン酸エステル誘導体;
フタルイミド−イル−トリフレート、フタルイミド−イル−トシレート、5−ノルボルネン2,3−ジカルボキシイミド−イル−トリフレート、5−ノルボルネン2,3−ジカルボキシイミド−イル−トシレート、5−ノルボルネン2,3−ジカルボキシイミド−イル−n−ブチルスルホネート、n−トリフルオロメチルスルホニルオキシナフチルイミド等のイミド−イル−スルホネート誘導体等が挙げられる。
更には、(5−(4−メチルフェニル)スルホニルオキシイミノ−5H−チオフェン−2−イリデン)−(2−メチルフェニル)アセトニトリル、(5−(4−(4−メチルフェニルスルホニルオキシ)フェニルスルホニルオキシイミノ)−5H−チオフェン−2−イリデン)−(2−メチルフェニル)−アセトニトリル等のイミノスルホネートや、2−メチル−2[(4−メチルフェニル)スルホニル]−1−[(4−メチルチオ)フェニル]−1−プロパン等が挙げられる。
これらの中でも、イミド−イル−スルホネート類やイミノスルホネート類、オキシムスルホネート類等が好適に用いられる。
グリコールウリル系化合物としては、例えばテトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等が挙げられる。
尿素系化合物としては、テトラメトキシメチル尿素、ジメトキシメチルエチレン尿素、ジメトキシメチルプロピレン尿素等が挙げられる。
添加成分の一つとしては、例えば塗布性を向上させるために慣用されている界面活性剤を(A)成分100質量部に対して0.01〜1質量部の割合で添加することができる。界面活性剤としては、非イオン性のものが好ましく、例えばフッ素系界面活性剤、具体的にはパーフルオロアルキルポリオキシエチレンエタノール、フッ素化アルキルエステル、パーフルオロアルキルアミンオキサイド、含フッ素オルガノシロキサン系化合物等が挙げられる。
ポリシロキサンAの合成
温度計、撹拌機、冷却器を備えた1L三つ口フラスコに、フェニルトリメトキシシラン89.2g(0.45モル)、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン110.9g(0.45モル)、メタノール360gを仕込み、撹拌しながら10℃以下に氷冷した。滴下ロートに0.1Mの酢酸水溶液90gを仕込み、氷冷しながら滴下したところ、発熱を伴い加水分解縮合反応が進行した。内温を室温まで上昇させ、2時間撹拌熟成した後、エステルアダプターを設置し、加熱常圧にてメタノール留去を行った。内温がメタノールの沸点を超えるまで留去を続けることによって、白濁粘ちょうなポリシロキサン溶液を得た。この時、捕捉したメタノール量は382gであった。このポリシロキサン溶液に酢酸エチル300gを添加し、溶解した溶液を純水にて2回水洗を行った。このポリシロキサン溶液をロータリーエバポレーターにて濃縮することにより、無色透明のポリシロキサン溶液Aを233g(固形分濃度62.2質量%)得た。
このポリシロキサンの重量平均分子量(GPCポリスチレン標準)は4.2×103であった。またアルカリクラッキング法では、残存メトキシ基は検出されなかった。29Si−NMRにてT0〜T3の存在比を求め、下記の平均組成式を算出した。
Ph0.5(EP)0.5Si(OH)0.72O1.14
EP:2−(3,4−エポキシシクロヘキシル)エチル基
Ph:フェニル基
[Ph基、EP基ともにR1基に相当。平均組成式(1)表記:a=1.0、b=0、c=0.72]
ポリシロキサンBの合成
温度計、撹拌機、冷却器を備えた1L三つ口フラスコに、フェニルトリメトキシシラン99.1g(0.5モル)、ジメチルジメトキシシラン60.1g(0.5モル)、メタノール277gを仕込み、撹拌しながら10℃以下に氷冷した。滴下ロートに0.1Mのメタンスルホン酸水溶液84gを仕込み、氷冷しながら滴下したところ、発熱を伴い加水分解縮合反応が進行した。内温を室温まで上昇させ、2時間撹拌熟成した後、エステルアダプターを設置し、加熱常圧にてメタノール留去を行った。内温がメタノールの沸点を超えるまで留去を続けることによって、白濁粘ちょうなポリシロキサン溶液を得た。この時、捕捉したメタノール量は280gであった。このポリシロキサン溶液に酢酸エチル200gを添加し、溶解した溶液を純水にて2回水洗を行った。このポリシロキサン溶液をロータリーエバポレーターにて濃縮することにより、無色透明のポリシロキサン溶液Bを185g(固形分濃度60.5質量%)得た。
このポリシロキサンの重量平均分子量(GPCポリスチレン標準)は3.8×103であった。またアルカリクラッキング法では、残存メトキシ基は検出されなかった。29Si−NMRにてT0〜T3の存在比を求め、下記の平均組成式を算出した。
Ph0.5Me1.0Si(OH)0.6O0.95
[Ph基(フェニル基)、Me基(メチル基)ともにR1基に相当。平均組成式(1)表記:a=1.5、b=0、c=0.6]
ポリシロキサンCの合成
温度計、撹拌機、冷却器を備えた1L三つ口フラスコに、テトラメトキシシラン98.9g(0.65モル)、フェニルトリメトキシシラン69.4g(0.35モル)、メタノール360gを仕込み、撹拌しながら10℃以下に氷冷した。滴下ロートに0.1Mの塩酸水溶液122gを仕込み、氷冷しながら滴下したところ、発熱を伴い加水分解反応が進行した。内温を室温ま.で上昇させ、2時間撹拌熟成した後、エステルアダプターを設置し、加熱常圧にてメタノール留去を行った。内温がメタノールの沸点を超えるまで留去を続けることにより、ポリシロキサン溶液を得た。このポリシロキサン溶液に酢酸エチル200gを添加し、得られたポリシロキサン溶液を純水にて2回水洗を行った。このポリシロキサン溶液をロータリーエバポレーターにて濃縮することにより、無色透明のポリシロキサン溶液Cを491g(固形分濃度20.2質量%)得た。
このポリシロキサンの重量平均分子量(GPCポリスチレン標準)5.5×103であった。また残存メトキシ基はアルカリクラッキング法にて1.0質量%検出された。29Si−NMRにてT0〜T3の存在比を求めることによって、平均組成式は下記のように算出された。
Ph0.35Si(OMe)0.03(OH)1.03O1.21
[平均組成式(1)表記:a=0.35、b=0.03、c=1.03]
アセタール化ポリシロキサンDの合成
合成例1で得られたポリシロキサンA80.4gを酢酸エチル溶液からテトラヒドロフラン溶液(固形分濃度20質量%)に溶媒置換した後、温度計、撹拌機、冷却器を備えた1L三つ口フラスコに仕込み、メタンスルホン酸1.0g(0.01モル)を添加した。
次に、10℃以下に氷冷し撹拌しながら、エチル−1−プロペニルエーテル19.4g(0.23モル)を滴下ロートにて内温を10℃以下に保ちながら滴下した。滴下後室温にて2時間反応させた後、トリエチルアミン1.0g(0.01モル)を添加し反応を終了した。反応液を1Lナスフラスコに移し、常温減圧下ロータリーエバポレーターにてテトラヒドロフランを留去し、メチルイソブチルケトン300g及び0.01N酢酸水溶液250mlを添加し反応液を水洗浄した。この洗浄操作を合計3回繰り返した後、有機層を分離、ロータリーエバポレーターにて濃縮して、無色透明のアセタール化ポリシロキサンDを49.0g得た。
このアセタール化ポリシロキサンDのアセタール置換率は13C−NMRの結果より32.5モル%と算出された。
アセタール化ポリシロキサンEの合成
合成例1で得られたポリシロキサンA80.4gを酢酸エチル溶液からテトラヒドロフラン溶液(シロキサン濃度20質量%)に溶媒置換した後、温度計、撹拌機、冷却器を備えた1L三つ口フラスコに仕込み、メタンスルホン酸1.0g(0.01モル)を添加した。
次に、10℃以下に氷冷し撹拌しながら、エチルビニルエーテル7.3g(0.10モル)と1,4−ブタンジオールジビニルエーテル1.6g(0.01モル)を滴下ロートにて内温を10℃以下に保ちながら滴下した。滴下後室温にて2時間反応させた後、トリエチルアミン1.0g(0.01モル)を添加し反応を終了した。反応液を1Lナスフラスコに移し、常温減圧下ロータリーエバポレーターにてテトラヒドロフランを留去し、メチルイソブチルケトン300g及び0.01N酢酸水溶液250mlを添加し反応液を水洗浄した。この洗浄操作を合計3回繰り返した後、有機層を分離、ロータリーエバポレーターにて濃縮して、無色透明のアセタール化ポリシロキサンEを49.0g得た。
このアセタール化ポリシロキサンEのアセタール置換率は13C−NMRの結果より34.5モル%と算出された。
アセタール化ポリシロキサンFの合成
合成例2で得られたポリシロキサンB82.6gを酢酸エチル溶液からテトラヒドロフラン溶液(シロキサン濃度20質量%)に溶媒置換した後、温度計、撹拌機、冷却器を備えた1L三つ口フラスコに仕込み、メタンスルホン酸1.0g(0.01モル)を添加した。
次に、10℃以下に氷冷し撹拌しながら、3,4−ジヒドロー2H−ピラン23.6g(0.28モル)を滴下ロートにて内温を10℃以下に保ちながら滴下した。滴下後室温にて2時間反応させた後、トリエチルアミン1.0g(0.01モル)を添加し反応を終了した。反応液を1Lナスフラスコに移し、常温減圧下ロータリーエバポレーターにてテトラヒドロフランを留去し、メチルイソブチルケトン300g及び0.01N酢酸水溶液250mlを添加し反応液を水洗浄した。この洗浄操作を合計3回繰り返した後、有機層を分離、ロータリーエバポレーターにて濃縮して、無色透明のアセタール化ポリシロキサンFを48.4g得た。
このアセタール化ポリシロキサンFのアセタール置換率は13C−NMRの結果より46.3モル%と算出された。
アセタール化ポリシロキサンGの合成
合成例3で得られたポリシロキサンC247.5gを酢酸エチル溶液からテトラヒドロフラン溶液(シロキサン濃度20質量%)に溶媒置換した後、温度計、撹拌機、冷却器を備えた1L三つ口フラスコに仕込み、メタンスルホン酸1.0g(0.01モル)を添加した。
次に、10℃以下に氷冷し撹拌しながら、イソブチルビニルエーテル21.7g(0.40モル)と1,4−シクロヘキサンジメタノールジビニルエーテル10.6g(0.1モル)を滴下ロートにて内温を10℃以下に保ちながら滴下した。滴下後室温にて2時間反応させた後、トリエチルアミン1.0g(0.01モル)を添加し反応を終了した。反応液を1Lナスフラスコに移し、常温減圧下ロータリーエバポレーターにてテトラヒドロフランを留去し、メチルイソブチルケトン400g及び0.01N酢酸水溶液250mlを添加し反応液を水洗浄した。この洗浄操作を合計3回繰り返した後、有機層を分離、ロータリーエバポレーターにて濃縮して、無色透明のアセタール化ポリシロキサンGを48.2g得た。
このアセタール化ポリシロキサンGのアセタール置換率は、13C−NMRの結果より58.8モル%と算出された。
合成例4で得られたアセタール化ポリシロキサンD10gをシクロペンタノン14gに溶解させ、酸発生剤として[5−(4−(4−メチルフェニルスルホニルオキシ)フェニルスルホニルオキシイミノ)−5H−チオフェン−2−イリデン]−(2−メチルフェニル)−アセトニトリルを0.10g及び界面活性剤X−70−093を0.01g混合し、溶解させた後、0.2μmの孔径のメンブレンフィルターにて濾過してレジスト液を調製した。
次に、6インチシリコンウェハー上に、上記レジスト液をスピンナーによって塗布し、ホットプレート上で100℃/120秒にてプリベークし、厚さ4.0μmのレジスト膜を形成した。更にi線ステッパー((株)ニコン製NSR−1755i7A、NA=0.5)を用いてパターニング露光し、テトラメチルアンモニウムヒドロキシド2.38質量%の現像液を用いて120秒パドル現像し、純水リンスした後、(株)日立製作所製SEM:S−4100にてパターン評価を行った。なお、パターン評価は0.5〜5.0μmライン&スペースパターンを観察し、感度、パターン側壁の垂直性、スペース部分のレジスト残渣(スカム)の有無及び最小解像寸法(ライン&スペース)で解像性を判断した。
実施例1と同様にしてレジスト液を調製し、パターニング評価を行った。表1に組成を、表2にパターン評価結果を示す。
合成例4で得られたアセタール化ポリシロキサンD10gをシクロペンタノン16gに溶解させ、酸発生剤として[5−(4−(4−メチルフェニルスルホニルオキシ)フェニルスルホニルオキシイミノ)−5H−チオフェン−2−イリデン]−(2−メチルフェニル)−アセトニトリルを0.10g、硬化剤としてテトラメトキシメチルグリコールウリルを0.5g及び界面活性剤X−70−093を0.01g混合し、溶解させた後、0.2μmの孔径のメンブレンフィルターにて濾過してレジスト液を調製した。
上記と同様にレジスト液をシリコンウェハー上にスピンナーによって塗布し、ホットプレート上で100℃/120秒にてプリベークし、厚さ4.0μmのレジスト膜を形成した。更に、上記と同様に露光後、テトラメチルアンモニウムヒドロキシド2.38質量%の現像液中に120秒浸漬し、純水リンスを行った。この操作後に残った皮膜を更に220℃のオーブンで1時間加熱して、膜厚3.5μmの硬化皮膜を得た。この硬化皮膜の形成されたウェハーを、60℃に加熱した2−アミノエタノール70g−ジメチルスルホキシド30gの混合溶液に15分間浸漬し、純水リンスを行った後膜厚を測定し、浸漬前の膜厚と比較し残膜率を測定し、耐溶剤性を評価した。
石英ウェハーを用いる他は、耐溶剤性の評価と同様にしてレジスト液をスピンナーによって塗布し、ホットプレート上で100℃/120秒にてプリベークし、厚さ4.0μmのレジスト膜を形成した。更に、上記と同様に露光後、テトラメチルアンモニウムヒドロキシド2.38質量%の現像液中に120秒浸漬し、純水リンスを行った。この操作後に残った皮膜を更に220℃のオーブンで1時間加熱して、膜厚3.5μmの硬化皮膜を得た。次に、分光光度計U−3000 130−0018((株)日立製作所製)を用いて200nmから800nmの領域での透過率を測定した後、400nmでの透過率にて透明性を評価した。
上述したレジスト液を更に樹脂固形分濃度が10質量%となるようシクロペンタノンで希釈し、6インチN型シリコンウェハー上にこの溶液をスピンコートし、溶剤除去のためホットプレート上で100℃/120秒にてプリベークを行った。更に、上記と同様に露光後、テトラメチルアンモニウムヒドロキシド2.38質量%の現像液中に120秒浸漬し、純水リンスを行った。この操作後に残った皮膜を更に220℃のオーブンで1時間加熱して、膜厚0.8μmの硬化皮膜を得た。この硬化皮膜を利用して、自動水銀CV測定装置495−CVシステム(日本SSM社製)を用い、自動水銀プローブを用いたCV法で比誘電率を測定した。
実施例5と同様にしてレジスト液を調製し、パターニング及び物性評価を行った。表3に組成、表4にパターン及び物性評価結果を示す。
Claims (5)
- 下記平均組成式(1)で示されるポリオルガノシロキサンに含まれる、ケイ素原子と直接結合している水酸基の一部の水素原子が下記一般式(2)で示される酸不安定基で置換及び/又は下記一般式(3)で示されるC−O−C基を有する架橋基により分子内又は分子間で架橋されており、且つゲルパーミッションクロマトグラフィー(GPC)により測定したポリスチレン標準で換算した重量平均分子量が300〜200,000であることを特徴とするポリオルガノシロキサン化合物。
R1 aSi(OR2)b(OH)cO(4-a-b-c)/2 (1)
(式中、R1は水素原子又は炭素数1〜18の有機基から選択される1種又は2種以上の基、R2は炭素数1〜6の直鎖状又は分岐状のアルキル基から選択される1種又は2種以上の基であり、0.3≦a≦1.6、0≦b≦0.3、0.001≦c≦2の範囲である。)
- (A)請求項1に記載のポリオルガノシロキサン化合物、
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤
を含有することを特徴とする感光性樹脂組成物。 - (A)請求項1に記載のポリオルガノシロキサン化合物、
(B)150〜450nmの波長範囲の光照射によって酸を発生する光酸発生剤、
(C)熱硬化剤
を含有することを特徴とする熱硬化性樹脂組成物。 - (i)請求項2に記載の感光性樹脂組成物のレジスト膜を基板上に形成する工程、
(ii)該レジスト膜をフォトマスクを介して波長150〜450nmの波長の光源を含む光で露光する工程、
(iii)露光後のレジスト膜をアルカリ水溶液現像液にて現像する工程
を含むパターン形成方法。 - (i)請求項3に記載の熱硬化性樹脂組成物のレジスト膜を基板上に形成する工程、
(ii)該レジスト膜をフォトマスクを介して波長150〜450nmの波長の光源を含む光で露光する工程、
(iii)露光後のレジスト膜をアルカリ水溶液現像液にて現像する工程、
(iv)現像によりパターン化されたレジストパターン膜を100〜250℃の範囲の温度で硬化する工程
を含むパターン形成方法。
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20090024246A (ko) * | 2006-06-27 | 2009-03-06 | 제이에스알 가부시끼가이샤 | 패턴 형성 방법 및 그것에 이용하는 유기 박막 형성용 조성물 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05333553A (ja) * | 1992-06-03 | 1993-12-17 | Oki Electric Ind Co Ltd | シリコーン樹脂及びこれを用いた組成物 |
JPH0680879A (ja) * | 1992-08-31 | 1994-03-22 | Oki Electric Ind Co Ltd | シリコーン樹脂組成物及びこれを用いたケイ酸ガラス薄膜の製造方法 |
JP2001288268A (ja) * | 2000-04-07 | 2001-10-16 | Jsr Corp | 共重合ポリシロキサンおよび感放射線性樹脂組成物 |
JP2004212946A (ja) * | 2002-10-21 | 2004-07-29 | Rohm & Haas Electronic Materials Llc | Siポリマー含有フォトレジスト |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2648969B2 (ja) | 1989-07-28 | 1997-09-03 | 富士写真フイルム株式会社 | 感光性組成物 |
JPH03175514A (ja) | 1989-12-04 | 1991-07-30 | Seiko Epson Corp | タイミング発生回路 |
JPH0798502A (ja) | 1993-09-29 | 1995-04-11 | Tosoh Corp | ポジ型熱硬化感光材料 |
JP3175514B2 (ja) * | 1994-12-09 | 2001-06-11 | 信越化学工業株式会社 | ポジ型レジスト材料 |
KR100452670B1 (ko) * | 1997-08-06 | 2005-10-11 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고분자실리콘화합물,레지스트재료및패턴형성방법 |
JPH1160733A (ja) | 1997-08-14 | 1999-03-05 | Showa Denko Kk | 重合体、レジスト樹脂組成物、及びそれらを用いたパターン形成方法 |
US6531260B2 (en) | 2000-04-07 | 2003-03-11 | Jsr Corporation | Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition |
US7067600B2 (en) | 2001-08-16 | 2006-06-27 | The Goodyear Tire & Rubber Company | Modified silane compounds |
JP4373082B2 (ja) | 2001-12-28 | 2009-11-25 | 富士通株式会社 | アルカリ可溶性シロキサン重合体、ポジ型レジスト組成物、レジストパターン及びその製造方法、並びに、電子回路装置及びその製造方法 |
JP2004038142A (ja) * | 2002-03-03 | 2004-02-05 | Shipley Co Llc | ポリシロキサンを製造する方法及びそれを含むフォトレジスト組成物 |
JP3944734B2 (ja) * | 2003-01-10 | 2007-07-18 | 信越化学工業株式会社 | オルガノシロキサン系高分子化合物及び光硬化性樹脂組成物並びにパターン形成方法及び基板保護用皮膜 |
JP4296792B2 (ja) | 2003-02-05 | 2009-07-15 | Jsr株式会社 | ポジ型感光性樹脂組成物およびその硬化物 |
DE112004003061B4 (de) * | 2003-02-26 | 2017-04-13 | Tokyo Ohka Kogyo Co., Ltd. | Verwendung einer Positivresist-Zusammensetzung |
JP4241217B2 (ja) * | 2003-06-24 | 2009-03-18 | コニカミノルタエムジー株式会社 | 感光性分散乳剤、該感光性分散乳剤を含有する熱現像感光材料および該熱現像感光材料を用いる画像形成方法 |
JP4819676B2 (ja) * | 2003-07-03 | 2011-11-24 | ダウ・コーニング・コーポレイション | 感光性シルセスキオキサン樹脂 |
JP4687315B2 (ja) | 2005-08-04 | 2011-05-25 | 東レ株式会社 | 感光性樹脂組成物、それから形成された硬化膜、および硬化膜を有する素子 |
US8513371B2 (en) * | 2007-12-31 | 2013-08-20 | Bridgestone Corporation | Amino alkoxy-modified silsesquioxanes and method of preparation |
US20090293858A1 (en) * | 2008-05-30 | 2009-12-03 | Krasznai Charles Z | Grill apparatus |
-
2008
- 2008-04-25 JP JP2008115514A patent/JP5136777B2/ja not_active Expired - Fee Related
-
2009
- 2009-04-24 TW TW098113663A patent/TW201005009A/zh unknown
- 2009-04-24 US US12/429,282 patent/US8048611B2/en not_active Expired - Fee Related
- 2009-04-24 EP EP09251181A patent/EP2112188B1/en active Active
- 2009-04-24 DE DE602009001134T patent/DE602009001134D1/de active Active
- 2009-04-24 AT AT09251181T patent/ATE507257T1/de not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05333553A (ja) * | 1992-06-03 | 1993-12-17 | Oki Electric Ind Co Ltd | シリコーン樹脂及びこれを用いた組成物 |
JPH0680879A (ja) * | 1992-08-31 | 1994-03-22 | Oki Electric Ind Co Ltd | シリコーン樹脂組成物及びこれを用いたケイ酸ガラス薄膜の製造方法 |
JP2001288268A (ja) * | 2000-04-07 | 2001-10-16 | Jsr Corp | 共重合ポリシロキサンおよび感放射線性樹脂組成物 |
JP2004212946A (ja) * | 2002-10-21 | 2004-07-29 | Rohm & Haas Electronic Materials Llc | Siポリマー含有フォトレジスト |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2014115438A (ja) * | 2012-12-10 | 2014-06-26 | Jsr Corp | 表示素子用感放射線性樹脂組成物、硬化膜、硬化膜の製造方法、半導体素子および表示素子 |
JP2019143161A (ja) * | 2013-12-13 | 2019-08-29 | 株式会社ダイセル | ポリオルガノシルセスキオキサン、ハードコートフィルム、接着シート、及び積層物 |
KR20160102538A (ko) | 2014-02-13 | 2016-08-30 | 후지필름 가부시키가이샤 | 감광성 수지 조성물, 경화막의 제조 방법, 경화막, 액정 표시 장치, 유기 el 표시 장치, 터치 패널 표시 장치 |
JP2015193747A (ja) * | 2014-03-31 | 2015-11-05 | 株式会社ダイセル | 硬化性組成物及び成形体 |
US11104824B2 (en) | 2014-03-31 | 2021-08-31 | Daicel Corporation | Curable composition and shaped product |
WO2016052391A1 (ja) * | 2014-09-29 | 2016-04-07 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化膜の製造方法、硬化膜、液晶表示装置、有機エレクトロルミネッセンス表示装置およびタッチパネル |
JP7009374B2 (ja) | 2016-02-19 | 2022-01-25 | エルティーシー カンパニー リミテッド | 樹脂組成物及びこれを含む遮光用ブラックレジスト組成物 |
JP2019507811A (ja) * | 2016-02-19 | 2019-03-22 | エルティーシー カンパニー リミテッド | ポリシルセスキオキサン樹脂組成物及びこれを含む遮光用ブラックレジスト組成物 |
KR20190046757A (ko) | 2016-08-29 | 2019-05-07 | 닛산 가가쿠 가부시키가이샤 | 아세탈 보호된 실라놀기를 포함하는 폴리실록산 조성물 |
JPWO2018043407A1 (ja) * | 2016-08-29 | 2019-06-24 | 日産化学株式会社 | アセタール保護されたシラノール基を含むポリシロキサン組成物 |
WO2018043407A1 (ja) * | 2016-08-29 | 2018-03-08 | 日産化学工業株式会社 | アセタール保護されたシラノール基を含むポリシロキサン組成物 |
US11884839B2 (en) | 2016-08-29 | 2024-01-30 | Nissan Chemical Corporation | Acetal-protected silanol group-containing polysiloxane composition |
JP2021092699A (ja) * | 2019-12-11 | 2021-06-17 | 株式会社カネカ | ポジ型感光性組成物、パターン硬化膜およびその製造方法 |
JP7394612B2 (ja) | 2019-12-11 | 2023-12-08 | 株式会社カネカ | ポジ型感光性組成物、パターン硬化膜およびその製造方法 |
KR20220057429A (ko) | 2020-10-29 | 2022-05-09 | 사카타 인쿠스 가부시키가이샤 | 활성 에너지선 경화형 조성물 |
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US20090269697A1 (en) | 2009-10-29 |
JP5136777B2 (ja) | 2013-02-06 |
US8048611B2 (en) | 2011-11-01 |
EP2112188A1 (en) | 2009-10-28 |
ATE507257T1 (de) | 2011-05-15 |
TW201005009A (en) | 2010-02-01 |
EP2112188B1 (en) | 2011-04-27 |
DE602009001134D1 (de) | 2011-06-09 |
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