JP2009260352A5 - - Google Patents

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Publication number
JP2009260352A5
JP2009260352A5 JP2009097045A JP2009097045A JP2009260352A5 JP 2009260352 A5 JP2009260352 A5 JP 2009260352A5 JP 2009097045 A JP2009097045 A JP 2009097045A JP 2009097045 A JP2009097045 A JP 2009097045A JP 2009260352 A5 JP2009260352 A5 JP 2009260352A5
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JP
Japan
Prior art keywords
liquid
exposure apparatus
exposure
supply port
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009097045A
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English (en)
Japanese (ja)
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JP2009260352A (ja
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Publication date
Application filed filed Critical
Publication of JP2009260352A publication Critical patent/JP2009260352A/ja
Publication of JP2009260352A5 publication Critical patent/JP2009260352A5/ja
Withdrawn legal-status Critical Current

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JP2009097045A 2008-04-14 2009-04-13 露光装置、クリーニング方法、及びデバイス製造方法 Withdrawn JP2009260352A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7113208P 2008-04-14 2008-04-14

Publications (2)

Publication Number Publication Date
JP2009260352A JP2009260352A (ja) 2009-11-05
JP2009260352A5 true JP2009260352A5 (https=) 2013-07-18

Family

ID=41387282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009097045A Withdrawn JP2009260352A (ja) 2008-04-14 2009-04-13 露光装置、クリーニング方法、及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2009260352A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1036709A1 (nl) * 2008-04-24 2009-10-27 Asml Netherlands Bv Lithographic apparatus and a method of operating the apparatus.
NL2005610A (en) 2009-12-02 2011-06-06 Asml Netherlands Bv Lithographic apparatus and surface cleaning method.
US20120062858A1 (en) * 2010-04-02 2012-03-15 Nikon Corporation Cleaning method, device manufacturing method, exposure apparatus, and device manufacturing system

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