JP2009259988A - Sheet sticking apparatus and sheet sticking method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To keep a sticking body and an adhesive sheet stuck even when the adhesive tape stuck to the sticking body such as a wafer and an unneeded adhesive sheet on the outer side are bonded again. <P>SOLUTION: The sheet sticking apparatus 10 comprises a table 11 for mounting a wafer W, a press roller 12 for sticking the adhesive sheet S in such a size that it is projected from the sticking surface W1 of the wafer W, a cutting means 13 for cutting the adhesive sheet S matched with the size of the sticking body, and a conveying means 14 for holding and conveying the wafer W. The table 11 is provided with an inner side table 17 movable in the direction of carrying away the wafer W, and an outer side table 16 provided on the outer side of the inner side table 17. The conveying means 14 includes a clamping means 32 for clamping the unneeded adhesive sheet S1 with the outer side table 16 when holding the wafer W, and is provided such that it can move the sticking body in the carry-away direction in synchronism with the inner side table 17 in the state of clamping the unneeded adhesive sheet S1 through the clamping means 32. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and more specifically, after sticking an adhesive sheet having a size protruding from the adherend surface of the adherend to the adherend, the adhesive sheet is then sized to the adherend. The present invention relates to a sheet sticking apparatus and a sticking method for cutting in accordance with the above.

  2. Description of the Related Art Conventionally, a semiconductor wafer (hereinafter simply referred to as “wafer”) is subjected to various treatments such as backside grinding by attaching a protective adhesive sheet to the circuit surface side. As an apparatus for attaching an adhesive sheet to a wafer, a belt-like adhesive sheet having a size that protrudes from the outer periphery of the wafer is fed and pasted on the wafer, and then the adhesive sheet is cut according to the size of the wafer. There are types (see, for example, Patent Document 1).

JP 2006-15453 A

  However, in an apparatus like patent document 1, there exists a tendency which will be in the state which re-bonded in the cutting | disconnection site | part of an adhesive sheet. As a result, when the wafer is transported, the adhesive sheet affixed to the wafer is displaced, or air is mixed between them. It causes inconvenience of damage. Such inconvenience appears in the case of an adhesive sheet having a weak adhesive force.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and its purpose is that even if an adhesive sheet affixed to an adherend such as a wafer and an unnecessary adhesive sheet outside are re-adhered. It is another object of the present invention to provide a sheet sticking apparatus and a sticking method that can favorably maintain the sticking state between the adherend and the adhesive sheet.

  In order to achieve the above object, the present invention provides a table on which an adherend is placed, an attaching means for attaching an adhesive sheet that protrudes from the adherend surface of the adherend, and the size of the adherend. In addition, a cutting means for cutting the adhesive sheet and a conveying means for holding and conveying the adherend with the adhesive sheet attached to the adherend surface, the table supports the adherend, An inner table movable in the carrying-out direction of the adherend, and an outer table provided outside the inner table and supporting an unnecessary adhesive sheet generated outside the adherend surface by the cutting, Includes gripping means for sandwiching the unnecessary adhesive sheet with the outer table when holding the adherend, and unloading the adherend in synchronization with the inner table with the unnecessary adhesive sheet sandwiched via the gripping means. In the direction Rotatably in provided, it adopts a configuration that.

  In the present invention, a configuration in which the inner table and the outer table are provided so as to be relatively rotatable about an axis orthogonal to the adherend surface as a rotation center is preferably employed.

  Further, a configuration may be adopted in which urging means is provided for urging the adherend toward the conveying means when the adherend is separated from the inner table via the conveying means.

  Further, the outer table may have a receiving hole for receiving the inner table, while the gripping means may have a hole having the same shape as the receiving hole on the contact surface with the adhesive sheet. it can.

  Further, the sticking method of the present invention includes a step of supporting an adherend on an inner table provided on the inner peripheral side of the outer table, and an adhesive sheet having a size protruding from the adherend surface of the adherend. A step of affixing to the body, a step of cutting the adhesive sheet according to the size of the adherend, a step of holding the adherend to which the adhesive sheet is affixed by a conveying means, and a gripping means of the conveying means A step of sandwiching an unnecessary adhesive sheet generated on the outside of the adherend by the cutting between the outer table and the outer table, and moving the adherend to which the adhesive sheet is adhered while the inner table and the conveying means are synchronized while maintaining the sandwiching. The method of having the process to do is taken.

  According to the present invention, an unnecessary adhesive sheet is sandwiched between the gripping means and the outer table, and the adherend to which the adhesive sheet is adhered can be transported between the inner table and the conveying means. As a result, even if the adhesive sheet affixed to the adherend and the unnecessary adhesive sheet outside are re-adhered, the adhesive sheet affixed to the adherend may be displaced, or air may flow between them. It can prevent mixing, and it becomes possible to keep those pasting states favorable. In particular, when the adhesion force of the adhesive sheet that protects the circuit surface of the wafer is weak using the adherend as a wafer, it is possible to effectively prevent the positional deviation of the adhesive sheet and avoid damage to the wafer.

  In addition, when the inner table and the outer table can be rotated relative to each other, the re-bonding part can be extended in the horizontal direction to cut the edges, and the adhesive sheet affixed to the adherend and the outer unnecessary adhesive sheet can be reliably separated. It becomes possible to do.

  Furthermore, since the urging means for urging the adherend toward the conveying means when the adherend is separated from the inner table is provided, the adherend can be more stably delivered to the conveying means.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The schematic front view of the sheet sticking apparatus which concerns on FIG. 1 is shown by FIG. In this figure, a sheet sticking apparatus 10 includes a table 11 on which a wafer W as an adherend is placed, and a press as a sticking means for sticking an adhesive sheet S having a size protruding from the adherend surface W1 of the wafer W. Roller 12, cutting means 13 for cutting the adhesive sheet S according to the size of the wafer W, transport means 14 for holding and transporting the wafer W to which the adhesive sheet S is attached, and feeding of the adhesive sheet S In addition, it has a collecting means 15 for collecting the unnecessary adhesive sheet S1 generated outside the adherend surface W1 by the cutting of the cutting means 13. Here, the adhesive sheet S is formed in a band shape, and in the present embodiment, is composed of a heat-sensitive adhesive sheet that is slightly tacky at room temperature, and is fed out on the table 11 as needed from the left side in FIG. It is supposed to be.

  The table 11 includes an outer table 16 and an inner table 17. The outer table 16 has a substantially square planar shape, a recess 21 is formed, a gap 18 is formed between the outer table 16 and the inner table 17, and is supported by a linear motor 19. The inner table 17 has a mounting surface 17A having the same shape as the surface of the wafer W, a heating means (not shown) is provided therein, and a concave portion 21 of the outer table 16 via a linear motion motor 24 and a motor 23. It is attached to the bottom. The mounting surface 17A of the inner table 17 is connected to a decompression source (not shown) so as to be able to suck and hold the wafer W, and is also connected to a pressurization source (not shown) to exhaust, thereby placing the wafer W thereon. It functions as an urging means FU that urges away from the surface 17A. The motor 23 enables the inner table 17 to rotate in a plane around the axis orthogonal to the adherend surface W1 of the wafer W, while the linear motion motor 24 causes the inner table 17 to move to the adherend surface W1 of the wafer W. On the other hand, it is displaced in the orthogonal direction.

  The press roller 12 is provided so as to be movable in the vertical direction via a driving means (not shown), and is provided so as to roll along the mounting surfaces 16A and 17A of the outer table 16 and the inner table 17. Yes. Thereby, the adhesive sheet S can be pressed against the wafer W.

  The cutting means 13 includes a cutter blade 27, an arm 28 that holds the cutter blade 27, a rotating shaft 29 that rotates the arm 28 in a plane, and the cutter blade 27 via the rotating shaft 29 and the arm 28. And a motor (not shown) that rotates along the outer periphery of the wafer W. The cutting means 13 is provided at a position above the table 11 so as to be lifted and lowered via a lifting device (not shown).

  As shown in FIG. 2, the conveying means 14 is provided on the support 31, the gripping means 32 connected to the outer periphery of the lower surface of the support 31, and the lower surface of the support 31, and is not shown. A holding unit 33 that is connected to a vacuum pump and is capable of sucking and holding the wafer W to which the adhesive sheet S is attached is provided on the lower surface. The holding means 33 is connected to the support body 31 so as to be rotatable in the circumferential direction. The transfer means 14 is supported by a robot (not shown) as disclosed in Japanese Patent Application No. 2006-109448 via a chuck, and can transfer the wafer W between the table 11 and a predetermined position. .

  The gripping means 32 includes a spring member 35 provided at predetermined intervals along the circumferential direction of the support 31 and a contact member 36 that is connected to the lower end side of the spring member 35 and contacts the adhesive sheet S. Has been. The spring member 35 is formed of a coil spring that exhibits an elastic force in a direction against the contact member 36 when the contact member 36 moves in a direction approaching the support 31. The contact member 36 is provided in a ring shape with a hole 36A formed in the same shape as the receiving hole 20 on the inner periphery.

  The collecting means 15 includes a single-axis robot 38 extending in the left-right direction in FIG. 1, a position fixed to a slider 39 of the single-axis robot 38 and a position indicated by a solid line and a position indicated by a two-dot chain line in FIG. A frame F movably provided between the pair of rollers, a pair of small-diameter rollers 40 supported by the frame F, a large-diameter roller 41 positioned therebetween, and unnecessary adhesion guided by the rollers 40 and 41. A winding roller 43 that winds up the sheet S1, and a driving roller 44 that is supported by the frame F and connected to the output shaft of the motor M, and winds the unnecessary adhesive sheet S1 between the winding roller 43 and the winding roller 43. It has. The take-up roller 40 is urged toward the drive roller 41 by a spring (not shown) so as to be able to cope with an increase in outer diameter accompanying take-up of the unnecessary adhesive sheet S1.

  Next, a method for sticking the adhesive sheet S using the sheet sticking apparatus 10 will be described.

  First, the collecting means 15 stops at a position indicated by a solid line in FIG. 1, the adhesive sheet S passes through the small diameter roller 40 and the large diameter roller 41, and the lead end is fixed to the winding roller 43. When the wafer W is placed on the inner table 17 by a transfer means (not shown), the inner table 17 is not shown so that the adherend surface W1 of the wafer W is at the same level as the placement surface 16A of the outer table 16. Positioning is performed by the sensor and the linear motion motor 24, and the wafer W is heated via a heating means (not shown). The outer table 16 is raised to a position where the adhesive sheet S is sandwiched between the placement surface 16A and the press roller 12 as shown in FIG.

  Then, the press roller 12 rolls and moves to a position indicated by a two-dot chain line in FIG. 1 while applying a pressing force to the adhesive sheet S, and the adhesive sheet S is placed on the mounting surface 16A of the wafer W and the outer table 16. Press. By this operation, the adhesive sheet S and the wafer W are bonded by heating by a heating means (not shown) provided on the inner table 17.

  In this state, the cutter blade 27 descends to a position where it pierces the adhesive sheet S and then rotates along the outer periphery of the wafer W, whereby the adhesive sheet S is cut along the shape of the wafer W. After the cutting of the adhesive sheet S, the cutting means 13 is retracted upward, and the conveying means 14 is moved so that the receiving hole 20 of the outer table 16 and the hole 36A of the contact member 36 coincide. . As shown in FIG. 3, when the holding means 33 is lowered against the elastic force of the spring member 35, the lower surface of the holding means 33 adsorbs the adhesive sheet S attached to the wafer W, and The unnecessary adhesive sheet S <b> 1 is sandwiched between the contact member 36 and the mounting surface 16 </ b> A of the outer table 16.

  In this state, the inner table 17 rotates in a plane via the motor 23, so that even if the cut adhesive sheet S is re-adhered by heating by the inner table 17, the re-adhered part causes lateral displacement. Thus, the edge is completely cut off from the unnecessary adhesive sheet S1. Thereafter, the linear motor 24 and a robot (not shown) move the inner table T2 in the unloading direction of the wafer W, that is, upward. In the initial stage of this movement, as shown in FIG. 4, since the unnecessary adhesive sheet S1 is held between the contact member 36 and the outer table 16, the unnecessary adhesive sheet S1 is attached to the wafer W by re-adhesion. The adhesive sheet S that has been affixed to the wafer W is no longer lifted, and the adhesive sheet S that has been affixed to the wafer W is sandwiched between the inner table 17 and the holding means 33, so that no positional displacement occurs.

  Thereafter, the conveying means 14 is further raised, and as shown in FIG. 5, when the wafer W is separated from the mounting surface 17A of the inner table 17, the mounting surface 17A is evacuated through a pressure source (not shown). Then, the wafer W is urged toward the transfer means 14, that is, upward, and the wafer W is delivered to the transfer means 14. Then, the transferred wafer W is transferred to a predetermined position.

Thereafter, the frame F moves to a position indicated by a two-dot chain line in FIG. 1, and the driving roller 44 and the winding roller 43 wind up the unnecessary adhesive sheet S1. Then, the outer table 16 descends, the rotation of the driving roller 44 is locked, and the frame F returns to the position indicated by the solid line in FIG.
Thereafter, the adhesive sheet S can be pasted and cut by the same operation.

  Therefore, according to such an embodiment, the adhesive strength of the adhesive sheet S is weak, and even if the adhesive sheet S after cutting attached to the wafer W and the unnecessary adhesive sheet S are re-adhered, It is possible to prevent the positional deviation between the adhesive sheet S and the adhesive sheet S. As a result, it is possible to avoid the occurrence of trouble in the next process by transporting the sheet with deviation.

As described above, the best configuration, method, and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the adherend is not limited to the wafer W, and other plate-like members such as a glass plate, a steel plate, or a resin plate can be targeted. The semiconductor wafer is a silicon wafer or a compound wafer. There may be.

  The spring member 35 of the gripping means 32 can be variously modified such as a synthetic resin body that can be elastically compressed and deformed as long as the spring member 35 exhibits the same function as that of the embodiment. Furthermore, the spring member 35 may be replaced with an air cylinder in which the abutting member 36 is connected to the tip of the rod, and the advance / retreat of the rod may be controlled so as to sandwich the unnecessary adhesive sheet S1 as described above.

  Further, the linear motion motor 24 may be replaced with a displacement means such as an air cylinder or a hydraulic cylinder, and the motor 23 may be constituted by a rotation means having an equivalent function.

  Further, the sticking means and the cutting means may be composed of those other than those shown in the embodiment, and the sticking means is as long as the adhesive sheet can be attached to the adherend, and the cutting means is as long as the adhesive sheet can be cut. It is not limited at all.

  Furthermore, the adhesive sheet S is not limited to a heat-sensitive adhesive sheet, and may be a pressure-sensitive adhesive sheet.

  Further, the outer table 16 may be rotated while the inner table 17 is stopped, or both of them may be rotated in the opposite direction.

  Further, the outer table 16 may be moved downward while the inner table 17 is stopped, or both of them may be moved in the opposite direction.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of a conveyance means. Explanatory drawing which shows the state which the conveyance means hold | maintained the wafer. Explanatory drawing which shows the state of the conveyance initial stage of a to-be-adhered body. Explanatory drawing which shows the state in which the wafer was delivered to the conveyance means from the table.

Explanation of symbols

10 Sheet sticking device 11 Table 12 Press roller (sticking means)
13 cutting means 14 transport means 16 outer table 17 inner table 20 receiving hole 32 gripping means 36A hole FU biasing means S adhesive sheet S1 unnecessary adhesive sheet W semiconductor wafer (adhered body)
W1 surface

Claims (5)

A table on which the adherend is placed; an attaching means for attaching an adhesive sheet having a size protruding from the adherend surface of the adherend; and a cutting means for cutting the adhesive sheet according to the size of the adherend. A transporting means for holding and transporting the adherend to which the adhesive sheet is affixed,
The table supports an adherend and is provided with an inner table that is movable in the carry-out direction of the adherend, and an unnecessary adhesive sheet that is provided outside the inner table and is generated outside the adherend surface by the cutting. A supporting outer table,
The conveying means includes a gripping means for sandwiching the unnecessary adhesive sheet with the outer table when the adherend is held, and in synchronization with the inner table with the unnecessary adhesive sheet being sandwiched via the gripping means. A sheet affixing device, wherein the adherend is provided so as to be movable in the carry-out direction.   2. The sheet sticking device according to claim 1, wherein the inner table and the outer table are provided so as to be relatively rotatable with an axis orthogonal to the adherend surface as a rotation center.   The sheet sticking according to claim 1 or 2, further comprising a biasing unit that biases the adherend toward the transporting unit when the adherend is separated from the inner table via the transporting unit. apparatus.   The outer table includes a receiving hole for receiving the inner table, and the gripping means includes a hole having the same shape as the receiving hole on a contact surface with the adhesive sheet. The sheet sticking device according to 1, 2 or 3. Supporting the adherend on an inner table provided on the inner peripheral side of the outer table;
A step of attaching an adhesive sheet of a size protruding from the adherend surface of the adherend to the adherend;
Cutting the adhesive sheet according to the size of the adherend;
Holding the adherend to which the adhesive sheet is affixed by a conveying means;
A step of sandwiching an unnecessary adhesive sheet generated outside the adherend by the cutting between the gripping means of the transport means and an outer table;
A step of moving the adherend to which the adhesive sheet is stuck in synchronization with the inner table and the conveying means in the carry-out direction while maintaining the sandwiching;
The sheet sticking method characterized by having.

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