JP2009212078A5 - - Google Patents

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Publication number
JP2009212078A5
JP2009212078A5 JP2008329271A JP2008329271A JP2009212078A5 JP 2009212078 A5 JP2009212078 A5 JP 2009212078A5 JP 2008329271 A JP2008329271 A JP 2008329271A JP 2008329271 A JP2008329271 A JP 2008329271A JP 2009212078 A5 JP2009212078 A5 JP 2009212078A5
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film
functional film
layer
substrate
refractive index
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JP2008329271A
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Japanese (ja)
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JP5112281B2 (ja
JP2009212078A (ja
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Publication of JP2009212078A5 publication Critical patent/JP2009212078A5/ja
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JP2008329271A 2007-12-28 2008-12-25 成膜用基板 Expired - Fee Related JP5112281B2 (ja)

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Application Number Priority Date Filing Date Title
JP2008329271A JP5112281B2 (ja) 2007-12-28 2008-12-25 成膜用基板

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2007338575 2007-12-28
JP2007338575 2007-12-28
JP2008026119 2008-02-06
JP2008026119 2008-02-06
JP2008329271A JP5112281B2 (ja) 2007-12-28 2008-12-25 成膜用基板

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JP2009212078A JP2009212078A (ja) 2009-09-17
JP2009212078A5 true JP2009212078A5 (https=) 2012-01-19
JP5112281B2 JP5112281B2 (ja) 2013-01-09

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JP2008329271A Expired - Fee Related JP5112281B2 (ja) 2007-12-28 2008-12-25 成膜用基板

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US (2) US8080811B2 (https=)
JP (1) JP5112281B2 (https=)
CN (1) CN101471423B (https=)
TW (1) TWI481733B (https=)

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