JP2009203141A - ガラス基板吸着テーブル、及びガラス基板加工方法 - Google Patents
ガラス基板吸着テーブル、及びガラス基板加工方法 Download PDFInfo
- Publication number
- JP2009203141A JP2009203141A JP2008049618A JP2008049618A JP2009203141A JP 2009203141 A JP2009203141 A JP 2009203141A JP 2008049618 A JP2008049618 A JP 2008049618A JP 2008049618 A JP2008049618 A JP 2008049618A JP 2009203141 A JP2009203141 A JP 2009203141A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- sheet material
- suction table
- chamfering
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 203
- 239000000758 substrate Substances 0.000 title claims abstract description 202
- 238000003672 processing method Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 116
- 150000001336 alkenes Chemical class 0.000 claims abstract description 18
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims abstract description 18
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 230000037303 wrinkles Effects 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000006063 cullet Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
【解決手段】ガラス基板加工機のガラス基板吸着テーブルに貼着されるシート材18として、JIS K6253、又はJIS K7215に準拠する硬度が90〜95度であり、厚さが0.7mm以下であり、動摩擦係数が0.3以下とした。また、好ましいシート材18は、すくなくともウレタンシート材32とオレフィンシート材(又はニトフロンシート材)34からなる複層構造とし、総厚を0.7mm以下とした。
【選択図】図2
Description
試験荷重:1000g
摺動速度:100mm/min
摺動距離:30mm
摺動回数:n3
温 度:室温
試験条件:DRY、WET(純水2cc滴下)
対象材料:オレフィンシート材、ニトフロンシート材、
スウェードシート材
試験結果
オレフィンシート材:0.202(DRY平均)、0.159(WET平均)
ニトフロンシート材:0.080(DRY平均)、0.058(WET平均)
スウェードシート材:0.498(DRY平均)、0.486(WET平均)
上記オレフィンシート材、ニトフロンシート材は、動摩擦係数が0.3以下であり、これら材料を貼着したガラス基板吸着テーブル10では、ガラス基板Gが円滑に滑動し、ガラス基板Gが正規の位置に常に位置決めされた。
Claims (6)
- ガラス基板加工機に設置されるガラス基板吸着テーブルにおいて、
前記ガラス基板吸着テーブルのガラス基板吸着面側に貼着されるシート材は、JIS K6253(2006年)、又はJIS K7215(1986年)に準拠する硬度が90〜95度であって、かつ厚さが0.7mm以下であり、動摩擦係数が0.3以下であることを特徴とするガラス基板吸着テーブル。 - 前記シート材が、複層構造である請求項1に記載のガラス基板吸着テーブル。
- 前記シート材が、すくなくともウレタンシート材と、オレフィンシート材又はニトフロンシート材と、からなり、前記オレフィンシート材又はニトフロンシート材が前記ガラス基板と接するシート材である請求項2に記載のガラス基板吸着テーブル。
- ガラス基板吸着テーブルに貼着されたJIS K6253(2006年)、又はJIS K7215(1986年)に準拠する硬度が90〜95度であって、かつ厚さが0.7mm以下であり、動摩擦係数が0.3以下のシート材に、ガラス基板を吸着保持させて該ガラス基板を加工することを特徴とするガラス基板加工方法。
- 前記シート材は、すくなくともウレタンシート材と、オレフィンシート材又はニトフロンシート材と、からなり、前記オレフィンシート材又はニトフロンシート材が前記ガラス基板と接するシート材である請求項4に記載のガラス基板加工方法。
- 前記ガラス基板の加工機が、吸着保持されたガラス基板の縁部の面取砥石による面取りである請求項4又は5に記載のガラス基板加工方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008049618A JP5246583B2 (ja) | 2008-02-29 | 2008-02-29 | ガラス基板吸着テーブル、及びガラス基板加工方法 |
KR1020107019084A KR101442884B1 (ko) | 2008-02-29 | 2009-02-25 | 유리 기판 흡착 테이블 및 유리 기판 가공 방법 |
PCT/JP2009/053460 WO2009107685A1 (ja) | 2008-02-29 | 2009-02-25 | ガラス基板吸着テーブル、及びガラス基板加工方法 |
CN200980106707.8A CN101959814B (zh) | 2008-02-29 | 2009-02-25 | 玻璃基板吸附台以及玻璃基板加工方法 |
TW098106568A TWI462209B (zh) | 2008-02-29 | 2009-02-27 | Glass substrate suction table, and glass substrate processing methods |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008049618A JP5246583B2 (ja) | 2008-02-29 | 2008-02-29 | ガラス基板吸着テーブル、及びガラス基板加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009203141A true JP2009203141A (ja) | 2009-09-10 |
JP5246583B2 JP5246583B2 (ja) | 2013-07-24 |
Family
ID=41016074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008049618A Active JP5246583B2 (ja) | 2008-02-29 | 2008-02-29 | ガラス基板吸着テーブル、及びガラス基板加工方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5246583B2 (ja) |
KR (1) | KR101442884B1 (ja) |
CN (1) | CN101959814B (ja) |
TW (1) | TWI462209B (ja) |
WO (1) | WO2009107685A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012060158A1 (ja) * | 2010-11-01 | 2012-05-10 | 旭硝子株式会社 | 面取り装置および面取り方法 |
CN107921601A (zh) * | 2015-07-21 | 2018-04-17 | 康宁股份有限公司 | 对玻璃基材进行边缘精整的方法和设备 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016102048A (ja) * | 2014-11-13 | 2016-06-02 | 三星ダイヤモンド工業株式会社 | スクライブ方法並びにスクライブ装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002144180A (ja) * | 2000-11-09 | 2002-05-21 | Nippon Electric Glass Co Ltd | ガラス板の吸着保持装置及び吸着保持方法 |
JP2003261346A (ja) * | 2002-03-06 | 2003-09-16 | Toray Ind Inc | ガラス基板のカット方法 |
JP2006117480A (ja) * | 2004-10-22 | 2006-05-11 | Citizen Seimitsu Co Ltd | ガラスブレーカー用ワークテーブル、及びその製造方法、及びそれを備えた自動ガラスブレーカー |
JP2006317484A (ja) * | 2005-05-10 | 2006-11-24 | Sanyo Epson Imaging Devices Corp | 電気光学装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07237929A (ja) * | 1994-02-28 | 1995-09-12 | Central Glass Co Ltd | 薄板ガラスの折割方法およびその装置 |
US7141300B2 (en) * | 2001-06-27 | 2006-11-28 | Nitto Denko Corporation | Adhesive sheet for dicing |
KR20050102097A (ko) * | 2003-02-21 | 2005-10-25 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 기판 가공용 테이블 및 기판의 가공장치 |
JP4884811B2 (ja) * | 2006-03-20 | 2012-02-29 | 三菱重工業株式会社 | ガラス基板の静電吸着装置及びその吸着離脱方法 |
-
2008
- 2008-02-29 JP JP2008049618A patent/JP5246583B2/ja active Active
-
2009
- 2009-02-25 KR KR1020107019084A patent/KR101442884B1/ko active IP Right Grant
- 2009-02-25 WO PCT/JP2009/053460 patent/WO2009107685A1/ja active Application Filing
- 2009-02-25 CN CN200980106707.8A patent/CN101959814B/zh active Active
- 2009-02-27 TW TW098106568A patent/TWI462209B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002144180A (ja) * | 2000-11-09 | 2002-05-21 | Nippon Electric Glass Co Ltd | ガラス板の吸着保持装置及び吸着保持方法 |
JP2003261346A (ja) * | 2002-03-06 | 2003-09-16 | Toray Ind Inc | ガラス基板のカット方法 |
JP2006117480A (ja) * | 2004-10-22 | 2006-05-11 | Citizen Seimitsu Co Ltd | ガラスブレーカー用ワークテーブル、及びその製造方法、及びそれを備えた自動ガラスブレーカー |
JP2006317484A (ja) * | 2005-05-10 | 2006-11-24 | Sanyo Epson Imaging Devices Corp | 電気光学装置の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012060158A1 (ja) * | 2010-11-01 | 2012-05-10 | 旭硝子株式会社 | 面取り装置および面取り方法 |
CN103201072A (zh) * | 2010-11-01 | 2013-07-10 | 旭硝子株式会社 | 磨边装置及磨边方法 |
JP5720696B2 (ja) * | 2010-11-01 | 2015-05-20 | 旭硝子株式会社 | 面取り装置および面取り方法 |
KR101822215B1 (ko) * | 2010-11-01 | 2018-01-25 | 아사히 가라스 가부시키가이샤 | 모따기 장치 및 모따기 방법 |
CN107921601A (zh) * | 2015-07-21 | 2018-04-17 | 康宁股份有限公司 | 对玻璃基材进行边缘精整的方法和设备 |
Also Published As
Publication number | Publication date |
---|---|
TWI462209B (zh) | 2014-11-21 |
JP5246583B2 (ja) | 2013-07-24 |
CN101959814A (zh) | 2011-01-26 |
KR101442884B1 (ko) | 2014-09-22 |
CN101959814B (zh) | 2014-05-14 |
KR20100136968A (ko) | 2010-12-29 |
WO2009107685A1 (ja) | 2009-09-03 |
TW200945478A (en) | 2009-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI509734B (zh) | 脆質部材之處理方法 | |
JP4637053B2 (ja) | ペリクルおよびペリクル剥離装置 | |
KR20120083842A (ko) | 유리 기판 유지 수단, 및 그것을 사용한 euv 마스크 블랭크의 제조 방법 | |
JP5821664B2 (ja) | 貼り合わせ装置、及び貼り合わせ方法 | |
US9449863B2 (en) | Device for aligning and pre-fixing a wafer | |
US20160325538A1 (en) | Method and apparatus for applying film | |
JP5246583B2 (ja) | ガラス基板吸着テーブル、及びガラス基板加工方法 | |
KR20160007400A (ko) | 적층체의 박리 장치 및 박리 방법, 그리고 전자 디바이스의 제조 방법 | |
CN108262941B (zh) | 软对硬贴膜工艺及贴膜产品 | |
JP6616922B1 (ja) | スペーサ、基板の積層体、基板の製造方法、及び磁気ディスク用基板の製造方法 | |
JP4639313B2 (ja) | フッ素樹脂コーティングプレート及び吸着ステージ | |
JP7456633B2 (ja) | ワーク端面クリーンローラ装置 | |
JP6459145B2 (ja) | 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法 | |
JP2016011210A (ja) | 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法 | |
KR20140074852A (ko) | 적층판의 가공 방법, 가공된 적층판 | |
WO2013073247A1 (ja) | 液晶表示素子の連続製造システムおよび液晶表示素子の連続製造方法 | |
CN105895558B (zh) | 剥离开始部制作装置及其制作方法、电子器件的制造方法 | |
KR20140052310A (ko) | 기능성 필름 부착장치 | |
JP6743686B2 (ja) | ガラスフィルム積層体の製造方法及び製造装置 | |
JP2008238348A (ja) | 被加工物保持材 | |
JP2019102584A (ja) | 基板吸着装置 | |
KR20160052446A (ko) | 전자 디바이스 패턴의 인쇄 장치 및 그 인쇄 방법 | |
TWM514102U (zh) | 薄型工件載具 | |
JP2008066477A (ja) | テープ接着方法および電子部品製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100914 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120914 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121030 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130318 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5246583 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130331 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160419 Year of fee payment: 3 |
|
R154 | Certificate of patent or utility model (reissue) |
Free format text: JAPANESE INTERMEDIATE CODE: R154 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |