JP2009163809A5 - - Google Patents
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- Publication number
- JP2009163809A5 JP2009163809A5 JP2007341298A JP2007341298A JP2009163809A5 JP 2009163809 A5 JP2009163809 A5 JP 2009163809A5 JP 2007341298 A JP2007341298 A JP 2007341298A JP 2007341298 A JP2007341298 A JP 2007341298A JP 2009163809 A5 JP2009163809 A5 JP 2009163809A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid
- acid
- manufacturing
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 16
- 239000007788 liquid Substances 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 7
- 238000005498 polishing Methods 0.000 claims 5
- 239000002253 acid Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims 3
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 claims 2
- 229910018104 Ni-P Inorganic materials 0.000 claims 2
- 229910018536 Ni—P Inorganic materials 0.000 claims 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 2
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 230000002378 acidificating effect Effects 0.000 claims 1
- 150000007513 acids Chemical class 0.000 claims 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- 239000012459 cleaning agent Substances 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 230000007935 neutral effect Effects 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 235000006408 oxalic acid Nutrition 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007341298A JP5073475B2 (ja) | 2007-12-28 | 2007-12-28 | ハードディスク用基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007341298A JP5073475B2 (ja) | 2007-12-28 | 2007-12-28 | ハードディスク用基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009163809A JP2009163809A (ja) | 2009-07-23 |
| JP2009163809A5 true JP2009163809A5 (https=) | 2010-11-11 |
| JP5073475B2 JP5073475B2 (ja) | 2012-11-14 |
Family
ID=40966263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007341298A Expired - Fee Related JP5073475B2 (ja) | 2007-12-28 | 2007-12-28 | ハードディスク用基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5073475B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6234673B2 (ja) * | 2012-12-05 | 2017-11-22 | 花王株式会社 | ガラス基板の洗浄方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3693441B2 (ja) * | 1996-12-27 | 2005-09-07 | 富士通株式会社 | 記録媒体の製造方法 |
-
2007
- 2007-12-28 JP JP2007341298A patent/JP5073475B2/ja not_active Expired - Fee Related
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