JP5073475B2 - ハードディスク用基板の製造方法 - Google Patents

ハードディスク用基板の製造方法 Download PDF

Info

Publication number
JP5073475B2
JP5073475B2 JP2007341298A JP2007341298A JP5073475B2 JP 5073475 B2 JP5073475 B2 JP 5073475B2 JP 2007341298 A JP2007341298 A JP 2007341298A JP 2007341298 A JP2007341298 A JP 2007341298A JP 5073475 B2 JP5073475 B2 JP 5073475B2
Authority
JP
Japan
Prior art keywords
substrate
liquid
acid
hard disk
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007341298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009163809A (ja
JP2009163809A5 (https=
Inventor
安則 堀尾
敦司 田村
定治 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP2007341298A priority Critical patent/JP5073475B2/ja
Publication of JP2009163809A publication Critical patent/JP2009163809A/ja
Publication of JP2009163809A5 publication Critical patent/JP2009163809A5/ja
Application granted granted Critical
Publication of JP5073475B2 publication Critical patent/JP5073475B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2007341298A 2007-12-28 2007-12-28 ハードディスク用基板の製造方法 Expired - Fee Related JP5073475B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007341298A JP5073475B2 (ja) 2007-12-28 2007-12-28 ハードディスク用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007341298A JP5073475B2 (ja) 2007-12-28 2007-12-28 ハードディスク用基板の製造方法

Publications (3)

Publication Number Publication Date
JP2009163809A JP2009163809A (ja) 2009-07-23
JP2009163809A5 JP2009163809A5 (https=) 2010-11-11
JP5073475B2 true JP5073475B2 (ja) 2012-11-14

Family

ID=40966263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007341298A Expired - Fee Related JP5073475B2 (ja) 2007-12-28 2007-12-28 ハードディスク用基板の製造方法

Country Status (1)

Country Link
JP (1) JP5073475B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087995A1 (ja) * 2012-12-05 2014-06-12 花王株式会社 ガラス基板の洗浄方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693441B2 (ja) * 1996-12-27 2005-09-07 富士通株式会社 記録媒体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087995A1 (ja) * 2012-12-05 2014-06-12 花王株式会社 ガラス基板の洗浄方法
JP2014111238A (ja) * 2012-12-05 2014-06-19 Kao Corp ガラス基板の洗浄方法

Also Published As

Publication number Publication date
JP2009163809A (ja) 2009-07-23

Similar Documents

Publication Publication Date Title
JP5364319B2 (ja) アルカリ型非イオン性界面活性剤組成物
CN102753669B (zh) 硬质表面用碱性洗涤剂组合物
CN104853853B (zh) 玻璃基板的清洗方法
WO2009076233A1 (en) Particle removal cleaning method and composition
JP2010086563A (ja) ハードディスク用ガラス基板用洗浄剤組成物。
JP5403890B2 (ja) ハードディスク用基板用の洗浄剤組成物
CN101802911B (zh) 用于垂直磁记录方式硬盘用基板的水系洗涤剂组合物
JPWO2012161270A1 (ja) 洗浄剤およびガラス基板の洗浄方法
JPWO2013161877A1 (ja) 合金材料用洗浄剤及び合金材料の製造方法
JP5819638B2 (ja) 電子材料基板用酸性洗浄剤組成物
JP5122497B2 (ja) ハードディスク用基板用の洗浄剤組成物
KR102612276B1 (ko) 실리콘 기판의 연마 방법 및 연마용 조성물 세트
JP5979744B2 (ja) ハードディスク製造方法
JP5073475B2 (ja) ハードディスク用基板の製造方法
JP6761025B2 (ja) 研磨用組成物セット、前研磨用組成物、及びシリコンウェーハの研磨方法
JP7294910B2 (ja) 磁気ディスク基板用洗浄剤組成物
US10570355B2 (en) Cleaning agent composition for glass hard disk substrate
JP5377058B2 (ja) ハードディスク用基板用の洗浄剤組成物
JP6239973B2 (ja) ガラスハードディスク基板の製造方法
JP7294860B2 (ja) 磁気ディスク基板用洗浄剤組成物

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100927

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100927

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110913

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110920

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111121

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120731

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120822

R151 Written notification of patent or utility model registration

Ref document number: 5073475

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150831

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees