JP2009149389A - 浮上ユニット及びそれを有する装置 - Google Patents
浮上ユニット及びそれを有する装置 Download PDFInfo
- Publication number
- JP2009149389A JP2009149389A JP2007326935A JP2007326935A JP2009149389A JP 2009149389 A JP2009149389 A JP 2009149389A JP 2007326935 A JP2007326935 A JP 2007326935A JP 2007326935 A JP2007326935 A JP 2007326935A JP 2009149389 A JP2009149389 A JP 2009149389A
- Authority
- JP
- Japan
- Prior art keywords
- conveyance path
- air
- workpiece
- groove
- guide groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims description 42
- 239000012530 fluid Substances 0.000 claims description 37
- 230000001681 protective effect Effects 0.000 claims description 23
- 239000011521 glass Substances 0.000 abstract description 40
- 239000000758 substrate Substances 0.000 abstract description 39
- 230000032258 transport Effects 0.000 description 18
- 239000007789 gas Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000002736 metal compounds Chemical class 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007326935A JP2009149389A (ja) | 2007-12-19 | 2007-12-19 | 浮上ユニット及びそれを有する装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007326935A JP2009149389A (ja) | 2007-12-19 | 2007-12-19 | 浮上ユニット及びそれを有する装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009149389A true JP2009149389A (ja) | 2009-07-09 |
| JP2009149389A5 JP2009149389A5 (https=) | 2011-02-10 |
Family
ID=40919033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007326935A Pending JP2009149389A (ja) | 2007-12-19 | 2007-12-19 | 浮上ユニット及びそれを有する装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009149389A (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2388808A1 (de) * | 2010-05-20 | 2011-11-23 | Westfälische Wilhelms-Universität Münster | Berührungsloses Transportsystem |
| JP2012138481A (ja) * | 2010-12-27 | 2012-07-19 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
| JP2019529283A (ja) * | 2016-09-13 | 2019-10-17 | コーニング インコーポレイテッド | ガラス基板を加工する装置および方法 |
| EP3900025A4 (en) * | 2018-12-21 | 2022-09-14 | Kateeva, Inc. | Devices, systems, and methods for controlling floatation of a substrate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06255775A (ja) * | 1993-03-05 | 1994-09-13 | Ochiai Nekusasu:Kk | 搬送装置 |
| JPH08293292A (ja) * | 1995-04-25 | 1996-11-05 | Matsushita Electric Ind Co Ltd | 薄物電池部材の搬送装置 |
| JP2004331265A (ja) * | 2003-05-01 | 2004-11-25 | Olympus Corp | 浮上ユニット及び基板検査装置 |
| JP2006206320A (ja) * | 2005-01-27 | 2006-08-10 | Taesung Engineering Corp | 板ガラス移送装置 |
| JP2007106521A (ja) * | 2005-10-11 | 2007-04-26 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
-
2007
- 2007-12-19 JP JP2007326935A patent/JP2009149389A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06255775A (ja) * | 1993-03-05 | 1994-09-13 | Ochiai Nekusasu:Kk | 搬送装置 |
| JPH08293292A (ja) * | 1995-04-25 | 1996-11-05 | Matsushita Electric Ind Co Ltd | 薄物電池部材の搬送装置 |
| JP2004331265A (ja) * | 2003-05-01 | 2004-11-25 | Olympus Corp | 浮上ユニット及び基板検査装置 |
| JP2006206320A (ja) * | 2005-01-27 | 2006-08-10 | Taesung Engineering Corp | 板ガラス移送装置 |
| JP2007106521A (ja) * | 2005-10-11 | 2007-04-26 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2388808A1 (de) * | 2010-05-20 | 2011-11-23 | Westfälische Wilhelms-Universität Münster | Berührungsloses Transportsystem |
| JP2012138481A (ja) * | 2010-12-27 | 2012-07-19 | Tokyo Ohka Kogyo Co Ltd | 塗布装置及び塗布方法 |
| JP2019529283A (ja) * | 2016-09-13 | 2019-10-17 | コーニング インコーポレイテッド | ガラス基板を加工する装置および方法 |
| JP7002824B2 (ja) | 2016-09-13 | 2022-01-20 | コーニング インコーポレイテッド | ガラス基板を加工する装置および方法 |
| US11420895B2 (en) | 2016-09-13 | 2022-08-23 | Corning Incorporated | Apparatus and method for processing a glass substrate |
| EP3900025A4 (en) * | 2018-12-21 | 2022-09-14 | Kateeva, Inc. | Devices, systems, and methods for controlling floatation of a substrate |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009073646A (ja) | 浮上方法及び浮上ユニット | |
| JP5047545B2 (ja) | 浮上搬送ユニット | |
| KR101142959B1 (ko) | 평판 정밀 플로팅 시스템 | |
| WO2006052919A1 (en) | Non-contact porous air bearing and glass flattening device | |
| KR20150000482A (ko) | 부상용 에어 플레이트 | |
| JP2008007319A5 (https=) | ||
| JP2009149389A (ja) | 浮上ユニット及びそれを有する装置 | |
| JP4814050B2 (ja) | 浮上搬送ユニット | |
| JP2010254453A (ja) | 浮上装置 | |
| KR101064893B1 (ko) | 평판 플로팅 시스템 | |
| KR100831135B1 (ko) | 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치 | |
| JP6605871B2 (ja) | 基板浮上搬送装置 | |
| JP2009161283A (ja) | 浮上ユニット及び装置 | |
| WO2012066613A1 (ja) | 通気性搬送用テーブル | |
| JP2009032984A (ja) | 浮上搬送ユニット | |
| JP2010260715A (ja) | 浮上ユニット及び浮上装置 | |
| TWI389240B (zh) | The support of the workpiece | |
| JP2008273729A (ja) | 浮上ユニット | |
| JP2011246213A (ja) | 基板搬送装置 | |
| JP5176631B2 (ja) | 基板搬送装置及び基板検査装置 | |
| JP2006264804A (ja) | 大型フラットパネルの浮上ユニット及びこれを用いた非接触搬送装置 | |
| JP4376641B2 (ja) | エア浮上式コンベア | |
| JP5740394B2 (ja) | 旋回流形成体及び非接触搬送装置 | |
| KR100830053B1 (ko) | 비접촉식 기판 반송용 척 | |
| JP5355056B2 (ja) | 浮上装置および流体噴出体ユニット |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101220 |
|
| A621 | Written request for application examination |
Effective date: 20101220 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20121024 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20121030 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130402 |