JP2009129993A - 筐体カバー機構 - Google Patents
筐体カバー機構 Download PDFInfo
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- JP2009129993A JP2009129993A JP2007300901A JP2007300901A JP2009129993A JP 2009129993 A JP2009129993 A JP 2009129993A JP 2007300901 A JP2007300901 A JP 2007300901A JP 2007300901 A JP2007300901 A JP 2007300901A JP 2009129993 A JP2009129993 A JP 2009129993A
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Abstract
【解決手段】少なくとも開口部233aを閉塞し得る大きさを有し可撓性を有するシート状カバー部材202を、移動手段215によって開口部233aを閉塞する閉塞位置と開口部233aを開放する開放位置との間で移動させることで、開口部233aを開閉するように構成し、開口部233aの開放時にはシート状カバー部材202を筐体233内部のメンテナンス性を阻害しない状態に維持することができるようにした。
【選択図】 図6
Description
201 筐体カバー機構
202 シート状カバー部材
203 線状部材
209 駆動手段
215 移動手段
220 保持手段
230 ウエーハ処理手段
233 筐体
233a 開口部
233m 第1の側部
233n 第2の側部
233o 筐体外壁面
Claims (3)
- ウエーハを保持する保持手段と該保持手段に保持されたウエーハの表面に洗浄或いは溶液塗布の処理を施すウエーハ処理手段とを少なくとも内蔵した筐体の上方に開口した開口部を開閉可能に覆う筐体カバー機構であって、
少なくとも前記開口部を閉塞し得る大きさを有し可撓性を有するシート状カバー部材と、
該シート状カバー部材を、前記開口部を閉塞する閉塞位置と前記開口部を開放する開放位置との間で移動させる移動手段と、
を備えることを特徴とする筐体カバー機構。 - 前記移動手段は、
前記シート状カバー部材の移動方向両側に連結されて移動方向に延在する一対の線状部材と、
該線状部材を前記シート状カバー部材の移動方向に沿って移動させる駆動手段と、
を備えることを特徴とする請求項1に記載の筐体カバー機構。 - 前記線状部材は、前記開口部の対向する第1の側部から第2の側部を経て前記筐体外壁面に沿って略逆L字状に屈曲配設されて周回移動する無端帯からなることを特徴とする請求項2に記載の筐体カバー機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007300901A JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007300901A JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009129993A true JP2009129993A (ja) | 2009-06-11 |
JP4979550B2 JP4979550B2 (ja) | 2012-07-18 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007300901A Active JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
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JP (1) | JP4979550B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012040571A (ja) * | 2010-08-13 | 2012-03-01 | Disco Corp | レーザー加工装置 |
JP2013105857A (ja) * | 2011-11-11 | 2013-05-30 | Disco Abrasive Syst Ltd | 筐体カバー機構 |
JP2013229462A (ja) * | 2012-04-26 | 2013-11-07 | Disco Abrasive Syst Ltd | 洗浄機構を備えた加工装置 |
KR20210157897A (ko) * | 2020-06-22 | 2021-12-29 | 주식회사 네패스 | 레이저 컷팅 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08117704A (ja) * | 1994-10-27 | 1996-05-14 | Olympus Optical Co Ltd | 洗浄装置のシャッター |
JP2006339435A (ja) * | 2005-06-02 | 2006-12-14 | Disco Abrasive Syst Ltd | 洗浄装置を備えた加工機 |
-
2007
- 2007-11-20 JP JP2007300901A patent/JP4979550B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08117704A (ja) * | 1994-10-27 | 1996-05-14 | Olympus Optical Co Ltd | 洗浄装置のシャッター |
JP2006339435A (ja) * | 2005-06-02 | 2006-12-14 | Disco Abrasive Syst Ltd | 洗浄装置を備えた加工機 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012040571A (ja) * | 2010-08-13 | 2012-03-01 | Disco Corp | レーザー加工装置 |
JP2013105857A (ja) * | 2011-11-11 | 2013-05-30 | Disco Abrasive Syst Ltd | 筐体カバー機構 |
JP2013229462A (ja) * | 2012-04-26 | 2013-11-07 | Disco Abrasive Syst Ltd | 洗浄機構を備えた加工装置 |
KR20210157897A (ko) * | 2020-06-22 | 2021-12-29 | 주식회사 네패스 | 레이저 컷팅 장치 |
KR102609588B1 (ko) * | 2020-06-22 | 2023-12-05 | 주식회사 네패스 | 레이저 컷팅 장치 |
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JP4979550B2 (ja) | 2012-07-18 |
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