JP2009124791A - 振動体及び振動波アクチュエータ - Google Patents

振動体及び振動波アクチュエータ Download PDF

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Publication number
JP2009124791A
JP2009124791A JP2007293247A JP2007293247A JP2009124791A JP 2009124791 A JP2009124791 A JP 2009124791A JP 2007293247 A JP2007293247 A JP 2007293247A JP 2007293247 A JP2007293247 A JP 2007293247A JP 2009124791 A JP2009124791 A JP 2009124791A
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JP
Japan
Prior art keywords
piezoelectric
layer
vibrating body
ceramic substrate
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007293247A
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English (en)
Japanese (ja)
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JP2009124791A5 (enExample
Inventor
Yutaka Maruyama
裕 丸山
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007293247A priority Critical patent/JP2009124791A/ja
Publication of JP2009124791A publication Critical patent/JP2009124791A/ja
Publication of JP2009124791A5 publication Critical patent/JP2009124791A5/ja
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2007293247A 2007-11-12 2007-11-12 振動体及び振動波アクチュエータ Pending JP2009124791A (ja)

Priority Applications (1)

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JP2007293247A JP2009124791A (ja) 2007-11-12 2007-11-12 振動体及び振動波アクチュエータ

Applications Claiming Priority (1)

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JP2007293247A JP2009124791A (ja) 2007-11-12 2007-11-12 振動体及び振動波アクチュエータ

Publications (2)

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JP2009124791A true JP2009124791A (ja) 2009-06-04
JP2009124791A5 JP2009124791A5 (enExample) 2010-12-24

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JP2007293247A Pending JP2009124791A (ja) 2007-11-12 2007-11-12 振動体及び振動波アクチュエータ

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011045869A (ja) * 2009-07-28 2011-03-10 Canon Inc 振動体及び振動波アクチュエータ
JP2011086641A (ja) * 2009-10-13 2011-04-28 Nec Tokin Corp 圧電膜型アクチュエータ、液滴噴射装置、およびそれらの製造方法
JP2011217493A (ja) * 2010-03-31 2011-10-27 Canon Inc 振動体及び振動波アクチュエータ
JP2011254569A (ja) * 2010-05-31 2011-12-15 Canon Inc 振動体とその製造方法及び振動波アクチュエータ
JP2012135072A (ja) * 2010-12-20 2012-07-12 Canon Inc 振動型駆動装置の振動体及び振動型駆動装置
WO2014203529A1 (en) * 2013-06-20 2014-12-24 Canon Kabushiki Kaisha Vibration-type actuator, interchangeable lens, image pickup apparatus, and automatic stage
JP2015133415A (ja) * 2014-01-14 2015-07-23 株式会社日本セラテック 圧電素子
JP2015170848A (ja) * 2014-03-10 2015-09-28 サムソン エレクトロ−メカニックス カンパニーリミテッド． 圧電素子及びこれを含む圧電振動子
US9818927B2 (en) 2013-02-08 2017-11-14 Canon Kabushiki Kaisha Vibration element, method for manufacturing same, and vibration-type driving device
US9837938B2 (en) 2013-02-08 2017-12-05 Canon Kabushiki Kaisha Vibration element, method for manufacturing same, and vibration-type driving device
JP2018010963A (ja) * 2016-07-13 2018-01-18 京セラ株式会社 圧電アクチュエータ
US10069440B2 (en) 2014-10-30 2018-09-04 Canon Kabushiki Kaisha Vibrator and ultrasonic motor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000183413A (ja) * 1998-12-21 2000-06-30 Ricoh Co Ltd 変位素子及びその作製方法
JP2004357438A (ja) * 2003-05-29 2004-12-16 Kyocera Corp 圧電アクチュエータおよびインクジェット記録ヘッド
JP2007059697A (ja) * 2005-08-25 2007-03-08 Tdk Corp 積層型圧電素子
JP2007281362A (ja) * 2006-04-11 2007-10-25 Canon Inc 積層圧電素子及びその製造方法、並びに振動波駆動装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000183413A (ja) * 1998-12-21 2000-06-30 Ricoh Co Ltd 変位素子及びその作製方法
JP2004357438A (ja) * 2003-05-29 2004-12-16 Kyocera Corp 圧電アクチュエータおよびインクジェット記録ヘッド
JP2007059697A (ja) * 2005-08-25 2007-03-08 Tdk Corp 積層型圧電素子
JP2007281362A (ja) * 2006-04-11 2007-10-25 Canon Inc 積層圧電素子及びその製造方法、並びに振動波駆動装置

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8941290B2 (en) 2009-07-28 2015-01-27 Canon Kabushiki Kaisha Vibrating body and vibration wave actuator
JP2011045869A (ja) * 2009-07-28 2011-03-10 Canon Inc 振動体及び振動波アクチュエータ
JP2011086641A (ja) * 2009-10-13 2011-04-28 Nec Tokin Corp 圧電膜型アクチュエータ、液滴噴射装置、およびそれらの製造方法
JP2011217493A (ja) * 2010-03-31 2011-10-27 Canon Inc 振動体及び振動波アクチュエータ
JP2011254569A (ja) * 2010-05-31 2011-12-15 Canon Inc 振動体とその製造方法及び振動波アクチュエータ
US9083264B2 (en) 2010-05-31 2015-07-14 Canon Kabushiki Kaisha Vibration element, manufacturing method thereof, and vibration wave actuator
JP2012135072A (ja) * 2010-12-20 2012-07-12 Canon Inc 振動型駆動装置の振動体及び振動型駆動装置
US8749117B2 (en) 2010-12-20 2014-06-10 Canon Kabushiki Kaisha Vibrating body of vibratory drive unit and vibratory drive unit
US9818927B2 (en) 2013-02-08 2017-11-14 Canon Kabushiki Kaisha Vibration element, method for manufacturing same, and vibration-type driving device
US9837938B2 (en) 2013-02-08 2017-12-05 Canon Kabushiki Kaisha Vibration element, method for manufacturing same, and vibration-type driving device
JP2015006047A (ja) * 2013-06-20 2015-01-08 キヤノン株式会社 振動型アクチュエータ、交換用レンズ、撮像装置、及び自動ステージ
WO2014203529A1 (en) * 2013-06-20 2014-12-24 Canon Kabushiki Kaisha Vibration-type actuator, interchangeable lens, image pickup apparatus, and automatic stage
US9813596B2 (en) 2013-06-20 2017-11-07 Canon Kabushiki Kaisha Vibration-type actuator, interchangeable lens, image pickup apparatus, and automatic stage
JP2015133415A (ja) * 2014-01-14 2015-07-23 株式会社日本セラテック 圧電素子
JP2015170848A (ja) * 2014-03-10 2015-09-28 サムソン エレクトロ−メカニックス カンパニーリミテッド． 圧電素子及びこれを含む圧電振動子
US10069440B2 (en) 2014-10-30 2018-09-04 Canon Kabushiki Kaisha Vibrator and ultrasonic motor
JP2018010963A (ja) * 2016-07-13 2018-01-18 京セラ株式会社 圧電アクチュエータ

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