JP2009076776A5 - - Google Patents

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Publication number
JP2009076776A5
JP2009076776A5 JP2007245915A JP2007245915A JP2009076776A5 JP 2009076776 A5 JP2009076776 A5 JP 2009076776A5 JP 2007245915 A JP2007245915 A JP 2007245915A JP 2007245915 A JP2007245915 A JP 2007245915A JP 2009076776 A5 JP2009076776 A5 JP 2009076776A5
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JP
Japan
Prior art keywords
probe
probe card
inspected
chip
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007245915A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009076776A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007245915A priority Critical patent/JP2009076776A/ja
Priority claimed from JP2007245915A external-priority patent/JP2009076776A/ja
Priority to CN2008100988561A priority patent/CN101393251B/zh
Priority to KR1020080047168A priority patent/KR101019878B1/ko
Priority to TW097136136A priority patent/TWI427295B/zh
Publication of JP2009076776A publication Critical patent/JP2009076776A/ja
Publication of JP2009076776A5 publication Critical patent/JP2009076776A5/ja
Pending legal-status Critical Current

Links

JP2007245915A 2007-09-21 2007-09-21 プローブ装置及びプローブ方法 Pending JP2009076776A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007245915A JP2009076776A (ja) 2007-09-21 2007-09-21 プローブ装置及びプローブ方法
CN2008100988561A CN101393251B (zh) 2007-09-21 2008-05-19 探测装置和探测方法
KR1020080047168A KR101019878B1 (ko) 2007-09-21 2008-05-21 프로브 장치, 프로브 방법 및 기억 매체
TW097136136A TWI427295B (zh) 2007-09-21 2008-09-19 Probe device and detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007245915A JP2009076776A (ja) 2007-09-21 2007-09-21 プローブ装置及びプローブ方法

Publications (2)

Publication Number Publication Date
JP2009076776A JP2009076776A (ja) 2009-04-09
JP2009076776A5 true JP2009076776A5 (enExample) 2010-09-24

Family

ID=40493641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007245915A Pending JP2009076776A (ja) 2007-09-21 2007-09-21 プローブ装置及びプローブ方法

Country Status (4)

Country Link
JP (1) JP2009076776A (enExample)
KR (1) KR101019878B1 (enExample)
CN (1) CN101393251B (enExample)
TW (1) TWI427295B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101968518B (zh) * 2009-07-27 2012-08-08 京元电子股份有限公司 具同心圆探针座的半导体测试设备
JP6289962B2 (ja) * 2013-07-11 2018-03-07 東京エレクトロン株式会社 プローブ装置
CN107976576A (zh) * 2016-10-24 2018-05-01 精工爱普生株式会社 电子元器件传送装置以及电子元器件检查装置
CN108885238A (zh) * 2017-01-19 2018-11-23 深圳市汇顶科技股份有限公司 一种用于矩阵排列芯片的测试装置
US11125814B2 (en) * 2017-02-22 2021-09-21 Sintokogio, Ltd. Test system
KR101897638B1 (ko) * 2017-08-21 2018-09-13 (주)씨온테크 반도체 소자의 전기적 특성 자동 측정용 고정밀 테스트 장치
TWI655444B (zh) * 2017-12-20 2019-04-01 亞亞科技股份有限公司 IC inspection machine with temporary fixing effect
US10698025B2 (en) * 2018-07-20 2020-06-30 Formfactor Beaverton, Inc. Probe systems and methods that utilize a flow-regulating structure for improved collection of an optical image of a device under test
JP2020145323A (ja) * 2019-03-06 2020-09-10 東京エレクトロン株式会社 基板保持装置および基板吸着方法
CN117501137A (zh) * 2021-06-23 2024-02-02 三菱电机株式会社 检查装置
CN113725131B (zh) * 2021-11-02 2022-02-08 西安奕斯伟材料科技有限公司 晶圆预处理装置及晶圆缺陷检测方法
CN114966147B (zh) * 2022-05-27 2023-12-22 江苏艾科半导体有限公司 一种芯片测试探针台保护罩
KR102761296B1 (ko) * 2023-11-24 2025-02-03 주식회사 비이링크 고전압-고전류용 전력반도체용 프로브 카드

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251280U (enExample) * 1985-09-19 1987-03-30
WO1996029607A1 (en) * 1995-03-18 1996-09-26 Tokyo Electron Limited Method and apparatus for inspecting substrate
JPH0982766A (ja) * 1995-09-18 1997-03-28 Sony Corp プロービング測定装置
JP3842468B2 (ja) * 1998-12-08 2006-11-08 株式会社日本マイクロニクス プローブの清掃方法及び装置
JP2002340974A (ja) * 2001-05-17 2002-11-27 Matsushita Electric Ind Co Ltd 半導体素子の電気特性測定装置、及び半導体素子の電気特性測定方法
JP4791023B2 (ja) * 2004-11-08 2011-10-12 インターナショナル・ビジネス・マシーンズ・コーポレーション Ｔｆｔの検査装置および検査方法

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