JP2009054662A - アンチヒューズ素子及びこれを有する半導体装置 - Google Patents
アンチヒューズ素子及びこれを有する半導体装置 Download PDFInfo
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- JP2009054662A JP2009054662A JP2007217765A JP2007217765A JP2009054662A JP 2009054662 A JP2009054662 A JP 2009054662A JP 2007217765 A JP2007217765 A JP 2007217765A JP 2007217765 A JP2007217765 A JP 2007217765A JP 2009054662 A JP2009054662 A JP 2009054662A
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- region
- electrode
- antifuse
- antifuse element
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/18—Auxiliary circuits, e.g. for writing into memory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5252—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Read Only Memory (AREA)
Abstract
【解決手段】ゲート電極110と、デプレッション型のチャネル領域120と、ゲート電極110とチャネル領域120との間に設けられたゲート絶縁膜130と、チャネル領域120と接合する拡散層領域122とを備える。チャネル領域120から見て拡散層領域122とは反対側の領域には、拡散層領域122と同電位が与えられる他の電極を介することなく素子分離領域104が存在する。これにより、ゲート絶縁膜130にかかる電界が不均一となり、拡散層領域122に近くなるほど電界強度が高くなることから、拡散層領域122に近い部分ほど絶縁破壊が生じる確率が高くなる。
【選択図】図1
Description
Rde=Rg+Rs・Rd/(Rs+Rd)=Rg+Rd/2
となる。
Rde= Rg+Rs・Rd/(Rs+Rd)≒Rg
となる。
101 N型基板
102 活性領域
103 Pウェル領域
104 素子分離領域
106 コンタクト領域
108 素子分離領域
110,410,510 ゲート電極
111〜114 ゲート電極の端部
120 チャネル領域
122,124 拡散層領域
130 ゲート絶縁膜
130a 絶縁破壊領域
140〜142,161,171,172 上層配線
150〜152,160 コンタクト
180 書き込み回路
190 読み出し回路
191 スイッチ
192 コンパレータ
411,511 ゲート電極の第1の部分
412,512 ゲート電極の第2の部分
513 ゲート電極の第3の部分
514 ゲート電極の第4の部分
Claims (6)
- 上部電極と、下部電極と、前記上部電極と前記下部電極との間に設けられた絶縁膜と、前記下部電極に隣接して設けられた引き出し電極とを備え、前記絶縁膜を絶縁破壊することにより前記下部電極を介して前記上部電極と前記引き出し電極とを電気的に接続可能なアンチヒューズ素子であって、
前記下部電極から見て前記引き出し電極とは反対側の領域には、前記引き出し電極と同電位が与えられる他の電極を介することなく素子分離領域が存在することを特徴とするアンチヒューズ素子。 - 前記上部電極の一部が前記素子分離領域上に形成されていることを特徴とする請求項1に記載のアンチヒューズ素子。
- 前記上部電極は第1の上層配線に接続されたゲート電極であり、前記引き出し電極は第2の上層配線に接続された拡散層領域であり、前記下部電極は前記拡散層領域と接合するデプレッション型のチャネル領域であることを特徴とする請求項1又は2に記載のアンチヒューズ素子。
- 前記ゲート電極と前記第1の上層配線とを接続するコンタクトは、前記チャネル領域の真上に配置されていることを特徴とする請求項3に記載のアンチヒューズ素子。
- 請求項1乃至4のいずれか一項に記載のアンチヒューズ素子と、前記上部電極に高電圧を印加することにより前記絶縁膜を絶縁破壊する書き込み回路と、前記上部電極と前記引き出し電極との間の抵抗値を検出する読み出し回路とを備えることを特徴とする半導体装置。
- 請求項3又は4に記載のアンチヒューズ素子が第1の方向に複数個並べて配置され、前記第1の上層配線が前記第1の方向と交差する第2の方向に延在し、前記第2の上層配線が前記第2の方向と対向する第3の方向に延在することにより2端子型のアンチヒューズアレイを構成し、
前記複数のアンチヒューズ素子が一つのコンタクト領域にまとめて取り囲まれていることを特徴とする半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007217765A JP2009054662A (ja) | 2007-08-24 | 2007-08-24 | アンチヒューズ素子及びこれを有する半導体装置 |
US12/196,325 US8179709B2 (en) | 2007-08-24 | 2008-08-22 | Semiconductor device including antifuse element |
US13/448,096 US20120199943A1 (en) | 2007-08-24 | 2012-04-16 | Semiconductor device including antifuse element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007217765A JP2009054662A (ja) | 2007-08-24 | 2007-08-24 | アンチヒューズ素子及びこれを有する半導体装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014239776A Division JP2015039042A (ja) | 2014-11-27 | 2014-11-27 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009054662A true JP2009054662A (ja) | 2009-03-12 |
Family
ID=40381980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007217765A Pending JP2009054662A (ja) | 2007-08-24 | 2007-08-24 | アンチヒューズ素子及びこれを有する半導体装置 |
Country Status (2)
Country | Link |
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US (2) | US8179709B2 (ja) |
JP (1) | JP2009054662A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10403380B2 (en) | 2016-06-30 | 2019-09-03 | Renesas Electroncis Corporation | Semiconductor device having an anti-fuse element and method for suppressing the expansion of the cell current distribution to improve the writing yield thereof |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8049299B2 (en) | 2009-02-25 | 2011-11-01 | Freescale Semiconductor, Inc. | Antifuses with curved breakdown regions |
JP4937316B2 (ja) * | 2009-08-21 | 2012-05-23 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US8350264B2 (en) * | 2010-07-14 | 2013-01-08 | International Businesss Machines Corporation | Secure anti-fuse with low voltage programming through localized diffusion heating |
US8891328B2 (en) | 2011-06-27 | 2014-11-18 | International Business Machines Corporation | Low voltage metal gate antifuse with depletion mode MOSFET |
KR101966278B1 (ko) * | 2012-12-28 | 2019-04-08 | 에스케이하이닉스 주식회사 | 반도체 소자의 안티 퓨즈 어레이 및 그 제조 방법 |
TWI767850B (zh) * | 2021-10-05 | 2022-06-11 | 華邦電子股份有限公司 | 反熔絲元件及其製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0461164A (ja) * | 1990-06-22 | 1992-02-27 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JPH0582641A (ja) * | 1991-01-18 | 1993-04-02 | Actel Corp | 非溶断型素子構造、非溶断型素子構造中に小抵抗導電フイラメントを形成する方法、及び非溶断型素子構造アレイ |
JP2003168734A (ja) * | 2001-11-29 | 2003-06-13 | Mitsubishi Electric Corp | 半導体装置及びその制御方法、その製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3322738B2 (ja) * | 1993-12-08 | 2002-09-09 | 株式会社半導体エネルギー研究所 | 半導体装置及び集積回路ならびに表示装置 |
US6630724B1 (en) * | 2000-08-31 | 2003-10-07 | Micron Technology, Inc. | Gate dielectric antifuse circuits and methods for operating same |
US6960819B2 (en) * | 2000-12-20 | 2005-11-01 | Broadcom Corporation | System and method for one-time programmed memory through direct-tunneling oxide breakdown |
US6700176B2 (en) | 2002-07-18 | 2004-03-02 | Broadcom Corporation | MOSFET anti-fuse structure and method for making same |
US6751150B2 (en) * | 2002-08-29 | 2004-06-15 | Micron Technology, Inc. | Circuits and method to protect a gate dielectric antifuse |
US20080029844A1 (en) * | 2006-08-03 | 2008-02-07 | Adkisson James W | Anti-fuse structure optionally integrated with guard ring structure |
JP5666078B2 (ja) * | 2007-07-27 | 2015-02-12 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | アンチヒューズ素子及びこれを有する半導体装置 |
-
2007
- 2007-08-24 JP JP2007217765A patent/JP2009054662A/ja active Pending
-
2008
- 2008-08-22 US US12/196,325 patent/US8179709B2/en not_active Expired - Fee Related
-
2012
- 2012-04-16 US US13/448,096 patent/US20120199943A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0461164A (ja) * | 1990-06-22 | 1992-02-27 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JPH0582641A (ja) * | 1991-01-18 | 1993-04-02 | Actel Corp | 非溶断型素子構造、非溶断型素子構造中に小抵抗導電フイラメントを形成する方法、及び非溶断型素子構造アレイ |
JP2003168734A (ja) * | 2001-11-29 | 2003-06-13 | Mitsubishi Electric Corp | 半導体装置及びその制御方法、その製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10403380B2 (en) | 2016-06-30 | 2019-09-03 | Renesas Electroncis Corporation | Semiconductor device having an anti-fuse element and method for suppressing the expansion of the cell current distribution to improve the writing yield thereof |
Also Published As
Publication number | Publication date |
---|---|
US20090052221A1 (en) | 2009-02-26 |
US8179709B2 (en) | 2012-05-15 |
US20120199943A1 (en) | 2012-08-09 |
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