JP2009052432A5 - - Google Patents

Download PDF

Info

Publication number
JP2009052432A5
JP2009052432A5 JP2007218003A JP2007218003A JP2009052432A5 JP 2009052432 A5 JP2009052432 A5 JP 2009052432A5 JP 2007218003 A JP2007218003 A JP 2007218003A JP 2007218003 A JP2007218003 A JP 2007218003A JP 2009052432 A5 JP2009052432 A5 JP 2009052432A5
Authority
JP
Japan
Prior art keywords
vacuum
reservoir tank
pressure
vacuum chamber
communication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007218003A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009052432A (ja
JP4881260B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007218003A priority Critical patent/JP4881260B2/ja
Priority claimed from JP2007218003A external-priority patent/JP4881260B2/ja
Publication of JP2009052432A publication Critical patent/JP2009052432A/ja
Publication of JP2009052432A5 publication Critical patent/JP2009052432A5/ja
Application granted granted Critical
Publication of JP4881260B2 publication Critical patent/JP4881260B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007218003A 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法 Expired - Fee Related JP4881260B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007218003A JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007218003A JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Publications (3)

Publication Number Publication Date
JP2009052432A JP2009052432A (ja) 2009-03-12
JP2009052432A5 true JP2009052432A5 (cg-RX-API-DMAC7.html) 2010-10-14
JP4881260B2 JP4881260B2 (ja) 2012-02-22

Family

ID=40503723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007218003A Expired - Fee Related JP4881260B2 (ja) 2007-08-24 2007-08-24 真空排気幇助装置と真空排気幇助方法

Country Status (1)

Country Link
JP (1) JP4881260B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6457753B2 (ja) * 2014-07-09 2019-01-23 岩谷産業株式会社 吸引装置、吸引方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113511A (en) * 1978-02-23 1979-09-05 Seiko Epson Corp Vacuum unit
JPS62199973A (ja) * 1986-02-28 1987-09-03 Nok Corp 真空引き方法
JPH04362284A (ja) * 1991-06-07 1992-12-15 Tel Varian Ltd 真空装置
JPH09306972A (ja) * 1996-05-17 1997-11-28 C Bui Res:Kk 半導体製造装置
JPH11230034A (ja) * 1998-02-18 1999-08-24 Ebara Corp 真空排気システム及びその運転方法

Similar Documents

Publication Publication Date Title
JP2009534574A5 (cg-RX-API-DMAC7.html)
JP2009539626A5 (cg-RX-API-DMAC7.html)
JP2013220492A (ja) 把持装置および把持方法
JP2004006801A5 (cg-RX-API-DMAC7.html)
RU2009110259A (ru) Очистное устройство и способ очистки обрабатываемой детали
JP2001020860A (ja) 多チャンバ真空装置の運転方法
FR2933380B1 (fr) Procede de conditionnement de produit fluide dans un distributeur
JP2009052432A5 (cg-RX-API-DMAC7.html)
JP6511437B2 (ja) フィルムチャンバの排気方法
JP6384654B2 (ja) ドライスポット除去装置及びドライスポット除去方法
CN101648461A (zh) 气泡清除系统及方法
JP2016537542A5 (cg-RX-API-DMAC7.html)
JP2008300806A5 (cg-RX-API-DMAC7.html)
CN210897311U (zh) 一种层压机用抽真空装置及光伏组件用层压机
JP2007149948A5 (cg-RX-API-DMAC7.html)
ATE408756T1 (de) Pumpvorrichtung zum schnellen evakuiieren eines behälters mit niedrigem energieverbrauch
JP4881260B2 (ja) 真空排気幇助装置と真空排気幇助方法
JP6022269B2 (ja) タイヤの加硫方法
JP2010167338A (ja) 真空処理装置及び真空処理方法
KR101428264B1 (ko) 진공압 밸브가 마련된 진공 배력식 브레이크 구조
JP5956754B2 (ja) 真空排気システム
CN201849043U (zh) 一种真空固化装置
JP2006075850A (ja) 真空装置及び真空引き方法
CN204344747U (zh) 离合器液压操纵机构及车辆
JP2004228602A5 (cg-RX-API-DMAC7.html)