JP2009031392A - ワイヤーグリッド型偏光素子、その製造方法、液晶装置および投射型表示装置 - Google Patents
ワイヤーグリッド型偏光素子、その製造方法、液晶装置および投射型表示装置 Download PDFInfo
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- JP2009031392A JP2009031392A JP2007192990A JP2007192990A JP2009031392A JP 2009031392 A JP2009031392 A JP 2009031392A JP 2007192990 A JP2007192990 A JP 2007192990A JP 2007192990 A JP2007192990 A JP 2007192990A JP 2009031392 A JP2009031392 A JP 2009031392A
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- Prior art keywords
- polarizing element
- wire grid
- metal
- grid type
- substrate surface
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- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 136
- 229910052751 metal Inorganic materials 0.000 claims abstract description 126
- 239000002184 metal Substances 0.000 claims abstract description 126
- 238000002834 transmittance Methods 0.000 claims abstract description 25
- 238000005530 etching Methods 0.000 claims description 39
- 239000010410 layer Substances 0.000 claims description 20
- 230000010287 polarization Effects 0.000 claims description 18
- 238000005498 polishing Methods 0.000 claims description 17
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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- 229910052769 Ytterbium Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
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- 229910052742 iron Inorganic materials 0.000 description 3
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229910052703 rhodium Inorganic materials 0.000 description 3
- 239000010948 rhodium Substances 0.000 description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
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- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
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- 229910045601 alloy Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
- Liquid Crystal (AREA)
- Projection Apparatus (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007192990A JP2009031392A (ja) | 2007-07-25 | 2007-07-25 | ワイヤーグリッド型偏光素子、その製造方法、液晶装置および投射型表示装置 |
| US12/145,229 US20090027773A1 (en) | 2007-07-25 | 2008-06-24 | Wire grid type polarization element, manufacturing method thereof, liquid crystal device, and projection type display apparatus |
| CNA2008101300313A CN101354458A (zh) | 2007-07-25 | 2008-07-24 | 线栅型偏振光元件及其制法、液晶装置及投射型显示装置 |
| KR1020080072001A KR20090012115A (ko) | 2007-07-25 | 2008-07-24 | 와이어 그리드형 편광 소자, 그 제조 방법, 액정 장치 및투사형 표시 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007192990A JP2009031392A (ja) | 2007-07-25 | 2007-07-25 | ワイヤーグリッド型偏光素子、その製造方法、液晶装置および投射型表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009031392A true JP2009031392A (ja) | 2009-02-12 |
| JP2009031392A5 JP2009031392A5 (enExample) | 2010-07-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007192990A Withdrawn JP2009031392A (ja) | 2007-07-25 | 2007-07-25 | ワイヤーグリッド型偏光素子、その製造方法、液晶装置および投射型表示装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20090027773A1 (enExample) |
| JP (1) | JP2009031392A (enExample) |
| KR (1) | KR20090012115A (enExample) |
| CN (1) | CN101354458A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016153920A (ja) * | 2016-05-19 | 2016-08-25 | ウシオ電機株式会社 | 偏光光照射装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010261999A (ja) * | 2009-04-30 | 2010-11-18 | Ricoh Co Ltd | 光学素子、偏光フィルタ、光アイソレータ、光学装置 |
| WO2011091556A1 (zh) * | 2010-01-26 | 2011-08-04 | Li Guanjun | 液晶屏与液晶显示装置 |
| JP5471674B2 (ja) * | 2010-03-23 | 2014-04-16 | セイコーエプソン株式会社 | プロジェクター |
| JP2011248284A (ja) * | 2010-05-31 | 2011-12-08 | Sony Chemical & Information Device Corp | 偏光板及び偏光板の製造方法 |
| US20130043956A1 (en) * | 2011-08-15 | 2013-02-21 | Honeywell International Inc. | Systems and methods for a nanofabricated optical circular polarizer |
| KR101856231B1 (ko) | 2011-12-19 | 2018-05-10 | 엘지이노텍 주식회사 | 나노패턴을 구비한 투명기판 및 그 제조방법 |
| WO2014196015A1 (ja) * | 2013-06-04 | 2014-12-11 | Necディスプレイソリューションズ株式会社 | 照明光学系及びプロジェクタ |
| CN104937448B (zh) * | 2013-09-06 | 2017-05-24 | 亚斯卡奈特股份有限公司 | 具备平行配置的光反射部的光控制面板的制造方法 |
| CN105511002B (zh) * | 2014-09-23 | 2018-03-20 | 中芯国际集成电路制造(上海)有限公司 | 一种光栅及其制造方法、电子装置 |
| JP6463934B2 (ja) * | 2014-09-29 | 2019-02-06 | Kyb株式会社 | サスペンション装置 |
| CN104297835B (zh) | 2014-10-17 | 2017-03-08 | 京东方科技集团股份有限公司 | 一种线栅偏振片的制作方法 |
| CN104347527B (zh) * | 2014-10-28 | 2017-02-15 | 北京思比科微电子技术股份有限公司 | 光学指纹传感器芯片封装玻璃光栅及其制作方法 |
| KR20160069048A (ko) * | 2014-12-05 | 2016-06-16 | 삼성디스플레이 주식회사 | 와이어 그리드 편광자 및 이의 제조방법 |
| KR102386196B1 (ko) * | 2014-12-10 | 2022-04-13 | 삼성디스플레이 주식회사 | 편광판, 이를 포함하는 박막 트랜지스터 기판 및 이의 제조 방법 |
| CN104483733B (zh) | 2014-12-30 | 2017-11-21 | 京东方科技集团股份有限公司 | 一种线栅偏振片及其制作方法、显示装置 |
| CN104459865A (zh) | 2014-12-30 | 2015-03-25 | 京东方科技集团股份有限公司 | 一种线栅偏振片及其制作方法、显示装置 |
| KR102319565B1 (ko) | 2015-01-08 | 2021-11-01 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
| KR20160118403A (ko) * | 2015-04-01 | 2016-10-12 | 삼성디스플레이 주식회사 | 미러 기판, 이의 제조 방법 및 이를 포함하는 표시 장치 |
| CN104849906B (zh) * | 2015-06-11 | 2018-01-26 | 京东方科技集团股份有限公司 | 偏光片及其制造方法、显示装置 |
| US11249229B2 (en) * | 2015-08-17 | 2022-02-15 | Samsung Display Co., Ltd. | Display devices including mirror substrates and methods of manufacturing mirror substrates |
| KR102464855B1 (ko) * | 2015-08-17 | 2022-11-09 | 삼성디스플레이 주식회사 | 미러 기판의 제조 방법 및 이를 갖는 표시 장치 |
| KR20170079671A (ko) * | 2015-12-30 | 2017-07-10 | 코오롱인더스트리 주식회사 | 와이어 그리드 편광판 및 이를 포함한 액정표시장치 |
| KR102605957B1 (ko) * | 2016-02-23 | 2023-11-27 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102663715B1 (ko) * | 2016-11-15 | 2024-05-16 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
| JP6922279B2 (ja) * | 2017-03-14 | 2021-08-18 | セイコーエプソン株式会社 | ワイヤーグリッド偏光素子および投射型表示装置 |
| CN106950636A (zh) * | 2017-04-20 | 2017-07-14 | 京东方科技集团股份有限公司 | 一种金属线栅偏振片基板及其制备方法 |
| CN107544180A (zh) | 2017-09-26 | 2018-01-05 | 京东方科技集团股份有限公司 | 发光二极管、背光模组及液晶显示装置 |
| TWI727247B (zh) * | 2018-02-02 | 2021-05-11 | 中央研究院 | 偏振選擇的奈米發光二極體 |
| CN108490609A (zh) * | 2018-03-07 | 2018-09-04 | 中航华东光电有限公司 | 增强现实眼镜的显示模组 |
| CN108776364A (zh) * | 2018-05-29 | 2018-11-09 | 武汉华星光电技术有限公司 | 金属线栅偏光片的制作方法 |
| CN109270620B (zh) | 2018-11-16 | 2022-07-19 | 京东方科技集团股份有限公司 | 金属线栅偏振片的制作方法及显示面板 |
| CN113517569A (zh) * | 2021-04-29 | 2021-10-19 | 杭州光学精密机械研究所 | 一种超材料光学窗及其制备方法 |
| CN120122264B (zh) * | 2025-05-12 | 2025-08-08 | 深圳市前海誉卓科技有限公司 | 可控偏光片的偏振层制备方法及装置 |
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| JP2004077831A (ja) * | 2002-08-19 | 2004-03-11 | Shin Etsu Chem Co Ltd | 偏光子および偏光子の製造方法 |
| JP2004271558A (ja) * | 2003-03-05 | 2004-09-30 | Ricoh Opt Ind Co Ltd | 偏光光学素子とその製造方法 |
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| US4512638A (en) * | 1982-08-31 | 1985-04-23 | Westinghouse Electric Corp. | Wire grid polarizer |
| US6447120B2 (en) * | 1999-07-28 | 2002-09-10 | Moxtex | Image projection system with a polarizing beam splitter |
| US6665119B1 (en) * | 2002-10-15 | 2003-12-16 | Eastman Kodak Company | Wire grid polarizer |
| US20040174596A1 (en) * | 2003-03-05 | 2004-09-09 | Ricoh Optical Industries Co., Ltd. | Polarization optical device and manufacturing method therefor |
| JP4386413B2 (ja) * | 2003-08-25 | 2009-12-16 | 株式会社エンプラス | ワイヤーグリッド偏光子の製造方法 |
| US7768018B2 (en) * | 2003-10-10 | 2010-08-03 | Wostec, Inc. | Polarizer based on a nanowire grid |
| JP2005172955A (ja) * | 2003-12-08 | 2005-06-30 | Hitachi Maxell Ltd | 偏光子、偏光子の製造方法及び投射型液晶表示装置 |
| KR20070041540A (ko) * | 2004-06-30 | 2007-04-18 | 니폰 제온 가부시키가이샤 | 전자파 차폐성 그리드 편광자 및 그 제조방법, 및 그리드편광자의 제조방법 |
| US20080055722A1 (en) * | 2006-08-31 | 2008-03-06 | Perkins Raymond T | Optical Polarization Beam Combiner/Splitter with an Inorganic, Dielectric Grid Polarizer |
| US7570424B2 (en) * | 2004-12-06 | 2009-08-04 | Moxtek, Inc. | Multilayer wire-grid polarizer |
| WO2007053579A2 (en) * | 2005-10-31 | 2007-05-10 | Kabushiki Kaisha Toshiba | Short-wavelength polarizing elements and the manufacture and use thereof |
| US20070217008A1 (en) * | 2006-03-17 | 2007-09-20 | Wang Jian J | Polarizer films and methods of making the same |
| US20090316262A1 (en) * | 2006-08-09 | 2009-12-24 | Nippon Sheet Glass Company, Limited | Transmission type polarizing element, and composite polarizing plate using the element |
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2007
- 2007-07-25 JP JP2007192990A patent/JP2009031392A/ja not_active Withdrawn
-
2008
- 2008-06-24 US US12/145,229 patent/US20090027773A1/en not_active Abandoned
- 2008-07-24 KR KR1020080072001A patent/KR20090012115A/ko not_active Withdrawn
- 2008-07-24 CN CNA2008101300313A patent/CN101354458A/zh active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004077831A (ja) * | 2002-08-19 | 2004-03-11 | Shin Etsu Chem Co Ltd | 偏光子および偏光子の製造方法 |
| JP2004271558A (ja) * | 2003-03-05 | 2004-09-30 | Ricoh Opt Ind Co Ltd | 偏光光学素子とその製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016153920A (ja) * | 2016-05-19 | 2016-08-25 | ウシオ電機株式会社 | 偏光光照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20090027773A1 (en) | 2009-01-29 |
| CN101354458A (zh) | 2009-01-28 |
| KR20090012115A (ko) | 2009-02-02 |
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