JP2009007670A - 金属ケイ素窒化物の被着方法 - Google Patents
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- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45531—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making ternary or higher compositions
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
- C23C16/45542—Plasma being used non-continuously during the ALD reactions
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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Abstract
【解決手段】金属アミド前駆体をパルス送りする工程、未反応金属アミドをパージ除去する工程、プラズマ雰囲気下で反応チャンバ内に窒素源ガスを導入する工程、未反応窒素源ガスをパージ除去する工程、ケイ素前駆体をパルス送りする工程、未反応ケイ素前駆体をパージ除去する工程、プラズマ雰囲気下で反応チャンバ内に窒素源ガスを導入する工程、及び未反応窒素源ガスをパージ除去する工程を含む被着方法。
【選択図】なし
Description
a)反応チャンバ内に蒸気状態で金属アミドを導入し、次にこの金属アミドを、加熱されている基材上に化学吸着させる工程、
b)未反応金属アミドをパージして除去する工程、
c)金属(M)−N結合を作るためプラズマ雰囲気下で反応チャンバ内に窒素源ガスを導入する工程、
d)未反応窒素源ガスをパージして除去する工程、
e)N−Si結合を作るため反応チャンバ内に蒸気状態のケイ素前駆体を導入する工程、
f)未反応ケイ素前駆体をパージして除去する工程、
g)Si−N結合を作るためプラズマ雰囲気下で反応チャンバに窒素源ガスを導入する工程、及び
h)未反応窒素源ガスをパージして除去する工程、
を含む。
a)プラズマ雰囲気下で反応チャンバ内に蒸気状態で金属アミドを導入し、次にこの金属アミドを、加熱されている基材上に化学吸着させる工程、
b)未反応金属アミドをパージして除去する工程、
c)基材上に吸着された金属アミドとケイ素前駆体との間で結合を作るべくプラズマ雰囲気下で反応チャンバ内に蒸気状態でケイ素前駆体を導入する工程、
d)未反応ケイ素前駆体をパージして除去する工程、
を含む被着方法を提供する。
(R1NH)nSiR2 mH4-n-m (1)
(R3 2N−NH)xSiR4 yH4-x-y (2)
上記式中、R1〜R4は同じか又は異なるものであり、アルキル、ビニル、アリル、フェニル、環状アルキル、フルオロアルキル及びシリルアルキルからなる群から独立して選択され、n=1、2、m=0、1、2、n+m≦3、x=1、2、y=0、1、2、x+y≦3である。
Claims (15)
- 基材上に金属ケイ素窒化物膜を形成するための被着方法であって、
a)反応チャンバ内に蒸気状態で金属アミドを導入し、次に該金属アミドを、加熱されている基材上に化学吸着させる工程、
b)未反応金属アミドをパージして除去する工程、
c)金属(M)−N結合を作るためプラズマ雰囲気下で反応チャンバ内に窒素源ガスを導入する工程、
d)未反応窒素源ガスをパージして除去する工程、
e)N−Si結合を作るため反応チャンバ内に蒸気状態のケイ素前駆体を導入する工程、
f)未反応ケイ素前駆体をパージして除去する工程、
g)Si−N結合を作るためプラズマ雰囲気下で反応チャンバに窒素源ガスを導入する工程、及び
h)未反応窒素源ガスをパージして除去する工程、
を含む被着方法。 - 前記工程をe→f→g→h→a→b→c→dの順序で実施する、請求項1に記載の方法。
- 基材上に金属ケイ素窒化物膜を形成するための被着方法であって、
a)プラズマ雰囲気下で反応チャンバ内に蒸気状態で金属アミドを導入し、次に該金属アミドを、加熱されている基材上に化学吸着させる工程、
b)未反応金属アミドをパージして除去する工程、
c)基材上に吸着された金属アミドとケイ素前駆体との間で結合を作るべくプラズマ雰囲気下で反応チャンバ内に蒸気状態でケイ素前駆体を導入する工程、
d)未反応ケイ素前駆体をパージして除去する工程、
を含む被着方法。 - 金属アミドを、テトラキス(ジメチルアミノ)チタン(TDMAT)、テトラキス(ジエチルアミノ)チタン(TDEAT)、テトラキス(エチルメチルアミノ)チタン(TEMAT)、tert−ブチルイミノトリ(ジエチルアミノ)タンタル(TBTDET)、tert−ブチルイミノトリ(ジメチルアミノ)タンタル(TBTDMT)、tert−ブチルイミノトリ(エチルメチルアミノ)タンタル(TBTEMT)、エチルイミノトリ(ジエチルアミノ)タンタル(EITDET)、エチルイミノトリ(ジメチルアミノ)タンタル(EITDMT)、エチルイミノトリ(エチルメチルアミノ)タンタル(EITEMT)、tert−アミルイミノトリ(ジメチルアミノ)タンタル(TAIMAT)、tert−アミルイミノトリ(ジエチルアミノ)タンタル(TAIEAT)、ペンタキス(ジメチルアミノ)タンタル(PDMAT)、tert−アミルイミノトリ(エチルメチルアミノ)タンタル(TAIEMAT)、ビス(tert−ブチルイミノ)ビス(ジメチルアミノ)タングステン(BTBMW)、ビス(tert−ブチルイミノ)ビス(ジエチルアミノ)タングステン(BTBEW)、ビス(tert−ブチルイミノ)ビス(エチルメチルアミノ)タングステン(BTBEMW)、テトラキス(ジメチルアミノ)ジルコニウム(TDMAZ)、テトラキス(ジエチルアミノ)ジルコニウム(TDEAZ)、テトラキス(エチルメチルアミノ)ジルコニウム(TEMAZ)、テトラキス(ジメチルアミノ)ハフニウム(TDMAH)、テトラキス(ジエチルアミノ)ハフニウム(TDEAH)、テトラキス(エチルメチルアミノ)ハフニウム(TEMAH)、及びそれらの混合物からなる群から選択する、請求項1〜3のいずれか1項に記載の方法。
- ケイ素前駆体がN−H結合及びSi−H結合の両方を含有する、請求項1〜3のいずれか1項に記載の方法。
- ケイ素前駆体が、下式(1)のモノアルキルアミノシランと下式(2)のヒドラジノシランからなる群から選択される1種以上の化合物である、請求項1〜3のいずれか1項に記載の方法。
(R1NH)nSiR2 mH4-n-m (1)
(R3 2N−NH)xSiR4 yH4-x-y (2)
(上記式中、R1〜R4は同じか又は異なるものであり、アルキル、ビニル、アリル、フェニル、環状アルキル、フルオロアルキル及びシリルアルキルからなる群から独立して選択され、n=1、2、m=0、1、2、n+m≦3、x=1、2、y=0、1、2、x+y≦3である) - ケイ素前駆体を、ビス(tert−ブチルアミノ)シラン(BTBAS)、トリス(tert−ブチルアミノ)シラン、ビス(イソプロピルアミノ)シラン、トリス(イソプロピルアミノ)シラン、ビス(1,1−ジメチルヒドラジノ)シラン、トリス(1,1−ジメチルヒドラジノ)シラン、ビス(1,1−ジメチルヒドラジノ)エチルシラン、ビス(1,1−ジメチルヒドラジノ)イソプロピルシラン、ビス(1,1−ジメチルヒドラジノ)ビニルシラン、及びそれらの混合物からなる群から選択する、請求項6に記載の方法。
- 窒素ガス源を、アンモニア、ヒドラジン、モノアルキルヒドラジン、ジアルキルヒドラジン、及びそれらの混合物からなる群から選択する、請求項1又は2に記載の方法。
- パージ除去の工程において使用するパージガスを、Ar、N2、He、H2及びそれらの混合物からなる群から選択する、請求項1〜3のいずれか1項に記載の方法。
- 金属ケイ素窒化物が、窒化ケイ素チタン、窒化ケイ素タンタル、窒化ケイ素タングステン、窒化ケイ素ハフニウム、又は窒化ケイ素ジルコニウムである、請求項1〜3のいずれか1項に記載の方法。
- 被着が循環式化学気相成長法である、請求項1〜3のいずれか1項に記載の方法。
- 被着が原子層堆積法である、請求項1〜3のいずれか1項に記載の方法。
- 基材の温度が600℃未満であり、処理圧力が0.1Torr〜100Torrである、請求項1〜3のいずれか1項に記載の方法。
- 前駆体及び窒素源ガスを供給するそれぞれの工程を、3成分金属ケイ素窒化物膜の化学量論組成を変更するべくそれらの供給時間を変更することにより実施する、請求項1〜3のいずれか1項に記載の方法。
- プラズマ発生型プロセスが、プラズマを反応装置内で直接発生させる直接プラズマ発生型プロセス、又はプラズマを反応装置外で発生させて反応装置内に供給する遠隔プラズマ発生型プロセスを含む、請求項1〜3のいずれか1項に記載の方法。
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KR10-2007-0059991 | 2007-06-19 | ||
KR1020070059991A KR100956210B1 (ko) | 2007-06-19 | 2007-06-19 | 금속 실리콘 질화물 박막의 플라즈마 강화 사이클릭증착방법 |
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US (1) | US20080318443A1 (ja) |
EP (1) | EP2009139A1 (ja) |
JP (1) | JP5290638B2 (ja) |
KR (1) | KR100956210B1 (ja) |
CN (1) | CN101328578B (ja) |
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JP2015021175A (ja) * | 2013-07-19 | 2015-02-02 | 大陽日酸株式会社 | 金属薄膜の製膜方法 |
JP2015514161A (ja) * | 2012-04-09 | 2015-05-18 | アイクストロン、エスイー | 原子層堆積法の使用によるTiSiN薄層の形成方法 |
JP2015193878A (ja) * | 2014-03-31 | 2015-11-05 | 東京エレクトロン株式会社 | TiSiN膜の成膜方法および成膜装置 |
JP2018528615A (ja) * | 2015-09-11 | 2018-09-27 | バーサム マテリアルズ ユーエス,リミティド ライアビリティ カンパニー | コンフォーマルな金属又はメタロイド窒化ケイ素膜を堆積するための方法及びその結果として得られる膜 |
JP2018534772A (ja) * | 2015-10-06 | 2018-11-22 | バーサム マテリアルズ ユーエス,リミティド ライアビリティ カンパニー | コンフォーマルな金属又はメタロイド窒化ケイ素膜の堆積方法 |
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US20150179316A1 (en) * | 2013-12-23 | 2015-06-25 | Intermolecular Inc. | Methods of forming nitrides at low substrate temperatures |
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KR100956210B1 (ko) | 2010-05-04 |
JP5290638B2 (ja) | 2013-09-18 |
TW200912034A (en) | 2009-03-16 |
KR20080111702A (ko) | 2008-12-24 |
CN101328578A (zh) | 2008-12-24 |
CN101328578B (zh) | 2012-06-20 |
EP2009139A1 (en) | 2008-12-31 |
TWI432597B (zh) | 2014-04-01 |
US20080318443A1 (en) | 2008-12-25 |
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