JP2008544531A5 - - Google Patents
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- Publication number
- JP2008544531A5 JP2008544531A5 JP2008517389A JP2008517389A JP2008544531A5 JP 2008544531 A5 JP2008544531 A5 JP 2008544531A5 JP 2008517389 A JP2008517389 A JP 2008517389A JP 2008517389 A JP2008517389 A JP 2008517389A JP 2008544531 A5 JP2008544531 A5 JP 2008544531A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- illumination optical
- field
- facet
- raster
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US69270005P | 2005-06-21 | 2005-06-21 | |
| PCT/EP2006/005857 WO2006136353A1 (en) | 2005-06-21 | 2006-06-19 | A double-facetted illumination system with attenuator elements on the pupil facet mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008544531A JP2008544531A (ja) | 2008-12-04 |
| JP2008544531A5 true JP2008544531A5 (https=) | 2009-08-06 |
Family
ID=36764368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008517389A Pending JP2008544531A (ja) | 2005-06-21 | 2006-06-19 | 瞳ファセットミラー上に減衰素子を備えた二重ファセット照明光学系 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20080165925A1 (https=) |
| EP (1) | EP1894063A1 (https=) |
| JP (1) | JP2008544531A (https=) |
| WO (1) | WO2006136353A1 (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006059024A1 (de) * | 2006-12-14 | 2008-06-19 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage für die Mikrolithographie, Beleuchtungsoptik für eine derartige Projektionsbelichtungsanlage, Verfahren zum Betrieb einer derartigen Projektionsbelichtungsanlage, Verfahren zur Herstellung eines mikrostrukturierten Bauteils sowie durch das Verfahren hergestelltes mikrostrukturiertes Bauteil |
| US7990520B2 (en) | 2006-12-18 | 2011-08-02 | Carl Zeiss Smt Gmbh | Microlithography illumination systems, components and methods |
| WO2008101664A1 (en) * | 2007-02-20 | 2008-08-28 | Carl Zeiss Smt Ag | Optical element with multiple primary light sources |
| US7843549B2 (en) * | 2007-05-23 | 2010-11-30 | Asml Holding N.V. | Light attenuating filter for correcting field dependent ellipticity and uniformity |
| US8908151B2 (en) | 2008-02-14 | 2014-12-09 | Nikon Corporation | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system |
| JP5182588B2 (ja) * | 2008-04-29 | 2013-04-17 | 株式会社ニコン | オプティカルインテグレータ、照明光学系、露光装置、およびデバイス製造方法 |
| DE102008001511A1 (de) | 2008-04-30 | 2009-11-05 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die EUV-Mikrolithografie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102008049586A1 (de) | 2008-09-30 | 2010-04-08 | Carl Zeiss Smt Ag | Feldfacettenspiegel zum Einsatz in einer Beleuchtungsoptik einer Projektionsbelichtungsanlage für die EUV-Mikrolithographie |
| JP6041304B2 (ja) * | 2009-03-27 | 2016-12-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvマイクロリソグラフィ用の照明光学系、この種の照明光学系用のeuv減衰器、及びこの種の照明光学系を有する照明系及び投影露光装置 |
| DE102009045491A1 (de) * | 2009-10-08 | 2010-11-25 | Carl Zeiss Smt Ag | Beleuchtungsoptik |
| JP5809637B2 (ja) * | 2009-11-18 | 2015-11-11 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置およびデバイス製造方法 |
| NL2005724A (en) * | 2009-12-23 | 2011-06-27 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
| JP6093753B2 (ja) | 2011-03-23 | 2017-03-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euvミラー機構、euvミラー機構を備えた光学系、及びeuvミラー機構を備えた光学系を操作する方法 |
| DE102011005940A1 (de) | 2011-03-23 | 2012-09-27 | Carl Zeiss Smt Gmbh | EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung |
| DE102011077234A1 (de) | 2011-06-08 | 2012-12-13 | Carl Zeiss Smt Gmbh | EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung |
| DE102011076658A1 (de) * | 2011-05-30 | 2012-05-10 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die EUV-Projektionslithographie |
| DE102012010093A1 (de) * | 2012-05-23 | 2013-11-28 | Carl Zeiss Smt Gmbh | Facettenspiegel |
| DE102012212453A1 (de) | 2012-07-17 | 2014-01-23 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik |
| DE102012212664A1 (de) * | 2012-07-19 | 2014-01-23 | Carl Zeiss Smt Gmbh | Verfahren zum Einstellen eines Beleuchtungssettings |
| EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
| EP2781296B1 (de) | 2013-03-21 | 2020-10-21 | Corning Laser Technologies GmbH | Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser |
| US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
| EP3166895B1 (en) | 2014-07-08 | 2021-11-24 | Corning Incorporated | Methods and apparatuses for laser processing materials |
| JP2017530867A (ja) * | 2014-07-14 | 2017-10-19 | コーニング インコーポレイテッド | 長さおよび直径の調節可能なレーザビーム焦線を用いて透明材料を加工するためのシステムおよび方法 |
| JP7292006B2 (ja) | 2015-03-24 | 2023-06-16 | コーニング インコーポレイテッド | ディスプレイガラス組成物のレーザ切断及び加工 |
| DE102015217603A1 (de) * | 2015-09-15 | 2017-03-16 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithografie |
| JP6923284B2 (ja) | 2016-09-30 | 2021-08-18 | コーニング インコーポレイテッド | 非軸対称ビームスポットを用いて透明被加工物をレーザ加工するための装置及び方法 |
| LT3529214T (lt) | 2016-10-24 | 2021-02-25 | Corning Incorporated | Substrato apdorojimo stotis lakšto formos stiklo substratų lazeriniam mašininiam apdorojimui |
| DE102017203246A1 (de) | 2017-02-28 | 2018-08-30 | Carl Zeiss Smt Gmbh | Verfahren zur Korrektur eines Spiegels für den Wellenlängenbereich von 5 nm bis 20 nm |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3158691B2 (ja) * | 1992-08-07 | 2001-04-23 | 株式会社ニコン | 露光装置及び方法、並びに照明光学装置 |
| WO1999036832A1 (en) * | 1998-01-19 | 1999-07-22 | Nikon Corporation | Illuminating device and exposure apparatus |
| JP4238390B2 (ja) * | 1998-02-27 | 2009-03-18 | 株式会社ニコン | 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法 |
| US6438199B1 (en) * | 1998-05-05 | 2002-08-20 | Carl-Zeiss-Stiftung | Illumination system particularly for microlithography |
| EP0955641B1 (de) * | 1998-05-05 | 2004-04-28 | Carl Zeiss | Beleuchtungssystem insbesondere für die EUV-Lithographie |
| DE10138313A1 (de) * | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| DE10053587A1 (de) * | 2000-10-27 | 2002-05-02 | Zeiss Carl | Beleuchtungssystem mit variabler Einstellung der Ausleuchtung |
| US6225027B1 (en) * | 1998-08-06 | 2001-05-01 | Euv Llc | Extreme-UV lithography system |
| US6195201B1 (en) * | 1999-01-27 | 2001-02-27 | Svg Lithography Systems, Inc. | Reflective fly's eye condenser for EUV lithography |
| JP2003506881A (ja) * | 1999-07-30 | 2003-02-18 | カール ツァイス シュティフトゥング トレイディング アズ カール ツァイス | Euv照明光学系の射出瞳における照明分布の制御 |
| US7209287B2 (en) * | 2000-09-18 | 2007-04-24 | Vincent Lauer | Confocal optical scanning device |
| US20020171922A1 (en) * | 2000-10-20 | 2002-11-21 | Nikon Corporation | Multilayer reflective mirrors for EUV, wavefront-aberration-correction methods for same, and EUV optical systems comprising same |
| US6741329B2 (en) * | 2001-09-07 | 2004-05-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| EP1349009B1 (en) * | 2002-03-18 | 2009-02-04 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| SG121762A1 (en) * | 2002-03-18 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus, and device manufacturing method |
| JP3720788B2 (ja) * | 2002-04-15 | 2005-11-30 | キヤノン株式会社 | 投影露光装置及びデバイス製造方法 |
| TWI255394B (en) * | 2002-12-23 | 2006-05-21 | Asml Netherlands Bv | Lithographic apparatus with debris suppression means and device manufacturing method |
| US7911584B2 (en) * | 2003-07-30 | 2011-03-22 | Carl Zeiss Smt Gmbh | Illumination system for microlithography |
| US7239445B2 (en) * | 2003-10-09 | 2007-07-03 | Merlin Technology Limited Liability Company | Projection-receiving surface that functions in ambient light |
-
2006
- 2006-06-19 WO PCT/EP2006/005857 patent/WO2006136353A1/en not_active Ceased
- 2006-06-19 JP JP2008517389A patent/JP2008544531A/ja active Pending
- 2006-06-19 EP EP06762082A patent/EP1894063A1/en not_active Withdrawn
-
2007
- 2007-12-20 US US11/961,431 patent/US20080165925A1/en not_active Abandoned
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