JP2008543085A - Cmos能動画素センサの増幅器を共有した画素 - Google Patents
Cmos能動画素センサの増幅器を共有した画素 Download PDFInfo
- Publication number
- JP2008543085A JP2008543085A JP2008514748A JP2008514748A JP2008543085A JP 2008543085 A JP2008543085 A JP 2008543085A JP 2008514748 A JP2008514748 A JP 2008514748A JP 2008514748 A JP2008514748 A JP 2008514748A JP 2008543085 A JP2008543085 A JP 2008543085A
- Authority
- JP
- Japan
- Prior art keywords
- floating diffusion
- region
- wiring layer
- image sensor
- unit cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims abstract description 61
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14641—Electronic components shared by two or more pixel-elements, e.g. one amplifier shared by two pixel elements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
Claims (12)
- 複数の画素を有する単位セルを含み、
前記単位セルは、
(a)前記複数の画素に共有された増幅器入力用トランジスタと、
(b)浮遊拡散配線層によって結合されていると共に前記増幅器入力用トランジスタに接続された複数の浮遊拡散領域と、
(c)前記浮遊拡散配線層をシールドする、出力信号用配線を構成する配線層と、
を含むことを特徴とする画像センサ。 - 複数の画素を有する単位セルを含み、各画素はフォトディテクタおよび転送ゲートを含んでおり、
前記単位セルは、(a)浮遊拡散配線層によって結合された複数の浮遊拡散領域を含み、
前記浮遊拡散領域内にp型ウェル埋め込み領域が付加されていないことを特徴とする画像センサ。 - 複数の画素を有する単位セルを含み、各画素はフォトディテクタおよび転送ゲートを含んでおり、
前記単位セルは、(a)浮遊拡散配線層によって結合された、n型ソース/ドレイン埋め込み領域を有する複数の浮遊拡散領域を含み、
n型埋め込み領域が前記n型ソース/ドレイン埋め込み領域を囲んで接合容量を低下させていることを特徴とする画像センサ。 - 請求項3に記載の画像センサであって、
前記n型埋め込み領域によって前記フォトディテクタが形成されていることを特徴とする画像センサ。 - 請求項2に記載の画像センサであって、
前記浮遊拡散領域はn型ソース/ドレイン埋め込み領域を有すると共に、前記浮遊拡散領域は浮遊拡散配線層によって結合され、
n型埋め込み領域が前記n型ソース/ドレイン埋め込み領域を囲んで接合容量を低下させていることを特徴とする画像センサ。 - 請求項5に記載の画像センサであって、
前記n型埋め込み領域によって前記フォトディテクタが形成されていることを特徴とする画像センサ。 - 画像センサを含み、
前記画像センサは複数の画素を有する単位セルを含み、
前記単位セルは、
(a)前記複数の画素に共有された増幅器入力用トランジスタと、
(b)浮遊拡散配線層によって結合されていると共に前記増幅器入力用トランジスタに接続された複数の浮遊拡散領域と、
(c)前記浮遊拡散配線層をシールドする、出力信号用配線を構成する配線層と、
を含むことを特徴とするカメラ。 - 画像センサを含み、
前記画像センサは複数の画素を有する単位セルを含み、各画素はフォトディテクタおよび転送ゲートを含んでおり、
前記単位セルは、(a)浮遊拡散配線層によって結合された複数の浮遊拡散領域を含み、
前記浮遊拡散領域内にp型ウェル埋め込み領域が付加されていないことを特徴とするカメラ。 - 画像センサを含み、
前記画像センサは複数の画素を有する単位セルを含み、各画素はフォトディテクタおよび転送ゲートを含んでおり、
前記単位セルは、(a)浮遊拡散配線層によって結合された、n型ソース/ドレイン埋め込み領域を有する複数の浮遊拡散領域を含み、
n型埋め込み領域が前記n型ソース/ドレイン埋め込み領域を囲んで接合容量を低下させていることを特徴とするカメラ。 - 請求項9に記載のカメラであって、
前記n型埋め込み領域によって前記フォトディテクタが形成されていることを特徴とするカメラ。 - 請求項8に記載のカメラであって、
前記浮遊拡散領域はn型ソース/ドレイン埋め込み領域を有すると共に、前記浮遊拡散領域は浮遊拡散配線層によって結合され、
n型埋め込み領域が前記n型ソース/ドレイン埋め込み領域を囲んで接合容量を低下させていることを特徴とするカメラ。 - 請求項11に記載のカメラであって、
前記n型埋め込み領域によって前記フォトディテクタが形成されていることを特徴とするカメラ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US68671505P | 2005-06-02 | 2005-06-02 | |
US60/686,715 | 2005-06-02 | ||
US11/440,894 US8253214B2 (en) | 2005-06-02 | 2006-05-25 | CMOS shared amplifier pixels with output signal wire below floating diffusion interconnect for reduced floating diffusion capacitance |
US11/440,894 | 2006-05-25 | ||
PCT/US2006/020716 WO2006130545A2 (en) | 2005-06-02 | 2006-05-31 | Cmos active pixel sensor shared amplifier pixel |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008543085A true JP2008543085A (ja) | 2008-11-27 |
JP2008543085A5 JP2008543085A5 (ja) | 2009-07-30 |
JP5036709B2 JP5036709B2 (ja) | 2012-09-26 |
Family
ID=36933356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008514748A Active JP5036709B2 (ja) | 2005-06-02 | 2006-05-31 | Cmos能動画素センサの増幅器を共有した画素 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8253214B2 (ja) |
EP (2) | EP1894246B1 (ja) |
JP (1) | JP5036709B2 (ja) |
KR (1) | KR101254832B1 (ja) |
TW (1) | TWI399848B (ja) |
WO (1) | WO2006130545A2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011117949A1 (ja) * | 2010-03-23 | 2011-09-29 | パナソニック株式会社 | 固体撮像装置 |
JP2012019057A (ja) * | 2010-07-07 | 2012-01-26 | Canon Inc | 固体撮像装置および撮像システム |
JP2013008952A (ja) * | 2011-05-20 | 2013-01-10 | Societe Francaise De Detecteurs Infrarouges Sofradir | 低フラックス及び低ノイズの検出回路 |
US8742359B2 (en) | 2010-07-07 | 2014-06-03 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and imaging system |
US8836833B2 (en) | 2010-07-07 | 2014-09-16 | Canon Kabushiki Kaisha | Solid-state imaging apparatus having pixels with plural semiconductor regions |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8913166B2 (en) * | 2009-01-21 | 2014-12-16 | Canon Kabushiki Kaisha | Solid-state imaging apparatus |
US8461660B2 (en) * | 2011-09-30 | 2013-06-11 | Omnivision Technologies, Inc. | CMOS image sensor with reset shield line |
US9190434B2 (en) * | 2011-09-30 | 2015-11-17 | Omnivision Technologies, Inc. | CMOS image sensor with reset shield line |
US9571763B2 (en) * | 2014-01-10 | 2017-02-14 | Omnivision Technologies, Inc. | Split pixel high dynamic range sensor |
US9526468B2 (en) * | 2014-09-09 | 2016-12-27 | General Electric Company | Multiple frame acquisition for exposure control in X-ray medical imagers |
DE102020111562A1 (de) | 2020-04-28 | 2021-10-28 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor |
DE102021128022B3 (de) | 2021-10-27 | 2023-02-02 | Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg | Bildsensor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145444A (ja) * | 1997-11-11 | 1999-05-28 | Nec Corp | 固体撮像装置 |
JPH11274461A (ja) * | 1998-03-23 | 1999-10-08 | Sony Corp | 固体撮像装置とその製造方法 |
JP2001298177A (ja) * | 2000-04-14 | 2001-10-26 | Canon Inc | 固体撮像装置および撮像システム |
JP2002325204A (ja) * | 2002-04-08 | 2002-11-08 | Canon Inc | 撮像装置 |
JP2004023107A (ja) * | 2002-06-20 | 2004-01-22 | Samsung Electronics Co Ltd | イメージセンサ及びその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6107655A (en) | 1997-08-15 | 2000-08-22 | Eastman Kodak Company | Active pixel image sensor with shared amplifier read-out |
US6657665B1 (en) | 1998-12-31 | 2003-12-02 | Eastman Kodak Company | Active Pixel Sensor with wired floating diffusions and shared amplifier |
US6750912B1 (en) | 1999-09-30 | 2004-06-15 | Ess Technology, Inc. | Active-passive imager pixel array with small groups of pixels having short common bus lines |
JP3795846B2 (ja) | 2002-08-29 | 2006-07-12 | 富士通株式会社 | 半導体装置 |
FR2844398A1 (fr) | 2002-09-11 | 2004-03-12 | St Microelectronics Sa | Photodetecteur d'un capteur d'images |
US7087944B2 (en) | 2003-01-16 | 2006-08-08 | Micron Technology, Inc. | Image sensor having a charge storage region provided within an implant region |
US7859581B2 (en) | 2003-07-15 | 2010-12-28 | Eastman Kodak Company | Image sensor with charge binning and dual channel readout |
JP4067054B2 (ja) * | 2004-02-13 | 2008-03-26 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP4230406B2 (ja) | 2004-04-27 | 2009-02-25 | 富士通マイクロエレクトロニクス株式会社 | 固体撮像装置 |
US7115925B2 (en) * | 2005-01-14 | 2006-10-03 | Omnivision Technologies, Inc. | Image sensor and pixel having an optimized floating diffusion |
US8130304B2 (en) * | 2009-07-24 | 2012-03-06 | Aptina Imaging Corporation | Image sensors with pixel charge summing |
-
2006
- 2006-05-25 US US11/440,894 patent/US8253214B2/en active Active
- 2006-05-31 WO PCT/US2006/020716 patent/WO2006130545A2/en active Application Filing
- 2006-05-31 JP JP2008514748A patent/JP5036709B2/ja active Active
- 2006-05-31 KR KR1020077028074A patent/KR101254832B1/ko active IP Right Grant
- 2006-05-31 EP EP06771466A patent/EP1894246B1/en active Active
- 2006-05-31 EP EP10189352A patent/EP2276065A3/en not_active Withdrawn
- 2006-06-02 TW TW095119512A patent/TWI399848B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145444A (ja) * | 1997-11-11 | 1999-05-28 | Nec Corp | 固体撮像装置 |
JPH11274461A (ja) * | 1998-03-23 | 1999-10-08 | Sony Corp | 固体撮像装置とその製造方法 |
JP2001298177A (ja) * | 2000-04-14 | 2001-10-26 | Canon Inc | 固体撮像装置および撮像システム |
JP2002325204A (ja) * | 2002-04-08 | 2002-11-08 | Canon Inc | 撮像装置 |
JP2004023107A (ja) * | 2002-06-20 | 2004-01-22 | Samsung Electronics Co Ltd | イメージセンサ及びその製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011117949A1 (ja) * | 2010-03-23 | 2011-09-29 | パナソニック株式会社 | 固体撮像装置 |
US8653566B2 (en) | 2010-03-23 | 2014-02-18 | Panasonic Corporation | Solid-state imaging device |
JP2012019057A (ja) * | 2010-07-07 | 2012-01-26 | Canon Inc | 固体撮像装置および撮像システム |
US8742359B2 (en) | 2010-07-07 | 2014-06-03 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and imaging system |
US8836833B2 (en) | 2010-07-07 | 2014-09-16 | Canon Kabushiki Kaisha | Solid-state imaging apparatus having pixels with plural semiconductor regions |
US9007501B2 (en) | 2010-07-07 | 2015-04-14 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and imaging system |
US9113103B2 (en) | 2010-07-07 | 2015-08-18 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and imaging system |
JP2013008952A (ja) * | 2011-05-20 | 2013-01-10 | Societe Francaise De Detecteurs Infrarouges Sofradir | 低フラックス及び低ノイズの検出回路 |
Also Published As
Publication number | Publication date |
---|---|
TW200703634A (en) | 2007-01-16 |
JP5036709B2 (ja) | 2012-09-26 |
EP2276065A2 (en) | 2011-01-19 |
KR20080011684A (ko) | 2008-02-05 |
EP1894246B1 (en) | 2012-10-31 |
EP1894246A2 (en) | 2008-03-05 |
WO2006130545A3 (en) | 2007-01-25 |
US20060273353A1 (en) | 2006-12-07 |
WO2006130545A2 (en) | 2006-12-07 |
KR101254832B1 (ko) | 2013-04-15 |
EP2276065A3 (en) | 2012-04-04 |
TWI399848B (zh) | 2013-06-21 |
US8253214B2 (en) | 2012-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5036709B2 (ja) | Cmos能動画素センサの増幅器を共有した画素 | |
US20210335875A1 (en) | Solid-state imaging element, manufacturing method, and electronic device | |
US11729530B2 (en) | Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus | |
JP5539104B2 (ja) | 光電変換装置およびそれを用いた撮像システム | |
JP4208559B2 (ja) | 光電変換装置 | |
JP2005310826A (ja) | 固体撮像装置 | |
TWI523214B (zh) | 用於影像感測器之像素單元及成像系統 | |
JP2017162886A (ja) | 画素ユニット、及び撮像素子 | |
US9924120B2 (en) | Pixel unit and image sensor | |
JP2015130533A (ja) | 固体撮像装置及びカメラ | |
CN101194363B (zh) | Cmos有源像素传感器共享的放大器像素 | |
JP7411916B2 (ja) | 撮像装置 | |
JP2020017753A (ja) | 画素ユニット、及び撮像素子 | |
JP5725232B2 (ja) | 固体撮像装置及びカメラ | |
JP5701344B2 (ja) | 光電変換装置及びそれを用いた撮像システム | |
JP2017163607A (ja) | 固体撮像装置及び電子機器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090527 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090527 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100521 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20110719 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120316 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120327 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120523 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120612 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120703 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150713 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5036709 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |