JP2008541160A5 - - Google Patents

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Publication number
JP2008541160A5
JP2008541160A5 JP2008510485A JP2008510485A JP2008541160A5 JP 2008541160 A5 JP2008541160 A5 JP 2008541160A5 JP 2008510485 A JP2008510485 A JP 2008510485A JP 2008510485 A JP2008510485 A JP 2008510485A JP 2008541160 A5 JP2008541160 A5 JP 2008541160A5
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JP
Japan
Prior art keywords
elastic
assembly
assembly according
optical element
mount
Prior art date
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Application number
JP2008510485A
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English (en)
Japanese (ja)
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JP5199068B2 (ja
JP2008541160A (ja
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Application filed filed Critical
Priority claimed from PCT/EP2006/004337 external-priority patent/WO2006119970A2/en
Publication of JP2008541160A publication Critical patent/JP2008541160A/ja
Publication of JP2008541160A5 publication Critical patent/JP2008541160A5/ja
Application granted granted Critical
Publication of JP5199068B2 publication Critical patent/JP5199068B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008510485A 2005-05-09 2006-05-09 光学エレメント調整組立体 Expired - Fee Related JP5199068B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US67968705P 2005-05-09 2005-05-09
US60/679,687 2005-05-09
PCT/EP2006/004337 WO2006119970A2 (en) 2005-05-09 2006-05-09 Assembly for adjusting an optical element

Publications (3)

Publication Number Publication Date
JP2008541160A JP2008541160A (ja) 2008-11-20
JP2008541160A5 true JP2008541160A5 (enExample) 2009-06-25
JP5199068B2 JP5199068B2 (ja) 2013-05-15

Family

ID=36649826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008510485A Expired - Fee Related JP5199068B2 (ja) 2005-05-09 2006-05-09 光学エレメント調整組立体

Country Status (3)

Country Link
US (1) US20090207511A1 (enExample)
JP (1) JP5199068B2 (enExample)
WO (1) WO2006119970A2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007014155A1 (de) 2007-03-20 2008-09-25 Jenoptik Laser, Optik, Systeme Gmbh Optikfassung und optisches Bauelement mit einer derartigen Optikfassung
WO2008122313A1 (en) * 2007-04-05 2008-10-16 Carl Zeiss Smt Ag Optical element module with imaging error and position correction
DE102007045975A1 (de) * 2007-09-25 2009-04-09 Carl Zeiss Smt Ag Optische Einrichtung mit einstellbarer Kraftwirkung auf ein optisches Modul
NL1036701A1 (nl) 2008-04-15 2009-10-19 Asml Holding Nv Apparatus for supporting an optical element, and method of making same.
DE102008029161B3 (de) * 2008-06-19 2009-10-08 Jenoptik Laser, Optik, Systeme Gmbh Lateral verstellbare optische Fassung mit Kniehebelmanipulatoreinheiten
DE102008032853A1 (de) 2008-07-14 2010-01-21 Carl Zeiss Smt Ag Optische Einrichtung mit einem deformierbaren optischen Element
DE102009044957A1 (de) 2008-09-30 2010-04-08 Carl Zeiss Smt Ag Stützelemente für ein optisches Element
DE102008063223B3 (de) 2008-12-23 2010-09-09 Jenoptik Laser, Optik, Systeme Gmbh Monolithische optische Fassung
WO2010098474A1 (ja) * 2009-02-27 2010-09-02 株式会社 ニコン 光学素子保持装置、光学系、露光装置、デバイスの製造方法及び光学素子の交換方法
DE102009031690A1 (de) * 2009-06-26 2010-09-23 Carl Zeiss Laser Optics Gmbh Optische Anordnung
DE102009037133B4 (de) 2009-07-31 2013-01-31 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
DE102009037135B4 (de) * 2009-07-31 2013-07-04 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
DE102009045163B4 (de) 2009-09-30 2017-04-06 Carl Zeiss Smt Gmbh Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage
US8591048B2 (en) * 2009-10-30 2013-11-26 Flir Systems, Inc. Spatially efficient kinematic mirror mount
TWI542952B (zh) 2010-12-02 2016-07-21 Asml控股公司 圖案化裝置支撐件
WO2012084675A1 (en) 2010-12-20 2012-06-28 Carl Zeiss Smt Gmbh Arrangement for mounting an optical element
DE102012025493A1 (de) 2012-12-21 2014-06-26 Manfred Steinbach Präzisionshalterung
CN105283789A (zh) * 2013-02-13 2016-01-27 齐戈股份有限公司 具有集成弯曲部的整体式光学部件
GB2513927A (en) * 2013-05-10 2014-11-12 Zeiss Carl Smt Gmbh Optical element arrangement with an optical element split into optical sub-elements
CN112068277B (zh) * 2020-08-31 2021-08-20 中国科学院长春光学精密机械与物理研究所 大口径光学透镜的多级柔性支撑结构
DE102020212927A1 (de) * 2020-10-14 2022-04-14 Carl Zeiss Smt Gmbh Abstützung eines optischen elements
CN113341532B (zh) * 2021-06-30 2022-05-17 中国科学院长春光学精密机械与物理研究所 高精度、高稳定性、紧凑的望远镜三镜俯仰调整机构
DE102022209902A1 (de) * 2022-09-20 2024-03-21 Carl Zeiss Smt Gmbh Bipod, optisches system und projektionsbelichtungsanlage
CN115421271B (zh) * 2022-10-01 2025-05-23 昆明理工大学 一种透镜柔性支撑结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5214529A (en) * 1992-05-29 1993-05-25 Eastman Kodak Company Assembly for static and dynamic positional control of an optical element
DE19825716A1 (de) * 1998-06-09 1999-12-16 Zeiss Carl Fa Baugruppe aus optischem Element und Fassung
US6220717B1 (en) * 2000-06-06 2001-04-24 Anthony Pastore Mirror for use with elevated hunter stand
JP4770090B2 (ja) * 2000-08-18 2011-09-07 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法
ATE352052T1 (de) * 2000-08-18 2007-02-15 Nikon Corp Haltevorrichtung für optisches element
DE10140608A1 (de) * 2001-08-18 2003-03-06 Zeiss Carl Vorrichtung zur Justage eines optischen Elements
US20030234918A1 (en) * 2002-06-20 2003-12-25 Nikon Corporation Adjustable soft mounts in kinematic lens mounting system
JP3805323B2 (ja) * 2003-05-21 2006-08-02 キヤノン株式会社 露光装置、収差低減方法及び光学部材調整機構

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