JP2008540167A - 金属ナノ粒子コーティングを有するミクロポア物品 - Google Patents
金属ナノ粒子コーティングを有するミクロポア物品 Download PDFInfo
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- JP2008540167A JP2008540167A JP2008510053A JP2008510053A JP2008540167A JP 2008540167 A JP2008540167 A JP 2008540167A JP 2008510053 A JP2008510053 A JP 2008510053A JP 2008510053 A JP2008510053 A JP 2008510053A JP 2008540167 A JP2008540167 A JP 2008540167A
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Abstract
Description
ミクロポアという用語は、微視的な寸法(すなわち、顕微鏡では見えるが肉眼では見えない)の連通しているかまたは結合された孔または空隙の中において、材料全体にわたる希釈相および/または空気などの気体を有することを意味する。
b)前記溶液から物品を形成する工程、
c)前記成形物品を、熱力学的な非平衡相分離を開始するのに十分な速度でおよびそうするのに十分な温度まで冷却する工程、
d)前記物品を更に冷却して熱可塑性ポリマーを凝固させる工程、および、
e)任意に、前記相溶し得る液体の少なくとも実質的な部分を除去する工程。
b)所望により、前記金属蒸気(または金属蒸気内で形成される金属ナノ粒子)と反応し得る第2の反応性気体を供給して、この反応性気体を金属蒸気(または金属ナノ粒子)と反応させて、金属蒸気(または金属ナノ粒子)を金属酸化物ナノ粒子に転化する工程、および、
c)金属蒸気をミクロポア材料上に衝突させて(ここで、核形成とナノ粒子の成長が生じる)、その上にナノ粒子コーティングを提供する工程。
b)前記炉に金属を導入および排出するための手段(例えば、金属を予め仕込むことができるか、あるいは、装置の運転中に連続的、または、バッチ式に供給することができるセラミック製、もしくは、金属製のるつぼ、または、スラブ、あるいは、電極が当該手段であることもある)、
c)所望により、第1の導入管から第1の非反応性気流を前記炉に導入するための手段(例えば、マイクロ絞り弁、電子流量コントローラー、または気体分散管)、
d)金属ナノ粒子を第1気流中に蒸発させるための手段(例えば、電子線、赤外線、レーザ、誘導、抵抗、またはプラズマジェットによるエネルギー入力)、
e)第1気流中で気化した金属ナノ粒子を凝縮させて、ナノ粒子の分散体を第1気流内へ生成するための手段(例えば、温度を下げる、圧力を上げる、非反応性気体の化学的性質を変化させる、移送管の長さを制御する、気体流量を制御する、またはこれらの組み合わせ)、
f)所望により、第2反応性気流を第2の導入管から前記炉に導入して、金属ナノ粒子と反応させるための手段(例えば、マイクロ絞り弁、電子流量コントローラー、または気体分散管)、
g)ナノ粒子を熱可塑性ミクロポア材料表面上に衝突させるための手段。
銀ナノ粒子をミクロポア膜上に電子ビーム蒸着して、40オングストロームのコーティングを得た。ミクロポア膜は、多孔質構造による光散乱に起因して、白色の不透明な外観を有していたが、結果として得られたコーティングされたフィルムは、銀コロイドナノ粒子の黄色がかった色特徴を有していた。銀コーティングされた二軸配向フィルムを、マスキングテープを用いて金属板に付着させ、次に紫外線源(メリーランド州ゲイザーズバーグ(Gaithersburg)のヒュージョンUVシステムズ社(Fusion UV Systems Inc.)製の、ハロゲン球(H bulb)を装備したフュージョンUVプロセッサー(Fusion UV Processor)モデルDRS−120)の中を3.0メートル/分(10フィート/分)で通過させた。この曝露は、エネルギー吸収の結果として孔の崩壊を引き起こし、そしてフィルムは、曝露によって半透明な橙色となった。このフィルムをUV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲において分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)(ヒューレット・パッカード(Hewlett Packard))で処理した。半透過領域は425ナノメートルで吸収最大値を示した。
実施例1に記載した通りに、銀コーティングされたミクロポア膜試料を調製した。銀ナノ粒子を、約13×13センチメートル(5×5インチ)のプラテンを装備したハンドプレス(インディアナ州ウォバッシュ(Wabash)のフレッド・カーバ社(Fred Carver Inc.)製のカーバ・ハンドプレス・モデルC(Carver Hand Press Model C))を用いてスライドガラスに転写させた。51マイクロメートル厚のテフロン(登録商標)シートをフィルムの上面に用いて、スライドガラスが破損するのを予防した。接面は約(19.4cm2(3平方インチ))であり、またプレスに表示された圧力は(103.4MPa(15,000psi))であった。転写後にガラス上に黄色がかった色が現れて、ナノ粒子の転写が生じたことを示した。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたスライドガラスを分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。図1に示すように、プラズモンピークは約450ナノメートルを中心とした。ナノ粒子コーティングされたスライドガラス一式の調製を行った。これらスライドを積み重ねて、前記と同様にして前記UV−Vis分光光度計を用いて分析した。プラズモンピークの強度は、積み重ねたスライドの数が増える毎に増強したが、ピーク位置は移動しなかった。
ITOスライドガラスを用いて、実施例2に記載したのと同様の転写手順を行った。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたスライドガラスを分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。最初、プラズモンピークは導電性表面によって不明瞭となったが、ITO表面のバックグラウンドを減じると、プラズモンピークは、図2に示すように、452ナノメートルに現れることが明らかとなった。
実施例2および3に記載したのと同様の手順を用いて、銀ナノ粒子を可撓性ポリマー材料へ転写させた。銀コーティングされたミクロポア膜試料を、実施例1に記載した通りに調製した。PTFE5490テープ1枚を、接着面を下にして、銀コーティングされたミクロポア膜の上に置いた。テープを剥離すると、幾つかの銀ナノ粒子がテープの接着層に転写した。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたテープ表面を分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。PTFE表面のバックグラウンドを減じると、プラズモンピークが452ナノメートルに現れた。テープ試料の2方向での変形は、プラズモン共鳴ピーク最大値を520ナノメートルへ移動させた。
実施例4に記載したのと同様の手順を用いて、銀ナノ粒子を可撓性ポリマー材料へ転写させた。銀コーティングされたミクロポア膜試料を、実施例1に記載した通りに調製した。銀ナノ粒子を、実施例4に記載した通りにポリエチレンフィルムに転写した。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたフィルム表面を分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。プラズモンピークは440ナノメートルに認められた。
銀コーティングされたミクロポア膜試料を、実施例1に記載した通りに調製した。実施例4に記載した通りに、銀ナノ粒子を1枚のPETフィルムへ転写した。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたフィルム表面を分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。プラズモンピークは450ナノメートルに認められた。
銀コーティングされたミクロポア膜試料を、実施例1に記載した通りに調製した。銀ナノ粒子を、実施例4に記載した通りに、1枚のMMOPフィルム(実施例7)、TEMOPフィルム(実施例8)、またはMOPフィルム(実施例9)へ転写した。UV−Vis分光光度計HP 8452A.Rev.Aを用いて190〜820ナノメートルの波長範囲においてナノ粒子コーティングされたフィルム表面を分析した。ここで、試料間隔は2ナノメートル、積分時間は0.5秒、そして路長は1センチメートルであった。データは、845X UV−VisシステムIソフトウェア(845X UV-Vis System I software)で処理した。実施例7(MMOPフィルム)の場合、主プラズモンピークが445ナノメートルに認められた。ただし、より短波長(254および295ナノメートル)にもはっきりと認識できる別の最大値がある。実施例8(TEMOPフィルム)の場合、主プラズモンピークが455ナノメートルに認められ、それと共にそれほどはっきりとしていない第2の最大値が284ナノメートルに認められた。実施例9(MOPフィルム)の場合、主プラズモンピークが437ナノメートルに認められ、また低波長ピークは肩のように不明瞭である。
Claims (23)
- ミクロポア膜およびその上の金属ナノ粒子の不連続コーティングを含む、物品。
- 前記ミクロポア膜が、連通孔の網状組織を提供するために複数の相互連結通路を有する熱可塑性ポリマー構造を含む、請求項1に記載の物品。
- 前記金属ナノ粒子が、100nm未満の平均の長寸法を有する個々の粒子類または粒子類の粒塊を含む、請求項1に記載の物品。
- 前記ミクロポア膜が延伸されている、請求項1に記載の物品。
- 前記金属ナノ粒子が、金、アルミニウム、銅、鉄、白金、パラジウム、イリジウム、ロジウム、オスミウム、ルテニウム、チタン、コバルト、バナジウム、マグネシウム、銀、亜鉛、およびカドミウム、インジウム、ランタン、インジウム、ランタン、インジウムスズ酸化物(ITO)およびアンチモンスズ酸化物(ATO)、アンチモンインジウムスズ酸化物(AITO)、スズ、ホウ素、六ホウ化ランタン、希土類金属類、並びにこれらの混合物および合金類から選択される、請求項1に記載の物品。
- 前記ナノ粒子の縦横比が1.5:1を超える、請求項1に記載の物品。
- 前記ミクロポア膜の前記熱可塑性ポリマーが、ポリアミド類、ポリイミド類、ポリウレタン類、ポリオレフィン類、ポリスチレン類、ポリエステル類、ポリカーボネート類、ポリケトン類、ポリ尿素類、ポリアクリレート類、およびポリメタクリレート類から選択される、請求項1に記載の物品。
- 請求項1〜7のいずれか1項に記載の前記ナノ粒子コーティングされたミクロポア膜の少なくとも1つの層と、少なくとも1つの別の層を含む、多層物品。
- 請求項1〜7のいずれか1項に記載の前記金属ナノ粒子コーティングされたフィルムの調製方法であって、
a)ミクロポア膜を提供すること、および
b)前記膜の表面上に金属ナノ粒子の不連続コーティングを物理的気相成長によって堆積させること、
を含む、フィルムの調製方法。 - 前記ミクロポア膜が前記堆積の工程の前に延伸される、請求項9に記載のフィルムの調製方法。
- 前記堆積の工程の後に、前記ミクロポア膜の延伸の工程を更に含む、請求項9に記載のフィルムの調製方法。
- 前記堆積の工程の後に、前記ミクロポア膜の収縮の工程を更に含む、請求項9に記載のフィルムの調製方法。
- 前記ナノ粒子コーティングの最大平均厚さが100nm未満である、請求項9に記載のフィルムの調製方法。
- 物理的気相成長法が、蒸着、カソードスパッタリング、熱分解、イオンめっき、または電子ビーム蒸着から選択される、請求項9に記載のフィルムの調製方法。
- 前記ナノ粒子コーティングされたミクロポア膜のアニール処理の工程を更に含む、請求項10に記載のフィルムの調製方法。
- 前記金属ナノ粒子が予め選ばれたパターンで堆積される、請求項9に記載のフィルムの調製方法。
- a)基材と、請求項1〜7のいずれか1項に記載の前記ナノ粒子コーティングされた物品とを提供すること、
b)前記ナノ粒子の少なくとも一部分を、前記ナノ粒子コーティングされた膜から前記基材の表面へ転写させるのに十分な圧力を加え、前記基材と前記ナノ粒子コーティングされた物品を接触させること、
を含む、ナノ粒子コーティングの基材上への提供方法。 - 前記基材が、金属類、ガラス、ケイ素およびITO、織物および不織布、並びに熱可塑性ポリマー類および熱硬化性ポリマー類から選択される、請求項17に記載のナノ粒子コーティングの基材上への提供方法。
- 前記ナノ粒子類が、予め選ばれたパターンで転写される、請求項17に記載のナノ粒子コーティングの基材上への提供方法。
- 前記基材が透明である、請求項17に記載のナノ粒子コーティングの基材上への提供方法。
- 前記基材が、堆積後に表面プラズモン共鳴を有する、請求項17に記載のナノ粒子コーティングの基材上への提供方法。
- 前記基材が収縮性の熱可塑性フィルム基材である、請求項17に記載のナノ粒子コーティングの基材上への提供方法。
- 前記収縮性の熱可塑性フィルム基材を収縮させて導電性ナノ粒子コーティングを提供する工程を更に含む、請求項22に記載のナノ粒子コーティングの基材上への提供方法。
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008105402A (ja) * | 2006-09-27 | 2008-05-08 | Toray Ind Inc | 金属化多孔質フィルム |
JP2011517620A (ja) * | 2008-04-10 | 2011-06-16 | サントル、ナショナール、ド、ラ、ルシェルシュ、シアンティフィク、(セーエヌエルエス) | 液体媒体中で安定している重合体フィルムによる基材の被覆 |
JP2012255197A (ja) * | 2011-06-10 | 2012-12-27 | Tohoku Univ | ナノ金属ガラス粒子集合体の製造方法 |
JP2013517119A (ja) * | 2010-01-14 | 2013-05-16 | ピーツーアイ リミティド | 撥液性表面 |
JP2013126658A (ja) * | 2011-12-13 | 2013-06-27 | Pall Corp | 局所的な非対称性を有する膜 |
KR20220119977A (ko) * | 2021-02-22 | 2022-08-30 | 한국과학기술연구원 | 나노다공성 합금 박막의 제조방법 |
Families Citing this family (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8309163B2 (en) | 2004-02-19 | 2012-11-13 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material |
US8623448B2 (en) * | 2004-02-19 | 2014-01-07 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles |
US7700464B2 (en) * | 2004-02-19 | 2010-04-20 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from nanoflake particles |
US7663057B2 (en) | 2004-02-19 | 2010-02-16 | Nanosolar, Inc. | Solution-based fabrication of photovoltaic cell |
US8642455B2 (en) * | 2004-02-19 | 2014-02-04 | Matthew R. Robinson | High-throughput printing of semiconductor precursor layer from nanoflake particles |
US7306823B2 (en) * | 2004-09-18 | 2007-12-11 | Nanosolar, Inc. | Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells |
US8846141B1 (en) | 2004-02-19 | 2014-09-30 | Aeris Capital Sustainable Ip Ltd. | High-throughput printing of semiconductor precursor layer from microflake particles |
US8329501B1 (en) | 2004-02-19 | 2012-12-11 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles |
US8372734B2 (en) * | 2004-02-19 | 2013-02-12 | Nanosolar, Inc | High-throughput printing of semiconductor precursor layer from chalcogenide nanoflake particles |
US7666494B2 (en) * | 2005-05-04 | 2010-02-23 | 3M Innovative Properties Company | Microporous article having metallic nanoparticle coating |
JP2009501095A (ja) * | 2005-07-14 | 2009-01-15 | スリーエム イノベイティブ プロパティズ カンパニー | 金属性ナノ粒子コーティングを有する水溶性ポリマー基材 |
US20070178293A1 (en) * | 2006-01-06 | 2007-08-02 | Yerkes Steven C | Super Lattice Intrinsic Materials |
WO2007117191A1 (en) | 2006-04-07 | 2007-10-18 | Bactiguard Ab | Novel antimicrobial substrates and uses thereof |
WO2007117672A2 (en) | 2006-04-07 | 2007-10-18 | Qd Vision, Inc. | Methods of depositing nanomaterial & methods of making a device |
WO2008111947A1 (en) | 2006-06-24 | 2008-09-18 | Qd Vision, Inc. | Methods and articles including nanomaterial |
US7952805B2 (en) * | 2006-08-22 | 2011-05-31 | 3M Innovative Properties Company | Solar control film |
US20110117648A1 (en) * | 2007-07-26 | 2011-05-19 | The Regents Of The University Of California | Single cell surgery tool and a cell transfection device utilizing the photothermal properties of thin films and/or metal nanoparticles |
US8252194B2 (en) * | 2008-05-02 | 2012-08-28 | Micron Technology, Inc. | Methods of removing silicon oxide |
CN102449460B (zh) * | 2009-04-03 | 2014-11-12 | 3M创新有限公司 | 微生物浓集方法和装置 |
US20110037976A1 (en) * | 2009-08-17 | 2011-02-17 | Yiping Zhao | Flexible surface enhanced raman spectroscopy (sers) substrates, methods of making, and methods of use |
US20130020113A1 (en) * | 2010-01-27 | 2013-01-24 | Javier Jesus Concepcion Corbea | Nanoparticle Electrodes and Methods of Preparation |
EP2372343A1 (en) * | 2010-02-25 | 2011-10-05 | Stichting IMEC Nederland | Gas sensor, method for optically measuring the presence of a gas using the gas sensor and gas sensing system |
US8711356B2 (en) | 2010-02-25 | 2014-04-29 | Stichting Imec Nederland | Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array |
CN102782772A (zh) * | 2010-03-05 | 2012-11-14 | 卡尔斯特里姆保健公司 | 透明导电膜、制品及方法 |
US8911823B2 (en) * | 2010-05-03 | 2014-12-16 | Pen Inc. | Mechanical sintering of nanoparticle inks and powders |
US9572880B2 (en) | 2010-08-27 | 2017-02-21 | Sienna Biopharmaceuticals, Inc. | Ultrasound delivery of nanoparticles |
WO2012027728A2 (en) | 2010-08-27 | 2012-03-01 | Sienna Labs, Inc. | Compositions and methods for targeted thermomodulation |
WO2012031201A2 (en) * | 2010-09-03 | 2012-03-08 | Massachusetts Institute Of Technology | Fabrication of anti-fouling surfaces comprising a micro- or nano-patterned coating |
FR2964469B1 (fr) * | 2010-09-08 | 2016-01-01 | Univ Troyes Technologie | Substrat revetu de nanoparticules, et son utilisation pour la detection de molecules isolees. |
US20120183674A1 (en) * | 2011-01-18 | 2012-07-19 | Bonn-Savage Nathan G | Method of Selectively Applying an Antimicrobial Coating to a Medical Device or Device Material |
AU2012255988B2 (en) | 2011-05-13 | 2017-07-13 | The Regents Of The University Of California | Photothermal substrates for selective transfection of cells |
EP3124236A1 (en) | 2011-06-17 | 2017-02-01 | Fiberweb, Inc. | Vapor permeable, substantially water impermeable multilayer article |
WO2012178027A2 (en) | 2011-06-23 | 2012-12-27 | Fiberweb, Inc. | Vapor-permeable, substantially water-impermeable multilayer article |
EP2723568B1 (en) | 2011-06-23 | 2017-09-27 | Fiberweb, LLC | Vapor permeable, substantially water impermeable multilayer article |
EP2723567A4 (en) | 2011-06-24 | 2014-12-24 | Fiberweb Inc | MULTILAYER ARTICLE PERMEABLE TO WATER VAPOR, BUT ESSENTIALLY WATERPROOF |
US20130189428A1 (en) * | 2011-06-27 | 2013-07-25 | Cedric TROADEC | Method for transferring target particles between substrates |
US8810789B2 (en) | 2011-11-07 | 2014-08-19 | University Of Georgia Research Foundation, Inc. | Thin layer chromatography-surfaced enhanced Raman spectroscopy chips and methods of use |
AU2012274016B2 (en) * | 2011-12-13 | 2014-09-04 | Cytiva Us Llc | Membrane with localized asymmetries |
US9862842B2 (en) | 2012-02-29 | 2018-01-09 | Sabic Global Technologies B.V. | Infrared radiation absorbing articles and method of manufacture |
US9624973B2 (en) * | 2012-03-19 | 2017-04-18 | Samsung Electronics Co., Ltd. | Apparatus having friction preventing function and method of manufacturing the same |
CA2787584A1 (en) | 2012-08-22 | 2014-02-22 | Hy-Power Nano Inc. | Method for continuous preparation of indium-tin coprecipitates and indium-tin-oxide nanopowders with substantially homogeneous indium/tin composition, controllable shape and particle size |
EP3272388A1 (en) | 2012-10-11 | 2018-01-24 | Nanocomposix, Inc. | Silver nanoplate compositions and methods |
FR3000408B1 (fr) * | 2013-01-03 | 2015-02-27 | Commissariat Energie Atomique | Procede de realisation d'un filtre destine a la filtration de nanoparticules, filtre obtenu et procede de collecte et d'analyse quantitative de nanoparticules associe. |
CA2905999A1 (en) | 2013-03-15 | 2014-09-25 | The Regents Of The University Of California | High-throughput cargo delivery into live cells using photothermal platforms |
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US11712667B2 (en) | 2021-03-23 | 2023-08-01 | Applied Membrane Technology, Inc. | Anti-microbial metal coatings for filters |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6412406A (en) * | 1987-07-07 | 1989-01-17 | Nitto Denko Corp | Directional conductor and manufacture thereof |
JPH02125730A (ja) * | 1988-07-27 | 1990-05-14 | Toyo Alum Kk | 電磁波シールド性を有する成形用シート及びそのシートを用いた成形体 |
JPH0639960A (ja) * | 1992-03-12 | 1994-02-15 | Kimberly Clark Corp | 弾性金属化フィルム及びその製造方法 |
JPH09131830A (ja) * | 1995-11-13 | 1997-05-20 | Japan Tobacco Inc | 金属蒸着層を有する軟質ポリ塩化ビニル積層体およびその製造方法 |
WO2000034033A1 (en) * | 1998-12-04 | 2000-06-15 | The Regents Of The University Of California | Novel controllable ion-exchange membranes |
JP2001316501A (ja) * | 2000-03-03 | 2001-11-16 | Natl Inst Of Advanced Industrial Science & Technology Meti | ナノ粒子分散構造体及びその積層体 |
WO2003093809A1 (en) * | 2002-04-30 | 2003-11-13 | University Of Maryland, Baltimore | Fluorescence sensing |
JP2005007668A (ja) * | 2003-06-17 | 2005-01-13 | Matsushita Electric Ind Co Ltd | 金属被膜フッ素樹脂基板、その評価方法及びその製造方法 |
Family Cites Families (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US677926A (en) * | 1900-12-05 | 1901-07-09 | Francis J Arend | Centrifugal machine. |
US4247498A (en) | 1976-08-30 | 1981-01-27 | Akzona Incorporated | Methods for making microporous products |
US4539256A (en) | 1982-09-09 | 1985-09-03 | Minnesota Mining And Manufacturing Co. | Microporous sheet material, method of making and articles made therewith |
US4849311A (en) | 1986-09-24 | 1989-07-18 | Toa Nenryo Kogyo Kabushiki Kaisha | Immobilized electrolyte membrane |
US4726989A (en) | 1986-12-11 | 1988-02-23 | Minnesota Mining And Manufacturing | Microporous materials incorporating a nucleating agent and methods for making same |
US4867881A (en) * | 1987-09-14 | 1989-09-19 | Minnesota Minning And Manufacturing Company | Orientied microporous film |
US4871790A (en) | 1987-11-25 | 1989-10-03 | Minnesota Mining And Manufacturing Company | Colloidal metals in monomers or polymers |
US5026599A (en) | 1988-08-29 | 1991-06-25 | Minnesota Mining & Manufacturing | Array of densely packed discrete metal microspheres coated on a substrate |
US4863792A (en) | 1988-10-14 | 1989-09-05 | Minnesota Mining And Manufacturing Company | Multi-layer laminates of microporous films |
US5130342A (en) | 1988-10-14 | 1992-07-14 | Mcallister Jerome W | Particle-filled microporous materials |
US5238623A (en) | 1989-11-20 | 1993-08-24 | Minnesota Mining And Manufacturing Company | Method for preparing microporous polyolefin shaped articles |
JP2635218B2 (ja) | 1993-01-21 | 1997-07-30 | イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー | 金属化ポリ(乳酸)フィルム |
US5366140A (en) | 1993-09-30 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Patterned array of uniform metal microbeads |
DE19544912A1 (de) * | 1995-12-01 | 1997-06-05 | Gore W L & Ass Gmbh | PTFE-Körper aus mikroporösem Polytetrafluorethylen mit Füllstoff und Verfahren zu dessen Herstellung |
US5922403A (en) * | 1996-03-12 | 1999-07-13 | Tecle; Berhan | Method for isolating ultrafine and fine particles |
US5774619A (en) | 1996-05-15 | 1998-06-30 | Hughes Electronics Corporation | Precision deformation mechanism and method |
US5750641A (en) | 1996-05-23 | 1998-05-12 | Minnesota Mining And Manufacturing Company | Polyimide angularity enhancement layer |
WO1998010289A1 (en) | 1996-09-04 | 1998-03-12 | The Penn State Research Foundation | Self-assembled metal colloid monolayers |
DK1017848T3 (da) | 1997-07-28 | 2003-02-10 | Medical Biosystems Ltd | Nucleinsyresekvensanalyse |
US6042959A (en) * | 1997-10-10 | 2000-03-28 | 3M Innovative Properties Company | Membrane electrode assembly and method of its manufacture |
US6537650B1 (en) * | 1998-06-19 | 2003-03-25 | 3M Innovative Properties Company | Inkjet receptor medium having ink migration inhibitor and method of making and using same |
US6383612B1 (en) * | 1998-06-19 | 2002-05-07 | 3M Innovative Properties Company | Ink-drying agents for inkjet receptor media |
AU8761498A (en) | 1998-07-30 | 2000-02-21 | Minnesota Mining And Manufacturing Company | Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers |
US6096213A (en) | 1998-08-14 | 2000-08-01 | 3M Innovative Properties Company | Puncture-resistant polyolefin membranes |
US6514599B1 (en) * | 1999-04-16 | 2003-02-04 | 3M Innovative Properties Company | Inkjet receptor medium having a multi-staged ink migration inhibitor and method of making and using same |
US20010036546A1 (en) | 1999-08-03 | 2001-11-01 | Kaytor Scott R. | Dimensionally stabilized diffuse reflective articles |
GB0006050D0 (en) | 2000-03-14 | 2000-05-03 | Johnson Matthey Plc | Liquid gold compositions |
DE60127035T2 (de) * | 2000-06-29 | 2007-11-08 | Shin-Etsu Chemical Co., Ltd. | Thermisches Sprühbeschichtungsverfahren und Pulver aus Oxyden der seltenen Erden dafür |
US20030114568A1 (en) | 2000-07-07 | 2003-06-19 | Shizuko Sato | Ultrafine metal particle/polymer hybrid material |
US6411748B1 (en) | 2000-07-17 | 2002-06-25 | Alcatel Usa Sourcing, L.P. | Wide tuning range acousto-optical fiber Bragg grating filter (FBGF) |
EP1311238B1 (de) * | 2000-08-18 | 2009-10-21 | Bitop Gesellschaft für Biotechnische Optimierung mbH | Verwendung von di-zuckeralkoholphosphaten zum schutz menschlicher hautzellen vor uv- und/oder ir-strahlung |
US6773926B1 (en) | 2000-09-25 | 2004-08-10 | California Institute Of Technology | Nanoparticle-based sensors for detecting analytes in fluids |
US6569529B1 (en) | 2000-10-10 | 2003-05-27 | Flex Product, Inc. | Titanium-containing interference pigments and foils with color shifting properties |
AR032424A1 (es) * | 2001-01-30 | 2003-11-05 | Procter & Gamble | Composiciones de recubrimiento para modificar superficies. |
US20020142306A1 (en) | 2001-03-28 | 2002-10-03 | 3M Innovative Properties Company | Method of transferring molecules to a film laminate |
CN100354699C (zh) | 2001-08-02 | 2007-12-12 | 伊吉斯半导体公司 | 可调谐光学仪器 |
US20030060878A1 (en) * | 2001-08-31 | 2003-03-27 | Shadduck John H. | Intraocular lens system and method for power adjustment |
US6805940B2 (en) * | 2001-09-10 | 2004-10-19 | 3M Innovative Properties Company | Method for making conductive circuits using powdered metals |
US20030070569A1 (en) * | 2001-10-11 | 2003-04-17 | Colin Bulthaup | Micro-stencil |
US6962946B2 (en) | 2001-11-21 | 2005-11-08 | 3M Innovative Properties Company | Nanoparticles having a rutile-like crystalline phase and method of preparing same |
US7129096B2 (en) | 2001-12-11 | 2006-10-31 | Duke University | Sensor for use in testing biological, biochemical, chemical or environmental samples |
US6642295B2 (en) | 2001-12-21 | 2003-11-04 | Eastman Kodak Company | Photoresist nanocomposite optical plastic article and method of making same |
US6858290B2 (en) | 2002-05-29 | 2005-02-22 | 3M Innovative Properties Company | Fluid repellent microporous materials |
CA2501104C (en) | 2002-10-09 | 2011-11-29 | Andre Arsenault | Widely wavelength tuneable polychrome colloidal photonic crystal device |
US7030989B2 (en) | 2002-10-28 | 2006-04-18 | University Of Washington | Wavelength tunable surface plasmon resonance sensor |
US6838486B2 (en) | 2003-01-07 | 2005-01-04 | Aps Laboratory | Preparation of metal nanoparticles and nanocomposites therefrom |
US7078276B1 (en) * | 2003-01-08 | 2006-07-18 | Kovio, Inc. | Nanoparticles and method for making the same |
JP2004217973A (ja) * | 2003-01-14 | 2004-08-05 | Gunze Ltd | 薄膜および薄膜製造方法 |
US6816125B2 (en) * | 2003-03-01 | 2004-11-09 | 3M Innovative Properties Company | Forming electromagnetic communication circuit components using densified metal powder |
US20040265565A1 (en) | 2003-06-30 | 2004-12-30 | Fischer Patrick J. | Microporous article containing flame retardant |
GB0316553D0 (en) | 2003-07-15 | 2003-08-20 | Densham Daniel | Method |
JP2005118963A (ja) | 2003-10-17 | 2005-05-12 | Ube Ind Ltd | ブロック共重合体膜、その製造方法、基材、および触媒 |
US7033667B2 (en) | 2003-12-18 | 2006-04-25 | 3M Innovative Properties Company | Printed circuits on shrink film |
US7195813B2 (en) * | 2004-05-21 | 2007-03-27 | Eastman Kodak Company | Mixed absorber layer for displays |
US7274458B2 (en) | 2005-03-07 | 2007-09-25 | 3M Innovative Properties Company | Thermoplastic film having metallic nanoparticle coating |
US7666494B2 (en) * | 2005-05-04 | 2010-02-23 | 3M Innovative Properties Company | Microporous article having metallic nanoparticle coating |
-
2005
- 2005-05-04 US US11/121,479 patent/US7666494B2/en not_active Expired - Fee Related
-
2006
- 2006-04-26 WO PCT/US2006/015808 patent/WO2006118903A2/en active Application Filing
- 2006-04-26 JP JP2008510053A patent/JP2008540167A/ja active Pending
- 2006-04-26 EP EP06751487A patent/EP1885905A2/en not_active Withdrawn
- 2006-04-26 CN CN200680015413.0A patent/CN101171360B/zh not_active Expired - Fee Related
-
2010
- 2010-01-11 US US12/685,011 patent/US8062701B2/en not_active Expired - Fee Related
- 2010-01-11 US US12/685,008 patent/US8834686B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6412406A (en) * | 1987-07-07 | 1989-01-17 | Nitto Denko Corp | Directional conductor and manufacture thereof |
JPH02125730A (ja) * | 1988-07-27 | 1990-05-14 | Toyo Alum Kk | 電磁波シールド性を有する成形用シート及びそのシートを用いた成形体 |
JPH0639960A (ja) * | 1992-03-12 | 1994-02-15 | Kimberly Clark Corp | 弾性金属化フィルム及びその製造方法 |
JPH09131830A (ja) * | 1995-11-13 | 1997-05-20 | Japan Tobacco Inc | 金属蒸着層を有する軟質ポリ塩化ビニル積層体およびその製造方法 |
WO2000034033A1 (en) * | 1998-12-04 | 2000-06-15 | The Regents Of The University Of California | Novel controllable ion-exchange membranes |
JP2001316501A (ja) * | 2000-03-03 | 2001-11-16 | Natl Inst Of Advanced Industrial Science & Technology Meti | ナノ粒子分散構造体及びその積層体 |
WO2003093809A1 (en) * | 2002-04-30 | 2003-11-13 | University Of Maryland, Baltimore | Fluorescence sensing |
JP2005007668A (ja) * | 2003-06-17 | 2005-01-13 | Matsushita Electric Ind Co Ltd | 金属被膜フッ素樹脂基板、その評価方法及びその製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008105402A (ja) * | 2006-09-27 | 2008-05-08 | Toray Ind Inc | 金属化多孔質フィルム |
JP2011517620A (ja) * | 2008-04-10 | 2011-06-16 | サントル、ナショナール、ド、ラ、ルシェルシュ、シアンティフィク、(セーエヌエルエス) | 液体媒体中で安定している重合体フィルムによる基材の被覆 |
JP2013517119A (ja) * | 2010-01-14 | 2013-05-16 | ピーツーアイ リミティド | 撥液性表面 |
JP2012255197A (ja) * | 2011-06-10 | 2012-12-27 | Tohoku Univ | ナノ金属ガラス粒子集合体の製造方法 |
JP2013126658A (ja) * | 2011-12-13 | 2013-06-27 | Pall Corp | 局所的な非対称性を有する膜 |
KR101473462B1 (ko) | 2011-12-13 | 2014-12-16 | 폴 코포레이션 | 국소화된 비대칭성을 갖는 막 |
KR20220119977A (ko) * | 2021-02-22 | 2022-08-30 | 한국과학기술연구원 | 나노다공성 합금 박막의 제조방법 |
KR102594660B1 (ko) * | 2021-02-22 | 2023-10-27 | 한국과학기술연구원 | 나노다공성 합금 박막의 제조방법 |
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US20060251874A1 (en) | 2006-11-09 |
US20100112199A1 (en) | 2010-05-06 |
WO2006118903A3 (en) | 2007-01-04 |
CN101171360B (zh) | 2010-12-22 |
EP1885905A2 (en) | 2008-02-13 |
US7666494B2 (en) | 2010-02-23 |
US20100108494A1 (en) | 2010-05-06 |
CN101171360A (zh) | 2008-04-30 |
US8834686B2 (en) | 2014-09-16 |
WO2006118903A2 (en) | 2006-11-09 |
US8062701B2 (en) | 2011-11-22 |
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