JP2008517468A - ナノワイヤを基礎にした電子デバイスにおけるゲート開閉形態および改良された接点のための方法、システム、および装置 - Google Patents
ナノワイヤを基礎にした電子デバイスにおけるゲート開閉形態および改良された接点のための方法、システム、および装置 Download PDFInfo
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Abstract
Description
(発明の分野)
本発明は、ナノワイヤを基礎にした電子デバイスにおけるゲート開閉形態に関する。
産業では、低コスト電子製品を開発することで、そして特に、低コストの大面積電子デバイスを開発することで興味が存在している。このような大面積電子デバイスの利用可能性は、民事用途から軍事用途までの範囲の種々の技術領域を大刷新し得る。このようなデバイスの例示の適用は、アクティブマトリックス液晶ディスプレイ(LCD)およびその他のタイプのマトリックスディスプレイ、スマートライブラリ、クレジッシカード、スマートプライスおよび在庫タグ、セキュリティスクリーニング/監視またはハイウェイ交通モニタニングシステム、大面積センサーアレイなどを含む。
高性能電子デバイスを形成するための方法、システムおよび装置が記載される。例えば、改良されたゲート構造を有する半導体デバイスのための方法、システム、および装置が記載される。
(序論)
本明細書中に示され、そして記載される特定の履行は、本発明の例であり、そしてそうでなければ、いかなる様式においても、本発明の範囲を制限することは意図されないことを認識すべきである。実際、簡潔さのために従来の電子製品、製造、半導体デバイス、およびナノワイヤ(NW)技術、およびシステム(およびこのシステムの個々の作動構成要素の構成要素)のその他の機能的局面は、本明細書中では詳細に説明されない。さらに、簡潔さのために、本発明は、ナノワイヤ、および半導体トランジスターデバイスに関するとしてしばしば説明される。さらに、ナノワイヤの数およびこれらのナノワイヤの間隔は、論議される特定の履行について提供されているが、これらの履行は、制限的であることは意図されず、そして広範な範囲のナノワイヤの数および間隔がまた用いられ得る。ナノワイヤがしばしば言及されるけれども、本明細書中で説明される技法はまた、ナノロッド、およびナノリボンに適用可能であることが認識されるべきである。本明細書中に記載される製造技法は、任意の半導体デバイスタイプ、およびその他の電子構成要素タイプを生成するために用いれら得ることがさらに認識されるべきである。さらに、これら技法は、電気システム、光システム、消費者電子製品、産業電子製品、ワイヤレスシステム、宇宙適用、または任意のその他の適用に適切であり得る。
本発明の実施形態は、重複するゲート形態を有する電子デバイスについてこのセクションに提供される。これらの実施形態は、例示目的のために提供され、そして制限するのではない。本発明のさらなる作動および構造の実施形態は、本明細書中の記載から当業者に明らかである。これらのさらなる実施形態は、本発明の範囲および思想の中にある。
1.ナノワイヤの接点領域のドーピングインプラントの必要性をなくする:および
2.ゲートの「オフ」−状態(例えば、ここでは、チャネルが相対的に非伝導性である)への調整はまた、ソース領域およびドレイン領域を遮断し、閾値以下の漏れ(「オフ」−状態漏れ)が、実質的に減少される。
本発明の実施形態は、このセクションでは、非対称ゲート形態を有する電子デバイスについて提供される。これらの実施形態は、例示の目的のために提供され、そして制限するのではない。本発明のさらなる作動的および構造的実施形態は、本明細書中の記載から当業者に明らかである。これらのさらなる実施形態は、本発明の範囲および思想の中にある。
A.高電流駆動能力;
B.低シリーズ抵抗性;
C.ドーピングなしのオーム抵抗;および
D.ナノワイヤ適用には、性能を犠牲にすることなく、完全に低い製作/アセンブリ環境温度(例えば、T<200゜)が可能である。
本発明の種々の実施形態が上記に記載されているが、それらは例示によってのみ提示され、そして制限ではないことが理解されるべきである。当業者には、形態および詳細における種々の変更が、本発明の思想および範囲から逸脱することなくその中でなされ得ることは明らかである。それ故、本発明の広さ、および範囲は、上記に記載の例示の実施形態のいずれによっても制限されるべきではなく、添付の請求項およびそれらの等価物に従ってのみ規定されるべきである。
Claims (31)
- 電子デバイスであって:
少なくとも1つのナノワイヤ;
該少なくとも1つのナノワイヤの長さの少なくとも一部分に沿って位置決めされたゲート接点;
該ゲート接点と該少なくとも1つのナノワイヤとの間の誘電性材料層;
該少なくとも1つのナノワイヤと接触するソース接点;
該少なくとも1つのナノワイヤと接触するドレイン接点;を備え、そして
ここで、該ソース接点および該ドレイン接点の少なくとも一部分が、該少なくとも1つのナノワイヤの該長さの該一部分と重複する、電子デバイス。 - 前記誘性電材料層が、前記少なくとも1つのナノワイヤの周りに形成されたシェル層である、請求項1に記載の電子デバイス。
- 前記電子デバイスが基板上に形成され、ここで、誘電性材料が該基板上に堆積され、前記誘電性材料層を形成する、請求項1に記載の電子デバイス。
- 前記少なくとも1つのナノワイヤが、複数の整列されたナノワイヤを備える、請求項1に記載の電子デバイス。
- 前記少なくとも1つのナノワイヤが、複数のランダムに配向されたナノワイヤを備える、請求項1に記載の電子デバイス。
- 基板をさらに備える請求項1に記載の電子デバイスであって、前記ソース接点および前記ドレイン接点が該基板上に形成され、前記少なくとも1つのナノワイヤが該ソース接点および該ドレイン接点上に堆積され、そして前記ゲート接点が前記少なくとも1つのナノワイヤ上の前記誘電性層上に形成される、電子デバイス。
- 基板をさらに備える請求項1に記載の電子デバイスであって、前記ゲート接点が該基板上に形成され、前記少なくとも1つのナノワイヤが該ゲート接点上に堆積され、そして前記ソース接点および前記ドレイン接点が該少なくとも1つのナノワイヤ上に形成される、電子デバイス。
- 前記誘電性材料層が、前記ゲート接点上の前記少なくとも1つのナノワイヤの堆積の前に該ゲート接点上に形成される、請求項7に記載の電子デバイス。
- 前記電子デバイスが、トランジスターである、請求項1に記載の電子デバイス。
- 前記トランジスターが、電解効果トランジスター(FET)である、請求項1に記載の電子デバイス。
- 電子デバイスであって:
半導体ナノワイヤ;
該ナノワイヤに接続されたドレイン接点およびソース接点;および
該ナノワイヤの長さに沿って該ドレイン接点および該ソース接点の少なくとも1つと重複する、該ナノワイヤに接続されるゲート接点を備える、電子デバイス。 - 前記ゲート接点と前記ナノワイヤとの間に位置決めされる誘電性材料をさらに備える、請求項11に記載の電子デバイス。
- 複数の半導体ナノワイヤ;
該複数の半導体ナノワイヤに接続されるドレイン接点およびソース接点;および
該複数の半導体ナノワイヤの長さに沿って該ドレイン接点および該ソース接点の少なくとも1つと重複する、該複数の半導体ナノワイヤに接続されるゲート接点を備える、電子デバイス。 - 前記ゲート接点と前記複数の半導体ナノワイヤとの間に位置決めされる誘電性材料をさらに備える、請求項13に記載の電子デバイス。
- 前記複数の半導体ナノワイヤの各々のナノワイヤが、半導体コアおよび該半導体コアを取り囲むシェル層を有し、ここで、該シェルが前記誘電性材料である、請求項14に記載の電子デバイス。
- 前記複数の半導体ナノワイヤが整列されている、請求項13に記載の電子デバイス。
- 電子デバイスを製作するための方法であって:
(a)基板上にナノワイヤを位置決めする工程であって、該ナノワイヤが半導体コアを有し、絶縁性シェル層が該コアを取り囲み、そして導体層が該絶縁性シェル層を取り囲む工程;
(b)該基板上の該ナノワイヤをエッチングする工程であって、該ナノワイヤの長さに沿った第1の位置にある該ナノワイヤの周りの導体層のリング形状の第1の部分、および該エッチングから反対の側の該ナノワイヤの長さに沿った導体層の第2の部分を除き、該ナノワイヤから該導体層を除去する工程;
(c)該基板上の該ナノワイヤ上に誘電性材料を位置決めする工程;
(d)該ナノワイヤをエッチングする工程であって、該ナノワイヤの長さに沿った第2の位置および第3の位置で、該誘電性材料、該絶縁性シェル層、および該コアの直径の部分を除去し、ここで、該第2の位置および該第3の位置が第1の位置の反対側である工程;および
(e)該第2の位置上にドレイン接点を、そして該第3の位置上にソース接点を形成する工程を包含する、方法。 - 工程(a)で堆積される前記ナノワイヤが、複数のナノワイヤで位置決めされ、ここで、工程(b)〜(e)が該複数のナノワイヤ上で実施され、前記電子デバイスを形成する、請求項17に記載の方法。
- 工程(b)が:フォトレジスト材料を前記ナノワイヤに付与すること;
該フォトレジスト材料を該ナノワイヤから、前記第1の位置を除いて除去すること;および
エッチングを用いる工程であって、前記リング形状の第1の部分および前記第2の部分を除いて該ナノワイヤから導体層を除去することを包含する、請求項17に記載の方法。 - 工程(d)が:
フォトレジスト材料を前記ナノワイヤに付与すること;
該フォトレジスト材料を該ナノワイヤから第2の位置および第3の位置で除去すること;
前記誘電性材料、絶縁性シェル層、および前記コアの直径の部分を、前記第2の位置および第3の位置で該ナノワイヤから除去するためにエッチングを用いることを包含する、請求項17に記載の方法。 - 工程(b)が:反応性イオンエッチングを用いることを包含する、請求項17に記載の方法。
- 前記用いることが:イオンビームを調節するために、プラズマ電力、プラズマ圧力、および基板バイアスの少なくとも1つを調整する、請求項21に記載の方法。
- 工程(c)が:蒸着を用いることを包含する、請求項17に記載の方法。
- 前記用いることが:化学的蒸着をもちいることを包含する、請求項23に記載の方法。
- 工程(c)が:ガラスプロセス上のスピン、ポリマープロセス上のスピン、の少なくとも1つを用いること、およびペレリンを付与することを包含する、請求項17に記載の方法。
- 工程(d)が:プラズマ乾燥エッチングを用いることを包含する、請求項17に記載の方法。
- 前記用いることが:前記コアと前記誘電性材料との間のエッチ選択性を制御するためにガス比およびガス圧の少なくとも1つを調整することを包含する、請求項26に記載の方法。
- 前記調整することが:実質的に平坦な表面を生成するように前記コアおよび前記誘電性材料のエッチ速度を実質的に等しくするために前記ガス比および前記ガス圧の少なくとも1つを調整することを包含する、請求項27に記載の方法。
- 工程(e)が:前記ドレイン接点およびソース接点をそれぞれ形成するために前記第2の位置および第3の位置を金属化することを包含する、請求項17に記載の方法。
- 基板上の電子デバイスであって:
絶縁シェル層によって取り囲まれた半導体コアを有するナノワイヤ;
該ナノワイヤの長さの部分に沿って該ナノワイヤを取り囲むリング形状の第1のゲート領域;
該ナノワイヤと該基板との間の該ナノワイヤの長さに沿って位置決めされる第2のゲート領域;および
該半導体コアの個々の剥き出た部分で該ナノワイヤの該半導体コアに接続されるソース接点およびドレイン接点、を備える、電子デバイス。 - 基板上の電子デバイスであって:
複数の整列されたナノワイヤであって、各々が絶縁シェル層によって取り囲まれた半導体コアを有するナノワイヤ;
該ナノワイヤの長さの一部分に沿って該ナノワイヤの各々を囲う第1のゲート領域;
該ナノワイヤの各々と該基板との間の該ナノワイヤの各々の長さに沿って位置決めされる第2のゲート領域;および
該半導体コアの個々の剥き出た部分で該ナノワイヤの各々の該半導体コアに接続されるソース接点およびドレイン接点、を備える、電子デバイス。
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CN101401210B (zh) | 2011-05-11 |
US20060081886A1 (en) | 2006-04-20 |
US7701014B2 (en) | 2010-04-20 |
AU2005336130B2 (en) | 2011-02-24 |
KR20070063597A (ko) | 2007-06-19 |
WO2007030126A3 (en) | 2009-04-16 |
WO2007030126A9 (en) | 2007-05-18 |
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US7473943B2 (en) | 2009-01-06 |
EP1810340A2 (en) | 2007-07-25 |
US20100144103A1 (en) | 2010-06-10 |
CA2589432A1 (en) | 2007-03-15 |
WO2007030126A2 (en) | 2007-03-15 |
CN101401210A (zh) | 2009-04-01 |
AU2005336130A1 (en) | 2007-03-15 |
CA2589432C (en) | 2014-08-05 |
US7871870B2 (en) | 2011-01-18 |
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