JP2008513781A5 - - Google Patents

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Publication number
JP2008513781A5
JP2008513781A5 JP2007532463A JP2007532463A JP2008513781A5 JP 2008513781 A5 JP2008513781 A5 JP 2008513781A5 JP 2007532463 A JP2007532463 A JP 2007532463A JP 2007532463 A JP2007532463 A JP 2007532463A JP 2008513781 A5 JP2008513781 A5 JP 2008513781A5
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JP
Japan
Prior art keywords
layer
active layer
silicon
alumina
deposited
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JP2007532463A
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English (en)
Japanese (ja)
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JP2008513781A (ja
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Priority claimed from PCT/US2005/032962 external-priority patent/WO2006118595A2/en
Publication of JP2008513781A publication Critical patent/JP2008513781A/ja
Publication of JP2008513781A5 publication Critical patent/JP2008513781A5/ja
Pending legal-status Critical Current

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JP2007532463A 2004-09-17 2005-09-14 ナノ構造薄膜およびその使用 Pending JP2008513781A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61111604P 2004-09-17 2004-09-17
PCT/US2005/032962 WO2006118595A2 (en) 2004-09-17 2005-09-14 Nanostructured thin films and their uses

Publications (2)

Publication Number Publication Date
JP2008513781A JP2008513781A (ja) 2008-05-01
JP2008513781A5 true JP2008513781A5 (https=) 2008-10-23

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JP2007532463A Pending JP2008513781A (ja) 2004-09-17 2005-09-14 ナノ構造薄膜およびその使用

Country Status (6)

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US (2) US7391018B2 (https=)
EP (1) EP1804958A4 (https=)
JP (1) JP2008513781A (https=)
AU (1) AU2005331265B2 (https=)
CA (1) CA2578359A1 (https=)
WO (1) WO2006118595A2 (https=)

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