JP2008511115A5 - - Google Patents

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Publication number
JP2008511115A5
JP2008511115A5 JP2007529134A JP2007529134A JP2008511115A5 JP 2008511115 A5 JP2008511115 A5 JP 2008511115A5 JP 2007529134 A JP2007529134 A JP 2007529134A JP 2007529134 A JP2007529134 A JP 2007529134A JP 2008511115 A5 JP2008511115 A5 JP 2008511115A5
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JP
Japan
Prior art keywords
ion beam
directed
deflected
workpiece
directing
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JP2007529134A
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English (en)
Japanese (ja)
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JP5254613B2 (ja
JP2008511115A (ja
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Priority claimed from PCT/IL2005/000913 external-priority patent/WO2006021958A2/en
Publication of JP2008511115A publication Critical patent/JP2008511115A/ja
Publication of JP2008511115A5 publication Critical patent/JP2008511115A5/ja
Application granted granted Critical
Publication of JP5254613B2 publication Critical patent/JP5254613B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007529134A 2004-08-24 2005-08-24 被加工物の有向多偏向イオンビームミリングならびにその程度の決定および制御 Expired - Lifetime JP5254613B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US60354404P 2004-08-24 2004-08-24
US60/603,544 2004-08-24
PCT/IL2005/000913 WO2006021958A2 (en) 2004-08-24 2005-08-24 Directed multi-deflected ion beam milling of a work piece and determining and controlling extent thereof

Publications (3)

Publication Number Publication Date
JP2008511115A JP2008511115A (ja) 2008-04-10
JP2008511115A5 true JP2008511115A5 (https=) 2008-07-03
JP5254613B2 JP5254613B2 (ja) 2013-08-07

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ID=35677383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007529134A Expired - Lifetime JP5254613B2 (ja) 2004-08-24 2005-08-24 被加工物の有向多偏向イオンビームミリングならびにその程度の決定および制御

Country Status (6)

Country Link
US (2) US20080078750A1 (https=)
EP (1) EP1787310A2 (https=)
JP (1) JP5254613B2 (https=)
KR (3) KR20070101204A (https=)
CN (1) CN101069260B (https=)
WO (1) WO2006021958A2 (https=)

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US11440151B2 (en) * 2019-06-07 2022-09-13 Applied Materials Israel Ltd. Milling a multi-layered object
US10971618B2 (en) 2019-08-02 2021-04-06 Applied Materials Israel Ltd. Generating milled structural elements with a flat upper surface
US11276557B2 (en) 2019-09-17 2022-03-15 Applied Materials Israel Ltd. Forming a vertical surface
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WO2022174187A2 (en) * 2021-02-15 2022-08-18 E.A. Fischione Instruments, Inc. System and method for uniform ion milling
US11784025B1 (en) 2022-05-10 2023-10-10 Plasma-Therm Nes Llc Integral sweep in ion beam system
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