JP2008506251A - 窒化物半導体発光素子及びその製造方法 - Google Patents
窒化物半導体発光素子及びその製造方法 Download PDFInfo
- Publication number
- JP2008506251A JP2008506251A JP2007520236A JP2007520236A JP2008506251A JP 2008506251 A JP2008506251 A JP 2008506251A JP 2007520236 A JP2007520236 A JP 2007520236A JP 2007520236 A JP2007520236 A JP 2007520236A JP 2008506251 A JP2008506251 A JP 2008506251A
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- emitting device
- semiconductor light
- nitride semiconductor
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Abstract
【解決手段】本発明による窒化物半導体発光素子製造方法は、P型窒化ガリウム層に接触層が形成された窒化物半導体発光素子を提供する段階と、前記窒化物半導体発光素子に水素分離金属を接触させる段階と、前記窒化物半導体発光素子と水素分離金属を振動させる段階と、前記窒化物半導体発光素子の接触層から水素を除去した後、前記水素分離金属を前記窒化物半導体発光素子から分離させる段階とを含むことを特徴とする。
【選択図】図2
Description
2/nMHn+ΔH――>2/nM±H2(吸熱反応:水素分離)―――(2)
(反応温度は18℃〜600℃、好ましくは18℃〜400℃、Mは金属)
110:半導体発光素子
120:水素分離金属
130:超音波振動発生装置
Claims (15)
- P型窒化ガリウム層に接触層が形成された窒化物半導体発光素子を提供する段階と、
前記窒化物半導体発光素子に水素分離金属を接触させる段階と、
前記窒化物半導体発光素子と水素分離金属を振動させる段階と、
前記窒化物半導体発光素子の接触層から水素を除去した後、前記水素分離金属を前記窒化物半導体発光素子から分離させる段階とを含むことを特徴とする窒化物半導体発光素子製造方法。 - 前記窒化物半導体発光素子と水素分離金属を振動させた後、水素結合を促進させるために水素ガスを供給する段階をさらに含むことを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記水素分離金属が周期律表の典型元素のうち第2族〜第5族金属のいずれか1つであることを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記水素分離金属が周期律表の典型元素のうち第2族〜第5族元素と第6族〜第8族元素の金属化合物であることを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記工程は進行温度が常温又は400℃以下であることを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記P型窒化ガリウム層上に形成される接触層が、水素を除去して正孔密度を高くしたことを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記P型窒化ガリウム層上に形成される接触層がMgから形成されることを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記窒化物半導体発光素子と水素分離金属を振動する方法が超音波振動装置を使用することを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記窒化物半導体発光素子と水素分離金属を振動させて前記P型窒化ガリウム層の接触層に存在する水素を活性化することを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- 前記窒化物半導体発光素子は前記水素分離金属に全体が取り囲まれて接触することを特徴とする請求項1に記載の窒化物半導体発光素子製造方法。
- サファイア基板と、
前記サファイア基板上に形成されたN型窒化ガリウム層と、
前記N型窒化ガリウム層上に形成された活性層と、
前記活性層上に形成されたP型窒化ガリウム層と、
前記P型窒化ガリウム層上に水素が除去された接触層とを含むことを特徴とする窒化物半導体発光素子。 - 前記接触層がMgから形成されることを特徴とする請求項11に記載の窒化物半導体発光素子。
- 前記接触層に結合した水素が、振動によって活性化した後、除去されることを特徴とする請求項11に記載の窒化物半導体発光素子。
- 前記接触層は、周期律表の典型元素のうち第2族〜第5族金属を接触させて水素が除去されたことを特徴とする請求項11に記載の窒化物半導体発光素子。
- 前記接触層は、周期律表の典型元素のうち第2族〜第5族元素と第6族〜第8族元素の金属化合物を接触させて水素が除去されたことを特徴とする請求項11に記載の窒化物半導体発光素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040052826A KR101081158B1 (ko) | 2004-07-08 | 2004-07-08 | 발광 다이오드 제조방법 |
KR10-2004-0052826 | 2004-07-08 | ||
PCT/KR2005/002206 WO2006006804A1 (en) | 2004-07-08 | 2005-07-08 | Nitride semiconductor light-emitting device and fabrication method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008506251A true JP2008506251A (ja) | 2008-02-28 |
JP5000500B2 JP5000500B2 (ja) | 2012-08-15 |
Family
ID=35784118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007520236A Active JP5000500B2 (ja) | 2004-07-08 | 2005-07-08 | 窒化物半導体発光素子及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7674692B2 (ja) |
EP (1) | EP1771892B1 (ja) |
JP (1) | JP5000500B2 (ja) |
KR (1) | KR101081158B1 (ja) |
CN (1) | CN100485981C (ja) |
WO (1) | WO2006006804A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080118998A1 (en) * | 2006-11-22 | 2008-05-22 | Chang Gung University | Method for enhancing lightness of p-type nitride group compound L.E.D. |
CN103021844B (zh) * | 2011-09-26 | 2015-09-30 | 比亚迪股份有限公司 | 一种外延片退火方法 |
CN104091872B (zh) * | 2014-07-30 | 2016-08-17 | 湘能华磊光电股份有限公司 | Mg扩散的LED外延片、生长方法及LED结构 |
JP6828697B2 (ja) * | 2018-02-06 | 2021-02-10 | 株式会社豊田中央研究所 | Iii族窒化物半導体装置およびiii族窒化物半導体基板の製造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000058919A (ja) * | 1998-08-13 | 2000-02-25 | Toshiba Corp | 半導体素子及びその製造方法 |
JP2000277802A (ja) * | 1999-03-24 | 2000-10-06 | Matsushita Electronics Industry Corp | 半導体装置の製造方法 |
JP2001035796A (ja) * | 1999-07-22 | 2001-02-09 | Hitachi Cable Ltd | p型窒化ガリウム系化合物半導体の製造方法 |
JP2002057161A (ja) * | 2000-08-10 | 2002-02-22 | Sony Corp | 窒化物化合物半導体層の熱処理方法及び半導体素子の製造方法 |
JP2003068745A (ja) * | 2001-06-11 | 2003-03-07 | Lumileds Lighting Us Llc | 埋込みp型GaN層におけるアクセプタを活性化する方法 |
JP2004289031A (ja) * | 2003-03-25 | 2004-10-14 | Sanyo Electric Co Ltd | 窒化物系半導体の形成方法および窒化物系半導体素子 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3519950B2 (ja) | 1994-07-19 | 2004-04-19 | シャープ株式会社 | 電極構造 |
JPH0832115A (ja) * | 1994-07-19 | 1996-02-02 | Sharp Corp | 電極構造およびその製造方法 |
US5838029A (en) * | 1994-08-22 | 1998-11-17 | Rohm Co., Ltd. | GaN-type light emitting device formed on a silicon substrate |
JP3671532B2 (ja) | 1996-07-19 | 2005-07-13 | 豊田合成株式会社 | 半導体発光素子の製造方法 |
US5926726A (en) * | 1997-09-12 | 1999-07-20 | Sdl, Inc. | In-situ acceptor activation in group III-v nitride compound semiconductors |
JPH11329981A (ja) | 1998-05-21 | 1999-11-30 | Sharp Corp | 窒化物半導体薄膜結晶成長装置、成長方法及び窒化物半導体発光素子 |
JP3579294B2 (ja) * | 1999-04-19 | 2004-10-20 | シャープ株式会社 | 電極の製造方法 |
US20020004254A1 (en) * | 2000-07-10 | 2002-01-10 | Showa Denko Kabushiki Kaisha | Method for producing p-type gallium nitride-based compound semiconductor, method for producing gallium nitride-based compound semiconductor light-emitting device, and gallium nitride-based compound semiconductor light-emitting device |
JP4652530B2 (ja) * | 2000-07-10 | 2011-03-16 | 昭和電工株式会社 | 窒化ガリウム系化合物半導体発光素子の作製方法 |
US20020157596A1 (en) * | 2001-04-30 | 2002-10-31 | Stockman Stephen A. | Forming low resistivity p-type gallium nitride |
US7153760B2 (en) * | 2003-11-24 | 2006-12-26 | Intel Corporation | Using acoustic energy including two lasers to activate implanted species |
-
2004
- 2004-07-08 KR KR1020040052826A patent/KR101081158B1/ko active IP Right Grant
-
2005
- 2005-07-08 WO PCT/KR2005/002206 patent/WO2006006804A1/en active Application Filing
- 2005-07-08 JP JP2007520236A patent/JP5000500B2/ja active Active
- 2005-07-08 EP EP05774500.2A patent/EP1771892B1/en not_active Expired - Fee Related
- 2005-07-08 US US11/631,858 patent/US7674692B2/en active Active
- 2005-07-08 CN CNB200580026864XA patent/CN100485981C/zh active Active
-
2010
- 2010-02-01 US US12/697,984 patent/US8377801B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000058919A (ja) * | 1998-08-13 | 2000-02-25 | Toshiba Corp | 半導体素子及びその製造方法 |
JP2000277802A (ja) * | 1999-03-24 | 2000-10-06 | Matsushita Electronics Industry Corp | 半導体装置の製造方法 |
JP2001035796A (ja) * | 1999-07-22 | 2001-02-09 | Hitachi Cable Ltd | p型窒化ガリウム系化合物半導体の製造方法 |
JP2002057161A (ja) * | 2000-08-10 | 2002-02-22 | Sony Corp | 窒化物化合物半導体層の熱処理方法及び半導体素子の製造方法 |
JP2003068745A (ja) * | 2001-06-11 | 2003-03-07 | Lumileds Lighting Us Llc | 埋込みp型GaN層におけるアクセプタを活性化する方法 |
JP2004289031A (ja) * | 2003-03-25 | 2004-10-14 | Sanyo Electric Co Ltd | 窒化物系半導体の形成方法および窒化物系半導体素子 |
Also Published As
Publication number | Publication date |
---|---|
EP1771892B1 (en) | 2015-01-14 |
JP5000500B2 (ja) | 2012-08-15 |
CN101002340A (zh) | 2007-07-18 |
KR101081158B1 (ko) | 2011-11-07 |
CN100485981C (zh) | 2009-05-06 |
US8377801B2 (en) | 2013-02-19 |
WO2006006804A1 (en) | 2006-01-19 |
KR20060004009A (ko) | 2006-01-12 |
US20070194309A1 (en) | 2007-08-23 |
US7674692B2 (en) | 2010-03-09 |
EP1771892A1 (en) | 2007-04-11 |
EP1771892A4 (en) | 2010-11-03 |
US20100136731A1 (en) | 2010-06-03 |
WO2006006804A9 (en) | 2009-05-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100887470B1 (ko) | 저온 성장 버퍼층을 형성하는 방법, 발광 소자, 발광소자를 제조하는 방법 및 발광 장치 | |
JP2009505392A (ja) | 発光素子及びその製造方法 | |
US20130292697A1 (en) | Gallium nitride based light emitting diode and fabrication method thereof | |
JP5000500B2 (ja) | 窒化物半導体発光素子及びその製造方法 | |
KR20140061827A (ko) | 반도체 발광소자 및 반도체 발광소자의 제조방법 | |
WO2006011740A1 (en) | Semiconductor emitting light and method for manufacturing semiconductor emitting light | |
CN100440553C (zh) | GaN基LED外延片及其制备方法 | |
JP2006294697A (ja) | 発光素子およびその製造方法 | |
KR20050049066A (ko) | 발광 다이오드 및 그 제조방법 | |
JP2004063732A (ja) | 発光素子 | |
KR101199176B1 (ko) | 발광 소자 | |
KR20050028644A (ko) | 발광 다이오드 제조방법 | |
JP2007042985A (ja) | 窒化ガリウム系化合物半導体発光素子及びその実装体 | |
KR100574541B1 (ko) | 발광 다이오드 및 그 제조방법 | |
KR20060009683A (ko) | 발광 다이오드 및 그 제조방법 | |
KR100986464B1 (ko) | 발광 다이오드 및 그 제조방법 | |
KR100916297B1 (ko) | 비평면의 p형 화합물 반도체 형성방법 및 화합물 반도체발광소자의 제조방법 | |
KR101080853B1 (ko) | 발광소자 모듈 및 그 제조방법 | |
KR20060053470A (ko) | 반도체 발광소자 | |
KR20130072510A (ko) | 발광장치 제조방법 및 이를 이용하여 제조된 발광장치 | |
JP2008103759A (ja) | 発光素子 | |
JP2007150363A (ja) | 発光素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080627 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110518 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110531 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110830 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110906 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110927 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20111102 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111110 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20111110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120508 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120516 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5000500 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150525 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |